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    Spatial light modulators with light blocking and absorbing areas
    51.
    发明授权
    Spatial light modulators with light blocking and absorbing areas 有权
    具有遮光和吸收区域的空间光调制器

    公开(公告)号：US06952301B2

    公开(公告)日：2005-10-04

    申请号：US10305631

    申请日：2002-11-26

    申请人： Andrew G. Huibers

    发明人： Andrew G. Huibers

    IPC分类号： G02B26/00

    CPC分类号： B82Y30/00

    摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.

    摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板之一粘合在一起的两个基板。 如果需要，在沉积吸气剂材料和/或固体或液体润滑剂在一个或两个晶片上之后，两个基底可以在晶片层上结合。 在本发明的一个实施例中，其中一个衬底是透光衬底，并且在透光衬底上设置优选为光吸收层的遮光层，以选择性地阻挡光通过衬底。 光阻挡层可以形成为图案，例如用于阻挡光进入相邻微镜之间的间隙的栅格或条带。

    Micromirror Array Assembly with In-Array Pillars
    53.
    发明申请
    Micromirror Array Assembly with In-Array Pillars 有权
    具有阵列支柱的微镜阵列组件

    公开(公告)号：US20100302618A1

    公开(公告)日：2010-12-02

    申请号：US12853411

    申请日：2010-08-10

    申请人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

    发明人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

    IPC分类号： G02B26/00 ,  B32B37/14 ,  B05D5/06

    CPC分类号： G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

    摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

    摘要翻译： 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

    System and Method for Grouped Pixel Addressing
    54.
    发明申请
    System and Method for Grouped Pixel Addressing 有权
    用于分组像素寻址的系统和方法

    公开(公告)号：US20100073397A1

    公开(公告)日：2010-03-25

    申请号：US12236379

    申请日：2008-09-23

    申请人： Andrew G. Huibers ,  Michael T. Davis ,  Henry W. Neal ,  James N. Hall

    发明人： Andrew G. Huibers ,  Michael T. Davis ,  Henry W. Neal ,  James N. Hall

    IPC分类号： G09G5/02

    CPC分类号： G09G3/346 ,  G09G3/2022 ,  G09G2300/0439 ,  G09G2310/0235

    摘要： In accordance with the teachings of the present disclosure, a system and method for displaying an image are provided. In one embodiment, the method includes receiving a data stream representing a frame of an image. The data stream may indicate a first color pixel cluster corresponding to a first color and a second color pixel cluster corresponding to a second color. The first color pixel cluster and the second color pixel cluster may be displayed. The first color pixel cluster may be different from the second color pixel cluster.

    摘要翻译： 根据本公开的教导，提供了一种用于显示图像的系统和方法。 在一个实施例中，该方法包括接收表示图像帧的数据流。 数据流可以指示对应于第一颜色的第一颜色像素簇和对应于第二颜色的第二颜色像素簇。 可以显示第一颜色像素簇和第二颜色像素簇。 第一颜色像素簇可以不同于第二颜色像素簇。

    Projection display
    56.
    发明授权
    Projection display 有权

    公开(公告)号：US07300162B2

    公开(公告)日：2007-11-27

    申请号：US10857132

    申请日：2004-05-28

    申请人： Andrew G. Huibers

    发明人： Andrew G. Huibers

    IPC分类号： G03B21/28

    CPC分类号： G03B21/28 ,  G02B26/0841 ,  Y10S359/904

    摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

    Micromirror array
    57.
    发明授权
    Micromirror array 有权
    微镜阵列

    公开(公告)号：US07167297B2

    公开(公告)日：2007-01-23

    申请号：US10857059

    申请日：2004-05-28

    申请人： Andrew G. Huibers

    发明人： Andrew G. Huibers

    IPC分类号： G02B26/00 ,  G02B26/08 ,  G02F1/00

    CPC分类号： G03B21/28 ,  G02B26/0841 ,  Y10S359/904

    摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

    摘要翻译： 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。

    Micromirrors with OFF-angle electrodes and stops
    58.
    发明授权
    Micromirrors with OFF-angle electrodes and stops 有权

    公开(公告)号：US07099065B2

    公开(公告)日：2006-08-29

    申请号：US10437776

    申请日：2003-05-13

    申请人： Satyadev Patel ,  Andrew G. Huibers ,  Christopher J. Spindt ,  Peter J. Heureux

    发明人： Satyadev Patel ,  Andrew G. Huibers ,  Christopher J. Spindt ,  Peter J. Heureux

    IPC分类号： G02B26/00

    CPC分类号： B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  C10L1/026 ,  G02B26/0841

    摘要： A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.

    Light recapture projection system
    59.
    发明授权
    Light recapture projection system 有权

    公开(公告)号：US07055961B2

    公开(公告)日：2006-06-06

    申请号：US11169545

    申请日：2005-06-28

    申请人： Andrew G. Huibers

    发明人： Andrew G. Huibers

    IPC分类号： G03B21/14 ,  G03B21/28 ,  G03B21/00 ,  F21V7/00 ,  G02B5/22

    CPC分类号： H04N9/315 ,  G02B26/008 ,  G03B11/00 ,  G03B21/14 ,  G03B33/08 ,  H04N9/3114

    摘要： A projection system is disclosed comprising a light source, a first reflector proximate the light source, a second reflector proximate the light source, a light pipe, a color sequencing device a spatial light modulator and a target. The color sequencing device preferably directs three or more colors onto the spatial light modulator at a time. Some light is reflected from the color sequencing device back through the light pipe and is again reflected at the reflector at the light source before returning to the light pipe and color sequencing device. The brightness of the projection system is thereby increased.

    Micromirror array for projection TV
    60.
    发明授权
    Micromirror array for projection TV 有权
    投影电视微镜阵列

    公开(公告)号：US07023606B2

    公开(公告)日：2006-04-04

    申请号：US10857058

    申请日：2004-05-28

    申请人： Andrew G. Huibers

    发明人： Andrew G. Huibers

    IPC分类号： G02B26/00 ,  G02B26/08 ,  G02F1/29 ,  G02F1/00

    CPC分类号： G03B21/28 ,  Y10S359/904

    摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

    摘要翻译： 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。