公开(公告)号：US09054674B2

公开(公告)日：2015-06-09

申请号：US13425001

申请日：2012-03-20

申请人： Kazunori Inoue ,  Jun Tsutsumi ,  Kazuhiro Matsumoto ,  Takashi Matsuda

发明人： Kazunori Inoue ,  Jun Tsutsumi ,  Kazuhiro Matsumoto ,  Takashi Matsuda

IPC分类号： H03H9/70 ,  H03H9/72 ,  H03H9/02 ,  H03H3/02 ,  H03H3/08 ,  H03H9/56 ,  H03H9/64

CPC分类号： H03H9/706 ,  H03H3/02 ,  H03H3/08 ,  H03H9/02125 ,  H03H9/02913 ,  H03H9/02952 ,  H03H9/568 ,  H03H9/6483 ,  H03H9/725 ,  Y10T29/49155

摘要： An acoustic wave filter includes: a substrate; resonators that are arranged on the substrate and excite acoustic waves; a ground terminal on the substrate; interconnection lines interconnecting the resonators and connecting predetermined ones of the resonators to the ground terminal; and a shield electrode disposed so as to be close to and face the interconnection lines.

摘要翻译： 声波滤波器包括：基板; 谐振器布置在基板上并激发声波; 衬底上的接地端子; 将所述谐振器互连并将所述谐振器中的预定谐振器连接到所述接地端子的互连线; 以及设置成靠近并面对互连线的屏蔽电极。

公开(公告)号：US07977848B2

公开(公告)日：2011-07-12

申请号：US12711753

申请日：2010-02-24

申请人： Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Yoshio Satoh

发明人： Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Yoshio Satoh

IPC分类号： H01L41/08 ,  H01L23/00 ,  H03H9/25

CPC分类号： H03H9/02574 ,  H03H9/14541 ,  Y10T29/42

摘要： An acoustic wave device of the present application includes a piezoelectric substrate (14), interdigital transducer electrodes (13) formed on the piezoelectric substrate (14), and an SiO2 film (12) formed so as to cover the electrodes (13). The acoustic wave device also includes a displacement adjustment film (11) formed on the SiO2 film (12), and the displacement adjustment film (11) is formed from a substance whose acoustic velocity is slower than that of the substance forming the SiO2 film (12). According to this configuration, it is possible to suppress unnecessary waves as well as improve temperature characteristics. Also, by mounting such an acoustic wave device in a communication module or communication apparatus, it is possible to achieve an improvement in reliability.

摘要翻译： 本申请的声波元件包括形成在压电基板（14）上的压电基板（14），叉指式换能器电极（13）和形成为覆盖电极（13）的SiO 2膜（12）。 声波装置还包括形成在SiO 2膜（12）上的位移调节膜（11），位移调节膜（11）由声速慢于形成SiO 2膜的物质的物质形成（ 12）。 根据该结构，能够抑制不必要的波以及改善温度特性。 此外，通过将这种声波装置安装在通信模块或通信装置中，可以实现可靠性的提高。

公开(公告)号：US07331092B2

公开(公告)日：2008-02-19

申请号：US10806148

申请日：2004-03-23

申请人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda ,  Hideki Takagi

发明人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda ,  Hideki Takagi

IPC分类号： H04R17/10

CPC分类号： H03H3/08 ,  H03H9/02574 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49016 ,  Y10T29/49126

摘要： A method of manufacturing a surface acoustic device that has a surface acoustic wave filter including comb-like electrodes, electrode pads, and wiring patterns formed on a joined substrate produced by joining a piezoelectric substrate and a supporting substrate to each other. This method includes the steps of: activating at least one of the joining surfaces of the piezoelectric substrate and the supporting substrate; and joining the piezoelectric substrate and the supporting substrate in such a manner that the activated joining surfaces face each other.

摘要翻译： 一种表面声学装置的制造方法，其具有包括梳状电极，电极焊盘和布线图案的表面声波滤波器，所述梳状电极，电极焊盘和布线图案形成在通过将压电基板和支撑基板彼此接合而制成的接合基板上。 该方法包括以下步骤：激活压电衬底和支撑衬底的至少一个接合表面; 以及使活化的接合面彼此面对的方式接合压电基板和支撑基板。

公开(公告)号：US06933810B2

公开(公告)日：2005-08-23

申请号：US10724577

申请日：2003-12-01

申请人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda

发明人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/64 ,  H03H9/72 ,  H03H9/25

CPC分类号： H03H9/02834 ,  H03H9/02559

摘要： A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes are formed, and a second surface, and a support substrate joined to the second surface of the piezoelectric substrate. The piezoelectric substrate is made of lithium, tantalate, and the support substrate is made of sapphire. The following expressions being satisfied: T/t 10  (2) where T is a thickness of the piezoelectric substrate, t is a thickness of the support substrate, and λ is a wavelength of a surface acoustic filter, propagated along the first surface of the piezoelectric substrate.

摘要翻译： 表面声波装置包括具有形成有梳状电极的第一表面和第二表面的压电基板和连接到压电基板的第二表面的支撑基板。 压电基板由钽酸锂制成，支撑基板由蓝宝石制成。 满足以下表达式：<？in-line-formula description =“In-line Formulas”end =“lead”？> T / t <1/3（1）<？in-line-formula description =“In- 行公式“end =”tail“？> <？in-line-formula description =”In-line Formulas“end =”lead“？> T / lambda> 10（2）<？in-line-formula description = 在线公式“end =”tail“？>其中T是压电基板的厚度，t是支撑基板的厚度，λ是表面声滤波器的波长，沿着压电的第一表面传播 基质。

公开(公告)号：US20100148626A1

公开(公告)日：2010-06-17

申请号：US12711753

申请日：2010-02-24

申请人： Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Yoshio Satoh

发明人： Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Yoshio Satoh

IPC分类号： H01L41/04 ,  H01L41/16 ,  H01L41/22

CPC分类号： H03H9/02574 ,  H03H9/14541 ,  Y10T29/42

摘要： An acoustic wave device of the present application includes a piezoelectric substrate (14), interdigital transducer electrodes (13) formed on the piezoelectric substrate (14), and an SiO2 film (12) formed so as to cover the electrodes (13). The acoustic wave device also includes a displacement adjustment film (11) formed on the SiO2 film (12), and the displacement adjustment film (11) is formed from a substance whose acoustic velocity is slower than that of the substance forming the SiO2 film (12). According to this configuration, it is possible to suppress unnecessary waves as well as improve temperature characteristics. Also, by mounting such an acoustic wave device in a communication module or communication apparatus, it is possible to achieve an improvement in reliability.

摘要翻译： 本申请的声波元件包括形成在压电基板（14）上的压电基板（14），叉指式换能器电极（13）和形成为覆盖电极（13）的SiO 2膜（12）。 声波装置还包括形成在SiO 2膜（12）上的位移调节膜（11），位移调节膜（11）由声速慢于形成SiO 2膜的物质的物质形成（ 12）。 根据该结构，能够抑制不必要的波以及改善温度特性。 此外，通过将这种声波装置安装在通信模块或通信装置中，可以实现可靠性的提高。

公开(公告)号：US07705836B2

公开(公告)日：2010-04-27

申请号：US11401280

申请日：2006-04-11

申请人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

发明人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

IPC分类号： G06F3/043 ,  H01L41/00 ,  H02N2/00

CPC分类号： G06F3/0436

摘要： A plurality of excitation elements are disposed on two facing sides of a quadrilateral detection range in a non-piezoelectric substrate, and a plurality of receiving elements are disposed on the other two sides of the detection range so as to face the excitation elements respectively. Surface acoustic waves are transmitted from the respective plurality of excitation elements in two diagonal directions of the detection range respectively, and the surface acoustic waves from the two diagonal directions are received by the respective receiving elements, so that a position of an object in contact with the substrate is detected based on received results in the receiving elements.

摘要翻译： 多个激励元件设置在非压电基板中的四边形检测范围的两个相对侧上，并且多个接收元件分别设置在检测范围的另外两侧，以分别面对激励元件。 表面声波分别从检测范围的两个对角线方向从相应的多个激励元件发射，并且来自两个对角线方向的表面声波由各个接收元件接收，使得物体与 基于接收元件中的接收结果来检测基板。

公开(公告)号：US07324096B2

公开(公告)日：2008-01-29

申请号：US10277963

申请日：2002-10-23

申请人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

发明人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

IPC分类号： G06F3/041 ,  G06F3/043 ,  H01L27/20 ,  H01L41/00 ,  H02N2/00

CPC分类号： G06F3/0436

摘要： A plurality of excitation elements, each including an IDT and a piezoelectric film, for exciting, respectively, surface acoustic waves, each having a unique center frequency, are formed on one end of a non-piezoelectric substrate, a plurality of receiving elements, each including an IDT and a piezoelectric film, for receiving, respectively, surface acoustic waves, each having a unique center frequency, are formed on the other end of the non-piezoelectric substrate to face the excitation elements, respectively, the center frequencies of the IDTs of the facing excitation element and receiving element are equal, the center frequencies of the IDTs of the excitation elements next to each other are different, and surface acoustic waves are propagated across the non-piezoelectric substrate, between the facing excitation elements and receiving elements so as to detect the position of an object in contact with the non-piezoelectric substrate, based on received results in the receiving elements.

摘要翻译： 在非压电基板的一端形成有多个分别包括IDT和压电膜的激励元件，分别用于激励分别具有唯一中心频率的表面声波，多个接收元件 分别在非压电基片的另一端分别形成分别具有独特中心频率的声表面波的IDT和压电薄膜，以分别面对激励元件，IDT的中心频率 面对的激励元件和接收元件相等时，彼此相邻的激励元件的IDT的中心频率不同，并且表面声波在非压电基板之间，在相对的激励元件和接收元件之间传播，所以 以便基于接收元件中的接收结果检测与非压电基片接触的物体的位置。

公开(公告)号：US07202590B2

公开(公告)日：2007-04-10

申请号：US10840632

申请日：2004-05-07

申请人： Takashi Matsuda ,  Michio Miura ,  Yoshio Satoh ,  Masanori Ueda

发明人： Takashi Matsuda ,  Michio Miura ,  Yoshio Satoh ,  Masanori Ueda

IPC分类号： H03H9/25

CPC分类号： H03H9/02866 ,  H03H3/08 ,  H03H9/02905 ,  H03H9/0576 ,  H03H9/72 ,  H03H9/725

摘要： A surface acoustic wave device includes: a piezoelectric substrate that has two or more resonators formed on a surface; and a supporting substrate that is joined to another surface of the piezoelectric substrate. In this surface acoustic wave device, at least two of the resonators have exciting portions that overlap each other in the direction of propagating surface acoustic waves, and at least a part of the piezoelectric substrate is removed or modified to have different properties between at least one pair of overlapping resonators among the resonators having the overlapping portions.

摘要翻译： 表面声波装置包括：压电基板，其在表面上形成有两个以上的谐振器; 以及与压电基板的另一表面接合的支撑基板。 在该声表面波装置中，至少两个谐振器具有在传播表面声波的方向上彼此重叠的激励部分，并且压电基板的至少一部分被去除或修改为在至少一个 具有重叠部分的谐振器中的一对重叠谐振器。

公开(公告)号：US20100150075A1

公开(公告)日：2010-06-17

申请号：US12709182

申请日：2010-02-19

申请人： Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Masanori Ueda

发明人： Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H04W4/00 ,  H03H7/12

CPC分类号： H03H9/0576 ,  H03H9/725

摘要： A demultiplexer has a common terminal, a transmission terminal, and a reception terminal, and furthermore includes a transmission filter connected between the common terminal and the transmission terminal, a reception filter connected between the common terminal and the reception terminal, and a phase shift circuit connected in series to the reception filter connected between the common terminal and the reception terminal. A node on the line from the phase shift circuit to the common terminal or the transmission terminal, and a node on the line from the phase shift circuit to the reception terminal are coupled via a reactance. Accordingly, it is possible to fundamentally reduce or eliminate the situation in which transmission signals from the transmission filter arrive at the reception circuit, and improve isolation.

摘要翻译： 解复用器具有公共端子，发送端子和接收端子，并且还包括连接在公共端子和发送端子之间的发送滤波器，连接在公共端子和接收端子之间的接收滤波器以及相移电路 与连接在公共端子和接收端子之间的接收滤波器串联连接。 从相移电路到共用端子或发送端子的线路上的节点，以及从相移电路到接收端子的线路上的节点经由电抗耦合。 因此，可以从根本上减少或消除来自发送滤波器的发送信号到达接收电路并且改善隔离的情况。

公开(公告)号：US07154359B2

公开(公告)日：2006-12-26

申请号：US10849151

申请日：2004-05-20

申请人： Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Masanori Ueda

发明人： Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H03H9/64 ,  H03H9/72

CPC分类号： H03H9/6493 ,  H03H7/1708 ,  H03H9/0538 ,  H03H9/14597 ,  H03H9/6426 ,  H03H9/6433 ,  H03H9/6436 ,  H03H9/725

摘要： A surface acoustic wave filter includes: an input interdigital transducer and an output interdigital transducer that are formed on a piezoelectric substrate; a capacitance that is provided between the input terminal of the input interdigital transducer and the output terminal of the output interdigital transducer; a first common ground terminal that connects the ground terminal of the input interdigital transducer and the ground terminal of the output interdigital transducer; and an inductance that is provided between the first common ground terminal and a ground.

摘要翻译： 表面声波滤波器包括：形成在压电基板上的输入叉指式换能器和输出叉指式换能器; 提供在输入叉指式换能器的输入端和输出叉指式换能器的输出端之间的电容; 连接输入叉指式换能器的接地端子和输出叉指式换能器的接地端子的第一公共接地端子; 以及设置在第一公共接地端子和地之间的电感。