公开(公告)号：US08359931B2

公开(公告)日：2013-01-29

申请号：US12950271

申请日：2010-11-19

申请人： Tsutomu Nishiwaki

发明人： Tsutomu Nishiwaki

IPC分类号： G01N3/24 ,  G01L1/00 ,  B25J19/00

CPC分类号： H01L41/1132 ,  B25J15/00 ,  B66C1/445 ,  B66C13/16 ,  Y10S901/31 ,  Y10S901/46

摘要： A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.

摘要翻译： 用于检测剪切力的剪切力检测装置包括：支撑体，其包括由垂直于剪切力的检测方向并且彼此平行的一对直线部分限定的开口; 在支撑体上的支撑膜并且关闭开口，支撑膜具有柔性; 位于所述支撑膜上的压电部件，并且在从沿着基板厚度方向观察所述支撑体的平面中观察时，沿着所述开口的内部和外侧并且沿着所述一对直线部分中的至少一个延伸， 压电部件可弯曲以输出电信号; 以及覆盖压电部件和支撑膜的弹性层。

公开(公告)号：US20090262169A1

公开(公告)日：2009-10-22

申请号：US12405984

申请日：2009-03-17

申请人： Toshinao Shinbo ,  Kazushige Hakeda ,  Koji Sumi ,  Tsutomu Nishiwaki

发明人： Toshinao Shinbo ,  Kazushige Hakeda ,  Koji Sumi ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045 ,  B21D53/76

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.

摘要翻译： 制造压电元件的方法包括：压电层形成工序，依次重复地进行热处理工序，在相对湿度为30〜50％Rh的范围内，将含有铅的压电材料涂布在下电极膜上， 进行热处理以形成压电前体膜和烧结压电前体膜以在下电极膜上形成压电膜的结晶步骤，从而形成压电层。

公开(公告)号：US07514854B2

公开(公告)日：2009-04-07

申请号：US11391331

申请日：2006-03-29

申请人： Xin-Shan Li ,  Koji Sumi ,  Masami Murai ,  Tsutomu Nishiwaki

发明人： Xin-Shan Li ,  Koji Sumi ,  Masami Murai ,  Tsutomu Nishiwaki

IPC分类号： H01L41/18

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/1876

摘要： Disclosed are a piezoelectric element in which crystallinity of a piezoelectric layer is improved, and which has uniform characteristics of the piezoelectric layer, a liquid-jet head using the piezoelectric element as well as a liquid-jet apparatus. The piezoelectric element includes: a lower electrode provided to one surface side of a substrate; a piezoelectric layer which is made of a piezoelectric material containing lead (Pb), zirconium (Zr) and titanium (Ti), and which is provided above the lower electrode; and an upper electrode provided above the piezoelectric layer, and in the piezoelectric element, a relative permittivity of the piezoelectric layer is 750 to 1500 and a coercive electric field of the piezoelectric layer is 10 to 40 kV/cm.

摘要翻译： 公开了一种压电元件的结晶度提高，压电体层的特性均匀，使用该压电元件的液体喷射头以及液体喷射装置的压电元件。 压电元件包括​​：设置在基板的一个表面侧的下电极; 由包含铅（Pb），锆（Zr）和钛（Ti）的压电材料制成并且设置在下电极上的压电层; 以及设置在压电层上方的上电极，压电元件的压电层的相对介电常数为750〜1500，压电层的矫顽电场为10〜40kV / cm。

公开(公告)号：US06883902B2

公开(公告)日：2005-04-26

申请号：US10614700

申请日：2003-07-08

申请人： Li Xin-Shan ,  Tsutomu Nishiwaki

发明人： Li Xin-Shan ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2202/03

摘要： A piezoelectric liquid-jet head apparatus, which provides a nearly uniform piezoelectric element and enables ejection of liquid at maximum output, is disclosed. The piezoelectric liquid-jet head has a piezoelectric element 300 provided on one surface of a passage forming substrate 10 via a vibration plate. The piezoelectric liquid jet head includes: a zirconium oxide layer 101 formed on the surface of the passage forming substrate 10; a cerium oxide layer 102 formed on the zirconium oxide layer 101; a superconductor layer 103 formed on the cerium oxide layer 102 and composed of a yttrium-barium-copper-oxygen-based material (YBCO); a lower electrode 60 formed on the superconductor layer 103 and composed of strontium ruthenate; and a piezoelectric layer 70 which is a single crystal epitaxially grown on the lower electrode 60.

摘要翻译： 公开了一种压电喷墨头装置，其提供几乎均匀的压电元件并且能够以最大输出喷射液体。 压电液体喷射头具有通过振动板设置在通道形成基板10的一个表面上的压电元件300。 压电液体喷射头包括：形成在通道形成基板10的表面上的氧化锆层101; 形成在氧化锆层101上的氧化铈层102; 形成在氧化铈层102上并由钇 - 钡 - 铜 - 氧 - 基材料（YBCO）组成的超导体层103; 形成在超导体层103上并由钌酸锶组成的下电极60; 以及在下电极60上外延生长的单晶的压电体层70。

公开(公告)号：US06803702B2

公开(公告)日：2004-10-12

申请号：US10050586

申请日：2002-01-18

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhiqiang Wei

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhiqiang Wei

IPC分类号： H01L4108

CPC分类号： B41J2/1628 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/318

摘要： When a piezoelectric material is manufactured by hydrothermal method, the proper amount of lead contained in the piezoelectric film can be ensured and decreases in piezoelectric characteristics can be prevented. A method for manufacturing a piezoelectric material expressed by the formula ABO3, containing an element “a” as the element expressed by A above, and having a perovskite crystal structure, comprises a first step of producing an oxide containing an element “a′”, and a second step of producing a piezoelectric material by subjecting the oxide produced in the first step to a hydrothermal processing using an aqueous solution containing the element “a”, wherein the amount of the element “a”, contained in the piezoelectric material produced in the second step is increased over the amount of the element “a” contained in the oxide produced in the first step.

摘要翻译： 当通过水热法制造压电材料时，可以确保压电膜中所含的适量的铅，并且可以防止压电特性的降低。 制备由式ABO3表示的压电材料的方法，其包含元素“a”作为上述A表示的元素，并且具有钙钛矿晶体结构，包括制备含有元素“a”的氧化物的第一步骤， 以及第二步骤，通过使用含有元素“a”的水溶液对第一步骤中产生的氧化物进行水热处理来制造压电材料，其中包含在压电材料中所含的元素“a”的量 第二步骤比第一步产生的氧化物中所含的元素“a”的量增加。

公开(公告)号：US06571446B2

公开(公告)日：2003-06-03

申请号：US09916747

申请日：2001-07-30

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki

IPC分类号： H04R1700

CPC分类号： C09K11/06 ,  G01N21/70 ,  Y10T29/42 ,  Y10T29/49156

摘要： A method for manufacturing a piezoelectric element is disclosed. The method includes the steps of forming a lower electrode over a substrate, forming a piezoelectric luminous film over the lower electrode, forming an upper electrode over the piezoelectric film, forming a pressure luminous layer for emitting light upon application of pressure on the upper electrode, and attaching a substrate to the pressure luminous layer—has been inserted as a new abstract.

摘要翻译： 公开了一种制造压电元件的方法。 该方法包括以下步骤：在衬底上形成下电极，在下电极上形成压电发光膜，在压电膜上形成上电极，形成用于在上电极施加压力时发光的压力发光层， 并将基板附着到压力发光层 - 作为新的摘要插入。

公开(公告)号：US06455106B1

公开(公告)日：2002-09-24

申请号：US09381163

申请日：1999-12-28

申请人： Hong Qiu ,  Kouji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Kazumasa Hasegawa

发明人： Hong Qiu ,  Kouji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Kazumasa Hasegawa

IPC分类号： B05D302

CPC分类号： H01L27/10 ,  C23C18/1208 ,  C23C18/1254 ,  C23C18/1295 ,  H01L21/316 ,  H01L21/31691

摘要： A process for the formation of an oxide ceramic thin film, which permits the control of film oxygen content and can give a film reduced in oxygen deficiency. The process is characterized in that the step of forming an amorphous thin film, the step of heating the thin film to crystallize it or the step of heat-treating the crystallized film is conducted in a moisture-containing atmosphere.

摘要翻译： 用于形成氧化物陶瓷薄膜的方法，其允许控制膜氧含量并且可以减少氧缺乏的膜。 该方法的特征在于，在含水气氛中进行形成非晶薄膜的步骤，加热薄膜使其结晶的步骤或对结晶薄膜进行热处理的步骤。

公开(公告)号：US06419848B1

公开(公告)日：2002-07-16

申请号：US09518189

申请日：2000-03-02

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Haruo Nakamura

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Haruo Nakamura

IPC分类号： H01L4100

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/318 ,  Y10T29/42

摘要： A piezoelectric actuator, comprising a stacked structure consisting of a top electrode 5, a piezoelectric film 4, and a bottom electrode 3, wherein the piezoelectric film comprises a first group 42 of piezoelectric ceramic particles and a second group 43 of piezoelectric ceramic particles. A distinctive feature is that the particles constituting the first group of piezoelectric ceramic particles are larger than the jingo particles constituting the second group of piezoelectric ceramic particles, and the first group of piezoelectric ceramic particles and the second group of piezoelectric ceramic particles have mutually different compositions. The piezoelectric actuator can thus be manufactured by an application method in a low-temperature environment, and a thicker piezoelectric film can be obtained. In addition, a highly practical piezoelectric film can be provided by combining the advantages of a plurality of material types.

摘要翻译： 一种压电致动器，包括由顶部电极5，压电膜4和底部电极3组成的堆叠结构，其中压电膜包括压电陶瓷颗粒的第一组42和压电陶瓷颗粒的第二组43。 其特征在于构成第一组压电陶瓷颗粒的颗粒大于构成第二组压电陶瓷颗粒的微型颗粒，并且第一组压电陶瓷颗粒和第二组压电陶瓷颗粒具有相互不同的组成 。 因此，压电致动器可以通过在低温环境中的施加方法制造，并且可以获得更厚的压电膜。 此外，通过组合多种材料的优点，可以提供高度实用的压电膜。

公开(公告)号：US06284434B1

公开(公告)日：2001-09-04

申请号：US09175319

申请日：1998-10-20

申请人： Hiroyuki Kamei ,  Tsutomu Nishiwaki ,  Makoto Matsuzaki ,  Masato Shimada ,  Akira Matsuzawa

发明人： Hiroyuki Kamei ,  Tsutomu Nishiwaki ,  Makoto Matsuzaki ,  Masato Shimada ,  Akira Matsuzawa

IPC分类号： G03F700

CPC分类号： H01L41/332 ,  H01L41/314

摘要： A piezoelectric thin film element is provided that functions well as an actuator, that yields the desired composition, and that exhibits good piezoelectric thin film distortion characteristics. A lower electrode is formed on a substrate, a piezoelectric thin film precursor thin film layer is formed on the lower electrode, this is subjected to patterning, and a heating solution is applied to the substrate to implement hydrothermal processing, thereby selectively crystallizing the precursor thin film layer and yielding a piezoelectric thin film layer.

摘要翻译： 提供了一种压电薄膜元件，其作为致动器的功能良好，其产生期望的组成，并且表现出良好的压电薄膜失真特性。 在基板上形成下电极，在下电极上形成压电薄膜前体薄膜层，对其进行图案化，将加热溶液施加到基板上进行水热处理，从而选择性地使前体薄膜 膜层并产生压电薄膜层。

公开(公告)号：US6158847A

公开(公告)日：2000-12-12

申请号：US809069

申请日：1997-05-14

申请人： Minoru Usui ,  Masato Shimada ,  Masami Murai ,  Kouji Sumi ,  Tsutomu Nishiwaki

发明人： Minoru Usui ,  Masato Shimada ,  Masami Murai ,  Kouji Sumi ,  Tsutomu Nishiwaki

IPC分类号： B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/155 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1625 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  H01L41/317 ,  H01L41/319 ,  B41J2002/1425 ,  B41J2002/14387 ,  B41J2202/03 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49401

摘要： A laminated ink-jet recording head is provided that has a strong joint between the diaphragm and the piezoelectric vibrating element and which can be driven on low voltage. The recording head is of such a design that a lower electrode is provided on the diaphragm in at lest a region that corresponds to said pressure generating chamber, the lower electrode being overlaid with the piezoelectric vibrating element formed by a hydrothermal method, said piezoelectric vibrating element in turn being overlaid with an upper electrode and having a film thickness of not less than 1 .mu.m but not more than 10 .mu.m. The invention further provides a process for producing this recording head, as well as an apparatus such as a printer that is equipped with this recording head.

摘要翻译： PCT No.PCT / JP96 / 01924 Sec。 371日期1997年5月14日 102（e）日期1997年5月14日PCT提交1996年7月11日PCT公布。 出版物WO97 / 03834 日期1997年2月6日提供了一种层压喷墨记录头，其在隔膜和压电振动元件之间具有牢固的接合，并且可以以低电压驱动。 记录头具有以下设计：在隔膜上设置有下部电极，只要与所述压力发生室对应的区域，下部电极与由水热法形成的压电振动元件重叠，所述压电振动元件 再用上电极覆盖，膜厚不小于1μm，但不大于10μm。 本发明还提供了一种用于制造该记录头的方法，以及装备有该记录头的诸如打印机的装置。