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公开(公告)号:US20200223687A1
公开(公告)日:2020-07-16
申请号:US16284735
申请日:2019-02-25
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yuan-Sheng LIN , Jung-Hao CHANG , Chang-Sheng HSU , Weng-Yi CHEN
Abstract: A MEMS structure includes a substrate, a dielectric layer, a membrane, a backplate, and a blocking layer. The substrate has a through-hole. The dielectric layer is disposed on the substrate and has a cavity in communication with the through-hole. The membrane has at least one vent hole, is embedded in the dielectric layer and together with the dielectric layer defines a first chamber that communicates with the through-hole. The backplate is disposed on the dielectric layer. One end of the blocking layer is embedded in the dielectric layer, and the other end of the blocking layer extends into the cavity; the blocking layer is spatially isolated from the membrane and at least partially overlaps with the at least one vent hole.
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公开(公告)号:US10714607B1
公开(公告)日:2020-07-14
申请号:US16294893
申请日:2019-03-06
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Huai-Tzu Chiang , Sheng-Hao Lin , Kuan-Hung Liu
IPC: H01L31/0256 , H01L29/778 , H01L29/207
Abstract: According to an embodiment of the present invention, a high electron mobility transistor (HEMT) includes: a buffer layer on a substrate; a carrier transit layer on the buffer layer; a carrier supply layer on the carrier transit layer; a gate electrode on the carrier supply layer; and a source and a drain adjacent to two sides of the gate electrode. Preferably, the carrier supply layer comprises a concentration gradient of aluminum (Al).
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公开(公告)号:US10707225B2
公开(公告)日:2020-07-07
申请号:US16792847
申请日:2020-02-17
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
IPC: H01L27/115 , H01L27/11568 , H01L29/792 , H01L21/28
Abstract: A method for fabricating a semiconductor memory device is disclosed. A substrate having a main surface is provided. A memory gate is formed on the main surface of the substrate. The memory has a first sidewall and a second sidewall opposite to the first sidewall. A control gate is formed in proximity to the memory gate. The control gate has a third sidewall directly facing the second sidewall, and a fourth sidewall opposite to the third sidewall. A gap is formed between the second sidewall of the memory gate and the third sidewall of the control gate. A first single spacer structure is formed on the first sidewall of the memory gate and a second single spacer structure on the fourth sidewall of the control gate. A gap-filling layer is formed to fill up the gap.
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公开(公告)号:US10706914B2
公开(公告)日:2020-07-07
申请号:US16019521
申请日:2018-06-26
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chun-Yen Tseng , Ching-Cheng Lung , Yu-Tse Kuo , Chun-Hsien Huang , Hsin-Chih Yu , Shu-Ru Wang
IPC: G11C11/00 , G11C11/412 , G11C11/419 , H01L43/08 , G11C7/12 , H01L27/11 , H01L43/02 , H01L43/10 , G01R33/09 , G11C8/08
Abstract: A static random access memory (SRAM) structure includes a first inverter comprising a first pull-up transistor and a first pull-down transistor, a second inverter comprising a second pull-up transistor and a second pull-down transistor, a first pass transistor coupled to the first inverter, and a second pass transistor coupled to the second inverter. Preferably, the first inverter is coupled to a first tunnel magnetoresistance (TMR) structure and the second inverter is coupled to a second TMR structure.
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公开(公告)号:US20200212030A1
公开(公告)日:2020-07-02
申请号:US16255786
申请日:2019-01-23
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chung-Liang Chu , Chih-Hsien Tang , Yu-Ruei Chen , Ya-Huei Tsai , Rai-Min Huang , Chueh-Fei Tai
Abstract: A layout pattern for magnetoresistive random access memory (MRAM) includes: a first magnetic tunneling junction (MTJ) pattern on a substrate; a second MTJ pattern adjacent to the first MTJ pattern; and a first metal interconnection pattern between the first MTJ pattern and the second MTJ pattern, wherein the first MTJ pattern, the first metal interconnection pattern, and the second MTJ pattern comprise a staggered arrangement.
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公开(公告)号:US20200211899A1
公开(公告)日:2020-07-02
申请号:US16811830
申请日:2020-03-06
Applicant: United Microelectronics Corp.
Inventor: Purakh Raj Verma , Kuo-Yuh Yang
IPC: H01L21/8249 , H01L21/768 , H01L21/84 , H01L27/06 , H01L27/12 , H01L29/66
Abstract: A semiconductor structure including a substrate, a complementary metal oxide semiconductor (CMOS) device, a bipolar junction transistor (BJT), and a first interconnect structure is provided. The substrate has a first side and a second side opposite to each other. The CMOS device includes an NMOS transistor and a PMOS transistor disposed on the substrate. The BJT includes a collector, a base and an emitter. The collector is disposed in the substrate. The base is disposed on the first side of the substrate. The emitter is disposed on the base. A top surface of a channel of the NMOS transistor, a top surface of a channel of the PMOS transistor and a top surface of the collector of the BJT have the same height. The first interconnect structure is electrically connected to the base at the first side of the substrate and extends to the second side of the substrate.
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公开(公告)号:US10700202B2
公开(公告)日:2020-06-30
申请号:US16172856
申请日:2018-10-28
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuang-Hsiu Chen , Sung-Yuan Tsai , Chi-Hsuan Tang , Kai-Hsiang Wang , Chao-Nan Chen , Shi-You Liu , Chun-Wei Yu , Yu-Ren Wang
IPC: H01L29/76 , H01L29/78 , H01L29/165 , H01L29/66 , H01L21/265
Abstract: A semiconductor device is disclosed. The semiconductor device comprises a substrate, a gate structure disposed on the substrate, a spacer disposed on the substrate and covering a sidewall of the gate structure, an air gap sandwiched between the spacer and the substrate, and a source/drain region disposed in the substrate and having a faceted surface exposed from the substrate, wherein the faceted surface borders the substrate on a boundary between the air gap and the substrate.
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公开(公告)号:US10700126B2
公开(公告)日:2020-06-30
申请号:US16167485
申请日:2018-10-22
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ting-Hsiang Huang , Yi-Chung Sheng , Sheng-Yuan Hsueh , Kuo-Hsing Lee , Chih-Kai Kang
Abstract: A magnetic random access memory (MRAM) includes device strings coupled in parallel, each comprising magnetic tunnel junctions (MTJs) coupled in serial, wherein a quantity of the MTJs of each of the device strings is equal to a quantity of the device strings, and an equivalent resistance (Req) of the MTJs is equal to an average of the sum of a high resistance of one of the MTJs and a low resistance of another MTJ.
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公开(公告)号:US10692785B2
公开(公告)日:2020-06-23
申请号:US16057826
申请日:2018-08-08
Inventor: Chien-Hao Chen , Chien-Wei Huang , Chia-Hung Wang , Sho-Shen Lee
Abstract: A semiconductor pattern for monitoring overlay and critical dimension at post-etching stage is provided in the present invention, which include a first inverted-T shaped pattern with a base portion and a middle portion extending from the base portion and a second pattern adjacent and spaced apart from the base portion of the first inverted-T shaped pattern, wherein the first inverted-T shaped pattern and the second pattern are composed of a plurality of spacer patterns spaced apart from each other.
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公开(公告)号:US10686079B1
公开(公告)日:2020-06-16
申请号:US16243014
申请日:2019-01-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Yi Wang , Cheng-Pu Chiu , Huang-Ren Wei , Tien-Shan Hsu , Chi-Sheng Tseng , Yao-Jhan Wang
IPC: H01L29/76 , H01L29/78 , H01L29/423 , H01L29/66 , H01L29/49 , H01L29/417 , H01L21/3213 , H01L21/8234
Abstract: A fin field effect transistor structure with particular gate appearance is provided in this disclosure, featuring a fin on a substrate and a gate on the substrate and traversing over the fin, wherein the fin is divided into an upper portion on a top surface of the fin and a lower portion on two sides of the fin, and the lower portion of the gate has protrusions laterally protruding in said first direction at positions abutting to the fin.
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