公开(公告)号：US5369286A

公开(公告)日：1994-11-29

申请号：US225425

申请日：1994-04-08

Applicant: David Cheng

Inventor： David Cheng

IPC: G01B11/16 ,  G01B11/255 ,  G01B11/30 ,  H01L21/00 ,  G01V9/04

CPC classification number: H01L21/67288 ,  G01B11/16 ,  G01B11/255 ,  G01B11/306

Abstract: A method for measuring surface topography characterized by making multiple scans of the surface with a laser scanning unit and utilizing the multiple scans to create representations of the surface's topography. The surface topography data can also be used to calculate the compressive or tensile stress caused by a thin film applied to the surface of a semiconductor wafer. The apparatus of the present invention scans a laser beam across a surface in an x direction, and detects displacements of a reflected portion of the laser beam in a z direction. A pair of photodetectors are used to translate z direction displacements of the reflected beam into analog signals which are digitized and input into a microcomputer for analysis. The multiple scans of the surface are preferably accomplished by placing the workpiece on a pedestal which can be rotated to various angular positions.

Abstract translation: 一种用于测量表面形貌的方法，其特征在于用激光扫描单元对表面进行多次扫描，并利用多次扫描来创建表面的地形图。 表面形貌数据也可用于计算由施加到半导体晶片表面的薄膜引起的压缩或拉伸应力。 本发明的装置沿x方向扫描激光束的表面，并且检测激光束在z方向上的反射部分的位移。 一对光电探测器用于将反射光束的z方向位移转换为模拟信号，并将其数字化并输入微型计算机进行分析。 表面的多次扫描优选通过将工件放置在可旋转到各种角度位置的基座上来实现。

公开(公告)号：US5304248A

公开(公告)日：1994-04-19

申请号：US823942

申请日：1992-01-22

Applicant: David Cheng ,  Mei Cheng

Inventor： David Cheng ,  Mei Cheng

IPC: C23C14/50 ,  C23C16/00 ,  C23C16/04 ,  C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/00

CPC classification number: C23C16/45521 ,  C23C16/04 ,  C23C16/042 ,  C23C16/4585

Abstract: An improved apparatus for CVD processing is described wherein a wafer mounted on a vertically movable susceptor beneath a gas outlet or showerhead is raised into contact with a shield ring which normally rests on a ring support in the chamber. The shield ring engages the frontside edge of the wafer, lifting the shield ring off its support, when the susceptor and the wafer 10 are raised to a deposition position in the chamber. The shield ring, by engaging the frontside edge of the wafer, shields the edge of the top surface of the wafer, as well as the end edge and the backside of the wafer, during the deposition. Matching tapered edges, respectively, on the susceptor and the shield ring permit alignment of the shield ring with respect to the susceptor, and alignment of the wafer to the susceptor and the shield ring. Alignment means are also disclosed to circularly align the shield ring to its support in the chamber. Multi-unit shield rings permit the use of wider shield rings and prevent cracking of the shield ring due to thermal stresses caused by temperature differences near and away from the wafer during processing. These shield rings may also have tapered edges to ensure alignment of the rings with respect to each other.

Abstract translation: 描述了用于CVD处理的改进的装置，其中安装在气体出口或喷头下方的可垂直移动的基座上的晶片升高成与屏蔽环接触，屏蔽环通常位于室中的环支撑件上。 当基座和晶片10升高到腔室中的沉积位置时，屏蔽环接合晶片的前边缘，将屏蔽环从支撑件上提起。 通过接合晶片的前边缘的屏蔽环在沉积期间屏蔽晶片的顶表面的边缘以及晶片的端边缘和后侧。 在基座和屏蔽环上分别配合锥形边缘允许屏蔽环相对于基座对准，并且将晶片对准基座和屏蔽环。 还公开了对准装置，以将屏蔽环圆形对准其室中的支撑件。 多单元屏蔽环允许使用更宽的屏蔽环，并防止由于在处理期间靠近和远离晶片的温度差引起的热应力而导致的屏蔽环的开裂。 这些屏蔽环也可以具有锥形边缘以确保环相对于彼此的对准。

公开(公告)号：US4951601A

公开(公告)日：1990-08-28

申请号：US371700

申请日：1989-06-23

Applicant: Dan Maydan ,  Sasson Somekh ,  David N. Wang ,  David Cheng ,  Masato Toshima ,  Isaac Harari ,  Peter D. Hoppe

Inventor： Dan Maydan ,  Sasson Somekh ,  David N. Wang ,  David Cheng ,  Masato Toshima ,  Isaac Harari ,  Peter D. Hoppe

IPC: H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67167 ,  H01L21/67184 ,  H01L21/67201 ,  H01L21/67742 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139

Abstract: An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R-.theta. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.

Abstract translation: 公开了一种集成的模块化多室真空处理系统。 该系统包括一个加载锁定，可以包括一个外部盒式电梯和一个内部装载锁定晶片升降机，并且还包括围绕负载锁的周边的站，用于将一个，两个或几个真空处理室连接到负载锁定室。 机器人安装在装载锁中，并且利用同轴驱动系统，该系统通过双四杆连杆机构连接到末端执行器，用于将选定的Rθ运动传递给叶片，以在外部升降机，内部升降机 和各个处理室。 该系统独特地适用于实现各种类型的IC处理，包括蚀刻，沉积，溅射和快速热退火室，从而为使用不同工艺的多步骤顺序处理提供了机会。

公开(公告)号：US4911597A

公开(公告)日：1990-03-27

申请号：US89926

申请日：1987-08-25

Applicant: Dan Maydan ,  Sasson R. Somekh ,  Charles Ryan-Harris ,  Richard A. Seilheimer ,  David Cheng ,  Edward M. Abolnikov ,  Lance S. Reinke ,  J. Christopher Moran ,  Richard M. Catlin, Jr. ,  Robert B. Lowrance ,  Gregory W. Ridgeway

Inventor： Dan Maydan ,  Sasson R. Somekh ,  Charles Ryan-Harris ,  Richard A. Seilheimer ,  David Cheng ,  Edward M. Abolnikov ,  Lance S. Reinke ,  J. Christopher Moran ,  Richard M. Catlin, Jr. ,  Robert B. Lowrance ,  Gregory W. Ridgeway

IPC: H01L21/677 ,  B65G49/07 ,  H01L21/67 ,  H01L21/683 ,  H05K13/02

CPC classification number: H05K13/021 ,  H01L21/67 ,  Y10S414/13 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14 ,  Y10S414/141

Abstract: A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

Abstract translation: 晶片处理系统包括安装在负载锁中的自动装载机，用于在半导体处理室和装载锁之间的卸载位置之间提供批处理，盒到盒自动晶片传送。 该系统提供快速，无污染的半导体晶片装载和卸载。

公开(公告)号：US4819167A

公开(公告)日：1989-04-04

申请号：US040974

申请日：1987-04-20

Applicant: David Cheng ,  Wesley W. Zhang

Inventor： David Cheng ,  Wesley W. Zhang

IPC: B65G43/08 ,  G01B11/00 ,  G01N21/84 ,  G05D3/00 ,  H01L21/677 ,  H01L21/68 ,  G06F15/46 ,  B65H1/00 ,  G21K5/10

CPC classification number: H01L21/681 ,  H01L2223/54453 ,  Y10S414/135 ,  Y10S414/137

Abstract: A system and method for determining the precise location of a moving object such as a semiconductor wafer relative to a destination position, using an array of optical sensors positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points along the path of movement are used to calculate the center position of the wafer relative to the destination position.

公开(公告)号：US4466087A

公开(公告)日：1984-08-14

申请号：US223200

申请日：1981-01-08

Applicant: David Cheng

Inventor： David Cheng

IPC: G11B7/004 ,  G11B7/09 ,  G11B7/12 ,  G11B7/135

CPC classification number: G11B7/1381 ,  G11B7/004 ,  G11B7/09 ,  G11B7/0904 ,  G11B7/0908 ,  G11B7/0916 ,  G11B7/12

Abstract: A single semiconductor laser (10) is utilized in an optical system (2) to record and readback from a recording media such as a spinning disk (24). By means of a retro-reflecting light and optical system, the same optical path can be used not only for recording, but for readback of the recorded data on the recording media (24). A polarizing beam splitter (16) causes the light beam (8) to pass through an optical system whereby both focus error and tracking error as well as the data signal can be generated. By dithering the light beam across the recorded track in accordance with data signal, a tracking error signal is generated to cause the dithering motion of the galvanometer (20) to maintain its center tracking of the recorded information. By the use of a separate beam splitter (30), a focus error signal can be detected by means of error signals from complementary detectors S1, S2 to maintain accurate focus of the applied light beam on the recording media.

Abstract translation: 在光学系统（2）中使用单个半导体激光器（10）来记录和回读诸如旋转盘（24）的记录介质。 借助于回射光和光学系统，相同的光路不仅可用于记录，而且可用于在记录介质（24）上回读记录的数据。 偏振分束器（16）使光束（8）通过光学系统，由此可以产生聚焦误差和跟踪误差以及数据信号。 通过根据数据信号将光束抖动到记录的轨道上，产生跟踪误差信号，以使电流计（20）的抖动运动保持其记录信息的中心跟踪。 通过使用单独的分束器（30），可以通过来自互补检测器S1，S2的误差信号来检测聚焦误差信号，以将所施加的光束的精确焦点保持在记录介质上。

公开(公告)号：US4394667A

公开(公告)日：1983-07-19

申请号：US362361

申请日：1982-03-26

Applicant: David Cheng ,  Stephen T. Chai

Inventor： David Cheng ,  Stephen T. Chai

IPC: G11B7/085 ,  G11B7/08 ,  G11B17/00 ,  G11B17/34 ,  G06K15/02 ,  G01D15/32

CPC classification number: G11B17/005 ,  G11B17/34 ,  G11B7/08

Abstract: An optical disk recorder in which the optical disk, the drive spindle and the disk drive motor are moved or pivoted in an arcuate path relative to stationary laser optics. When moved in such an arcuate path, the optical disk, spindle and drive motor have a lessened movement of inertia (compared to linear movement thereof) which permits relatively fast accessing of an optical disk without a large drive motor. The accessing system can be naturally statically balanced by placing the spindle and the drive motor or opposite sides of the pivot point.

Abstract translation: 一种光盘记录器，其中光盘，驱动主轴和盘驱动电机相对于固定的激光光学器件以弧形路径移动或枢转。 当以这样的弧形路径移动时，光盘，主轴和驱动马达具有减小的惯性运动（与其线性运动相比），这允许在没有大的驱动马达的情况下相对快速地访问光盘。 通过放置主轴和驱动电机或枢转点的相对侧，可以自然地平稳地进入系统。

公开(公告)号：US07970674B2

公开(公告)日：2011-06-28

申请号：US11347024

申请日：2006-02-03

Applicant: David Cheng ,  Stan Humphries ,  Kyusik Chung ,  Dong Xiang ,  Jonathan Burstein

Inventor： David Cheng ,  Stan Humphries ,  Kyusik Chung ,  Dong Xiang ,  Jonathan Burstein

IPC: G06Q40/10

CPC classification number: G06Q30/02 ,  G06Q10/10 ,  G06Q30/0278 ,  G06Q40/00 ,  G06Q50/16

Abstract: A facility procuring information about a distinguished property from its owner that is usable to refine an automatic valuation of the distinguished property is described. The facility displays information about the distinguished property used in the automatic valuation of the distinguished property. The facility obtains user input from the owner adjusting at least one aspect of information about the distinguished property used in the automatic valuation of the distinguished property. The facility then displays to the owner a refined valuation of the distinguished property that is based on the adjustment of the obtained user input.

Abstract translation: 描述了从可用于改进不同属性的自动估价的用户处获得与其所有者有关的区别属性的信息的设施。 该设施显示有关区分属性自动估价中使用的区别属性的信息。 该设施从所有者获得用户输入，调整关于在不同属性的自动估价中使用的区别属性的信息的至少一个方面。 然后，该设施向所有者显示基于所获得的用户输入的调整的区别属性的精细估价。

公开(公告)号：USD636014S1

公开(公告)日：2011-04-12

申请号：US29248143

申请日：2006-07-31

Applicant: David Cheng

Designer： David Cheng

公开(公告)号：US20080073031A1

公开(公告)日：2008-03-27

申请号：US11929230

申请日：2007-10-30

Applicant: J.B. Price ,  Jed Keller ,  Laurence Dulmage ,  David Cheng

Inventor： J.B. Price ,  Jed Keller ,  Laurence Dulmage ,  David Cheng

IPC: H01L21/67 ,  H01L21/00

CPC classification number: H01L21/67178 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S414/139

Abstract: A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.

Abstract translation: 公开了一种用于半导体处理的方法和装置。 在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。 使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。