PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS
    45.
    发明申请
    PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS 有权
    压电薄膜共振器,过滤器和通讯设备

    公开(公告)号:US20100060385A1

    公开(公告)日:2010-03-11

    申请号:US12397932

    申请日:2009-03-04

    IPC分类号: H03H9/15

    摘要: A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.

    摘要翻译: 压电薄膜谐振器包括基板,形成在基板上的下电极,形成在基板和下电极上的压电膜,以及形成在压电膜上并与下电极相对的上电极,形成在基板上的上电极 压电薄膜。 上部电极具有与主体部分连接的主要部分和延伸部分,与下部电极相对的主要部分和设置在基板和下部电极之间的开口,延伸部分具有与开口和基板相对的部分。

    Resonator, filter and fabrication of resonator
    47.
    发明授权
    Resonator, filter and fabrication of resonator 有权
    谐振器的谐振器,滤波器和制造

    公开(公告)号:US07498717B2

    公开(公告)日:2009-03-03

    申请号:US11092979

    申请日:2005-03-30

    IPC分类号: H01L41/09

    摘要: A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.

    摘要翻译: 谐振器包括设置在基板的主表面上的压电薄膜,设置在压电薄膜的第一表面上的第一电极膜,设置在压电薄膜的第二表面上的第二电极膜, 频率调节膜,其设置在所述第一和第二电极膜中的一个上,所述频率调节膜包括膜层叠体,所述膜层叠体包括设置在所述第一和第二电极膜中的所述一个上的第一调节膜,以及设置在所述第一调节膜上的第二调节膜 。 第一调节膜用于Deltaf调节,第二调节膜用于校正过滤器制造过程中产生的频率偏差。 因此,可以精确地控制多个谐振器连接的滤波器的中心频率。

    Filter and duplexer
    49.
    发明授权
    Filter and duplexer 有权
    过滤器和双工器

    公开(公告)号:US07786649B2

    公开(公告)日:2010-08-31

    申请号:US11790530

    申请日:2007-04-26

    IPC分类号: H01L41/04

    CPC分类号: H03H9/564 H03H9/568

    摘要: A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

    摘要翻译: 滤波器包括具有基板,由基板支撑的下电极,设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状,使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。