公开(公告)号：US07077915B2

公开(公告)日：2006-07-18

申请号：US10687701

申请日：2003-10-20

申请人： Yoshikazu Nagamura ,  Nobuyuki Yoshioka ,  Koji Yamanaka ,  Hozumi Usui

发明人： Yoshikazu Nagamura ,  Nobuyuki Yoshioka ,  Koji Yamanaka ,  Hozumi Usui

IPC分类号： B08B3/00

CPC分类号： G03F1/82 ,  G03F1/32 ,  Y10S134/902

摘要： Organic matter and metal impurities present on the surface of a photomask are removed. Foreign matter still adhering to the surface of the photomask is removed with H2 gas dissolved water. The photomask is dried. Thus provided is a method of washing a photomask in a manner which permits attaining an effect of removing foreign matter equivalent or superior to that of a conventional method with a small amount of chemical solution and reducing the amounts of chemicals and high purity water.

摘要翻译： 去除存在于光掩模表面上的有机物质和金属杂质。 用H 2气溶解的水除去仍然附着于光掩模表面的异物。 光掩模被干燥。 因此，提供了以少量的化学溶液和减少化学品和高纯度水量的方式来洗涤光掩模的方法，该方法能够获得等同于或优于常规方法的异物的效果。

公开(公告)号：US20060154996A1

公开(公告)日：2006-07-13

申请号：US11301053

申请日：2005-12-12

申请人： Hiroshi Inoue ,  Koji Yamanaka ,  Makio Tamura ,  Shusaku Yoshida ,  Hideo Nakamura

发明人： Hiroshi Inoue ,  Koji Yamanaka ,  Makio Tamura ,  Shusaku Yoshida ,  Hideo Nakamura

IPC分类号： C08J5/20

CPC分类号： B01J47/08 ,  B01D61/48 ,  B01J20/28033 ,  B01J20/28054 ,  B01J20/28069 ,  B01J20/28083 ,  B01J20/28085 ,  B01J20/28092 ,  B01J39/26 ,  B01J41/20 ,  B01J47/014 ,  B01J2220/52 ,  C02F1/42 ,  C02F1/469

摘要： A porous ion exchanger includes an open cell structure including interconnected macropores and mesopores whose average diameter is in a range of 1 to 1000 μm existing on walls of the macropores. Moreover, a total pore volume is in a range of 1 to 50 ml/g, ion exchange groups are uniformly distributed, and an ion exchange capacity is not less than 0.5 mg equivalent/g of dry porous ion exchanger. The porous ion exchanger can be used as an ion exchanger filled into a deionization module of an electrodeionization water purification device, solid acid catalyst, adsorbent, and filler for chromatography.

公开(公告)号：US20050167357A1

公开(公告)日：2005-08-04

申请号：US10508008

申请日：2003-07-14

申请人： Hiroshi Inoue ,  Koji Yamanaka

发明人： Hiroshi Inoue ,  Koji Yamanaka

IPC分类号： B01J20/28 ,  B01J20/32 ,  C02F1/28 ,  C02F1/42 ,  B01D15/00

CPC分类号： B01J20/28078 ,  B01J20/28054 ,  B01J20/28069 ,  B01J20/28083 ,  B01J20/28085 ,  B01J20/3212 ,  B01J20/3219 ,  B01J20/3248 ,  B01J20/3253 ,  C02F1/285 ,  C02F2101/00 ,  C02F2103/04

摘要： An organic porous material having selective adsorption ability for boron, characterized in that it has an open cell structure comprising macro pores jointed to one another and, formed within the wall of the macro pore, meso pores having a pore diameter of 0.02 to 200 μm, has a total pore volume of 1 to 50 ml/g, and contains a compound capable of forming a complex with boric acid introduced through a covalent bonding in an amount of 1 μmol/g-dry porous material or more. The organic porous material exhibits improved ability for adsorbing boron and also is excellent in stability, and a boron removing module and an ultra-pure water production apparatus using the porous material have extremely high utility.

摘要翻译： 一种对硼具有选择性吸附能力的有机多孔材料，其特征在于，它具有包含彼此连接的大孔的开放孔结构，并且在大孔的壁内形成孔径为0.02至200μm的中孔， 具有1至50ml / g的总孔体积，并且含有能够以1mumol / g-干多孔材料或更多的量通过共价键引入的硼酸形成络合物的化合物。 有机多孔体具有提高的硼吸附能力，稳定性优异，使用该多孔质体的除硼组件和超纯水生产装置具有极高的实用性。

公开(公告)号：US20050134160A1

公开(公告)日：2005-06-23

申请号：US11007179

申请日：2004-12-09

申请人： Koji Yamanaka

发明人： Koji Yamanaka

IPC分类号： C22C5/04 ,  H01T13/32 ,  H01T13/39 ,  H01T13/20 ,  H01T13/16

CPC分类号： H01T13/39

摘要： An improved structure of a spark plug is provided for improving the mechanical strength of joints between a noble metal member made of Ir-alloy and a ground electrode which withstands intense heat. The noble metal member is welded to the ground electrode through laser-fused portions. Each of the fused portion contains less than 40% by weight of Ir in a range defined inside an imaginary plane coinciding with an outer peripheral wall of the noble metal member before welded to the ground electrode, thereby enhancing the strength of the joints between the noble metal member made and the ground electrode.

摘要翻译： 提供了一种改进的火花塞结构，用于提高由Ir合金制成的贵金属构件和承受强烈热量的接地电极之间的接头的机械强度。 贵金属构件通过激光熔合部焊接到接地电极。 每个熔融部分在焊接到接地电极之前，在与贵金属构件的外周壁重合的虚拟平面内限定的范围内包含小于40重量％的Ir，从而提高贵金属之间的接合强度 金属构件和接地电极。

公开(公告)号：US20050023212A1

公开(公告)日：2005-02-03

申请号：US10929523

申请日：2004-08-31

申请人： Hiroshi Inoue ,  Koji Yamanaka

发明人： Hiroshi Inoue ,  Koji Yamanaka

IPC分类号： C08J9/00 ,  B01J20/26 ,  B01J20/28 ,  B01J39/20 ,  B01J41/14 ,  B01D15/08

CPC分类号： B01J20/28085 ,  B01J20/28014 ,  B01J20/28069 ,  B01J20/28076 ,  B01J20/28078 ,  B01J20/28083 ,  B01J20/28092 ,  B01J39/20 ,  B01J41/14

摘要： An organic porous material having a continuous pore structure, which comprises interconnected macropores and mesopores with a radius of 0.01 to 100 μm in the walls of the macropores, having a total pore volume of 1 to 50 ml/g and having pore distribution curve characteristics wherein the value obtained by dividing the half-width of the pore distribution curve at the main peak by the radius at the main peak is 0.5 or less. The organic porous material is useful as an adsorbent having high physical strength and excelling in adsorption amount and adsorption speed, an ion exchanger excelling in durability against swelling and shrinkage, and a filler for chromatography exhibiting high separation capability.

摘要翻译： 一种具有连续孔结构的有机多孔材料，其包含相互连接的大孔和在大孔壁中具有0.01至100μm的半径的介孔，其总孔体积为1至50ml / g并具有孔分布曲线特征，其中 通过将主峰处的孔分布曲线的半宽除以主峰的半径而得到的值为0.5以下。 有机多孔材料可用作具有高的物理强度并且吸附量和吸附速度优异的吸附剂，对膨胀和收缩的耐久性优异的离子交换剂和显示高分离能力的色谱填料。

公开(公告)号：US06841580B2

公开(公告)日：2005-01-11

申请号：US10307937

申请日：2002-12-03

申请人： Hiroshi Inoue ,  Koji Yamanaka

发明人： Hiroshi Inoue ,  Koji Yamanaka

IPC分类号： C08J9/00 ,  B01J20/26 ,  B01J20/28 ,  B01J39/20 ,  B01J41/14 ,  C08J5/20

CPC分类号： B01J20/28085 ,  B01J20/28014 ,  B01J20/28069 ,  B01J20/28076 ,  B01J20/28078 ,  B01J20/28083 ,  B01J20/28092 ,  B01J39/20 ,  B01J41/14

摘要： An organic porous material having a continuous pore structure, which comprises interconnected macropores and mesopores with a radius of 0.01 to 100 μm in the walls of the macropores, having a total pore volume of 1 to 50 ml/g and having pore distribution curve characteristics wherein the value obtained by dividing the half-width of the pore distribution curve at the main peak by the radius at the main peak is 0.5 or less. The organic porous material is useful as an adsorbent having high physical strength and excelling in adsorption amount and adsorption speed, an ion exchanger excelling in durability against swelling and shrinkage, and a filler for chromatography exhibiting high separation capability.

公开(公告)号：US06636659B2

公开(公告)日：2003-10-21

申请号：US09985752

申请日：2001-11-06

申请人： Nobuyuki Kagi ,  Koji Yamanaka

发明人： Nobuyuki Kagi ,  Koji Yamanaka

IPC分类号： H01S300

CPC分类号： H01S3/1301 ,  H01S3/06754 ,  H01S3/094003 ,  H01S3/10015 ,  H01S3/302 ,  H01S2301/06

摘要： An optical amplification apparatus estimates a gain deviation over a range of multiplex wavelength of a signal light received from an EDFA in the preceding stage, selects a gain profile, with which the gain deviation becomes a minimum, from a gain profile storage section, and determines the gain profile. This optical amplification apparatus further controls an HPU (High power pumping light source) according to the determined gain profile and performs Raman amplification on the received signal light.

公开(公告)号：US06277205B1

公开(公告)日：2001-08-21

申请号：US09562929

申请日：2000-05-02

申请人： Yoshikazu Nagamura ,  Nobuyuki Yoshioka ,  Hozumi Usui ,  Koji Yamanaka

发明人： Yoshikazu Nagamura ,  Nobuyuki Yoshioka ,  Hozumi Usui ,  Koji Yamanaka

IPC分类号： C23F102

CPC分类号： G03F1/82 ,  G03F1/32 ,  Y10S134/902

摘要： To provide a photomask cleaning method which brings about a high effect of removing residual sulfuric acid or foreign objects and can remove foreign objects effectively without fluctuating the transmission or other properties of the light-shielding layer (MoSiON film) in a phase shift photomask. A method of cleaning a photomask which comprises a first step of cleaning the surface of a photomask used as a master in the photolithography step in the process for the production of semiconductor device with a hot mixture of sulfuric acid and hydrogen peroxide to decompose organic objects present thereon and remove metallic impurities, a second step of removing residual sulfuric acid from the surface of said photomask, a third step of removing foreign objects attached to the surface of said photomask, and a fourth step of drying said photomask which has finished with said first, second and third steps, characterized in that said second step involves the removal of residual sulfuric acid from the surface of said photomask with anodic water and said third step involves the removal of foreign objects with cathodic water.

摘要翻译： 为了提供一种能够有效除去残留硫酸或异物的光掩模清洗方法，能够有效地除去异物，而不会波动相移光掩模中的遮光层（MoSiON膜）的透过率或其它特性。 一种清洁光掩模的方法，该方法包括：在用硫酸和过氧化氢的热混合物生产半导​​体器件的过程中，在光刻步骤中清洁用作母体的光掩模的表面的第一步骤，以分解其上存在的有机物质 并除去金属杂质，从所述光掩模的表面除去残余硫酸的第二步骤，除去附着在所述光掩模的表面上的异物的第三步骤，以及干燥所述光掩模的第四步骤，所述光掩模用所述第一， 第二和第三步骤，其特征在于所述第二步骤涉及从t去除残余的硫酸 所述光掩模的表面具有阳极水，并且所述第三步骤涉及用阴极水除去异物。

公开(公告)号：US5720869A

公开(公告)日：1998-02-24

申请号：US548986

申请日：1995-10-27

申请人： Koji Yamanaka ,  Takashi Imaoka ,  Takashi Futatsuki ,  Yukinari Yamashita

发明人： Koji Yamanaka ,  Takashi Imaoka ,  Takashi Futatsuki ,  Yukinari Yamashita

IPC分类号： C02F1/20 ,  C02F1/28 ,  C02F1/32 ,  C02F1/42 ,  C02F1/44 ,  C02F1/46 ,  C02F1/461 ,  C02F1/78 ,  C02F9/00

CPC分类号： C02F1/32 ,  C02F1/4618 ,  C02F9/00 ,  C02F1/20 ,  C02F1/283 ,  C02F1/44 ,  C02F1/78 ,  C02F2001/427 ,  C02F2001/46133 ,  C02F2103/04 ,  C02F2201/4611 ,  C02F2201/46115 ,  C02F2201/4618

摘要： A high-purity water producing equipment comprises a primary purification treatment system, a primary deionized water tank, a secondary purification treatment system for producing high-purity water from a primary deionized water, a circulatory system pipe for returning the produced high-purity water to a primary deionized water tank and a branch water feed system branched off from the circulatory system for feeding the high-purity water to a use point. An electrolytic unit for producing the anolyte EIW (electrolytic ionized water) to be catholyte EIW from the electrolysis of the high-purity water is provided as a bypass midway along the circulatory system. The anolyte EIW is added to the circulatory pipe downstream of the branching point toward the use point, when cleaning of units is necessary.

摘要翻译： 高纯度水生产设备包括初级净化处理系统，初级去离子水箱，用于从初级去离子水生产高纯度水的二次净化处理系统，用于将生产的高纯度水返回到的循环系统管道 从循环系统分支的主要去离子水箱和分支给水系统，用于将高纯度水供给到使用点。 在循环系统的中途设置用于从高纯度水的电解中制造阴极电解液EIW（电解电离水）的电解单元作为旁路。 阳极电解液EIW被添加到分支点下游的循环管道朝向使用点，当需要清洁单元时。