摘要:
A semiconductor region having an upper surface and a side surface is formed on a substrate. A first impurity region is formed in an upper portion of the semiconductor region. A second impurity region is formed in a side portion of the semiconductor region. The resistivity of the second impurity region is substantially equal to or smaller than that of the first impurity region.
摘要:
Provided is a liquid ejecting apparatus for ejecting a liquid, including: a depressurizing pump: a liquid storing chamber which includes an inlet for the liquid and stores the liquid; a first partition wall portion which has flexibility and gas permeability; a first pressure control chamber which is adjacent to the liquid storing chamber with the first partition wall portion interposed therebetween; a pressure control valve which opens or seals the inlet in response to displacement of the first partition wall portion; and a switching valve which is connected to the first pressure control chamber and the depressurizing pump and selects an arbitrary state among a first communication state where the first pressure control chamber communicates with an atmosphere, a second communication state where the first pressure control chamber communicates with the depressurizing pump, and a sealed state where the first pressure control chamber is sealed.
摘要:
An impurity region is formed in a surface of a substrate by exposing the substrate to a plasma generated from a gas containing an impurity in a vacuum chamber. In this process, a plasma doping condition is set with respect to a dose of the impurity to be introduced into the substrate so that a first one of doses in a central portion and in a peripheral portion of the substrate is greater than a second one of the doses during an initial period of doping, with the second dose becoming greater than the first dose thereafter.
摘要:
A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
摘要:
A layered chip package includes: a plurality of layer portions stacked, each of the layer portions including a semiconductor chip; and a heat sink. Each of the plurality of layer portions has a top surface, a bottom surface, and four side surfaces. The heat sink has at least one first portion, and a second portion coupled to the at least one first portion. The at least one first portion is adjacent to the top surface or the bottom surface of at least one of the layer portions. The second portion is adjacent to one of the side surfaces of each of at least two of the plurality of layer portions.
摘要:
A valve device for opening and closing a valve including a movable valve member, the valve device comprising: an operation member movable toward and away from the valve, the operation member moving the valve member with magnetic force when moving toward or away from the valve to open or close the valve, wherein the operation member is formed to move in a predetermined direction including a first component representing magnitude of a vector in a movement direction of the valve member and a second component representing magnitude of a vector in a direction perpendicular to the movement direction of the valve member, with the first component being greater than the second component.
摘要:
A soil treating agent or a seed treating agent having excellent prevention effects against various plant pathogens (particularly against rice blast) is provided. A soil treating agent or seed treating agent, comprising one or more compounds of the general formula (Ia), (Ib) or (Ic): (wherein R1, R2: C1-C6 alkyl (may be substituted), aryl (may be substituted), heteroaryl (may be substituted), aralkyl (may be substituted) and the like; R3, R4: H, C1-C6 alkyl (may be substituted), halogen, C1-C6 alkoxy and the like; X: halogen, C1-C6 alkyl (may be substituted), C2-C6 alkenyl (may be substituted), C2-C6 alkynyl (may be substituted), aryl (may be substituted), heteroaryl (may be substituted), C1-C6 alkoxy and the like; Y: halogen, C1-C6 alkyl, C1-C6 alkoxy, OH; n: 0 to 4; m: 0 to 6) or salts thereof as an active ingredient.
摘要:
A manufacturing method for a layered chip package including a stack of a plurality of layer portions includes the steps of: fabricating a layered substructure by stacking a plurality of substructures each including a plurality of layer portions corresponding to the plurality of layer portions of the layered chip package; and fabricating a plurality of layered chip packages by using the layered substructure. The step of fabricating the layered substructure includes: fabricating a first and a second pre-polishing substructure; bonding the first pre-polishing substructure to a jig such that a first surface of the first pre-polishing substructure faces the jig; forming a first substructure by polishing a second surface of the first pre-polishing substructure; bonding the second pre-polishing substructure to the first substructure such that a first surface of the second pre-polishing substructure faces the polished surface of the first substructure; and forming a second substructure by polishing a second surface of the second pre-polishing substructure.
摘要:
A method and an apparatus for plasma processing which can accurately monitor an ion current applied to the surface of a sample. Predetermined gas is exhausted via an exhaust port by a turbo-molecular pump while introducing the gas within the vacuum chamber from a gas supply device, and the pressure within the vacuum chamber is kept at a predetermined value by a pressure regulating valve. A high-frequency power supply for a plasma source supplies a high-frequency power to a coil provided near a dielectric window to generate inductively coupled plasma within the vacuum chamber. A high-frequency power supply for the sample electrode for supplying the high-frequency power to the sample electrode is provided. A matching circuit for the sample electrode and a high-frequency sensor are provided between the sample electrode high-frequency power supply and the sample electrode. An ion current applied to the surface of a sample can be accurately monitored buy using the high-frequency sensor and an arithmetic device.
摘要:
An impurity region is formed in a surface of a substrate by exposing the substrate to a plasma generated from a gas containing an impurity in a vacuum chamber. In this process, a plasma doping condition is set with respect to a dose of the impurity to be introduced into the substrate so that a first one of doses in a central portion and in a peripheral portion of the substrate is greater than a second one of the doses during an initial period of doping, with the second dose becoming greater than the first dose thereafter.