Coincident site lattice-matched growth of semiconductors on substrates using compliant buffer layers
    10.
    发明授权
    Coincident site lattice-matched growth of semiconductors on substrates using compliant buffer layers 有权
    使用顺应缓冲层的衬底上半导体的重合位点晶格匹配生长

    公开(公告)号:US09425249B2

    公开(公告)日:2016-08-23

    申请号:US13990743

    申请日:2010-12-01

    申请人: Andrew Norman

    发明人: Andrew Norman

    摘要: A method of producing semiconductor materials and devices that incorporate the semiconductor materials are provided. In particular, a method is provided of producing a semiconductor material, such as a III-V semiconductor, on a silicon substrate using a compliant buffer layer, and devices such as photovoltaic cells that incorporate the semiconductor materials. The compliant buffer material and semiconductor materials may be deposited using coincident site lattice-matching epitaxy, resulting in a close degree of lattice matching between the substrate material and deposited material for a wide variety of material compositions. The coincident site lattice matching epitaxial process, as well as the use of a ductile buffer material, reduce the internal stresses and associated crystal defects within the deposited semiconductor materials fabricated using the disclosed method. As a result, the semiconductor devices provided herein possess enhanced performance characteristics due to a relatively low density of crystal defects.

    摘要翻译: 提供了一种制造半导体材料的方法以及结合半导体材料的器件。 特别地,提供了使用兼容缓冲层在硅衬底上制造诸如III-V半导体的半导体材料的方法,以及诸如并入半导体材料的诸如光伏电池的器件。 顺应性缓冲材料和半导体材料可以使用重合的位点晶格匹配外延沉积,导致用于各种材料组成的衬底材料和沉积材料之间的格子匹配的紧密程度。 使用本发明的方法制造的沉积的半导体材料中的重合位点晶格匹配外延工艺以及延性缓冲材料的使用降低了内部应力和相关的晶体缺陷。 结果,这里提供的半导体器件由于晶体缺陷的密度相对较低而具有增强的性能特性。