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公开(公告)号：US20180204753A1
公开(公告)日：2018-07-19
申请号：US15750379
申请日：2016-07-12
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Toshihiro KAWAI , Yasushi TANIYAMA , Munekazu KOMIYA , Takashi SHIGETA
IPC: H01L21/677 , H01L21/673 , H01L21/67
Abstract: A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.
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公开(公告)号：US20180072211A1
公开(公告)日：2018-03-15
申请号：US15565634
申请日：2016-02-04
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Masahiko Kato , Yosuke Yamada
IPC: B60P1/02
Abstract: Provided is a cargo carrying vehicle including; an elevating table 2 elevatable in the vertical direction; a plurality of rotating bodies 31 located on the elevating table 2 and configured to rotate so as to carry a cargo C in a conveyance direction X that is a direction toward a loading-unloading part of an aircraft; and a support 32 configured to support the plurality of rotating bodies 31, wherein the support 32 and the plurality of rotating bodies 31 constitute the conveying unit 3, and the conveying unit 3 is movable on the elevating table 2 in a position adjusting direction Y that is a direction intersecting the vertical direction and the conveyance direction.
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公开(公告)号：US20170194850A1
公开(公告)日：2017-07-06
申请号：US15463247
申请日：2017-03-20
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Hiroshi Nakagawa , Takayoshi Fujii , Takashi Fukunaga , Yasuhiro Sakai , Takashi Onoue
IPC: H02K33/18
CPC classification number: H02K33/18 , H02K33/16 , H02K41/035
Abstract: The linear actuator includes an inner core (2), and an outer core (3) provided outside the inner core in a radial direction while being supported by a pair of flat springs (41 and 42). Permanent magnets (23 and 24) are formed at one of the inner core and the outer core, and magnetic pole portions (31a and 32a) are formed at the other of the inner core and the outer core to face the permanent magnet with predetermined gaps formed therebetween. Spacers (71 and 72) are respectively provided between the inner core and the flat springs, abutting portions are respectively configured by abutting facing surfaces of the spacers and the inner core and facing surfaces of the spacers and the flat springs adjacent to the spacers in the axial direction, and at least an engagement portion including a recess and a protrusion are arranged at the abutting portions.
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公开(公告)号：USD772734S1
公开(公告)日：2016-11-29
申请号：US29529016
申请日：2015-06-03
Applicant: Sinfonia Technology Co., Ltd.
Designer： Hidetoshi Katada , Takenori Motoori
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公开(公告)号：US09318983B2
公开(公告)日：2016-04-19
申请号：US14560406
申请日：2014-12-04
Applicant: SINFONIA TECHNOLOGY CO., LTD. , IHI AEROSPACE CO., LTD.
Inventor： Yoshito Ohta , Keisuke Onishi , Hitoshi Oyori
CPC classification number: H02P6/002 , H02P6/28 , H02P21/22 , H02P29/0243
Abstract: A 0-axis current calculator 7 configured to calculate a target value of the 0-axis current by setting the current of the open phase to be zero when one of the phases becomes open, or determines that the target value of the 0-axis current is zero when there is no open phase is provided. Based on the target values of the d-axis current and the q-axis current, the target value of the 0-axis current calculated by the 0-axis current calculator 7, and the d-axis current, the q-axis current, and the 0-axis current transformed by the d-q-0 transformer 8, the current supplied to each phase of the motor are controlled.
Abstract translation: 0轴电流计算器7，被配置为当其中一个相位变为断开时，通过将开路相位的电流设置为零来计算0轴电流的目标值，或者确定0轴电流的目标值 当没有提供开放相位时为零。 基于d轴电流和q轴电流的目标值，由0轴电流计算器7计算的0轴电流的目标值和d轴电流，q轴电流， 和由dq-0变压器8变换的0轴电流，控制提供给电动机各相的电流。
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Patent Agency Ranking
公开(公告)号：US09276508B2
公开(公告)日：2016-03-01
申请号：US14289760
申请日：2014-05-29
Inventor： Akira Nakazumi , Yusuke Kamimura , Hiroyuki Suminaga , Takeshi Tomizaki , Hideaki Moriya
CPC classification number: H02P21/0021 , H02P6/28 , H02P27/085 , Y02P80/116
Abstract: An object of the present invention is to provide an inverter device for driving an electric motor, which allows control stability and efficiency to be ensured over a wide region of the speed of the electric motor. The inverter device includes a rotational-speed detection section which detects a rotational speed of the electric motor, a carrier-frequency calculation section which calculates a carrier frequency on the basis of the detected rotational speed, and a carrier-frequency switching section which switches, on the basis of the calculated carrier frequency, the carrier frequency used for performing PWM control on the electric motor. The carrier-frequency calculation section calculates, as the carrier frequency, a frequency increased with an increase in the electric-motor rotational speed detected by the rotational-speed detection section.
Abstract translation: 本发明的目的是提供一种用于驱动电动机的逆变器装置，其能够在电动机的宽度范围内确保控制的稳定性和效率。 逆变器装置包括检测电动机的转速的转速检测部，基于检测出的转速来计算载波频率的载波频率计算部;以及载波频率切换部， 基于所计算的载波频率，用于对电动机执行PWM控制的载波频率。 载波频率计算部分计算随着由转速检测部分检测到的电动机转速的增加而增加的频率作为载波频率。
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公开(公告)号：US09159600B2
公开(公告)日：2015-10-13
申请号：US13740721
申请日：2013-01-14
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Takumi Mizokawa , Yasuyoshi Kitazawa
IPC: H01L21/677 , H01L21/67
CPC classification number: H01L21/67739 , H01L21/67201
Abstract: The wafer transport apparatus prevents contaminant deposited on an unprocessed wafer from adhering to a processed wafer. Carrying-in load port 2A is loaded with a FOUP 1 storing an unprocessed wafer W1. Carrying-in chamber 3A has a transport robot 4A which takes out the unprocessed wafer W1 from the FOUP 1. Carrying-in load lock 5A is accessed by the transport robot 4A from the carrying-in chamber 3A side. Carrying-out load port 2B is loaded with the FOUP 1 that can store a processed wafer W2. Carrying-out chamber 3B has a transport robot 4B which passes the processed wafer W2 to the FOUP 1. Carrying-out load lock 5B is accessed by the transport robot 4B from the carrying-out chamber 3B side. The carrying-in chamber 3A and carrying-out chamber 3B are separated from each other. The carrying-in load lock 5A and carrying-out load lock 5B are arranged on different stages.
Abstract translation: 晶片输送装置防止沉积在未处理的晶片上的污染物粘附到经处理的晶片上。 载入装载口2A装载有存储未加工的晶片W1的FOUP1。 搬运室3A具有从FOUP1取出未处理的晶片W1的搬运机械手4A。搬运机械手4A从搬运室3A侧接收搬运装载锁5A。 执行装载端口2B装载有可存储经处理的晶片W2的FOUP 1。 搬运室3B具有将处理后的晶片W2通过FOUP1的搬送机械手4B。搬运机械手4B从搬送室3B侧进入搬运装载锁5B。 搬入室3A和搬出室3B彼此分离。 承载加载锁5A和执行装载锁5B布置在不同的级上。
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公开(公告)号：US08764085B2
公开(公告)日：2014-07-01
申请号：US13932663
申请日：2013-07-01
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Yuji Urabe , Yasumichi Mieno
IPC: B66C1/42
CPC classification number: B25J15/0014 , H01L21/68707 , Y10S901/31
Abstract: A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly to a central direction of the workpiece are formed; a proximal end side stationary blocks which are provided on a side of a proximal end of the workpiece retaining base, and in which upward stationary tilt faces tilting downward toward the central direction of the workpiece are formed; and a movable block which is arranged at a position proximal to the proximal end side stationary blocks, and is capable of advancing to or retracting from a side of the distal end side stationary blocks with the workpiece being held between the blocks, and in which a downward movable tilt face tilting upwardly toward the central direction of the workpiece is formed.
Abstract translation: 一种夹紧装置，包括：前端侧固定块，其设置在工件保持基座的远端的一侧，并且其中固定的倾斜面向下倾斜到工件的中心方向; 形成在工件保持基座的基端的一侧设置的朝向工件的中心方向向下倾斜向上的固定倾斜面的基端侧固定块， 以及可动块，其布置在靠近所述近端侧固定块的位置，并且能够在所述工件保持在所述块之间的情况下从所述远端侧固定块的一侧前进或后退，其中 形成朝向工件的中心方向向上倾斜的向下可动倾斜面。
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公开(公告)号：US12055220B2
公开(公告)日：2024-08-06
申请号：US16980638
申请日：2019-03-13
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshihiro Kawai , Gengoro Ogura
IPC: B23P19/00 , F16J15/10 , H01L21/673
CPC classification number: F16J15/108 , H01L21/67376
Abstract: A housing is made sealable even when the rigidity of a frame member and a cover member is not high. In an EFEM, a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing. The housing includes a frame member assembled so as to form an opening, a cover member attached to the frame member so as to cover the opening, and a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening. The frame member and the cover member are formed of a sheet metal. The seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.
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公开(公告)号：US12002693B2
公开(公告)日：2024-06-04
申请号：US17959247
申请日：2022-10-03
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshihiro Kawai , Gengoro Ogura
CPC classification number: H01L21/67201 , B01D46/0041 , H01L21/67196 , B01D46/10 , B01D2273/30
Abstract: Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port 4, a housing configured to define, in the housing, a transfer chamber closed by connecting the load port 4 to an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipe 49 for discharging a gas in the transfer chamber. The load port 4 includes an opening/closing mechanism 54 capable of opening and closing a lid 101 of a mounted FOUP 100, and an accommodation chamber 60 kept in communication with the transfer chamber via a slit 51b and configured to accommodate a part of the opening/closing mechanism 54. The discharge pipe 49 is connected to the accommodation chamber 60 to discharge the gas in the transfer chamber via the accommodation chamber 60.
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