摘要:
An apparatus for exposing a pattern, formed on a mask, on each of a plurality of partitioned areas on a photosensitive substrate by a step-and-repeat scheme includes a projection optical system for projecting the pattern of the mask on the photosensitive substrate, a substrate stage for holding the photosensitive substrate and two-dimensionally moving the photosensitive substrate within a plane perpendicular to the optical axis of the projection optical system, a detection unit for projecting a pattern image having a predetermined shape on the photosensitive substrate and photoelectrically detecting light reflected by the photosensitive substrate to detect a position at each of a plurality of points on the photosensitive substrate along the optical axis of the projection optical system, and a measurement unit for, when each of a plurality of measurement points in a partitioned area on which a pattern of the mask is to be exposed next coincides with or approaches the pattern image, detecting an offset amount between an imaging plane of the projection optical system and the next partitioned area along the optical axis during a stepping operation of the substrate stage, wherein the imaging plane and the next partitioned area are relatively moved along the optical axis in accordance with the measured offset amount before the pattern of the mask is exposed on the next partitioned area.
摘要:
An automobile ac generator system comprises a generator driven by the engine of the automobile, a system controller for converting the ac power generated by the generator to dc power, controlling the generator on the basis of the voltage of the converted dc power and converting the dc power to ac power of commercial line frequency, and a mode switch for selecting among control operating modes of the system controller.
摘要:
An automobile generator apparatus for producing commercial line power when driven by an automobile engine comprises a generator, an inverter unit, a controller for controlling the generator field and an accelerator actuator.The accelerator actuator is mounted opposite the accelerator pedal in such manner as to prevent erroneous operation thereof.The generator field is controlled while monitoring both the low-voltage side output and the high-voltage side output so as to prevent a large output current from flowing through the low-voltage side load. A circuit is further provided for preventing the occurrence of an overvoltage as a result of field control transistor malfunction.The switching elements constituting the output stage of the inverter unit are controlled to vary the duty ratio of the output waveform so as to stabilize the inverter output voltage and controlled to remove the center portion of the output waves so as to cope with the startup load.The inverter unit is also provided with an improved constant voltage circuit.There is further provided a synchronized operation control for combining the outputs of a plurality of automobile generator apparatuses.The generator is a single-shaft, dual-output type wherein the windings of the high-voltage side coils are disposed at the bottom of slots in the stator while the windings of the low-voltage side coils are disposed near the entrance of the slots.
摘要:
In order to provide a function of eliminating minute particles in exhaust gas to a control apparatus of an internal combustion engine, a filter temperature sensor, inserted in an exhaust path, for measuring a temperature of a filter for trapping minute particles of an exhaust gas, an electric heater for removing the minute particles deposited on the filter by combustion, and a control circuit are provided. In the control circuit, filter recovery is detected, a preheating instruction for raising the filter temperature is generated in accordance with the detection result, completion of the preheating of the filter is decided, an instruction for changing an injection pattern of the fuel injection valve for preheating the filter is generated, and an ON signal is supplied to the electric heater.
摘要:
A display apparatus for displaying two-dimensionally on a plane the correlation between two parameters, such as the acceleration of an automobile and the fuel consumption rate in its engine, which vary in association with the running of the automobile. The displaying portion includes a plurality of light-emitting elements which are arranged in rows and columns on the same plane so as to be given their respective co-ordinates, or ordinates and abscissas. The acceleration of an automobile is calculated corresponding to the counted value of speed pulses having a frequency proportional to the speed of revolution of the wheels so that the calculated acceleration value may be discriminated to show to which of a plurality of acceleration ranges the acceleration value belongs. Similarly, the fuel consumption rate in the engine is calculated corresponding to the counted value of fuel pulses having a frequency proportional to the fuel consumption rate so that the calculated fuel consumption rate value may be discriminated to show to which of a plurality of fuel consumption rate ranges the fuel consumption rate belongs. The results of discrimination with respect to acceleration and fuel consumption rate are assigned to the ordinate and abscissa on the plane, respectively, so that one of the light-emitting elements arranged at the thus assigned co-ordinates may be lighted. The position or co-ordinate of the lighted element indicates the correlation between the acceleration and the fuel consumption rate.BACKGROUND OF THE INVENTIONThe present invention relates to a two-dimensional display apparatus for displaying as a point or an area on a plane different parameters such as the acceleration and the fuel consumption rate of an automobile.Heretofore, an apparatus has been known which calculates and displays parameters, such as the number of rotation of an automobile's engine, the fuel consumption rate and the acceleration of an automobile, which parameters vary in association with the running of an automobile. Further, it has been known to display these parameters in an analogue or digital manner. However, in such known apparatus, for example, in an analogue display apparatus, it is made generally that, when different parameters are to be displayed on a plane, the parameters are displayed in the same direction on the plane, such as longitudinal or transverse direction. Therefore, it is very difficult for a driver of an automobile to be readily acquainted with the correlation between the different parameters which vary in association with each other.
摘要:
A target fuel injection timing of the fuel injection pump is calculated based on the operating conditions of a diesel engine (Steps 102; 302; 602), while an actual fuel injection timing is calculated based on crank angle signals (Steps 103; 303: 603). Then, a fuel injection timing error (Terr) is obtained based on a difference between the target fuel injection timing and the actual fuel injection timing (Steps 104; 304; 604). To adjust the actual fuel injection timing based on the error (Terr), a rotational position of a roller ring (10) is controlled through a timer piston (21) slidable and housed in a timer device (28) by a hydraulic pressure control valve (27) in response to a pulse actuating signal having a controllable duty ratio (DFIN). The pulse actuating signal having the controlled duty ratio is generated at a predetermined pulse output timing (Steps 208; 406; 706), so that the fuel injection caused by a force feeding stroke of the fuel injection pump is not overlapped with an actual valve-open duration of hydraulic pressure control valve (27) varying depending on the engine speed (N), thereby completely locking the timer piston (21) during the fuel injection.
摘要:
In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.
摘要:
In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.
摘要:
A device for driving a load reactance element, such as a piezoelectric actuator for a fuel injection system, including a series reactance element connected in series with the load reactance element, and a resonance circuit formed by the load reactance and the series reactance. First and second switching elements are connected between the resonance circuit and the power source or ground potential. Each of the first and second switching elements is rendered conductive only during a half cycle of resonance. The directions of the load current flowing through the load reactance element are switchable by making alternately the first and second switching elements conductive.
摘要:
A method of driving a solenoid-operated proportional control valve is disclosed. The solenoid-operated proportional control valve is of the kind in which a valve member is displaced in proportional relation to current supplied to a solenoid under control of a control signal, and the method comprises adding a predetermined value to the control signal when the valve member starts to move to open the solenoid-operated proportional control valve from its full-closed position or subtracting a predetermined value from the control signal when the valve member starts to move to close the solenoid-operated proportional control valve from its full-open position.