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41.发明申请VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT 审中-公开蒸气沉积装置，蒸气沉积方法和生产有机电致发光元件的方法公开(公告)号：US20170012201A1
公开(公告)日：2017-01-12
申请号：US15114316
申请日：2014-11-28
发明人： Takashi OCHI , Satoshi INOUE , Yuhki KOBAYASHI , Kazuki MATSUNAGA , Shinichi KAWATO , Katsuhiro KIKUCHI , Masahiro ICHIHARA , Eiichi MATSUMOTO
IPC分类号： H01L51/00 , C23C16/455 , H01L51/56 , C23C16/50
CPC分类号： H01L51/0002 , C23C14/042 , C23C14/044 , C23C14/12 , C23C14/24 , C23C14/546 , C23C16/455 , C23C16/50 , H01L51/0008 , H01L51/5012 , H01L51/56
摘要： The present invention provides a vapor deposition apparatus, a vapor deposition method, and a method for producing an organic electroluminescent element which can control the vapor deposition rate on the substrate in the entire vapor deposition region with excellent precision. The vapor deposition apparatus of the present invention that forms a film on a substrate includes a first thickness monitor; and a vapor deposition unit including a vapor deposition source, the apparatus being configured to perform vapor deposition while controlling the distance between a portion of the vapor deposition source designed to eject a vaporized material and a surface of the substrate on which the vapor deposition is performed, based on a measurement result from the first thickness monitor.
摘要翻译： 本发明提供一种气相沉积设备，气相沉积方法和一种有机电致发光元件的制造方法，该有机电致发光元件可以精确地控制整个气相沉积区域中的基板上的气相沉积速率。 在基板上形成膜的本发明的蒸镀装置具有：第一厚度监视器; 以及包括气相沉积源的气相沉积单元，所述装置被配置为执行气相沉积，同时控制设计成喷射气化材料的气相沉积源的一部分与其上进行气相沉积的基板的表面之间的距离 基于来自第一厚度监视器的测量结果。
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42.发明申请METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT, AND ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE 有权用于生产有机电致发光元件的方法和有机电致发光显示器件公开(公告)号：US20160149134A1
公开(公告)日：2016-05-26
申请号：US14900541
申请日：2014-05-01
发明人： Satoshi INOUE , Katsuhiro KIKUCHI , Shinichi KAWATO , Takashi OCHI , Yuhki KOBAYASHI , Masahiro ICHIHARA , Eiichi MATSUMOTO
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/24 , H01L27/3244 , H01L51/5012
摘要： The present invention provides a method for producing an organic EL element capable of shortening the film formation time while suppressing an increase in the blur width; and an organic EL display device. The method is for producing an organic EL element by scanning vapor deposition, in which one or more vapor deposition sources each are provided with ejection orifices that face the respective openings of a limiting plate, and the ejection orifices facing the same opening are spaced from each other to give a sum of distributions represented by the following formula (1) of 1 or smaller, cos(ni+3)θi×ri/Ri (1) wherein Ri represents a maximum film-formation rate of an ejection orifice i among the ejection orifices facing the same opening, i represents an integer of 1 or greater and m or smaller, m represents the number of the ejection orifices facing the same opening, ri represents the actual film-formation rate of the ejection orifice i in the vapor deposition step, ni is an n value, which is zero or more, of the ejection orifice i, and θi represents an angle formed by a main film formation direction and a segment connecting the ejection orifice i and a point within the film formation region.
摘要翻译： 本发明提供了一种制造能够缩短成膜时间同时抑制模糊宽度增加的有机EL元件的方法; 和有机EL显示装置。 该方法是通过扫描气相沉积来生产有机EL元件，其中一个或多个气相沉积源各自具有面对限制板的相应开口的喷射口，并且面向相同开口的喷射孔与每个 另外给出由下式（1）表示的分布为1或更小的分布之和，cos（ni + 3）＆thetas; i×ri / Ri（1）其中Ri表示喷射口i的最大成膜速率 在面向相同开口的喷射孔中，i表示1以上且m以下的整数，m表示与同一开口面对的喷射孔的数量，ri表示喷射孔i的实际成膜速度 气相沉积步骤，ni是喷射口i的零度以上的n值，θ表示由主成膜方向形成的角度和连接喷射孔i的部分和 成膜区。
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43.发明申请METHOD OF MANUFACTURING FILM FORMATION SUBSTRATE, AND METHOD OF MANUFACTURING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE 审中-公开制造薄膜形成基板的方法和制造有机电致发光显示装置的方法公开(公告)号：US20160036008A1
公开(公告)日：2016-02-04
申请号：US14879090
申请日：2015-10-08
CPC分类号： H01L51/56 , C23C14/12 , C23C14/24 , C23C14/243 , H01L27/3211 , H01L51/0008 , H01L51/0011 , H01L51/0012 , H01L51/0021 , H01L51/5203 , H01L51/5253 , H05B33/04 , H05B33/10
摘要： A vapor deposition device (50) in accordance with the present invention includes: a vapor deposition source (80) which has a plurality of injection holes (81) from which vapor deposition particles are to be injected towards a film formation substrate (60); a plurality of pipes (83a and 83b); a vapor deposition source crucible (82) for supplying the vapor deposition particles to the vapor deposition source (80); and moving means for moving the film formation substrate (60) relative to the vapor deposition source (80). The pipes (83a and 83b) are connected to first and second sides of the vapor deposition source (80) on one end side and the other end side, respectively, of a line of the injection holes (81).
摘要翻译： 根据本发明的气相沉积装置（50）包括：气相沉积源（80），其具有多个喷射孔（81），气相沉积颗粒将从该注入孔向成膜基底（60）注入; 多个管道（83a和83b）; 用于将气相沉积颗粒供应到气相沉积源（80）的蒸镀源坩埚（82）; 以及用于相对于气相沉积源（80）移动成膜衬底（60）的移动装置。 管道（83a和83b）分别在喷射孔（81）的一行的一端侧和另一端侧连接到气相沉积源（80）的第一和第二侧。
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公开(公告)号：US20140087450A1
公开(公告)日：2014-03-27
申请号：US14091187
申请日：2013-11-26
IPC分类号： C12M1/26
CPC分类号： C23C16/4401 , C12M33/00 , C23C14/564 , H01L31/186 , H01L51/0011
摘要： A Film (7) is provided on at least a part of a surface of each of a vapor deposition preventing plate (3) and a shutter (4) of a vacuum chamber (5) on which surface vapor deposition particles are vapor-deposited, the film (7) being provided so as to be peeled off from the each of the vapor deposition preventing plate (3) and the shutter (4), and the film being made of a material differing in at least one of a melting point, a sublimation point, solubility in a given solvent, microbial biodegradability, and photodegradability from a material of which a vapor-deposited film that is formed on the film (7) is made.
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公开(公告)号：US20190363272A1
公开(公告)日：2019-11-28
申请号：US16067258
申请日：2017-03-30
发明人： Yuto TSUKAMOTO , Shinichi KAWATO , Manabu NIBOSHI , Satoshi INOUE , Hiroshi IMADA , Tokiyoshi UMEDA , Bai ZHANG , Tomoaki JO
摘要： A hole injection layer provided between a first electrode and each of light emitting layers, and an electron injection layer provided between a second electrode and each of light emitting layers, overlap only inward from an end portions each of the light emitting layers when viewed in plan view.
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公开(公告)号：US20190189948A1
公开(公告)日：2019-06-20
申请号：US16273193
申请日：2019-02-12
发明人： Yuto TSUKAMOTO , Katsuhiro KIKUCHI , Hideki UCHIDA , Eiji KOIKE , Satoshi INOUE , Masanori OHARA , Kazuki MATSUNAGA
CPC分类号： H01L51/5016 , C09K11/06 , H01L51/0067 , H01L51/50 , H01L51/5004 , H01L51/5012 , H01L51/56
摘要： The organic EL element (10) at least includes, between a first electrode (2) and a second electrode (4), at least one layer of an exciton generating layer (33) which contains at least one type of TADF material as a host material and at least one layer of a fluorescent emission layer (34) which contains at least one type of fluorescent emission material.
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公开(公告)号：US20190157360A1
公开(公告)日：2019-05-23
申请号：US16319840
申请日：2017-07-21
发明人： Yuto TSUKAMOTO , Seiichi MITSUI , Shinichi KAWATO , Satoshi INOUE , Yuhki KOBAYASHI , Takashi OCHI
摘要： In this manufacturing method, in a blue fluorescent light-emitting layer formation step, a blue fluorescent light-emitting layer is formed in both a subpixel and a subpixel; in a green fluorescent light-emitting layer formation step, a green fluorescent light-emitting layer is formed in both the subpixel and a subpixel; and in a red light-emitting layer formation step, a red light-emitting layer is formed in both the subpixel and a subpixel. In at least two of the abovementioned steps, linear vapor deposition is performed using a slit mask having an opening that is provided so as to extend across a plurality of pixels.
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48.发明申请公开(公告)号：US20190074464A1
公开(公告)日：2019-03-07
申请号：US15774290
申请日：2016-11-30
发明人： Eiji KOIKE , Katsuhiro KIKUCHI , Shinichi KAWATO , Satoshi INOUE
摘要： An organic EL device of one aspect of the disclosure includes: a base material; an insulating layer provided with a recessed portion on an upper face thereof; and a light-emitting element including a reflective layer provided on at least a surface of the recessed portion, a filling layer having optical transparency and filling the inside of the recessed portion with the reflective layer interposed between the filling layer and the recessed portion, a first electrode having optical transparency and provided on at least an upper layer side of the filling layer, an organic layer containing at least a light-emitting layer provided on an upper layer of the first electrode, a second electrode having optical transparency and provided on an upper layer side of the organic layer, and an edge cover layer covering at least an end portion of the first electrode, wherein the organic electroluminescence device includes a plurality of unit light emitting regions separated from one another, an excavated portion is provided in the insulating layer between adjacent unit light emitting regions, and at last the filling layer is provided inside the excavated portion.
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公开(公告)号：US20180371604A1
公开(公告)日：2018-12-27
申请号：US16063295
申请日：2016-11-25
发明人： Satoshi INOUE , Shinichi KAWATO , Yuhki KOBAYASHI
摘要： On a vapor deposition target surface of a vapor deposition target substrate placed on a substrate tray in a vapor deposition device, display regions on which vapor deposition particles are to be deposited are arranged in alignment to be apart from each other in a direction parallel with a scanning direction, and the substrate tray includes a blocking part configured to block the vapor deposition particles to be deposited onto regions adjacent to the display regions in a direction parallel with the scanning direction. This prevents a degree of freedom in designing of the vapor deposition target substrate from being restricted even in performing scan vapor deposition.
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公开(公告)号：US20180269428A1
公开(公告)日：2018-09-20
申请号：US15758408
申请日：2016-08-10
发明人： Hideki UCHIDA , Katsuhiro KIKUCHI , Yoshiyuki ISOMURA , Eiji KOIKE , Satoshi INOUE , Yuto TSUKAMOTO , Masanori OHARA , Asae ITO
CPC分类号： H01L51/5271 , G02B5/20 , H01L27/3206 , H01L27/322 , H01L51/5088 , H01L51/5234 , H01L51/5265 , H01L51/5284 , H01L51/56 , H01L2251/5315 , H01L2251/558
摘要： An organic electroluminescence device includes a base material including a recessed portion on one face side, and a light emitting element. The light emitting layer including a reflective layer disposed at least on a surface of the recessed portion, a filling layer that has optical transparency and is filled and disposed in the recessed portion with the reflective layer interposed between the recessed portion and the filling layer, a first electrode that has optical transparency and is disposed at least on an upper-layer side of the filling layer, an organic layer that includes at least a light emitting layer and is disposed on an upper layer of the first electrode, and a second electrode that has optical transparency and is disposed on an upper-layer side of the organic layer. The organic electroluminescence device includes a display region divided into a plurality of unit regions separated from each other. The unit regions each has a light emitting area and a non emissive area that are partitioned. The light emitting area includes the light emitting element, and the non emissive area includes a light absorption layer.
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