Exposure method and apparatus
    41.
    发明授权

    公开(公告)号:US5448332A

    公开(公告)日:1995-09-05

    申请号:US345325

    申请日:1994-11-21

    CPC分类号: G03F7/70358 G03F9/7026

    摘要: An apparatus for exposing a pattern, formed on a mask, on each of a plurality of partitioned areas on a photosensitive substrate by a step-and-repeat scheme includes a projection optical system for projecting the pattern of the mask on the photosensitive substrate, a substrate stage for holding the photosensitive substrate and two-dimensionally moving the photosensitive substrate within a plane perpendicular to the optical axis of the projection optical system, a detection unit for projecting a pattern image having a predetermined shape on the photosensitive substrate and photoelectrically detecting light reflected by the photosensitive substrate to detect a position at each of a plurality of points on the photosensitive substrate along the optical axis of the projection optical system, and a measurement unit for, when each of a plurality of measurement points in a partitioned area on which a pattern of the mask is to be exposed next coincides with or approaches the pattern image, detecting an offset amount between an imaging plane of the projection optical system and the next partitioned area along the optical axis during a stepping operation of the substrate stage, wherein the imaging plane and the next partitioned area are relatively moved along the optical axis in accordance with the measured offset amount before the pattern of the mask is exposed on the next partitioned area.

    Automobile ac generator system
    42.
    发明授权
    Automobile ac generator system 失效
    汽车交流发电机系统

    公开(公告)号:US5086266A

    公开(公告)日:1992-02-04

    申请号:US584635

    申请日:1990-09-19

    IPC分类号: H02J7/14 H02P9/30

    CPC分类号: H02J7/1438 H02P9/30

    摘要: An automobile ac generator system comprises a generator driven by the engine of the automobile, a system controller for converting the ac power generated by the generator to dc power, controlling the generator on the basis of the voltage of the converted dc power and converting the dc power to ac power of commercial line frequency, and a mode switch for selecting among control operating modes of the system controller.

    摘要翻译: 一种汽车交流发电机系统,包括由汽车发动机驱动的发电机,用于将发电机产生的交流电力转换为直流电力的系统控制器,基于转换后的直流电力的电压控制发电机, 商业线路频率的交流电力的功率,以及用于在系统控制器的控制操作模式之间进行选择的模式开关。

    Automobile generator apparatus
    43.
    发明授权
    Automobile generator apparatus 失效
    汽车发电机

    公开(公告)号:US4973896A

    公开(公告)日:1990-11-27

    申请号:US260918

    申请日:1988-10-21

    IPC分类号: H02J7/14 H02P9/30

    摘要: An automobile generator apparatus for producing commercial line power when driven by an automobile engine comprises a generator, an inverter unit, a controller for controlling the generator field and an accelerator actuator.The accelerator actuator is mounted opposite the accelerator pedal in such manner as to prevent erroneous operation thereof.The generator field is controlled while monitoring both the low-voltage side output and the high-voltage side output so as to prevent a large output current from flowing through the low-voltage side load. A circuit is further provided for preventing the occurrence of an overvoltage as a result of field control transistor malfunction.The switching elements constituting the output stage of the inverter unit are controlled to vary the duty ratio of the output waveform so as to stabilize the inverter output voltage and controlled to remove the center portion of the output waves so as to cope with the startup load.The inverter unit is also provided with an improved constant voltage circuit.There is further provided a synchronized operation control for combining the outputs of a plurality of automobile generator apparatuses.The generator is a single-shaft, dual-output type wherein the windings of the high-voltage side coils are disposed at the bottom of slots in the stator while the windings of the low-voltage side coils are disposed near the entrance of the slots.

    摘要翻译: 一种用于在由汽车发动机驱动时产生商业线路电力的汽车发电机装置包括发电机,逆变器单元,用于控制发电机场的控制器和加速器致动器。 加速器致动器以与加速器踏板相对的方式安装,以防止其错误操作。 在监视低压侧输出和高压侧输出的同时控制发电机场,以防止大的输出电流流过低压侧负载。 还提供一种电路,用于防止由于场控制晶体管故障而导致过电压的发生。 控制构成逆变器单元的输出级的开关元件,以改变输出波形的占空比,从而稳定逆变器输出电压并被控制以去除输出波的中心部分,以便应对启动负载。 逆变器单元还具有改进的恒压电路。 还提供了一种用于组合多个汽车发电机装置的输出的同步运行控制。 发电机是单轴双输出型,其中高压侧线圈的绕组设置在定子的槽的底部,而低压侧线圈的绕组设置在槽的入口附近 。

    Engine control with function to eliminate minute particles in exhaust gas
    44.
    发明授权
    Engine control with function to eliminate minute particles in exhaust gas 失效
    发动机控制功能,可消除废气中的微小颗粒

    公开(公告)号:US4685290A

    公开(公告)日:1987-08-11

    申请号:US797023

    申请日:1985-11-12

    摘要: In order to provide a function of eliminating minute particles in exhaust gas to a control apparatus of an internal combustion engine, a filter temperature sensor, inserted in an exhaust path, for measuring a temperature of a filter for trapping minute particles of an exhaust gas, an electric heater for removing the minute particles deposited on the filter by combustion, and a control circuit are provided. In the control circuit, filter recovery is detected, a preheating instruction for raising the filter temperature is generated in accordance with the detection result, completion of the preheating of the filter is decided, an instruction for changing an injection pattern of the fuel injection valve for preheating the filter is generated, and an ON signal is supplied to the electric heater.

    摘要翻译: 为了提供排气中的微小颗粒到内燃机的控制装置的功能,插入排气路径中的过滤器温度传感器用于测量用于捕集排气的微小颗粒的过滤器的温度, 设置用于通过燃烧除去沉积在过滤器上的微小颗粒的电加热器,以及控制电路。 在控制电路中,检测到过滤器回收,根据检测结果生成提高过滤器温度的预热指示,决定过滤器的预热结束,改变燃料喷射阀的喷射模式的指示, 产生预热过滤器,向电加热器供给ON信号。

    Two-dimensional display apparatus for an automobile
    45.
    发明授权
    Two-dimensional display apparatus for an automobile 失效
    汽车二维显示装置

    公开(公告)号:US4210908A

    公开(公告)日:1980-07-01

    申请号:US879496

    申请日:1978-02-21

    CPC分类号: G01F9/023 B60K35/00 G01D7/10

    摘要: A display apparatus for displaying two-dimensionally on a plane the correlation between two parameters, such as the acceleration of an automobile and the fuel consumption rate in its engine, which vary in association with the running of the automobile. The displaying portion includes a plurality of light-emitting elements which are arranged in rows and columns on the same plane so as to be given their respective co-ordinates, or ordinates and abscissas. The acceleration of an automobile is calculated corresponding to the counted value of speed pulses having a frequency proportional to the speed of revolution of the wheels so that the calculated acceleration value may be discriminated to show to which of a plurality of acceleration ranges the acceleration value belongs. Similarly, the fuel consumption rate in the engine is calculated corresponding to the counted value of fuel pulses having a frequency proportional to the fuel consumption rate so that the calculated fuel consumption rate value may be discriminated to show to which of a plurality of fuel consumption rate ranges the fuel consumption rate belongs. The results of discrimination with respect to acceleration and fuel consumption rate are assigned to the ordinate and abscissa on the plane, respectively, so that one of the light-emitting elements arranged at the thus assigned co-ordinates may be lighted. The position or co-ordinate of the lighted element indicates the correlation between the acceleration and the fuel consumption rate.BACKGROUND OF THE INVENTIONThe present invention relates to a two-dimensional display apparatus for displaying as a point or an area on a plane different parameters such as the acceleration and the fuel consumption rate of an automobile.Heretofore, an apparatus has been known which calculates and displays parameters, such as the number of rotation of an automobile's engine, the fuel consumption rate and the acceleration of an automobile, which parameters vary in association with the running of an automobile. Further, it has been known to display these parameters in an analogue or digital manner. However, in such known apparatus, for example, in an analogue display apparatus, it is made generally that, when different parameters are to be displayed on a plane, the parameters are displayed in the same direction on the plane, such as longitudinal or transverse direction. Therefore, it is very difficult for a driver of an automobile to be readily acquainted with the correlation between the different parameters which vary in association with each other.

    摘要翻译: 一种显示装置,用于在平面上二维显示汽车的加速度和发动机的燃料消耗率等两个参数之间的相关性,其与汽车的行驶有关。 显示部分包括在同一平面上以行和列布置的多个发光元件,以便给予它们各自的坐标或纵坐标和横坐标。 对应于具有与车轮旋转速度成比例的频率的速度脉冲的计数值来计算汽车的加速度,使得可以区分所计算的加速度值以示出加速度值属于多个加速度范围中的哪一个 。 类似地,对应于具有与燃料消耗率成比例的频率的燃料脉冲的计数值来计算发动机中的燃料消耗率,使得可以区分计算出的燃料消耗率值以显示多个燃料消耗率 范围燃油消耗率属于。 关于加速度和燃料消耗率的鉴别结果分别被分配给平面上的纵坐标和横坐标,使得布置在如此分配的坐标处的发光元件中的一个可以被点亮。 点亮元件的位置或坐标表示加速度和燃料消耗率之间的相关性。

    Fuel injection timing control apparatus for a fuel injection pump and
control method for the same
    46.
    发明授权
    Fuel injection timing control apparatus for a fuel injection pump and control method for the same 失效
    燃料喷射泵的燃料喷射正时控制装置及其控制方法

    公开(公告)号:US5697347A

    公开(公告)日:1997-12-16

    申请号:US719204

    申请日:1996-09-25

    IPC分类号: F02B3/06 F02D41/40 F02M37/04

    摘要: A target fuel injection timing of the fuel injection pump is calculated based on the operating conditions of a diesel engine (Steps 102; 302; 602), while an actual fuel injection timing is calculated based on crank angle signals (Steps 103; 303: 603). Then, a fuel injection timing error (Terr) is obtained based on a difference between the target fuel injection timing and the actual fuel injection timing (Steps 104; 304; 604). To adjust the actual fuel injection timing based on the error (Terr), a rotational position of a roller ring (10) is controlled through a timer piston (21) slidable and housed in a timer device (28) by a hydraulic pressure control valve (27) in response to a pulse actuating signal having a controllable duty ratio (DFIN). The pulse actuating signal having the controlled duty ratio is generated at a predetermined pulse output timing (Steps 208; 406; 706), so that the fuel injection caused by a force feeding stroke of the fuel injection pump is not overlapped with an actual valve-open duration of hydraulic pressure control valve (27) varying depending on the engine speed (N), thereby completely locking the timer piston (21) during the fuel injection.

    摘要翻译: 基于柴油发动机的运行条件,计算出燃料喷射泵的目标燃料喷射正时(步骤102; 302; 602),同时基于曲柄角信号计算实际燃料喷射正时(步骤103; 303:603 )。 然后,基于目标燃料喷射正时与实际燃料喷射正时之间的差,获得燃料喷射正时误差(Terr)(步骤104; 304; 604)。 为了基于误差(Terr)来调节实际的燃料喷射正时,通过一个定时器活塞(21)来控制滚子环(10)的旋转位置,定时器活塞(21)通过液压控制阀可滑动并容纳在定时装置(28)中 (27)响应具有可控占空比(DFIN)的脉冲致动信号。 具有受控占空比的脉冲致动信号在预定的脉冲输出定时产生(步骤208; 406; 706),使得由燃料喷射泵的力供给冲程引起的燃料喷射不与实际的阀 - 液压控制阀(27)的打开持续时间根据发动机转速(N)而变化,从而在燃油喷射期间完全锁定定时器活塞(21)。

    Projection exposure apparatus
    47.
    发明授权
    Projection exposure apparatus 失效
    投影曝光装置

    公开(公告)号:US5483311A

    公开(公告)日:1996-01-09

    申请号:US249988

    申请日:1994-05-27

    IPC分类号: G03F7/20 G03F7/207 G03B27/42

    摘要: In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.

    摘要翻译: 在投影曝光装置中,当通过投影光学系统将形成有预定图案的掩模通过快门投影到放置在平台上的感光基板上时,台沿光轴方向移动的投影曝光装置中, 基于快门的操作特性和舞台的操作特性(特别是速度特性),舞台的快门和控制装置彼此互锁,使得相对于感光体的移动的存在概率的分布 基板从打开操作开始时间到关闭操作完成时间点相对于光轴的方向可以在光轴方向上的至少两个位置处呈现基本相等的最大值。

    Projection exposure apparatus
    48.
    发明授权
    Projection exposure apparatus 失效
    投影曝光装置

    公开(公告)号:US5343270A

    公开(公告)日:1994-08-30

    申请号:US986630

    申请日:1992-12-07

    IPC分类号: G03F7/20 G03F7/207 G03B27/42

    摘要: In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.

    摘要翻译: 在投影曝光装置中,当通过投影光学系统将形成有预定图案的掩模通过快门投影到放置在平台上的感光基板上时,台沿光轴方向移动的投影曝光装置中, 基于快门的操作特性和舞台的操作特性(特别是速度特性),舞台的快门和控制装置彼此互锁,使得相对于感光体的移动的存在概率的分布 基板从打开操作开始时间到关闭操作完成时间点相对于光轴的方向可以在光轴方向上的至少两个位置处呈现基本相等的最大值。

    Load reactance element driving device
    49.
    发明授权
    Load reactance element driving device 失效
    负载电抗元件驱动装置

    公开(公告)号:US4608958A

    公开(公告)日:1986-09-02

    申请号:US533812

    申请日:1983-09-19

    摘要: A device for driving a load reactance element, such as a piezoelectric actuator for a fuel injection system, including a series reactance element connected in series with the load reactance element, and a resonance circuit formed by the load reactance and the series reactance. First and second switching elements are connected between the resonance circuit and the power source or ground potential. Each of the first and second switching elements is rendered conductive only during a half cycle of resonance. The directions of the load current flowing through the load reactance element are switchable by making alternately the first and second switching elements conductive.

    摘要翻译: 用于驱动负载电抗元件的装置,例如用于燃料喷射系统的压电致动器,包括与负载电抗元件串联连接的串联电抗元件,以及由负载电抗和串联电抗形成的谐振电路。 第一和第二开关元件连接在谐振电路和电源或地电位之间。 第一和第二开关元件中的每一个仅在谐振的半周期期间才导通。 流过负载电抗元件的负载电流的方向可以通过交替地使第一和第二开关元件导通来切换。