Projection exposure method and apparatus
    51.
    发明授权
    Projection exposure method and apparatus 失效
    投影曝光方法及装置

    公开(公告)号:US06235438B1

    公开(公告)日:2001-05-22

    申请号:US09166884

    申请日:1998-10-06

    IPC分类号: G03F900

    摘要: A projection exposure apparatus comprises a projection optical system for projecting a pattern of a mask on a photosensitive substrate; a plane-parallel plate disposed on a side of the photosensitive substrate of the projection optical system, almost perpendicularly to an optical axis of the projection optical system; and a adjustment device for adjusting at least one of an inclination angle of a normal line of the plane-parallel plate relative to the optical axis of the projection optical system and an inclination angle of the plane-parallel plate.

    摘要翻译: 投影曝光装置包括:投影光学系统,用于将光敏图案的图案投影在感光基板上; 平面平行板,布置在投影光学系统的感光基板的一侧上,几乎垂直于投影光学系统的光轴; 以及用于调整平面平行板的法线相对于投影光学系统的光轴的倾斜角和平面平行板的倾斜角中的至少一个的调节装置。

    Exposure apparatus, exposure method, and device manufacturing method
    53.
    发明授权
    Exposure apparatus, exposure method, and device manufacturing method 有权
    曝光装置,曝光方法和装置制造方法

    公开(公告)号:US08125613B2

    公开(公告)日:2012-02-28

    申请号:US11785715

    申请日:2007-04-19

    申请人: Kousuke Suzuki

    发明人: Kousuke Suzuki

    摘要: An exposure apparatus includes a projection optical system, which projects a pattern of a mask onto a prescribed exposure area on a substrate at a prescribed projection magnification. The optical axis center of the projection optical system is set to a position different from that of the center of the projection area onto which the pattern is projected. The exposure apparatus further includes a magnification modification device, which modifies the projection magnification of the projection optical system; a calculation device, which calculates a shift length of the center of the projection area associated with modification of the projection magnification; and a correction device, which corrects the position information of the exposure area based on the shift length of the center of the projection area.

    摘要翻译: 曝光装置包括投影光学系统,其以规定的投影倍率将掩模的图案投影到基板上的规定的曝光区域上。 将投影光学系统的光轴中心设定为与投影图案的投影区域的中心不同的位置。 所述曝光装置还具备能够改变所述投影光学系统的投影倍率的倍率变更装置, 计算装置,其计算与投影倍率的修改相关联的投影区域的中心的移动长度; 以及校正装置,其基于投影区域的中心的移动长度校正曝光区域的位置信息。

    IMAGE FORMING APPARATUS
    54.
    发明申请
    IMAGE FORMING APPARATUS 有权
    图像形成装置

    公开(公告)号:US20100194808A1

    公开(公告)日:2010-08-05

    申请号:US12699949

    申请日:2010-02-04

    申请人: Kousuke Suzuki

    发明人: Kousuke Suzuki

    IPC分类号: B41J29/38

    摘要: The present image forming apparatus converts driving data in such a manner that when a volume of liquid to be ejected in an (m+1)-th print cycle following an m-th print cycle is a maximum volume of ink among a plurality of predetermined volumes of ink, a volume of liquid to be ejected in the m-th print cycle is any volume other than zero and the maximum volume among the predetermined volumes, in which m-th print cycle (m is an integer number no less than “0”) no ink is to be ejected

    摘要翻译: 本图像形成装置以如下方式转换驱动数据:当在第m打印周期之后的第(m + 1)个打印周期中要喷射的液体的体积是多个预定的 在第m次打印循环中要喷射的液体体积是除了零以外的任何体积和预定体积中的最大体积,其中第m次打印循环(m是不小于“ 0“)不喷墨

    Developer, and image forming method using the developer
    60.
    发明申请
    Developer, and image forming method using the developer 有权
    开发者和使用开发者的图像形成方法

    公开(公告)号:US20050260516A1

    公开(公告)日:2005-11-24

    申请号:US11126270

    申请日:2005-05-11

    摘要: A developer for an electrophotographic tandem image forming method is provided that contains a toner; and a carrier, wherein the toner has a shape factor SF-1 of from 120 to 160, an average circularity of form 0.93 to 0.98, a weight-average particle diameter (D4) of from 3.0 to 8.0 μm, and a ratio (D4/Dn) of the weight-average particle diameter (D4) to a number-average particle diameter (Dn) of from 1.01 to 1.20, and wherein the carrier is almost a spherical ferrite coated with a resin wherein alumina is dispersed, which has an average particle diameter of from 20 to 45 μm and the following formula: (MgO)x(MnO)y(Fe2O3)z wherein x is from 1 to 5 mol %, y is from 5 to 55 mol % and z is from 45 to 55 mol %.

    摘要翻译: 提供一种用于电子照相串联成像方法的显影剂,其包含调色剂; 和载体,其中调色剂的形状因子SF-1为120〜160,平均圆形度为0.93〜0.98,重均粒径(D4)为3.0〜8.0μm,比例(D4 / Dn)与数均粒径(Dn)的比值为1.01〜1.20,并且其中载体几乎是涂覆有分散有氧化铝的树脂的球形铁氧体,其具有 平均粒径为20〜45μm,具有下式:<?in-line-formula description =“In-line formula”end =“lead”?>(MgO)x(MnO)y 其中x为1〜5摩尔%,y为0〜5摩尔%,y为1〜5摩尔%,y为1〜5摩尔% 5〜55摩尔%,z为45〜55摩尔%。