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    Magnetic null accelerometer
    42.
    发明授权
    Magnetic null accelerometer 有权
    磁零加速度计

    公开(公告)号：US07331229B2

    公开(公告)日：2008-02-19

    申请号：US10905007

    申请日：2004-12-09

    Applicant: Ray F. Campbell ,  Joan D. Wada ,  Michael J. Costello ,  Mohsen A. Khatiblou

    Inventor： Ray F. Campbell ,  Joan D. Wada ,  Michael J. Costello ,  Mohsen A. Khatiblou

    IPC: G01P15/125

    CPC classification number: G01P15/132 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828

    Abstract: An accelerometer system includes a capacitor plate fixed within a housing and a flexure plate positioned substantially parallel to the capacitor plate a distance therefrom. The distance varies in response to acceleration forces acting upon the flexure plate such that the flexure plate and the capacitor plate generate a capacitance signal. A magnet is coupled to the flexure plate and generates a magnetic field, which moves as the flexure plate flexes. A coil winding around the flexure plate generates a second magnetic field as a function of capacitance signal, thus opposing the flexure plate magnetic field, and thereby returning the flexure plate to a null position.

    Abstract translation: 加速度计系统包括固定在壳体内的电容器板和与电容器板基本平行的挠曲板，其距离为一定距离。 该距离响应于作用在挠曲板上的加速力而变化，使得挠曲板和电容器板产生电容信号。 一个磁体连接到挠曲板上并产生一个磁场，随着弯曲板的弯曲而移动。 围绕挠曲板的线圈绕组产生作为电容信号的函数的第二磁场，从而与弯曲板磁场相反，从而使挠曲板返回到零位置。

    MAGNETIC NULL ACCELEROMETER
    43.
    发明申请
    MAGNETIC NULL ACCELEROMETER 有权
    MAGNETIC NULL加速度计

    公开(公告)号：US20080011081A1

    公开(公告)日：2008-01-17

    申请号：US10905007

    申请日：2004-12-09

    Applicant: Ray F. Campbell ,  Joan D. Wada ,  Michael J. Costello ,  Mohsen A. Khatiblou

    Inventor： Ray F. Campbell ,  Joan D. Wada ,  Michael J. Costello ,  Mohsen A. Khatiblou

    IPC: G01P15/13 ,  G01P15/125

    CPC classification number: G01P15/132 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828

    Abstract: An accelerometer system includes a capacitor plate fixed within a housing and a flexure plate positioned substantially parallel to the capacitor plate a distance therefrom. The distance varies in response to acceleration forces acting upon the flexure plate such that the flexure plate and the capacitor plate generate a capacitance signal. A magnet is coupled to the flexure plate and generates a magnetic field, which moves as the flexure plate flexes. A coil winding around the flexure plate generates a second magnetic field as a function of capacitance signal, thus opposing the flexure plate magnetic field, and thereby returning the flexure plate to a null position.

    Abstract translation: 加速度计系统包括固定在壳体内的电容器板和与电容器板基本平行的挠曲板，其距离为一定距离。 该距离响应于作用在挠曲板上的加速力而变化，使得挠曲板和电容器板产生电容信号。 一个磁体连接到挠曲板上并产生一个磁场，随着弯曲板的弯曲而移动。 围绕挠曲板的线圈绕组产生作为电容信号的函数的第二磁场，从而与弯曲板磁场相反，从而使挠曲板返回到零位置。

    Dynamic quantity sensor
    46.
    发明申请
    Dynamic quantity sensor 有权
    动态量传感器

    公开(公告)号：US20070158822A1

    公开(公告)日：2007-07-12

    申请号：US11709271

    申请日：2007-02-22

    Applicant: Tetsuo Fujii

    Inventor： Tetsuo Fujii

    IPC: H01L23/12

    CPC classification number: G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/00012

    Abstract: A dynamic quantity sensor includes a sensor chip (10) having a movable portion (13) at one surface side thereof and a silicon layer (14) at another surface side thereof. The movable portion (13) is displaced under application of a dynamic quantity. The silicon layer (14) is separated from the movable portion (13) through an insulator (15). The dynamic quantity sensor also includes a circuit chip (20) for transmitting/receiving electrical signals to/from the sensor chip (20). The circuit chip (20) is disposed to confront the one surface of the sensor chip (10) through a gap portion (30) and cover the movable portion (13). The sensor chip (10) and the circuit chip (20) are bonded to each other around the gap portion (30) so that a bonding portion (40) is formed to substantially surround the gap portion (30) and thereby seal the gap portion (30).

    Abstract translation: 动态量传感器包括在其一个表面侧具有可移动部分（13）的传感器芯片（10）和在其另一表面侧的硅层（14）。 可移动部分（13）在施加动态量的情况下移动。 硅层（14）通过绝缘体（15）与可动部分（13）分离。 动态量传感器还包括用于向传感器芯片（20）发送/接收电信号的电路芯片（20）。 电路芯片（20）设置成通过间隙部分（30）与传感器芯片（10）的一个表面相对并覆盖可动部分（13）。 传感器芯片（10）和电路芯片（20）围绕间隙部分（30）彼此接合，使得接合部分（40）形成为基本上围绕间隙部分（30），从而将间隙部分 （30）。

    Nanoparticle Vibration and Acceleration Sensors
    47.
    发明申请
    Nanoparticle Vibration and Acceleration Sensors 审中-公开
    纳米颗粒振动和加速度传感器

    公开(公告)号：US20070138583A1

    公开(公告)日：2007-06-21

    申请号：US11561410

    申请日：2006-11-19

    Applicant: Eran Ofek ,  Noel Axelrod ,  Amir Lichtenstein ,  Vered Pardo-Yissar

    Inventor： Eran Ofek ,  Noel Axelrod ,  Amir Lichtenstein ,  Vered Pardo-Yissar

    IPC: H01L29/84

    CPC classification number: G01H11/06 ,  B82Y5/00 ,  B82Y15/00 ,  B82Y30/00 ,  G01N33/54373 ,  G01P15/0802 ,  G01P15/0894 ,  G01P15/12 ,  G01P15/123 ,  G01P2015/0828

    Abstract: Nanoscale acceleration and vibration sensors comprise a thin beam attached to a first substrate, being generally suspended over the first substrate by a cantilevered attachment. The thin beam functions as a second substrate for a coating that has a resistivity that varies with strain in the beam. The coating comprises an ordered array of conductive nanoparticles coupled to the substrate either by a thin polymeric layer or a columnar spacer that is a molecular species. The polymer or columnar spacers preferably have a thickness that is at least two times the diameter of the conductive nanoparticles. A circuit to measure the resistance of the coating is formed on or with the beam substrate. The sensor may deploy an array of beam having different dimensions to represent a range of resonant frequencies that can be simultaneously detected and resolved. The sensor may deploy multiple beams of the same dimensions to provide redundancy in the case of partial device failure.

    Abstract translation: 纳米级加速度和振动传感器包括附接到第一基底的细梁，其通过悬臂连接件一般悬挂在第一基底上。 薄光束用作涂层的第二衬底，其具有随着光束中的应变而变化的电阻率。 该涂层包括通过薄聚合物层或作为分子种类的柱状间隔物而与基底偶联的导电纳米颗粒的有序阵列。 聚合物或柱状隔离物优选具有至少是导电纳米颗粒直径的两倍的厚度。 用于测量涂层电阻的电路形成在光束衬底上或与光束衬底上。 传感器可以部署具有不同尺寸的波束阵列，以表示可同时检测和解决的谐振频率的范围。 在部分设备故障的情况下，传感器可以部署相同尺寸的多个波束以提供冗余。

    Accelerometer with cantilever and magnetic field detector
    48.
    发明授权
    Accelerometer with cantilever and magnetic field detector 失效
    具有悬臂和磁场检测器的加速度计

    公开(公告)号：US07219549B2

    公开(公告)日：2007-05-22

    申请号：US11084818

    申请日：2005-03-21

    Applicant: Yoshinobu Honkura ,  Michiharu Yamamoto ,  Yoshiaki Koutani ,  Masaki Mori ,  Eiji Kako ,  Kouei Genba ,  Takumi Asano ,  Naoki Ishikawa

    Inventor： Yoshinobu Honkura ,  Michiharu Yamamoto ,  Yoshiaki Koutani ,  Masaki Mori ,  Eiji Kako ,  Kouei Genba ,  Takumi Asano ,  Naoki Ishikawa

    IPC: G01P15/08

    CPC classification number: G01P1/006 ,  G01P1/023 ,  G01P15/105 ,  G01P15/18 ,  G01P2015/0828

    Abstract: An accelerometer for measuring the displacement of a magnet body using magnetic detecting elements is provided, the accelerometer having superior measurement accuracy by suppressing influence of a peripheral magnetic field. The accelerometer has detecting units each having a cantilever which is elastically deformed so as to rotate around a fixed end thereof, a magnet body provided at a free end of the cantilever, and a magnetic detecting head portion disposed outside the rotation region of the cantilever. In order to correct detection signals output from the magnetic detecting head portions, the accelerometer has peripheral magnetic field detecting portions for measuring a peripheral magnetic field acting on the magnetic detecting head portions and the magnet bodies.

    Abstract translation: 提供了一种使用磁检测元件测量磁体的位移的加速度计，该加速度计通过抑制周边磁场的影响而具有优异的测量精度。 加速度计具有检测单元，每个检测单元具有弹性变形以围绕其固定端旋转的悬臂，设置在悬臂的自由端的磁体和设置在悬臂的旋转区域的外侧的磁性检测头部。 为了校正从磁检测头部输出的检测信号，加速度计具有用于测量作用在磁检测头部和磁体上的周边磁场的周边磁场检测部。

    Three axis accelerometer with variable axis sensitivity
    49.
    发明申请
    Three axis accelerometer with variable axis sensitivity 失效
    具有可变轴灵敏度的三轴加速度计

    公开(公告)号：US20060230829A1

    公开(公告)日：2006-10-19

    申请号：US11105474

    申请日：2005-04-14

    Applicant: Douglas Byrd

    Inventor： Douglas Byrd

    IPC: G01P15/00

    CPC classification number: G01P15/18 ,  G01P15/097 ,  G01P2015/0828

    Abstract: The accelerometer includes an inertial mass, a fixed base and at least one or more supports/sensors for supporting the mass from the base rendering the support system statically indeterminate. The supports/sensors are preferably double-ended dual beam tuning forks suspended between mounting pads and vibrated by an oscillator. By adding one or more supports/sensors beyond those supports/sensors necessary for a statically determinate support system, the support system is rendered statically indeterminate and therefore sensitive in one or more directions.

    Abstract translation: 加速度计包括惯性质量块，固定基座和至少一个或多个支撑/传感器，用于从基座支撑质量，从而使得支撑系统静止不动。 支撑/传感器优选是悬挂在安装焊盘之间并由振荡器振动的双端双梁调谐叉。 通过在静态确定的支持系统所需的支撑/传感器之外增加一个或多个支撑/传感器，支撑系统呈现静态不确定性，因此在一个或多个方向上敏感。

    BI-DIRECTIONAL RELEASED-BEAM SENSOR
    50.
    发明申请
    BI-DIRECTIONAL RELEASED-BEAM SENSOR 有权
    双向释放光束传感器

    公开(公告)号：US20060138573A1

    公开(公告)日：2006-06-29

    申请号：US11024192

    申请日：2004-12-28

    Applicant: Joseph McAlexander

    Inventor： Joseph McAlexander

    IPC: H01L21/00 ,  H01L29/84 ,  H01L23/48

    CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

    Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

    Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

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