公开(公告)号：US07462850B2

公开(公告)日：2008-12-09

申请号：US11296702

申请日：2005-12-08

申请人： Vadim Yevgenyevich Banine ,  Vladimir Vitalevitch Ivanov ,  Johannes Hubertus Josephina Moors ,  Bastiaan Theodoor Wolschrijn ,  Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelmus Van Herpen

发明人： Vadim Yevgenyevich Banine ,  Vladimir Vitalevitch Ivanov ,  Johannes Hubertus Josephina Moors ,  Bastiaan Theodoor Wolschrijn ,  Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelmus Van Herpen

IPC分类号： H05G2/00

CPC分类号： G03F7/70933 ,  G03F7/70925

摘要： A cleaning arrangement is configured to clean an EUV optic of an EUV lithographic apparatus. The partial radical pressure ranges between 0.1-10 Pa. The cleaning arrangement can be configured inside a cleaning cocoon of the lithographic apparatus for offline cleaning. It can also be configured at particular positions inside the apparatus to clean nearby optics during production. In the pressure range of 0.1-10 Pa the penetration of atomic hydrogen into the optical devices is high, while the recombination to molecular hydrogen and hydrogen consumption is limited.

摘要翻译： 清洁装置被配置为清洁EUV光刻设备的EUV光学元件。 部分自由基压力范围在0.1-10Pa之间。清洁装置可以被配置在光刻设备的清洁茧内用于离线清洁。 它也可以在设备内的特定位置进行配置，以便在生产过程中清洁附近的光学元件。 在0.1-10Pa的压力范围内，原子氢进入光学器件的渗透率很高，而分子氢和氢消耗的复合受到限制。

公开(公告)号：US20080157006A1

公开(公告)日：2008-07-03

申请号：US11645809

申请日：2006-12-27

申请人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Derk Jan Wilfred Klunder ,  Wouter Anthon Soer ,  Kurt Gielissen

发明人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Derk Jan Wilfred Klunder ,  Wouter Anthon Soer ,  Kurt Gielissen

IPC分类号： G21G5/00

CPC分类号： G03F7/70916 ,  G03F7/70858 ,  H05G2/003 ,  H05G2/005

摘要： A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source. The system includes a contamination barrier constructed and arranged to rotate about an axis, and a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source. The magnet structure is constructed and arranged to provide a magnetic field through the contamination barrier. The magnetic field, when passing through the contamination barrier, is oriented along planes generally coinciding with the axis of rotation of the contamination barrier.

摘要翻译： 用于捕集来自碎屑产生辐射源的污染物质的碎片缓解系统。 该系统包括构造和布置成围绕轴线旋转的污染屏障，以及构造和布置成提供用于使来自辐射源的带电碎片偏转的磁场的磁体结构。 磁体结构被构造和布置成通过污染屏障提供磁场。 当通过污染屏障时，磁场沿着通常与污染屏障旋转轴线重合的平面定向。

公开(公告)号：US20080149854A1

公开(公告)日：2008-06-26

申请号：US11643951

申请日：2006-12-22

申请人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Vadim Yevgenyevich Banine ,  Mandeep Singh ,  Harm-Jan Voorma ,  Derk Jan Wilfred Klunder

发明人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Vadim Yevgenyevich Banine ,  Mandeep Singh ,  Harm-Jan Voorma ,  Derk Jan Wilfred Klunder

IPC分类号： G21G5/00 ,  G02B5/08

CPC分类号： G03F7/70958 ,  B82Y10/00 ,  G03F7/70925 ,  G21K1/062 ,  G21K2201/067

摘要： An EUV illumination system, for example, for use in a photolithographic apparatus is configured to condition a radiation beam. A hydrogen radical source configured to supply gas containing hydrogen or hydrogen radicals into the illumination system. The hydrogen gas is effective to remove carbonaceous contamination from the surface of a mirror in the illumination system or to form a buffer against unwanted gases. In order to prevent damage by hydrogen that penetrates the mirror, the mirror comprises a layer made of metal non-metal compound adjacent a reflection surface of the mirror. A transition metal carbide, nitride, boride or silicide compound or mixture thereof may be used for example.

摘要翻译： 例如，用于光刻设备的EUV照明系统被配置为调节辐射束。 氢自由基源，被配置为将含有氢或氢自由基的气体供应到照明系统中。 氢气有效地从照明系统中的反射镜表面除去碳质污染物或形成缓冲液以防止不需要的气体。 为了防止穿透反射镜的氢的破坏，反射镜包括与反射镜的反射面相邻的金属非金属化合物制成的层。 可以使用过渡金属碳化物，氮化物，硼化物或硅化物或其混合物。

公开(公告)号：US20080142741A1

公开(公告)日：2008-06-19

申请号：US11637937

申请日：2006-12-13

申请人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Vadim Yevgenyevich Banine ,  Vladimir Vitalevitch Ivanov ,  Konstantin Nikolaevitch Koshelev ,  Derk Jan Wilfred Klunder

发明人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Vadim Yevgenyevich Banine ,  Vladimir Vitalevitch Ivanov ,  Konstantin Nikolaevitch Koshelev ,  Derk Jan Wilfred Klunder

IPC分类号： G21K5/00 ,  H05G2/00

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  H05G2/005

摘要： The invention relates to a radiation system for generating electromagnetic radiation. The radiation system includes a pair of electrodes constructed and arranged to generate plasma of a first substance and a pinch in the plasma. The radiation system also includes a plasma recombination surface that is arranged proximate to the pinch, and is configured to neutralize a plurality of plasma particles.

摘要翻译： 本发明涉及一种用于产生电磁辐射的辐射系统。 辐射系统包括一对电极，其构造和布置成产生等离子体中的第一物质的等离子体和夹持物。 辐射系统还包括等离子体复合表面，该等离子体复合表面被布置成接近于夹紧，并且被配置为中和多个等离子体颗粒。

公开(公告)号：US20080308745A1

公开(公告)日：2008-12-18

申请号：US12094788

申请日：2006-11-13

申请人： Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelmus Herpen ,  Marcello Leonardo Mario Balistreri

发明人： Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelmus Herpen ,  Marcello Leonardo Mario Balistreri

IPC分类号： G01J1/58

CPC分类号： G01N21/648 ,  G01N21/6452 ,  G01N2021/6419 ,  G01N2021/6482

摘要： The invention relates to a device for optical excitation, in particular luminescent excitation of biomolecules (40) in a fluid sample, comprising a multiple wavelength generator which generates at least one array of spots (60) with different wavelengths at least one defined area of the device.

摘要翻译： 本发明涉及一种用于光学激发的装置，特别是流体样品中的生物分子（40）的发光激发装置，包括多波长发生器，该多波长发生器产生具有不同波长的至少一个具有不同波长的至少一个限定区域的阵列 设备。

公开(公告)号：US07851770B2

公开(公告)日：2010-12-14

申请号：US12094788

申请日：2006-11-13

申请人： Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelm Herpen ,  Marcello Leonardo Mario Balistreri

发明人： Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelm Herpen ,  Marcello Leonardo Mario Balistreri

IPC分类号： G01J1/58

CPC分类号： G01N21/648 ,  G01N21/6452 ,  G01N2021/6419 ,  G01N2021/6482

摘要： The invention relates to a device for optical excitation, in particular luminescent excitation of biomolecules (40) in a fluid sample, comprising a multiple wavelength generator which generates at least one array of spots (60) with different wavelengths at least one defined area of the device.

摘要翻译： 本发明涉及一种用于光学激发的装置，特别是流体样品中的生物分子（40）的发光激发装置，包括多波长发生器，该多波长发生器产生具有不同波长的至少一个具有不同波长的至少一个限定区域的阵列 设备。

公开(公告)号：US09612239B2

公开(公告)日：2017-04-04

申请号：US14001566

申请日：2012-02-27

申请人： Joannes Baptist Adrianus Dionisius Van Zon ,  Toon Hendrik Evers ,  Ron Martinus Laurentius Van Lieshout ,  Wilhelmina Maria Hardeman ,  Derk Jan Wilfred Klunder

发明人： Joannes Baptist Adrianus Dionisius Van Zon ,  Toon Hendrik Evers ,  Ron Martinus Laurentius Van Lieshout ,  Wilhelmina Maria Hardeman ,  Derk Jan Wilfred Klunder

IPC分类号： G01N21/17 ,  G01N33/543 ,  G01N21/552 ,  G01N21/64 ,  G01N21/77 ,  G01N27/74

CPC分类号： G01N33/54326 ,  G01N21/552 ,  G01N21/648 ,  G01N21/7703 ,  G01N27/745

摘要： The invention relates to a substance determining apparatus (19) for determining a substance within a fluid. A location event determination unit (34) determines location events indicating that a particle, which may have attached the substance, is located in a sensing region and a property of the location events from the sensing signal generated by sensing the sensing region. A location events selection unit (70) selects a part of the location events having a property in a predefined property range, and a substance determination unit (40) determines the substance within the fluid (3) based on the selected part of the location events. This allows tuning the determination of the substance within the fluid to a desired property range, which can relate to a desired kind of bound particles, thereby reducing the influence of unwanted effects on the determination of the substance and, thus, improving the determination accuracy.

公开(公告)号：US09075052B2

公开(公告)日：2015-07-07

申请号：US13498482

申请日：2010-09-23

申请人： Johannes Joseph Hubertina Barbara Schleipen ,  Joannes Baptist Adrianus Dionisius Van Zon ,  Derk Jan Wilfred Klunder ,  Toon Hendrik Evers ,  Josephus Arnoldus Henricus Maria Kahlman ,  Ron Martinus Laurentius Van Lieshout ,  Mikhail Mikhaylovich Ovsyanko

发明人： Johannes Joseph Hubertina Barbara Schleipen ,  Joannes Baptist Adrianus Dionisius Van Zon ,  Derk Jan Wilfred Klunder ,  Toon Hendrik Evers ,  Josephus Arnoldus Henricus Maria Kahlman ,  Ron Martinus Laurentius Van Lieshout ,  Mikhail Mikhaylovich Ovsyanko

IPC分类号： G01N21/00 ,  G01N33/543 ,  G01N21/47 ,  G01N21/552 ,  G01N21/64 ,  G01R33/12 ,  G01N21/51 ,  G01N21/49 ,  G01N27/72 ,  G01N15/10 ,  G01N15/00

CPC分类号： G01N33/54373 ,  G01N15/10 ,  G01N15/1031 ,  G01N21/47 ,  G01N21/49 ,  G01N21/51 ,  G01N21/552 ,  G01N21/6458 ,  G01N27/72 ,  G01N33/54313 ,  G01N2015/0065 ,  G01N2201/12 ,  G01R33/1269

摘要： A biosensor system for the detection of particles includes a biosensor cartridge having a sensor surface. A biosensor magnet assembly is disposed on one side of the cartridge for generating a magnetic field effective at the cartridge and the sensor surface. The biosensor magnet assembly includes at least two magnetic sub-units separated by a gap. A first optical detection system detects the particles arranged at the same side of the cartridge as the magnet assembly. The magnet assembly and the first optical sensor are disposed such that the optical detection is accomplished through the gap of the magnet assembly.

摘要翻译： 用于检测颗粒的生物传感器系统包括具有传感器表面的生物传感器盒。 生物传感器磁体组件设置在盒的一侧，用于在盒和传感器表面产生有效的磁场。 生物传感器磁体组件包括由间隙分开的至少两个磁性子单元。 第一光学检测系统检测与磁体组件布置在盒的同一侧的颗粒。 磁体组件和第一光学传感器被布置成使得通过磁体组件的间隙实现光学检测。

公开(公告)号：US20130114076A1

公开(公告)日：2013-05-09

申请号：US13809304

申请日：2011-07-05

申请人： Johannes Joseph Hubertina Barbara Schleipen ,  Albert Hendrik Jan Immink ,  Menno William Jose Prins ,  Derk Jan Wilfred Klunder

发明人： Johannes Joseph Hubertina Barbara Schleipen ,  Albert Hendrik Jan Immink ,  Menno William Jose Prins ,  Derk Jan Wilfred Klunder

IPC分类号： G01N21/01

CPC分类号： G01N21/01 ,  A61B5/0059 ,  B01L3/508 ,  B01L2300/044 ,  B01L2300/0654 ,  B01L2300/0822 ,  B01L2300/0887 ,  B01L2400/043 ,  G01N21/552 ,  G01N21/648 ,  G01N21/7703

摘要： The invention relates to a cartridge (110) and an examination apparatus (100) for optical examinations of a sample. The cartridge (110) comprises a transparent bottom layer (113) that is of substantially uniform thickness and a top layer (111, 112) comprising a sample chamber (SC). The bottom layer and the top layer are preferably laminated onto each other, for example in a C roll-to-roll process. The bottom layer (113) is provided with structures like gratings (115) that allow the incoupling or outcoupling of light.

摘要翻译： 本发明涉及用于样品光学检查的盒（110）和检查装置（100）。 盒（110）包括具有基本均匀厚度的透明底层（113）和包括样品室（SC）的顶层（111,112）。 底层和顶层优选层压在彼此上，例如以C卷对卷方法。 底层（113）设置有允许光耦合或耦合的光栅（115）的结构。

公开(公告)号：US20100140464A1

公开(公告)日：2010-06-10

申请号：US11909638

申请日：2006-03-27

申请人： Marcello Balistreri ,  Derk Jan Wilfred Klunder ,  Maarten Van Herpen

发明人： Marcello Balistreri ,  Derk Jan Wilfred Klunder ,  Maarten Van Herpen

IPC分类号： H01L31/0232 ,  G02B27/42 ,  G02B5/18 ,  G02B27/44

CPC分类号： G01N21/645 ,  G02B27/0037 ,  G02B27/4205 ,  G02B27/4277

摘要： The invention relates to an optical system that particularly allows an improved detection of signal light propagating from a light source (1) through a flat glass substrate (11). SC-modes of this signal light that would normally be totally internally reflected at the backside (10) of the substrate (11) are coupled out by a first diffractive optical element DOE (21). To map all signal light leaving the substrate (11) onto a single target location (51), a focusing lens (31) and a second DOE (41) are disposed in the optical path behind the substrate (11). The DOEs (21, 41) may for example be a ID sinusoidal grating or a 2D blaze grating. The optical system may particularly be applied in an investigation apparatus for detecting multiple spots of a fluorescent sample material.

摘要翻译： 本发明涉及一种特别允许改进从光源（1）通过平板玻璃基板（11）传播的信号光的检测的光学系统。 通常在基板（11）的背面（10）处内部反射的该信号光的SC模式由第一衍射光学元件DOE（21）耦合出来。 为了将离开基板（11）的所有信号光映射到单个目标位置（51）上，在基板（11）后面的光路中设置聚焦透镜（31）和第二DOE（41）。 DOE（21,41）可以例如是ID正弦光栅或2D火焰光栅。 光学系统可以特别应用于用于检测荧光样品材料的多个点的检查装置中。