Method for making a contact magnetic transfer template
    52.
    发明授权
    Method for making a contact magnetic transfer template 失效
    制造接触磁传输模板的方法

    公开(公告)号:US07160477B2

    公开(公告)日:2007-01-09

    申请号:US11044288

    申请日:2005-01-26

    IPC分类号: B44C1/22

    摘要: A contact magnetic transfer (CMT) master template is made by first adhering a plastic film to a first surface of a silicon wafer. A resist pattern is then formed on the polyimide film and the polyimide is reactive-ion-etched through the resist to form recesses. The resist is removed and a chemical-mechanical-polishing (CMP) stop layer is deposited over the non-recessed regions of the polyimide, and optionally into the bottoms of the recesses. A layer of magnetic material is then deposited over the polyimide film to fill the recesses. A CMP process is then performed to remove magnetic material above the recesses and above the non-recessed regions and continued until the CMP stop layer is reached. The resulting upper surface of the polyimide film is then a continuous planar film of magnetic islands and regions of CMP stop layer material that function as the nonmagnetic regions of the template.

    摘要翻译: 通过首先将塑料膜粘附到硅晶片的第一表面上来制造接触磁传递(CMT)主模板。 然后在聚酰亚胺膜上形成抗蚀剂图案,并通过抗蚀剂反应离子蚀刻聚酰亚胺以形成凹陷。 去除抗蚀剂,并在化学机械抛光(CMP)停止层上沉积在聚酰亚胺的非凹陷区域上,并且任选地沉积到凹部的底部中。 然后将一层磁性材料沉积在聚酰亚胺膜上以填充凹部。 然后执行CMP处理以除去凹部上方的磁性材料并且在非凹陷区域上方并继续直到达到CMP停止层。 所得到的聚酰亚胺膜的上表面是磁性岛的连续平面膜和作为模板的非磁性区域的CMP停止层材料的区域。

    Slider fabrication system for sliders with integrated electrical lapping guides
    54.
    发明授权
    Slider fabrication system for sliders with integrated electrical lapping guides 失效
    滑块制造系统,用于带集成电动研磨导轨的滑块

    公开(公告)号:US07014530B2

    公开(公告)日:2006-03-21

    申请号:US10675043

    申请日:2003-09-29

    IPC分类号: B24B49/00

    摘要: A slider is described with a resistive electro-lapping guide (ELG), which is aligned with a structure in the write head such as the throat height or trailing shield thickness and extends from the lapping region through the ABS and is connected to pads on the surface of the slider. In a second embodiment the ELG is disposed entirely in the section of the slider which will be removed by lapping. Another embodiment of the invention is a system for single slider lapping which simultaneously monitors the resistance of the read sensor or a read head ELG and at least one ELG that is aligned with a structure in the write head. A controller uses the resistance information to implement an algorithm which decides when lapping should be terminated.

    摘要翻译: 使用电阻式电动研磨引导件(ELG)描述滑块,其与写入头部中的结构对准,例如喉部高度或尾部屏蔽层厚度,并从研磨区域穿过ABS延伸并连接到 滑块的表面。 在第二实施例中,ELG完全设置在滑块的将通过研磨去除的部分中。 本发明的另一个实施例是用于单个滑块研磨的系统,其同时监视读取传感器或读取头ELG和与写入头中的结构对准的至少一个ELG的电阻。 控制器使用电阻信息来实现一种算法,该算法决定何时结束研磨。

    Method for manufacturing a perpendicular write head
    56.
    发明申请
    Method for manufacturing a perpendicular write head 失效
    用于制造垂直写头的方法

    公开(公告)号:US20050219744A1

    公开(公告)日:2005-10-06

    申请号:US10813836

    申请日:2004-03-31

    IPC分类号: G11B5/127 G11B5/147

    摘要: A method for manufacturing a write head having a small write pole tip that emits magnetic flux sufficient for effective perpendicular recording. The method creates a leading edge taper (LET) between the write pole tip and a magnetic flux guide to create a sufficient magnetic flux in the write pole. The LET is fabricated by ion milling away a sacrificial striated material whose layers have different rates of ion milling. The top layer of material thus mills away faster than lower layers, creating the required tapering of a negative mold. An endpoint material stops the milling. The LET magnetic material is then spattered into the negative mold, resulting in a well defined taper of magnetic flux shaping material extending the magnetic flux guide to the write pole tip, such that the write pole tip is able to emit sufficient magnetic flux for perpendicular recording.

    摘要翻译: 一种用于制造写头的方法,所述写头具有发射足以有效垂直记录的磁通量的小写尖端。 该方法在写极尖和磁通引导之间产生前缘锥形(LET),以在写入极中产生足够的磁通量。 LET通过离子铣削除去具有不同离子铣削速率的牺牲条纹材料来制造。 因此,顶层材料的磨料速度比较低,从而产生了负模具所需的锥形化。 端点材料停止铣削。 然后将LET磁性材料溅入阴模中,产生明确限定的磁通量成形材料的锥形,该磁通量成形材料将磁通引导件延伸到写入磁极尖端,使得写入磁极尖端能够发射足够的磁通量用于垂直记录 。

    Apparatus for patterning a self-aligned coil using a damascene process
    57.
    发明申请
    Apparatus for patterning a self-aligned coil using a damascene process 有权
    用于使用镶嵌工艺图案化自对准线圈的装置

    公开(公告)号:US20050047014A1

    公开(公告)日:2005-03-03

    申请号:US10652877

    申请日:2003-08-29

    IPC分类号: G11B5/127 G11B5/147

    CPC分类号: G11B5/127

    摘要: An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.

    摘要翻译: 公开了一种使用镶嵌工艺图案化自对准线圈的装置。 在设置在第一极层上的第一绝缘层中形成线圈腔。 隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。 在线圈袋中形成铜,并在绝缘层上形成铜。 铜平坦化到绝缘层。 自对准线圈工艺将更多的铜包装到相同的线圈袋中,并松弛线圈对准公差。 由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚,所以防止了突起。

    Methods of forming an electrical connection in a magnetic head using a damascene process
    58.
    发明申请
    Methods of forming an electrical connection in a magnetic head using a damascene process 失效
    使用镶嵌工艺在磁头中形成电连接的方法

    公开(公告)号:US20050047013A1

    公开(公告)日:2005-03-03

    申请号:US10651532

    申请日:2003-08-29

    IPC分类号: G11B5/127 G11B5/147

    摘要: In one illustrative example disclosed, a method for use in making a magnetic head involves forming a thermal-assist heater for the magnetic head; forming a plurality of coil layers of a write coil using a damascene process; and simultaneously forming an electrical connection to the thermal-assist heater in the same damascene process used to form the write coil. Advantageously, fabrication steps are reduced using a parallel process that provides for relatively small dimensions and reduces the possibility of electrical shorting. The method may be alternatively used to form an electrical connection to any other suitable electrical device for the magnetic head, such as an electrical lapping guide (ELG) or other component.

    摘要翻译: 在所公开的一个说明性示例中,用于制造磁头的方法包括形成用于磁头的热辅助加热器; 使用镶嵌工艺形成写入线圈的多个线圈层; 并且在用于形成写入线圈的相同的镶嵌工艺中同时形成与热辅助加热器的电连接。 有利的是,使用提供相对小的尺寸并减少电短路的可能性的并行工艺来减少制造步骤。 该方法可以替代地用于形成用于磁头的任何其它合适的电气装置的电连接,例如电研磨引导件(ELG)或其它部件。

    Magnetic bias structure for magnetoresistive sensor having a scissor structure
    59.
    发明授权
    Magnetic bias structure for magnetoresistive sensor having a scissor structure 有权
    具有剪刀结构的磁阻传感器的磁偏置结构

    公开(公告)号:US08907666B2

    公开(公告)日:2014-12-09

    申请号:US13251100

    申请日:2011-09-30

    IPC分类号: G01R33/02 G01R33/00 G01R33/09

    摘要: A scissor style magnetic sensor having a novel hard bias structure for improved magnetic biasing robustness. The sensor includes a sensor stack that includes first and second magnetic layers separated by a non-magnetic layer such as an electrically insulating barrier layer or an electrically conductive spacer layer. The first and second magnetic layers have magnetizations that are antiparallel coupled, but that are canted in a direction that is neither parallel with nor perpendicular to the air bearing surface by a magnetic bias structure. The magnetic bias structure includes a neck portion extending from the back edge of the sensor stack and having first and second sides that are aligned with first and second sides of the sensor stack. The bias structure also includes a tapered or wedged portion extending backward from the neck portion.

    摘要翻译: 具有改进的磁偏置鲁棒性的新型硬偏置结构的剪刀式磁传感器。 该传感器包括传感器堆叠,该传感器堆叠包括由诸如电绝缘阻挡层或导电隔离层之类的非磁性层分开的第一和第二磁性层。 第一和第二磁性层具有反平行耦合的磁化,但是通过磁偏置结构在不与空气轴承表面平行或垂直的方向上倾斜。 磁偏置结构包括从传感器堆叠的后边缘延伸的颈部,并且具有与传感器堆叠的第一和第二侧对准的第一和第二侧。 偏置结构还包括从颈部部分向后延伸的锥形或楔形部分。

    MAGNETIC BIAS STRUCTURE FOR MAGNETORESISTIVE SENSOR HAVING A SCISSOR STRUCTURE
    60.
    发明申请
    MAGNETIC BIAS STRUCTURE FOR MAGNETORESISTIVE SENSOR HAVING A SCISSOR STRUCTURE 有权
    具有扫描结构的磁传感器的磁偏置结构

    公开(公告)号:US20130082696A1

    公开(公告)日:2013-04-04

    申请号:US13251100

    申请日:2011-09-30

    IPC分类号: G01R33/02 C23F1/04

    摘要: A scissor style magnetic sensor having a novel hard bias structure for improved magnetic biasing robustness. The sensor includes a sensor stack that includes first and second magnetic layers separated by a non-magnetic layer such as an electrically insulating barrier layer or an electrically conductive spacer layer. The first and second magnetic layers have magnetizations that are antiparallel coupled, but that are canted in a direction that is neither parallel with nor perpendicular to the air bearing surface by a magnetic bias stricture. The magnetic bias structure includes a neck portion extending from the back edge of the sensor stack and having first and second sides that are aligned with first and second sides of the sensor stack. The bias structure also includes a tapered or wedged portion extending backward from the neck portion.

    摘要翻译: 具有改进的磁偏置鲁棒性的新型硬偏置结构的剪刀式磁传感器。 该传感器包括传感器堆叠,该传感器堆叠包括由诸如电绝缘阻挡层或导电隔离层之类的非磁性层分开的第一和第二磁性层。 第一和第二磁性层具有反平行耦合的磁化,但是通过磁偏置狭窄不能平行于或垂直于空气轴承表面的方向倾斜。 磁偏置结构包括从传感器堆叠的后边缘延伸的颈部,并且具有与传感器堆叠的第一和第二侧对准的第一和第二侧。 偏置结构还包括从颈部部分向后延伸的锥形或楔形部分。