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公开(公告)号：US20090274359A1
公开(公告)日：2009-11-05
申请号：US12501822
申请日：2009-07-13
IPC分类号： G06K9/00
CPC分类号： G01N23/2252 , H01J37/222 , H01J37/226 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/221 , H01J2237/2807
摘要： It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.
摘要翻译： 本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域 在带电粒子束装置中，其代表是电子显微镜。 在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置 通过用带电粒子束照射检测X射线。
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公开(公告)号：US20090237904A1
公开(公告)日：2009-09-24
申请号：US12397151
申请日：2009-03-03
申请人： Hiroyuki Onishi , Toshiaki Nagase , Jun Ishikawa , Kazuyoshi Kontani , Toshinari Fukatsu , Hiroyuki Kobayashi , Naohito Kanie , Takahiro Nakamura
发明人： Hiroyuki Onishi , Toshiaki Nagase , Jun Ishikawa , Kazuyoshi Kontani , Toshinari Fukatsu , Hiroyuki Kobayashi , Naohito Kanie , Takahiro Nakamura
IPC分类号： H05K1/18
CPC分类号： H02M7/003 , H01L2224/48095 , H01L2224/48227
摘要： A power converter apparatus includes a substrate 22 on which switching elements Q, Q1 to Q6 are mounted, positive and negative terminal interconnection members 27, 28 mounted on the substrate, and a capacitor 17 having a positive terminal 17a connected to the main body of the positive terminal interconnection member 27 and a negative terminal 17b connected to the main body of the negative terminal interconnection member 28. The interconnection members each have a plate-like main body 27a, 28a that is located above and parallel to the substrate 22. The main bodies of the interconnection members are stacked to be close to each other while being electrically insulated from each other. Each of the positive terminal interconnection member and the negative terminal interconnection member further includes a plate-like extension 27b, 28b that extends from the corresponding main body toward the substrate, and a terminal portion 27c, 28c that extends from the extension and is joined to the substrate. The extensions extend to positions closest to the substrate, while being parallel to and close to each other.
摘要翻译： 电力转换装置包括：基板22，安装有开关元件Q，Q1〜Q6的基板22，安装在基板上的正极和负极连接部件27,28;电容器17，其具有连接到主体的正极端子17a 正端子互连构件27和连接到负端子互连构件28的主体的负极端子17b。互连构件各自具有位于基板22的上方并平行的板状主体27a，28a。主体 互连构件的主体在彼此电绝缘的同时堆叠成彼此靠近。 正极端子互连构件和负极端子互连构件中的每一个还包括从相应的主体朝向衬底延伸的板状延伸部27b，28b以及从延伸部延伸并连接到的端子部27c，28c 底物。 延伸部延伸到最靠近基板的位置，同时彼此平行并相互靠近。
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公开(公告)号：US20090218507A1
公开(公告)日：2009-09-03
申请号：US12389838
申请日：2009-02-20
IPC分类号： H01J3/14
CPC分类号： H01J37/1471 , H01J37/26 , H01J2237/024 , H01J2237/065 , H01J2237/1501 , H01J2237/2802
摘要： The present invention provides a charged particle beam device which can effectively restrain misalignment of an optical axis even if a position of an anode is changed. The present invention is a charged particle beam device comprising a cathode provided with a charged particle source which emits a charged particle, an anode which applies an electric field to the emitted charged particle, a charged particle beam deflector which deflects an orbit of a charged particle beam having passed the anode, and a charged particle beam detector which detects the charged particle beam from a sample to which the charged particle is irradiated, wherein a distance changing mechanism which changes a distance between the cathode and the anode, corresponding to a charged particle amount emitted from the charged particle source and a deflection amount control mechanism which detects a condition of the deflector under which the charged particle dose detected from the sample scanned by deflecting the charged particle beam in the changed distance becomes a desired size and controls deflection of the deflector at sample measurement on the basis of the condition are provided.
摘要翻译： 本发明提供一种带电粒子束装置，即使改变阳极的位置，也能够有效地抑制光轴的未对准。 本发明是一种带电粒子束装置，它包括一个阴极，该阴极设有带电粒子源，该粒子源发射一个带电粒子，一个向发射的带电粒子施加电场的阳极，一个带电粒子束偏转器，它使带电粒子的轨道偏转 通过阳极的光束和从被照射带电粒子的样品检测带电粒子束的带电粒子束检测器，其中改变对应于带电粒子的阴极和阳极之间的距离的距离改变机构 从所述带电粒子源发射的量;以及偏转量控制机构，其检测所述偏转器的状态，在所述偏转量条件下，通过使所述带电粒子束在变化的距离偏转而被扫描的样本中检测到的带电粒子剂量成为期望的尺寸， 提供了基于条件的样品测量的偏转器。
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44.发明申请ELECTROSTATIC CHUCK MEMBER, METHOD OF MANUFACTURING THE SAME, AND ELECTROSTATIC CHUCK DEVICE 审中-公开静电切割部件，其制造方法和静电切割装置公开(公告)号：US20090056112A1
公开(公告)日：2009-03-05
申请号：US12201392
申请日：2008-08-29
申请人： Hiroyuki Kobayashi
发明人： Hiroyuki Kobayashi
CPC分类号： H02N13/00 , H01L21/6833 , Y10T29/49002 , Y10T29/5313 , Y10T29/53174 , Y10T279/23
摘要： A plurality of protruded portions is formed through embossing and is distributed and arranged regularly or irregularly on an electrostatic chuck surface, and has a circular or almost circular top surface shape and a roundness (R) of 0.01 mm or more is applied to an edge part defined by an intersection of the top surface and a side surface and a portion to which the roundness is applied occupies a quarter of a height h of the protruded portion or more.
摘要翻译： 通过压花形成多个突出部分，并且规则地或不规则地分布和布置在静电卡盘表面上，并且具有圆形或几乎圆形的顶表面形状，并且将0.01mm或更大的圆度（R）施加到边缘部分 由顶表面和侧表面以及圆形度施加的部分的交点定义为凸出部分的高度h的四分之一或更多。
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公开(公告)号：US20090027982A1
公开(公告)日：2009-01-29
申请号：US12239052
申请日：2008-09-26
申请人： Hiroyuki Kobayashi
发明人： Hiroyuki Kobayashi
IPC分类号： G11C29/12
CPC分类号： G11C29/44 , G11C11/401 , G11C29/026 , G11C29/1201 , G11C29/50 , G11C29/78
摘要： A cell array has a word line and a bit line coupled to memory cells, and a redundancy word line and a redundancy bit line coupled to redundancy memory cells. A read unit reads data held in the memory cell. A defect detection input unit receives a defect detection signal from a test apparatus. A dummy defect output unit outputs a dummy defect signal during a predetermined period of time after the defect detection input unit receives the defect detection signal. A data output unit inverts a logic of the read data output from the read unit during an activation of the dummy defect signal. Accordingly, an artificial defect can be generated by the semiconductor memory without changing the test apparatus or a test program. As a result of this, a relief efficiency can be enhanced and a test cost can be reduced.
摘要翻译： 单元阵列具有耦合到存储器单元的字线和位线，以及耦合到冗余存储器单元的冗余字线和冗余位线。 读取单元读取存储单元中保存的数据。 缺陷检测输入单元从测试装置接收缺陷检测信号。 虚设缺陷输出单元在缺陷检测输入单元接收到缺陷检测信号之后的预定时间段期间输出虚拟缺陷信号。 在虚拟缺陷信号的激活期间，数据输出单元反转从读取单元输出的读取数据的逻辑。 因此，在不改变测试装置或测试程序的情况下，半导体存储器可以产生人为缺陷。 结果，可以提高救援效率，并且可以降低测试成本。
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公开(公告)号：US20080283750A1
公开(公告)日：2008-11-20
申请号：US12119916
申请日：2008-05-13
申请人： Eiko NAKAZAWA , Hiroyuki Kobayashi
发明人： Eiko NAKAZAWA , Hiroyuki Kobayashi
IPC分类号： G01N23/04
CPC分类号： H01J37/265 , H01J2237/245 , H01J2237/282
摘要： There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.
摘要翻译： 提供了能够捕获连续视野图像而不会产生像差影响的透射电子显微镜。 为了获得样品的整个预定范围的电子束图像，透射电子显微镜在图像拾取装置的视野中指定几乎没有像差的区域，以指定区域为单位移动样品台 捕获整个预定范围作为多个连续的视野图像。
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公开(公告)号：US07382599B2
公开(公告)日：2008-06-03
申请号：US11553861
申请日：2006-10-27
IPC分类号： H01G7/00
CPC分类号： G01L9/0073
摘要： A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode passing through the glass substrate to be exposed at one surface and a projection passing through the glass substrate to be exposed at the one surface. A second silicon substrate is bonded to the one surface of the glass substrate and is disposed to face the fixed electrode so as to form a cavity between the second silicon substrate and the fixed electrode.
摘要翻译： 提供电容式压力传感器。 电容式压力传感器包括具有彼此面对的一对表面的玻璃基板。 第一硅衬底具有穿过玻璃衬底的固定电极，以在一个表面上暴露，并且穿过玻璃衬底的突起在一个表面处露出。 第二硅衬底被结合到玻璃衬底的一个表面上并且被设置为面对固定电极，以在第二硅衬底和固定电极之间形成空腔。
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公开(公告)号：US07379057B2
公开(公告)日：2008-05-27
申请号：US10381347
申请日：2002-07-26
IPC分类号： G09G5/00
CPC分类号： H04N5/202 , G09G3/20 , G09G3/3611 , G09G2320/0276 , G09G2320/0285 , G09G2320/0666 , G09G2320/0673 , H04N9/69
摘要： A nonlinearly processed (gamma-corrected) video signal is subjected to three-dimensional signal level correction using three-dimensional correction values and corresponding to a position in a horizontal direction and a vertical direction of a pixel on a display screen of an image display unit and the signal level of the pixel data. Thereby, accurate gamma correction is made possible, and horizontal and vertical area information (grid block) can be disposed in an optimum positional relation according to resolution of the screen.
摘要翻译： 使用三维校正值对非线性处理（伽马校正）视频信号进行三维信号电平校正，并对应于图像显示单元的显示屏上的像素的水平方向和垂直方向上的位置 和像素数据的信号电平。 从而，可以进行准确的伽马校正，并且可以根据屏幕的分辨率将水平和垂直面积信息（网格块）设置在最佳的位置关系中。
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公开(公告)号：US20080088072A1
公开(公告)日：2008-04-17
申请号：US11925374
申请日：2007-10-26
申请人： Hiroyuki Kobayashi
发明人： Hiroyuki Kobayashi
CPC分类号： B28B13/04 , B28B17/00 , B65G47/90 , Y10T29/49345 , Y10T29/49998
摘要： A holding apparatus includes a first holding unit including at least two supporting rollers rotatable around rotation shafts which extend substantially parallel with each other; a second holding unit including at least one supporting roller rotatable around a rotation shaft; and at least one holding mechanism having the first holding unit and the second holding unit. The rotation shafts of the supporting rollers of the first holding unit and the rotation shaft of the supporting roller of the second holding unit are substantially in parallel with each other. By moving at least one of the first holding unit and the second holding unit, an object to be held is held between the first holding unit and the second holding unit by using the supporting rollers.
摘要翻译： 保持装置包括：第一保持单元，其包括至少两个支撑辊，所述至少两个支撑辊可围绕基本上彼此平行延伸的旋转轴旋转; 第二保持单元，包括可围绕旋转轴旋转的至少一个支撑辊; 以及具有第一保持单元和第二保持单元的至少一个保持机构。 第一保持单元的支撑辊和第二保持单元的支撑辊的旋转轴的旋转轴基本上彼此平行。 通过移动第一保持单元和第二保持单元中的至少一个，通过使用支撑辊将待保持的物体保持在第一保持单元和第二保持单元之间。
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公开(公告)号：US07345867B2
公开(公告)日：2008-03-18
申请号：US11558602
申请日：2006-11-10
CPC分类号： G01L9/0073
摘要： A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A recessed portion is provided to form a cavity on one of the pair of principal surfaces. A first protruding portion provided in the recessed portion. A first silicon substrate has a fixed electrode formed on the first protruding portion, and a movable electrode disposed with a predetermined interval between the fixed electrode and the movable electrode.
摘要翻译： 提供一种电容式压力传感器及其制造方法。 电容式压力传感器包括具有彼此相对的一对表面的玻璃基板。 设置凹部以在一对主表面之一上形成空腔。 设置在凹部中的第一突出部。 第一硅衬底具有形成在第一突出部分上的固定电极和在固定电极和可动电极之间以预定间隔布置的可移动电极。
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