MEASUREMENT OPTICAL SYSTEM FOR METROLOGY INSPECTION AND METHOD OF MEASURING OVERLAY USING THE SAME

    公开(公告)号:US20250085642A1

    公开(公告)日:2025-03-13

    申请号:US18882312

    申请日:2024-09-11

    Abstract: A measurement optical system and an overlay measurement method using the same are provided. The measurement optical system includes: a light source configured to emit infrared light; a light splitter configured to reflect, from the light source and to a subject, a first portion of the infrared light incident to the light splitter; a photodetector on a same optical axis as the light splitter and configured to receive a second portion of the infrared light reflected from the subject; a first lens optical system between the light splitter and the photodetector; and a second lens optical system between the first lens optical system and the photodetector, wherein the subject may include an alignment key on which a meta key is provided.

    ZOOMABLE IMAGE SENSOR AND IMAGE SENSING METHOD

    公开(公告)号:US20240022818A1

    公开(公告)日:2024-01-18

    申请号:US18477214

    申请日:2023-09-28

    CPC classification number: H04N23/69 H04N23/55 H04N23/80

    Abstract: An image sensor includes a plurality of lens elements, each lens element of the plurality of lens elements including a plurality of scatterers arranged to concentrate light incident on the image sensor; and a sensing element configured to sense light passing through the plurality of lens elements, wherein one lens element of the plurality of lens elements has a first focal length that is different from a second focal length of another lens element of the plurality of lens elements and is separated from the sensing element by the first focal length.

    STRUCTURED LIGHT PROJECTOR AND ELECTRONIC APPARATUS INCLUDING THE SAME

    公开(公告)号:US20230056804A1

    公开(公告)日:2023-02-23

    申请号:US17980376

    申请日:2022-11-03

    Abstract: A structured light projector includes a light source configured to emit light, a structured light pattern mask configured to receive the light emitted by the light source and including a first region configured to generate a first structured light having a first polarization and a second region configured to generate a second structured light having a second polarization that is different from the first polarization, and a polarization multiplexing deflector configured to deflect the first structured light and the second structured light generated by the structured light pattern mask, to different directions, respectively.

    CAMERA WITH META-LENS AND ELECTRONIC DEVICE INCLUDING SAME

    公开(公告)号:US20220232148A1

    公开(公告)日:2022-07-21

    申请号:US17588102

    申请日:2022-01-28

    Abstract: An electronic device according to various embodiments disclosed herein may include a lens assembly having a structure in which at least one meta-lens and a spacer member are stacked, and an image sensor assembly attached to one side of the lens assembly to receive light passing through the lens assembly and convert the light into an optical signal. The spacer member may be fixed to one side of the lens assembly between the image sensor assembly and the lens assembly such that a cavity is defined by an inner side surface of the spacer member, a bottom surface of the lens assembly, and a top surface of the image sensor assembly.

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