Method of manufacturing semiconductor device
    52.
    发明授权
    Method of manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08017482B2

    公开(公告)日:2011-09-13

    申请号:US12974819

    申请日:2010-12-21

    IPC分类号: H01L21/336

    摘要: The invention provides a method of manufacturing a semiconductor device at low cost in which the gate insulation film having a trench structure is not damaged by arsenic ions when the emitter layer or the like is formed and the insulation breakdown voltage is enhanced. A gate electrode made of polysilicon formed in a trench is thermally oxidized in a high temperature furnace or the like to form a thick polysilicon thermal oxide film on the gate electrode. Impurity ions are then ion-implanted to form an N type semiconductor layer that is to be an emitter layer or the like. At this time, the polysilicon thermal oxide film is formed thicker than the projected range Rp of impurity ions in the silicon oxide film for forming the N type semiconductor layer as the emitter layer or the like by ion implantation. This prevents a gate insulation film between the gate electrode and the N type semiconductor layer from being damaged by the impurity ions.

    摘要翻译: 本发明提供了一种以低成本制造半导体器件的方法,其中当形成发射极层等时,具有沟槽结构的栅极绝缘膜不被砷离子损坏并且绝缘击穿电压增强。 在沟槽中形成的由多晶硅形成的栅电极在高温炉等中被热氧化,以在栅电极上形成厚的多晶硅热氧化膜。 然后将杂质离子离子注入以形成作为发射极层等的N型半导体层。 此时,通过离子注入,多晶硅热氧化膜形成得比用于形成N型半导体层的氧化硅膜中的杂质离子的投射范围Rp比发射极层等厚。 这防止了栅电极和N型半导体层之间的栅极绝缘膜被杂质离子损坏。

    SEMICONDUCTOR DEVICE
    53.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号:US20080283889A1

    公开(公告)日:2008-11-20

    申请号:US12101959

    申请日:2008-04-11

    IPC分类号: H01L29/94 H01L29/92

    摘要: The present invention aims to enhance the reliability of a semiconductor device having first through fourth capacitive elements. The first through fourth capacitive elements are disposed over a semiconductor substrate. A series circuit of the first and second capacitive elements and a series circuit of the third and fourth capacitive elements are coupled in parallel between first and second potentials. Lower electrodes of the first and third capacitive elements are respectively formed by a common conductor pattern and coupled to the first potential. Lower electrodes of the second and fourth capacitive elements are respectively formed by a conductor pattern of the same layer as the above conductor pattern and coupled to the second potential. Upper electrodes of the first and second capacitive elements are respectively formed by a common conductor pattern and brought to a floating potential. Upper electrodes of the third and fourth capacitive elements are respectively formed by a conductor pattern of the same layer as the above conductor pattern and brought to a floating potential, but not coupled to the upper electrodes of the first and second capacitive elements by a conductor.

    摘要翻译: 本发明旨在提高具有第一至第四电容元件的半导体器件的可靠性。 第一至第四电容元件设置在半导体衬底上。 第一和第二电容元件的串联电路和第三和第四电容元件的串联电路在第一和第二电位之间并联耦合。 第一和第三电容元件的下电极分别由公共导体图案形成并耦合到第一电位。 第二和第四电容元件的下电极分别由与上述导体图案相同的层的导体图案形成并耦合到第二电位。 第一和第二电容元件的上电极分别由公共导体图形形成并且具有浮动电位。 第三和第四电容元件的上电极分别由与上述导体图案相同的层的导体图形形成浮动电位,但不通过导体耦合到第一和第二电容元件的上电极。

    Photo-electric conversion tube with optical fiber plate
    56.
    发明授权
    Photo-electric conversion tube with optical fiber plate 失效
    带光纤板的光电转换管

    公开(公告)号:US4914349A

    公开(公告)日:1990-04-03

    申请号:US112490

    申请日:1987-10-26

    IPC分类号: H01J40/02 H01J29/89 H01J43/28

    CPC分类号: H01J43/28 H01J29/892

    摘要: A photo electric conversion tube in which a translucent photocathode surface is provided inside of an incident light window. The incident light window is made of glass plate and an optical fiber plate bonded to at least part of the glass plate or just the optical fiber plate on the photocathode surface. The optical fiber plate contains fibers which are inclined at an angle to the photocathode surface.

    摘要翻译: 一种光电转换管,其中在入射光窗内设置有半透明光电阴极表面。 入射光窗由玻璃板和光纤板制成,该光纤板与玻璃板的至少一部分或仅在光电阴极表面上的光纤板接合。 光纤板含有与光电阴极表面倾斜一定角度的纤维。

    Electrostatic copying process and apparatus
    57.
    发明授权
    Electrostatic copying process and apparatus 失效
    静电复印工艺及设备

    公开(公告)号:US4380579A

    公开(公告)日:1983-04-19

    申请号:US88655

    申请日:1979-10-26

    摘要: An electrostatic copying apparatus has a housing having at its top surface a transparent plate on which to place an original to be copied, a rotary drum disposed within the housing and having a photosensitive member on its surface, a charging, a developing, a transferring and a cleaning mechanism which are successively arranged around the rotary drum in the moving direction of its surface, an optical system for projecting the image of the original onto the surface of the rotary drum between the charging means and the developing means, and a receptor sheet conveying system for transferring a receptor sheet through a transfer station defined between the surface of the rotary drum and the transferring mechanism. A support is mounted on the housing so that it is slidable in the forward and rearward directions between its operating position within the housing and its pulled-out position ahead of the housing, and the rotary drum and the developing device are mounted on the support so that they can be separately and independently detached from the support. An electrostatic copying process can be efficiently practiced by using this apparatus.

    摘要翻译: 静电复印设备具有壳体,其顶表面具有透明板,放置要复制的原件,设置在壳体内的旋转鼓,表面具有感光构件,充电,显影,转印和 一个在其表面移动方向上依次布置在旋转滚筒周围的清洁机构,用于将原稿的图像投影到充电装置和显影装置之间的旋转滚筒表面上的光学系统,以及传送 用于通过限定在旋转鼓的表面和转印机构之间的转印站转印接收片的系统。 支撑件安装在壳体上,使得其可以在壳体内的操作位置和其在壳体前方的拉出位置之间在前后方向上滑动,并且旋转鼓和显影装置安装在支撑件上 它们可以单独地和独立地从支撑体分离。 通过使用该装置可以有效地实施静电复印处理。

    Computer-assisted holographic image formation technique which determines
interference pattern data used to form the holographic
    58.
    发明授权
    Computer-assisted holographic image formation technique which determines interference pattern data used to form the holographic 失效
    计算机辅助全息图像形成技术,其确定用于形成全息的干涉图案数据

    公开(公告)号:US5347375A

    公开(公告)日:1994-09-13

    申请号:US981296

    申请日:1992-11-25

    摘要: A computer-generated hologram recording apparatus includes a diffraction image generator which receives an input image signal representing an object and computes a corresponding diffraction pattern with a first sampling density. An interpolation processor is connected to the diffraction image generator via an intermediate page memory. The interpolation processor subjects the diffraction pattern to the interpolation process to create an interpolated diffraction pattern with an increased second sampling density. An interference pattern generator is connected to the interpolation processor to compute an interference caused pattern between the interpolated diffraction pattern and a reference wave by converting amplitude and phase distributions of the input image signal into the intensity distribution. A multi-beam scan printing apparatus records the interference pattern on a previously selected recording medium for later reproduction by use of white light.

    摘要翻译: 计算机生成的全息图记录装置包括:衍射图像生成器,其接收表示对象的输入图像信号,并以第一采样密度计算相应的衍射图案。 内插处理器经由中间页存储器连接到衍射图像生成器。 内插处理器将衍射图案进行插值处理,以产生具有增加的第二采样密度的内插衍射图案。 干涉图案发生器连接到内插处理器,通过将输入图像信号的幅度和相位分布转换成强度分布来计算内插衍射图案和参考波之间的干涉引起的图形。 多光束扫描打印设备将干涉图案记录在先前选择的记录介质上,以便通过使用白光进行后续再现。

    Automatic document conveying device
    60.
    发明授权
    Automatic document conveying device 失效
    自动文件输送装置

    公开(公告)号:US5058874A

    公开(公告)日:1991-10-22

    申请号:US322914

    申请日:1989-03-14

    IPC分类号: G03G15/00 B65H5/22

    CPC分类号: G03G15/60 G03G2215/00185

    摘要: An automatic document conveying device for use with an image processing machine having a transparent plate on which to place documents. The device includes an opening-closing frame and a document table. A conveyor roller is rotatably mounted in the opening-closing frame. A document delivery device is provided for delivering sheet-like documents from the document table. The document delivered from the document table is introduced into a required position on the transparent plate by the conveyor roller. The rotation of the conveyor roller in the introducing direction is stopped while the introduced document is still between the conveyor roller and the transparent plate. A guiding device which permits advance of the document from the document table to the transparent plate but hampers movement of the document from the transparent plate toward the document table and defects it upwardly, is provided between the document table and the conveyor roller. When the conveyor roller is rotated in the carrying direction, the document on the transparent plate is deflected upwardly by the guiding device and discharged through a discharge opening formed in the opening-closing frame.