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公开(公告)号：US4588490A
公开(公告)日：1986-05-13
申请号：US736918
申请日：1985-05-22
CPC分类号： H01J37/3405
摘要： A plasma sputter etching/deposition system comprising an electron-emitting hollow cathode arc-source combined with a conventional plasma sputter etching/deposition system such as a magnetron. The electrons emitted are coupled into the intrinsic high energy, e.g., magnetic field and are accelerated by the plasma potential and cause a significant increase plasma density. The resultant combination allows much greater sputtering/deposition efficiency than was possible with previous devices. According to a further aspect of the invention, switched operation is possible, whereby etching may vary from isotropic to anisotropic. A side discharge hollow cathode structure is also described for enhancing certain sputtering/deposition processes, wherein electrons may be emitted from one or more openings at the side of a hollow cathode chamber to achieve more uniform electron emission in a large process chamber.
摘要翻译： 等离子体溅射蚀刻/沉积系统，其包括与常规等离子体溅射蚀刻/沉积系统如磁控管组合的电子发射空心阴极电弧源。 所发射的电子被耦合到固有的高能量例如磁场中，并被等离子体电势加速并且引起显着增加的等离子体密度。 所得到的组合允许比以前的装置更大的溅射/沉积效率。 根据本发明的另一方面，切换操作是可能的，由此蚀刻可以从各向同性到各向异性。 还描述了用于增强某些溅射/沉积工艺的侧面放电中空阴极结构，其中电子可以从中空阴极室侧面的一个或多个开口发射，以在大的处理室中实现更均匀的电子发射。
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52.发明授权公开(公告)号：US08858764B2
公开(公告)日：2014-10-14
申请号：US13606815
申请日：2012-09-07
IPC分类号： H01L21/00 , G01N33/487
CPC分类号： G01N33/48721 , Y10S977/712
摘要： A technique for a nanodevice is provided that includes a reservoir filled with a conductive fluid and a membrane separating the reservoir. The membrane includes an electrode layer having a tunneling junction formed therein. A nanopore is formed through the membrane, and the nanopore is formed through other layers of the membrane such that the nanopore is aligned with the tunneling junction of the electrode layer. When a voltage is applied to the electrode layer, a tunneling current is generated by a base in the tunneling junction to be measured as a signature for distinguishing the base. When an organic coating is formed on an inside surface of the tunneling junction, transient bonds are formed between the electrode layer and the base.
摘要翻译： 提供了一种纳米器件的技术，其包括填充有导电流体的储存器和分离储存器的膜。 膜包括其中形成有隧道结的电极层。 通过膜形成纳米孔，并且纳米孔通过膜的其它层形成，使得纳米孔与电极层的隧道结对准。 当向电极层施加电压时，通过作为区分基底的标记的待测量的隧道结中的基底产生隧穿电流。 当在隧道结的内表面上形成有机涂层时，在电极层和基底之间形成瞬态结合。
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公开(公告)号：US20140004300A1
公开(公告)日：2014-01-02
申请号：US13555251
申请日：2012-07-23
IPC分类号： B32B3/10
CPC分类号： B81C1/00087 , B81B2201/058 , H01L21/0337 , Y10T428/24322
摘要： For a cross slit structure that contains a nanopore, a layer is produced including a first spacer that penetrates through the layer. A subsequent layer over, and in direct contact with, the layer is also produced. The subsequent layer includes a second spacer penetrating through the subsequent layer. The first spacer and the second spacer are selectively etched away, creating a first slit and a second slit. Respective projections of these slits are crossing one another at an angle. At such a crossing an opening is formed which provides for fluid connectivity through the two layers.
摘要翻译： 对于包含纳米孔的交叉狭缝结构，产生包括穿透层的第一间隔物的层。 还产生了与层直接接触的后续层。 随后的层包括贯穿后续层的第二间隔物。 选择性地蚀刻掉第一间隔物和第二间隔物，形成第一狭缝和第二狭缝。 这些狭缝的各个投影以一定角度相互交叉。 在这样一个交叉口处，形成一个开口，其提供通过两层的流体连通性。
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54.发明授权公开(公告)号：US08307994B2
公开(公告)日：2012-11-13
申请号：US12607258
申请日：2009-10-28
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
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公开(公告)号：US08297449B2
公开(公告)日：2012-10-30
申请号：US12685734
申请日：2010-01-12
CPC分类号： B01D67/0065 , B01D61/025 , B01D67/0088 , B01D71/025 , B01D2313/90 , C02F1/441 , C02F2103/08 , C02F2305/08 , Y02A20/131
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. Functionalized nanoparticles are deposited through self assembly onto surfaces defining the nanochannels so as to decrease the final diameter of the membrane. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 功能化纳米颗粒通过自组装沉积到限定纳米通道的表面上，以便降低膜的最终直径。 还提供了制造和使用过滤器的方法。
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公开(公告)号：US08278155B2
公开(公告)日：2012-10-02
申请号：US13100456
申请日：2011-05-04
申请人： Geoffrey W. Burr , Chandrasekharan Kothandaraman , Chung Hon Lam , Xiao Hu Liu , Stephen M. Rossnagel , Christy S. Tyberg , Robert L. Wisnieff
发明人： Geoffrey W. Burr , Chandrasekharan Kothandaraman , Chung Hon Lam , Xiao Hu Liu , Stephen M. Rossnagel , Christy S. Tyberg , Robert L. Wisnieff
IPC分类号： H01L21/82 , H01L21/326 , H01L21/479
CPC分类号： H01L23/5256 , H01L23/5252 , H01L45/06 , H01L45/1206 , H01L45/1226 , H01L45/1286 , H01L45/1293 , H01L45/144 , H01L45/148 , H01L45/1683 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A reversible fuse structure in an integrated circuit is obtained through the implementation of a fuse cell having a short thin line of phase change materials in contact with via and line structures capable of passing current through the line of phase change material (fuse cell). The current is passed through the fuse cell in order to change the material from a less resistive material to a more resistive material through heating the phase change material in the crystalline state to the melting point then quickly quenching the material into the amorphous state. The reversible programming is achieved by passing a lower current through the fuse cell to convert the high resistivity amorphous material to a lower resistivity crystalline material. Appropriate sense-circuitry is integrated to read the information stored in the fuses, wherein said sense circuitry is used to enable or disable circuitry.
摘要翻译： 集成电路中的可逆熔丝结构通过实现具有短路相变材料的熔断电池获得，所述相变材料与能够使电流通过相变材料线（熔丝电池）的通孔和线结构相接触。 电流通过熔丝电池，以便通过将结晶状态的相变材料加热至熔点，从而将材料从较小电阻的材料转变为更电阻的材料，然后快速将材料淬火成非晶状态。 可逆编程通过使较低电流通过熔丝电池来实现，以将高电阻率无定形材料转换成较低电阻率的晶体材料。 集成适当的感测电路以读取存储在熔丝中的信息，其中所述感测电路用于启用或禁用电路。
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57.发明申请DNA MOTION CONTROL BASED ON NANOPORE WITH ORGANIC COATING FORMING TRANSIENT BONDING TO DNA 审中-公开基于NANOPORE的DNA运动控制与有机涂层形成瞬态结合到DNA公开(公告)号：US20120193235A1
公开(公告)日：2012-08-02
申请号：US13359743
申请日：2012-01-27
申请人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Ajay K. Royyuru , Gustavo A. Stolovitzky , Philip S. Waggoner
发明人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Ajay K. Royyuru , Gustavo A. Stolovitzky , Philip S. Waggoner
IPC分类号： G01N27/453
CPC分类号： G01N27/4473 , C12Q1/6869 , C12Q2523/303 , C12Q2565/631
摘要： A nanodevice includes a reservoir filled with a conductive fluid and a membrane separating the reservoir. The membrane includes an insulating layer. A nanopore is formed through the membrane, and an organic coating is provided on the insulating layer to form a transient bond to a DNA molecule in the nanopore. The transient bond is stronger than thermal motion, such that the transient bond can hold the DNA molecule against the thermal motion. When a voltage is applied across the membrane, the voltage will break the transient bond to move the DNA molecule through the nanopore in a controllable state.
摘要翻译： 纳米器件包括填充有导电流体的储存器和分离储存器的膜。 膜包括绝缘层。 通过膜形成纳米孔，并且在绝缘层上提供有机涂层以与纳米孔中的DNA分子形成瞬时键合。 瞬态键比热运动强，使得瞬态键可以保持DNA分子抵抗热运动。 当跨膜施加电压时，电压将破坏瞬态键合，以在可控状态下将DNA分子移动通过纳米孔。
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58.发明申请DNA SEQUENCING USING MULTIPLE METAL LAYER STRUCTURE WITH ORGANIC COATINGS FORMING TRANSIENT BONDING TO DNA BASES 审中-公开使用多种金属层结构的DNA序列与有机涂层形成瞬态结合到DNA基础公开(公告)号：US20120193231A1
公开(公告)日：2012-08-02
申请号：US13359750
申请日：2012-01-27
申请人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Gustavo A. Stolovitzky , Philip S. Waggoner , George F. Walker
发明人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Gustavo A. Stolovitzky , Philip S. Waggoner , George F. Walker
IPC分类号： G01N27/447 , G01N27/453
CPC分类号： G01N33/48721 , C12Q1/6869 , C12Q2563/116 , C12Q2563/157 , C12Q2565/607 , C12Q2565/631
摘要： A nanodevice is provided. A reservoir is filled with an ionic fluid. A membrane separates the reservoir, and the membrane includes electrode layers separated by insulating layers in which the electrode layers have an organic coating. A nanopore is formed through the membrane, and the organic coating on the electrode layers forms transient bonds to a base of a molecule in the nanopore. When a first voltage is applied to the electrode layers a tunneling current is generated by the base in the nanopore, and the tunneling current travels through the transient bonds formed to the base to be measured as a current signature for distinguishing the base.
摘要翻译： 提供了一个纳米设备。 储存器充满离子流体。 膜分离储存器，并且膜包括由绝缘层分离的电极层，其中电极层具有有机涂层。 通过膜形成纳米孔，并且电极层上的有机涂层与纳米孔中分子的碱基形成瞬态键。 当第一电压施加到电极层时，通过纳米孔中的基底产生隧道电流，并且隧道电流通过形成到待测量的基极的瞬态键作为用于区分基极的电流签名传播。
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公开(公告)号：US08084319B2
公开(公告)日：2011-12-27
申请号：US12704665
申请日：2010-02-12
IPC分类号： H01L21/8238
CPC分类号： H01L21/0337 , B81B2201/058 , B81C1/00071 , H01L21/0338
摘要： Methods are provided for fabricating devices. A first layer is formed. A hardmask on the first layer is formed. Features on the hardmask are patterned. The sizes of features on the hardmask are reduced by applying a plasma treatment process to form reduced size features. Also, the size of features on the hardmask can be enlarged to form enlarged size features by applying the plasma treatment process and/or removing the oxidized part of the feature during plasma treatment process. Another method may include a first layer formed on a substrate and a second layer formed on the first layer. First features are patterned on the first layer, and second features are patterned on the second layer. A size of second features on the second layer is closed due to the different oxidation rate of the two layers during the plasma treatment process, to form a self-sealed channel and/or self-buried trench.
摘要翻译： 提供了制造器件的方法。 形成第一层。 形成第一层上的硬掩模。 硬掩模上的特征被图案化。 通过应用等离子体处理工艺来形成尺寸减小的特征，可减少硬掩模上的特征尺寸。 此外，通过在等离子体处理过程中应用等离子体处理工艺和/或去除特征的氧化部分，可以扩大硬掩模上的特征的尺寸以形成扩大的尺寸特征。 另一种方法可以包括形成在基底上的第一层和形成在第一层上的第二层。 第一特征在第一层上被图案化，并且第二特征被图案化在第二层上。 由于在等离子体处理过程中两层的氧化速率不同，所以第二层上的第二特征的尺寸是封闭的，以形成自密封通道和/或自埋式沟槽。
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公开(公告)号：US20110227021A1
公开(公告)日：2011-09-22
申请号：US13150705
申请日：2011-06-01
IPC分类号： H01L45/00
CPC分类号： H01L45/06 , H01L45/1233 , H01L45/143 , H01L45/144 , H01L45/1641 , H01L45/1683
摘要： Techniques for forming a phase change memory cell. An example apparatus includes a substrate and a bottom electrode carried by the substrate. The bottom electrode is a thermal conductor. A phase change layer, including phase change material, is disposed over the bottom electrode. A thermal insulating layer is disposed above the phase change layer. A heater is configured to temporarily melt the phase change material such that the phase change material crystallizes without voids within a switching region after melting.
摘要翻译： 形成相变存储单元的技术。 示例性装置包括由基板承载的基板和底部电极。 底部电极是导热体。 包括相变材料的相变层设置在底部电极上。 隔热层设置在相变层的上方。 加热器被配置为暂时熔化相变材料，使得相变材料在熔化后在开关区域内没有空隙结晶。
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