Abstract:
An illumination apparatus for illuminating a target surface using light includes a light source that emits the light, a reflection integrator that forms plural secondary light sources using the light from the light source, and an optical unit that differentiates Helmholtz-Lagrange invariants in two orthogonal directions with respect to the light incident upon the reflection integrator.
Abstract:
It is an object of the present invention to provide a processing solution used for forming a hexavalent chromium free, black conversion film, which is applied onto the surface of zinc or zinc alloy plating layers, and which has corrosion resistance identical to or higher than that achieved by the conventional hexavalent chromium-containing conversion film. According to an aspect of the present invention, there is provided a processing solution for forming a hexavalent chromium free, black conversion film on zinc or zinc alloy plating layers, the processing solution comprising: nitrate ions and trivalent chromium in a mole ratio (NO3−/Cr3+) of less than 0.5/1, wherein the trivalent chromium is present in the form of a water-soluble complex with a chelating agent; and cobalt ions and/or nickel ions, wherein the cobalt ions and/or nickel ions are stably present in the processing solution without causing any precipitation by forming a hardly soluble metal salt with the chelating agent; wherein the solution reacts with zinc when it is brought into contact with the zinc or zinc alloy plating to form a hexavalent chromium free, black conversion film containing zinc, chromium, cobalt and/or nickel, and the chelating agent on the plating.
Abstract:
An exposure method for transferring a pattern of a mask onto a workpiece in a proximity exposure system, includes a first exposure step for exposing a predetermined portion of the workpiece, while maintaining a first spacing between the mask and the workpiece, and a second exposure step for exposing the predetermined portion of the workpiece, while maintaining a second spacing, different from the first spacing, between the mask and the workpiece, wherein exposures in the first and second exposure steps are performed superposedly, prior to a development process.
Abstract:
An X-ray optical system includes an X-ray illumination system having at least two mirrors, a driving system for moving the at least two mirrors, a detecting system having at least one sensor, for detecting at least one of tilt and incidence position of X-rays in the X-ray illumination system, and a control system for controlling movements of the at least two mirrors by the driving system on the basis of detection by the detecting system.
Abstract:
A reflection system, includes a reflecting member having a mirror-finished reflection surface of a spherical shape; and a base member having a base surface of a predetermined shape; and wherein the reflection member and the base member are adhered to each other with one of the bottom surface of the reflection member and the base surface of the base member being made to follow the other to cause deformation of the spherical shape, whereby the reflection surface is formed into an aspherical shape.
Abstract:
A process for producing 4,6-diaminoresorcinols comprises the steps of:subjecting a dioxime of the formula (4) ##STR1## wherein R is an alkyl or phenyl group, to Beckmann rearrangement to thereby produce 4,6-diacylaminoresorcinol of the formula (5) ##STR2## wherein R is as defined above, and subjecting the 4,6-diacylaminoresorcinol to hydrolysis and recovering the product 4,6-diaminoresorcinol (6) ##STR3## or a salt thereof.
Abstract:
A radiation window includes a radiation transmitting window material, a supporting frame for gas-tightly supporting an outer periphery of the radiation transmitting window material, a flange for gas-tightly supporting an outer periphery of the supporting frame, and a structure for reducing a stress related to mounting the supporting frame onto the flange.
Abstract:
A simulator apparatus collects communication information on a transmission line by a line information collecting module, extracts the communication information between a server and clients from the collected communication information by an information extracting module, and further discriminates the communication information necessary for a simulation on a protocol unit basis from the communication information and converts to a simulating procedure by a procedure converting module. A simulation processing module performs a simulating operation of the client for the server in accordance with a simulation definition file of the simulating procedure and operating conditions and stores an operating situation to a performance log file.
Abstract:
A document exposure apparatus includes a glass plate on which a document original is located, a press cover for covering the glass plate, an open/close discriminating unit for discriminating an open state and a close state of the press cover, an exposure unit, disposed under the glass plate, for illuminating the original with light, and a control unit for controlling the illuminating operation of the exposure unit according to an open/close state of the press cover, which is discriminated by the open/close discriminating unit.
Abstract:
A reflection type mask includes a reflective portion effective to reflect soft X-rays or vacuum ultraviolet rays, and an absorbent material pattern formed on the reflecting portion, wherein, when the wavelength of the soft X-rays or vacuum ultraviolet rays is denoted by .lambda. and the optical constant of the material constituting the absorbent material pattern is denoted by 1-.delta.-ik (where .delta. and k are real numbers while i is an imaginary number), a relation 0.29