Semiconductor device, semiconductor device manufacturing method, liquid crystal display device and electronic apparatus
    42.
    发明授权
    Semiconductor device, semiconductor device manufacturing method, liquid crystal display device and electronic apparatus 有权
    半导体器件,半导体器件制造方法,液晶显示器件和电子设备

    公开(公告)号:US08570455B2

    公开(公告)日:2013-10-29

    申请号:US12934659

    申请日:2009-03-30

    摘要: A semiconductor device includes a supporting substrate; a semiconductor film on the supporting substrate; a gate insulating film on the semiconductor film; a gate electrode on the gate insulating film; and a source region and a drain region formed by introducing impurity elements to the semiconductor film. The thickness of the semiconductor film is within the range of 20 nm to 40 nm. Low-concentration regions are provided between the source region and a channel forming region, and between the drain region and the channel forming region, respectively. The low-concentration regions each have an impurity concentration smaller than that of the source region and that of the drain region, and the impurity concentration in a lower surface side region on the side of the supporting substrate is smaller than that of an upper surface side region on the opposite side.

    摘要翻译: 半导体器件包括支撑衬底; 支撑基板上的半导体膜; 半导体膜上的栅极绝缘膜; 栅极绝缘膜上的栅电极; 以及通过将杂质元素引入半导体膜形成的源区和漏区。 半导体膜的厚度在20nm〜40nm的范围内。 在源极区域和沟道形成区域之间以及漏极区域和沟道形成区域之间分别设置有低浓度区域。 低浓度区域的杂质浓度比源极区域和漏极区域的杂质浓度小,并且在支撑衬底侧的下表面侧区域中的杂质浓度小于上表面侧的杂质浓度 对面的区域

    Method of manufacturing a semiconductor device with a front-end insulating layer interposed between a semiconductor layer and an insulating substrate
    43.
    发明授权
    Method of manufacturing a semiconductor device with a front-end insulating layer interposed between a semiconductor layer and an insulating substrate 有权
    制造半导体器件的方法,该半导体器件具有介于半导体层和绝缘衬底之间的前端绝缘层

    公开(公告)号:US08431447B2

    公开(公告)日:2013-04-30

    申请号:US13291450

    申请日:2011-11-08

    申请人: Shigeru Mori

    发明人: Shigeru Mori

    IPC分类号: H01L21/76

    摘要: A semiconductor device in which a semiconductor layer is formed on an insulating substrate with a front-end insulating layer interposed between the semiconductor layer and the insulating substrate is provided which is capable of preventing action of an impurity contained in the insulating substrate on the semiconductor layer and of improving reliability of the semiconductor device. In a TFT (Thin Film Transistor), boron is made to be contained in a region located about 100 nm or less apart from a surface of the insulating substrate so that boron concentration decreases at an average rate being about 1/1000-fold per 1 nm from the surface of the insulating substrate toward the semiconductor layer.

    摘要翻译: 提供一种半导体器件,其中半导体层形成在绝缘基板上,其中插入在半导体层和绝缘基板之间的前端绝缘层,其能够防止绝缘基板中包含的杂质对半导体层的作用 并提高半导体器件的可靠性。 在TFT(薄膜晶体管)中,使硼被包含在距离绝缘基板的表面约100nm以下的区域中,使得硼浓度以平均速率降低约1/1000倍/ 1 从绝缘基板的表面朝向半导体层。

    SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, LIQUID CRYSTAL DISPLAY DEVICE AND ELECTRONIC APPARATUS
    44.
    发明申请
    SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, LIQUID CRYSTAL DISPLAY DEVICE AND ELECTRONIC APPARATUS 有权
    半导体器件,半导体器件制造方法,液晶显示器件和电子设备

    公开(公告)号:US20110013107A1

    公开(公告)日:2011-01-20

    申请号:US12934659

    申请日:2009-03-30

    摘要: A semiconductor device includes a supporting substrate; a semiconductor film on the supporting substrate; a gate insulating film on the semiconductor film; a gate electrode on the gate insulating film; and a source region and a drain region formed by introducing impurity elements to the semiconductor film. The thickness of the semiconductor film is within the range of 20 nm to 40 nm. Low-concentration regions are provided between the source region and a channel forming region, and between the drain region and the channel forming region, respectively. The low-concentration regions each have an impurity concentration smaller than that of the source region and that of the drain region, and the impurity concentration in a lower surface side region on the side of the supporting substrate is smaller than that of an upper surface side region on the opposite side.

    摘要翻译: 半导体器件包括支撑衬底; 支撑基板上的半导体膜; 半导体膜上的栅极绝缘膜; 栅极绝缘膜上的栅电极; 以及通过将杂质元素引入半导体膜形成的源区和漏区。 半导体膜的厚度在20nm〜40nm的范围内。 在源极区域和沟道形成区域之间以及漏极区域和沟道形成区域之间分别设置有低浓度区域。 低浓度区域的杂质浓度比源极区域和漏极区域的杂质浓度小,并且在支撑衬底侧的下表面侧区域中的杂质浓度小于上表面侧的杂质浓度 对面的区域

    Transistor with electrode-protecting insulating film
    45.
    发明授权
    Transistor with electrode-protecting insulating film 有权
    具有电极保护绝缘膜的晶体管

    公开(公告)号:US07582933B2

    公开(公告)日:2009-09-01

    申请号:US11483561

    申请日:2006-07-11

    IPC分类号: H01L29/772

    CPC分类号: H01L29/78621 H01L29/66757

    摘要: A base layer is formed on an insulating substrate, and a semiconductor layer is formed in localized fashion thereon. A gate insulating film is then formed so as to cover the semiconductor layer, and a gate electrode is formed on a portion of the gate insulating film. An impurity is then implanted into the semiconductor layer via the gate insulating film, and a source region, a drain region, and an LDD region are formed. The gate insulating film is etched with dilute hydrofluoric acid. An electrode-protecting insulating film is then formed so as to cover the gate electrode, and the entire surface of the surface layer portion of the electrode-protecting insulating film is etched away using dilute hydrofluoric acid. Carrier traps introduced into the electrode-protecting insulating film and the gate insulating film are thereby removed.

    摘要翻译: 在绝缘基板上形成基底层,以局部方式形成半导体层。 然后形成栅极绝缘膜以覆盖半导体层,并且栅极电极形成在栅极绝缘膜的一部分上。 然后通过栅极绝缘膜将杂质注入到半导体层中,形成源极区,漏极区和LDD区。 用稀氢氟酸蚀刻栅极绝缘膜。 然后形成电极保护绝缘膜以覆盖栅电极,并且使用稀氢氟酸腐蚀掉电极保护绝缘膜的表面层部分的整个表面。 因此,引入到电极保护绝缘膜和栅极绝缘膜中的载流子阱被去除。

    Printed circuit board and manufacturing process thereof
    50.
    发明授权
    Printed circuit board and manufacturing process thereof 有权
    印刷电路板及其制造工艺

    公开(公告)号:US06509528B1

    公开(公告)日:2003-01-21

    申请号:US09690750

    申请日:2000-10-18

    IPC分类号: H05K103

    摘要: A printed circuit board and a manufacturing method thereof can realize a thick film laminated structure of single resin material of low dielectric constant without reinforcement material. The printed circuit board is formed with an insulation layer of composite structure of a first resin material of low dielectric constant and a first general base material having different relative dielectric constants, and the insulation layer is disposed between conductor circuits.

    摘要翻译: 印刷电路板及其制造方法可以实现没有增强材料的低介电常数的单一树脂材料的厚膜层压结构。 印刷电路板形成有具有低介电常数的第一树脂材料和具有不同相对介电常数的第一通用基材的复合结构的绝缘层,绝缘层设置在导体电路之间。