摘要:
A projection exposure apparatus comprises a projection optical system for projecting a pattern of a mask on a photosensitive substrate; a plane-parallel plate disposed on a side of the photosensitive substrate of the projection optical system, almost perpendicularly to an optical axis of the projection optical system; and a adjustment device for adjusting at least one of an inclination angle of a normal line of the plane-parallel plate relative to the optical axis of the projection optical system and an inclination angle of the plane-parallel plate.
摘要:
A carrier for developing an electrostatic latent image is provided. The carrier comprises a core particle having an internal void ratio of from 0.0% to 2.0% and a coating layer coating the core particle. The coating layer contains flat chargeable particles satisfying Formula 1 blow: 1.0≤R1/R2≤3.0 Formula 1 where R1 [nm] and R2 [nm] represent a major axis and a thickness, respectively, of each of the flat chargeable particles. The carrier has an apparent density of from 2.0 to 2.5 g/cm3.
摘要:
An exposure apparatus includes a projection optical system, which projects a pattern of a mask onto a prescribed exposure area on a substrate at a prescribed projection magnification. The optical axis center of the projection optical system is set to a position different from that of the center of the projection area onto which the pattern is projected. The exposure apparatus further includes a magnification modification device, which modifies the projection magnification of the projection optical system; a calculation device, which calculates a shift length of the center of the projection area associated with modification of the projection magnification; and a correction device, which corrects the position information of the exposure area based on the shift length of the center of the projection area.
摘要:
The present image forming apparatus converts driving data in such a manner that when a volume of liquid to be ejected in an (m+1)-th print cycle following an m-th print cycle is a maximum volume of ink among a plurality of predetermined volumes of ink, a volume of liquid to be ejected in the m-th print cycle is any volume other than zero and the maximum volume among the predetermined volumes, in which m-th print cycle (m is an integer number no less than “0”) no ink is to be ejected
摘要:
A semiconductor device having a self-aligned contact hole is formed by providing a side wall oxide film on a gate electrode, covering the gate electrode and the side wall oxide film by an oxide film and further covering the oxide film by a nitride film, wherein the oxide film is formed by a plasma CVD process with a reduced plasma power such that the H2O content in the oxide film is less than about 2.4 wt %.
摘要翻译:具有自对准接触孔的半导体器件通过在栅电极上设置侧壁氧化膜形成,通过氧化膜覆盖栅电极和侧壁氧化膜,并通过氮化物膜进一步覆盖氧化膜,其中 氧化膜通过等离子体CVD工艺形成,其中等离子体功率降低,使得氧化物膜中的H 2 O 2含量小于约2.4重量%。
摘要:
A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.
摘要:
A carrier composition, including a particulate magnetic material; and a layer located on a surface of the particulate magnetic material, wherein the layer is formed by heating a mixture containing a metal alkoxide; a resin having a hydroxyl group reacting with the metal alkoxide; and a particulate inorganic material.
摘要:
A semiconductor device having a self-aligned contact hole is formed by providing a side wall oxide film on a gate electrode, covering the gate electrode and the side wall oxide film by an oxide film and further covering the oxide film by a nitride film, wherein the oxide film is formed by a plasma CVD process with a reduced plasma power such that the H2O content in the oxide film is less than about 2.4 wt %.
摘要翻译:具有自对准接触孔的半导体器件通过在栅电极上设置侧壁氧化膜形成,通过氧化膜覆盖栅电极和侧壁氧化膜,并通过氮化物膜进一步覆盖氧化膜,其中 氧化膜通过等离子体CVD工艺形成,其中等离子体功率降低,使得氧化物膜中的H 2 O 2含量小于约2.4重量%。
摘要:
A semiconductor device having a self-aligned contact hole is formed by providing a side wall oxide film on a gate electrode, covering the gate electrode and the side wall oxide film by an oxide film and further covering the oxide film by a nitride film, wherein the oxide film is formed by a plasma CVD process with a reduced plasma power such that the H2O content in the oxide film is less than about 2.4 wt %.
摘要:
A developer for an electrophotographic tandem image forming method is provided that contains a toner; and a carrier, wherein the toner has a shape factor SF-1 of from 120 to 160, an average circularity of form 0.93 to 0.98, a weight-average particle diameter (D4) of from 3.0 to 8.0 μm, and a ratio (D4/Dn) of the weight-average particle diameter (D4) to a number-average particle diameter (Dn) of from 1.01 to 1.20, and wherein the carrier is almost a spherical ferrite coated with a resin wherein alumina is dispersed, which has an average particle diameter of from 20 to 45 μm and the following formula: (MgO)x(MnO)y(Fe2O3)z wherein x is from 1 to 5 mol %, y is from 5 to 55 mol % and z is from 45 to 55 mol %.