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210 条记录 (耗时 0.017 秒)

    Substrate supporting apparatus
    41.
    发明授权
    Substrate supporting apparatus 有权
    基板支撑装置

    公开(公告)号：US07275749B2

    公开(公告)日：2007-10-02

    申请号：US10751478

    申请日：2004-01-06

    申请人： Minoru Matsuzawa ,  Tatsuro Yoshida

    发明人： Minoru Matsuzawa ,  Tatsuro Yoshida

    IPC分类号： B23B31/12

    CPC分类号： H01L21/6838 ,  H01L21/68728 ,  Y10T279/11 ,  Y10T279/17231 ,  Y10T279/18

    摘要： A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2, a rotatable chuck 3 which is disposed in the housing 2, which is provided at its central portion with a hollow 12 and which supports a substrate 6, and a cylindrical nozzle member 4 which is disposed in the housing 2, which has a nozzle hole 7 and which can vertically move in the hollow 12. A nozzle hole 7 is formed in a central portion of the nozzle member 4. Gas is discharged from a gas source 8 through the nozzle hole 7, thereby holding the substrate 6 by an upper surface of the chuck 3 in a non-contact state. When the substrate 6 is to be detached, the nozzle member 4 is moved upward while discharging gas from the nozzle hole 7, thereby floating the substrate 6.

    摘要翻译： 公开了一种用于通过伯努利定理支持处于非接触状态的衬底或晶片的衬底支撑装置。 基板支撑装置1包括壳体2，设置在壳体2中的可旋转卡盘3，其在其中央部分设置有中空部12并支撑基板6，以及圆柱形喷嘴构件4，其设置在 壳体2具有喷嘴孔7并且可以在中空部12中垂直移动。 喷嘴孔7形成在喷嘴构件4的中央部。 气体通过喷嘴孔7从气体源8排出，由此卡盘3的上表面以非接触状态保持基板6。 当要拆下基板6时，喷嘴构件4在从喷嘴孔7排出气体的同时向上移动，从而使基板6浮起。

    Method of forming a hard carbon film over an inner surface of a guide bush using a jig
    43.
    发明授权
    Method of forming a hard carbon film over an inner surface of a guide bush using a jig 失效
    使用夹具在导套的内表面上形成硬质碳膜的方法

    公开(公告)号：US6117496A

    公开(公告)日：2000-09-12

    申请号：US262918

    申请日：1999-03-05

    申请人： Osamu Sugiyama ,  Yukio Miya ,  Ryota Koike ,  Takashi Toida ,  Toshiichi Sekine

    发明人： Osamu Sugiyama ,  Yukio Miya ,  Ryota Koike ,  Takashi Toida ,  Toshiichi Sekine

    IPC分类号： C23C16/02 ,  C23C16/04 ,  C23C16/26 ,  C23C16/503 ,  C23C16/509 ,  H05H1/24

    CPC分类号： C23C16/0281 ,  C23C16/045 ,  C23C16/26 ,  C23C16/503 ,  C23C16/509 ,  Y10S279/906 ,  Y10S427/104 ,  Y10T279/17231 ,  Y10T279/18 ,  Y10T279/29 ,  Y10T82/2518 ,  Y10T82/2521

    摘要： A hard carbon film is formed over an inner surface of a guide bush including the steps of fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.

    摘要翻译： 在引导衬套的内表面上形成硬碳膜，包括以下步骤：通过辅助电极绝缘部件固定辅助电极支撑部件，辅助电极支撑部件用于支撑用于在引导衬套的中心孔中形成膜的夹具的辅助电极 将辅助电极配置成与中心孔的轴线对准，以面对内表面，设置腿，以及固定在腿上的第一电极板，第二电极板和绝缘构件放置在 将引导衬套放置在与电源电接触的第一电极板的真空容器的底部，同时从辅助电极绝缘构件突出的辅助电极支撑构件的突起与第二电极板电接触。 辅助电极通过辅助电极支撑构件，第二电极板，支腿和真空容器接地，抽空真空容器后，将含碳气体引入真空容器中，并在真空容器中产生等离子体 通过第一电极板从电源向引导衬套提供电力。

    Bone vise
    45.
    发明授权
    Bone vise 失效
    骨虎钳

    公开(公告)号：US4786063A

    公开(公告)日：1988-11-22

    申请号：US106054

    申请日：1987-10-07

    申请人： John A. Engelhardt ,  Richard R. Tarr

    发明人： John A. Engelhardt ,  Richard R. Tarr

    IPC分类号： A61B17/28 ,  A61B17/88 ,  B25B1/20 ,  B25B5/04 ,  B25B5/08 ,  B25B5/10 ,  B25B5/14

    CPC分类号： B25B5/14 ,  A61B17/28 ,  A61B17/88 ,  B25B1/20 ,  B25B5/04 ,  B25B5/08 ,  B25B5/10 ,  Y10T279/17231 ,  Y10T279/18

    摘要： A bone vise for holding a bone or bone fragment immobile during surgery to enable a surgeon to perform desired sculpting or other operations thereon. The vise includes a planar base member with an integral threaded post upstanding from its central portion and a platform threadedly received on the post. A plurality of elongated gripper members are pivotally mounted intermediate their ends on the platform about axes which are tangent to a circle whose center lies within a bone receiving and engaging region. Each gripper member has a toothed surface at one end adjacent the bone receiving and engaging region and a cam surface at the opposite end weight biased into engagement with the base member. Rotation of the platform in one direction causes movement thereof away from the base member and enlargement of the bone receiving and holding region for insertion or removal of the bone. Rotation of the platform in the opposite direction causes movement thereof toward the base member and reduction of the bone receiving and holding region for gripping of the bone by the toothed surfaces of the gripping members. The base member may include a bearing surface with a low coefficient of friction for engagement by the cam surfaces. At least one handle member integral with the base member may be provided for lifting the base member and for maintaining the base member in a desired position.

    摘要翻译： 用于在手术期间保持骨或骨片不能移动的骨钳，以使外科医生能够对其进行期望的雕刻或其他操作。 台钳包括具有从其中心部分直立的整体螺纹柱的平面基部构件和螺纹地接收在柱上的平台。 多个细长的夹持构件在它们的端部之间枢转地安装在平台上，围绕与中心位于骨接收和接合区域内的圆相切的轴线。 每个夹持构件在与骨接收和接合区域相邻的一端具有齿形表面，并且在相对端配重处的凸轮表面偏置成与基部构件接合。 平台在一个方向上的旋转引起其远离基体的移动，并且用于插入或移除骨的骨接收和保持区域的扩大。 平台在相反方向上的旋转引起其向基部构件的移动，并且通过夹持构件的齿形表面减小用于夹持骨骼的骨接收和保持区域。 基部构件可以包括具有低摩擦系数的支承表面，用于通过凸轮表面接合。 可以提供与基部构件成一体的至少一个把手构件用于提升基座构件并将基座构件保持在期望的位置。

    Chuck apparatus
    46.
    发明授权
    Chuck apparatus 失效
    CHUCK装置

    公开(公告)号：US3912287A

    公开(公告)日：1975-10-14

    申请号：US45905074

    申请日：1974-04-08

    申请人： STEINMETZ JOHN C

    发明人： STEINMETZ JOHN C

    IPC分类号： B23B31/12 ,  B24B3/24

    CPC分类号： B24B3/247 ,  B23B31/1261 ,  Y10T279/17231 ,  Y10T279/18 ,  Y10T279/26 ,  Y10T279/35

    摘要： Chuck apparatus for holding a cutting tool or other work-piece for rotational movement about an axis. The chuck apparatus comprises generally a frame disposed around the axis and at least three jaws each having an outer portion and an inner gripping portion. The jaws are pivotally mounted at their outer portions on the frame. The jaws are spaced around the axis and extend generally inwardly toward the axis so that the inner gripping portions will converge toward the axis when the jaws are pivoted. The chuck further comprises means for controlling the pivotal movement of the jaws toward and away from the axis so that each of the gripping portions remains essentially the same distance from the axis as the other gripping portions over a gripping range for the chuck apparatus. The apparatus is particularly adapted to hold a workpiece such as a twist drill which has an irregular or discontinuous outer surface, the jaws having a length in the direction of the axis to provide sufficient points of contact between the jaws and the helical flutes of the drill to accurately center the drill and firmly hold it in that position.