Illumination apparatus and exposure apparatus
    41.
    发明申请
    Illumination apparatus and exposure apparatus 失效
    照明装置和曝光装置

    公开(公告)号:US20050185165A1

    公开(公告)日:2005-08-25

    申请号:US11062024

    申请日:2005-02-18

    Inventor: Yutaka Watanabe

    CPC classification number: G03B27/54 G03F7/70075

    Abstract: An illumination apparatus for illuminating a target surface using light includes a light source that emits the light, a reflection integrator that forms plural secondary light sources using the light from the light source, and an optical unit that differentiates Helmholtz-Lagrange invariants in two orthogonal directions with respect to the light incident upon the reflection integrator.

    Abstract translation: 用于使用光照射目标表面的照明装置包括发射光的光源,使用来自光源的光形成多个次级光源的反射积分器,以及在两个正交方向上区分亥姆霍兹 - 拉格朗日不变量的光学单元 相对于反射积分器发生的光线。

    Processing solution for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, and method for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers
    42.
    发明申请
    Processing solution for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, and method for forming hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers 审中-公开
    用于在锌或锌合金镀层上形成六价铬,黑色转换膜的加工溶液,以及在锌或锌合金镀层上形成六价铬黑色转化膜的方法

    公开(公告)号:US20050109426A1

    公开(公告)日:2005-05-26

    申请号:US10939555

    申请日:2004-09-14

    CPC classification number: C23C22/17 C23C22/47 C23C22/53 C23C2222/10

    Abstract: It is an object of the present invention to provide a processing solution used for forming a hexavalent chromium free, black conversion film, which is applied onto the surface of zinc or zinc alloy plating layers, and which has corrosion resistance identical to or higher than that achieved by the conventional hexavalent chromium-containing conversion film. According to an aspect of the present invention, there is provided a processing solution for forming a hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, the processing solution comprising: nitrate ions and trivalent chromium in a mole ratio (NO3−/Cr3+) of less than 0.5/1, wherein the trivalent chromium is present in the form of a water-soluble complex with a chelating agent; and cobalt ions and/or nickel ions, wherein the cobalt ions and/or nickel ions are stably present in the processing solution without causing any precipitation by forming a hardly soluble metal salt with the chelating agent; wherein the solution reacts with zinc when it is brought into contact with the zinc or zinc alloy plating to form a hexavalent chromium free, black conversion film containing zinc, chromium, cobalt and/or nickel, and the chelating agent on the plating.

    Abstract translation: 本发明的目的是提供一种用于形成六价铬无黑变换膜的处理溶液,其被施加到锌或锌合金镀层的表面上,并且具有与之相同或更高的耐蚀性 通过常规的六价含铬转化膜实现。 根据本发明的一个方面,提供一种用于在锌或锌合金镀层上形成六价铬的黑色转换膜的处理溶液,所述处理溶液包括:摩尔比(NO < 其中三价铬以与螯合剂的水溶性络合物的形式存在;其中三价铬以水溶性络合物的形式存在于螯合剂中; 和钴离子和/或镍离子,其中钴离子和/或镍离子稳定地存在于处理溶液中,而不会通过与螯合剂形成难溶的金属盐而引起任何沉淀; 其中当与锌或锌合金镀层接触时,溶液与锌反应,以形成含有锌,铬,钴和/或镍的六价铬无黑色转化膜和电镀上的螯合剂。

    Exposure method
    43.
    发明授权
    Exposure method 有权
    曝光方法

    公开(公告)号:US06324250B1

    公开(公告)日:2001-11-27

    申请号:US09425224

    申请日:1999-10-22

    CPC classification number: G03F7/70425 G03F1/22 G03F1/50 G03F7/2022

    Abstract: An exposure method for transferring a pattern of a mask onto a workpiece in a proximity exposure system, includes a first exposure step for exposing a predetermined portion of the workpiece, while maintaining a first spacing between the mask and the workpiece, and a second exposure step for exposing the predetermined portion of the workpiece, while maintaining a second spacing, different from the first spacing, between the mask and the workpiece, wherein exposures in the first and second exposure steps are performed superposedly, prior to a development process.

    Abstract translation: 一种用于在接近曝光系统中将掩模图案转印到工件上的曝光方法包括:第一曝光步骤,用于在保持掩模和工件之间的第一间隔的同时保持工件的预定部分,以及第二曝光步骤 用于在所述掩模和所述工件之间保持与所述第一间隔不同的第二间隔的情况下暴露所述工件的预定部分,其中在显影处理之前,重叠地执行所述第一和第二曝光步骤中的曝光。

    X-ray optical system and X-ray exposure apparatus
    44.
    发明授权
    X-ray optical system and X-ray exposure apparatus 失效
    X射线光学系统和X射线曝光装置

    公开(公告)号:US06219400B1

    公开(公告)日:2001-04-17

    申请号:US09062014

    申请日:1998-04-17

    CPC classification number: G21K1/06 G03F7/70058 G03F7/7085

    Abstract: An X-ray optical system includes an X-ray illumination system having at least two mirrors, a driving system for moving the at least two mirrors, a detecting system having at least one sensor, for detecting at least one of tilt and incidence position of X-rays in the X-ray illumination system, and a control system for controlling movements of the at least two mirrors by the driving system on the basis of detection by the detecting system.

    Abstract translation: X射线光学系统包括具有至少两个反射镜的X射线照明系统,用于移动至少两个反射镜的驱动系统,具有至少一个传感器的检测系统,用于检测至少两个反射镜的倾斜和入射位置 X射线照射系统中的X射线,以及用于根据检测系统的检测来控制驱动系统的至少两个反射镜的移动的控制系统。

    Reflecting system
    45.
    发明授权
    Reflecting system 失效
    反思系统

    公开(公告)号:US5975709A

    公开(公告)日:1999-11-02

    申请号:US234948

    申请日:1994-04-28

    Abstract: A reflection system, includes a reflecting member having a mirror-finished reflection surface of a spherical shape; and a base member having a base surface of a predetermined shape; and wherein the reflection member and the base member are adhered to each other with one of the bottom surface of the reflection member and the base surface of the base member being made to follow the other to cause deformation of the spherical shape, whereby the reflection surface is formed into an aspherical shape.

    Abstract translation: 反射系统包括具有球面形状的镜面反射面的反射部件, 以及具有预定形状的基面的基底构件; 并且其中所述反射构件和所述基底构件通过所述反射构件的底表面中的一个并且所述基底构件的所述基面彼此粘合以引起所述球形的变形,由此所述反射面 形成为非球面形状。

    Method and apparatus for simulating a computer network system through
collected data from the network
    48.
    发明授权
    Method and apparatus for simulating a computer network system through collected data from the network 失效
    通过从网络收集的数据来模拟计算机网络系统的方法和装置

    公开(公告)号:US5761486A

    公开(公告)日:1998-06-02

    申请号:US638771

    申请日:1996-04-29

    CPC classification number: H04L12/26 H04L43/00 G06F11/3457

    Abstract: A simulator apparatus collects communication information on a transmission line by a line information collecting module, extracts the communication information between a server and clients from the collected communication information by an information extracting module, and further discriminates the communication information necessary for a simulation on a protocol unit basis from the communication information and converts to a simulating procedure by a procedure converting module. A simulation processing module performs a simulating operation of the client for the server in accordance with a simulation definition file of the simulating procedure and operating conditions and stores an operating situation to a performance log file.

    Abstract translation: 模拟器装置通过线路信息采集模块收集传输线上的通信信息,通过信息提取模块从所收集的通信信息中提取服务器与客户端之间的通信信息,并进一步鉴别协议模拟所需的通信信息 从通信信息的单位基础,并通过程序转换模块转换成模拟过程。 模拟处理模块根据模拟过程和操作条件的模拟定义文件对服务器的客户端进行模拟操作,并将运行状况存储到演奏日志文件。

    Document exposure apparatus
    49.
    发明授权
    Document exposure apparatus 失效
    文件曝光装置

    公开(公告)号:US5657113A

    公开(公告)日:1997-08-12

    申请号:US384373

    申请日:1995-02-03

    CPC classification number: G03G15/043 G03G15/605

    Abstract: A document exposure apparatus includes a glass plate on which a document original is located, a press cover for covering the glass plate, an open/close discriminating unit for discriminating an open state and a close state of the press cover, an exposure unit, disposed under the glass plate, for illuminating the original with light, and a control unit for controlling the illuminating operation of the exposure unit according to an open/close state of the press cover, which is discriminated by the open/close discriminating unit.

    Abstract translation: 文件曝光装置包括:文档原稿所在的玻璃板,用于覆盖玻璃板的压盖,用于识别压盖的打开状态和关闭状态的打开/关闭判别单元,设置在曝光单元 在玻璃板下面,用于用光照射原稿;以及控制单元,用于根据由打开/关闭识别单元区分的按压盖的打开/关闭状态来控制曝光单元的照明操作。

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