公开(公告)号：US06429117B1

公开(公告)日：2002-08-06

申请号：US09619018

申请日：2000-07-19

申请人： John Sudijono ,  Yakub Aliyu ,  Mei Sheng Zhou ,  Simon Chooi ,  Subhash Gupta ,  Sudipto Ranendra Roy ,  Paul Kwok Keung Ho ,  Yi Xu

发明人： John Sudijono ,  Yakub Aliyu ,  Mei Sheng Zhou ,  Simon Chooi ,  Subhash Gupta ,  Sudipto Ranendra Roy ,  Paul Kwok Keung Ho ,  Yi Xu

IPC分类号： H01L214763

CPC分类号： H01L21/76831 ,  H01L21/3105 ,  H01L21/31633 ,  H01L21/31695 ,  H01L21/76807 ,  H01L21/76814 ,  H01L21/76826 ,  Y10S438/958

摘要： A method of preventing metal penetration and diffusion from metal structures formed over a semiconductor structure, comprising the following steps. A semiconductor structure including a patterned dielectric layer is provided. The patterned dielectric layer includes an opening and an upper surface. The dielectric layer surface is then passivated to form a passivation layer. A metal plug is formed within the dielectric layer opening. The passivation layer prevents penetration and diffusion of metal out from the metal plug into the semiconductor structure and the patterned dielectric layer.

摘要翻译： 一种防止在半导体结构上形成的金属结构的金属渗透和扩散的方法，包括以下步骤。 提供包括图案化介电层的半导体结构。 图案化电介质层包括开口和上表面。 然后将介电层表面钝化以形成钝化层。 在电介质层开口内形成金属塞。 钝化层防止金属从金属插塞渗入并扩散到半导体结构和图案化的介电层中。

公开(公告)号：US06309982B1

公开(公告)日：2001-10-30

申请号：US09803188

申请日：2001-03-12

申请人： Simon Chooi ,  Yi Xu ,  Yakub Aliyu ,  Mei-Sheng Zhou ,  John Leonard Sudijono ,  Subhash Gupta ,  Sudipto Ranendra Roy ,  Paul Ho

发明人： Simon Chooi ,  Yi Xu ,  Yakub Aliyu ,  Mei-Sheng Zhou ,  John Leonard Sudijono ,  Subhash Gupta ,  Sudipto Ranendra Roy ,  Paul Ho

IPC分类号： H01L2131

CPC分类号： H01L21/02129 ,  H01L21/02126 ,  H01L21/02274 ,  H01L21/3115 ,  H01L21/31612 ,  H01L21/31625

摘要： A method for reducing copper diffusion into an inorganic dielectric layer adjacent to a copper structure by doping the inorganic dielectric layer with a reducing agent (e.g. phosphorous, sulfur, or both) during plasma enhanced chemical vapor deposition. The resulting doped inorganic dielectric layer can reduce copper diffusion without a barrier layer reducing fabrication cost and cycle time, as well as reducing RC delay.

摘要翻译： 一种通过在等离子体增强化学气相沉积期间通过用还原剂（例如磷，硫或两者）掺杂无机介电层来减少铜扩散到与铜结构相邻的无机电介质层中的方法。 所得到的掺杂无机介电层可以减少铜扩散而无需阻挡层降低制造成本和循环时间，并减少RC延迟。

公开(公告)号：US06265321B1

公开(公告)日：2001-07-24

申请号：US09550264

申请日：2000-04-17

申请人： Simon Chooi ,  Mei-Sheng Zhou ,  Yi Xu

发明人： Simon Chooi ,  Mei-Sheng Zhou ,  Yi Xu

IPC分类号： H01L2100

CPC分类号： H01L21/7682 ,  H01L21/76807

摘要： A method for reducing RC delay in integrated circuits by lowering the dielectric constant of the intermetal dielectric material between metal interconnects or metal damascene interconnects is described. The dielectric constant of the intermetal dielectric is lowered by introducing air into the intermetal dielectric between metal interconnections. An air bridge comprising a porous material, preferably amorphous silicon, porous silicon oxide, or porous silsesquioxane, is deposited over a layer containing a reactive organic material. An oxygen plasma treatment or an anisotropic etching through the pores in the air bridge layer removes at least a portion of the reactive material, leaving air plugs within the intermetal dielectric.

摘要翻译： 描述了通过降低金属互连或金属镶嵌互连之间的金属间电介质材料的介电常数来减小集成电路中的RC延迟的方法。 通过在金属互连之间的金属间电介质中引入空气来降低金属间电介质的介电常数。 包括多孔材料，优选非晶硅，多孔氧化硅或多孔倍半硅氧烷的空气桥被沉积在含有反应性有机材料的层上。 通过空气桥接层中的孔的氧等离子体处理或各向异性蚀刻去除至少一部分反应性材料，从而将空气塞留在金属间电介质内。

公开(公告)号：US06261955B1

公开(公告)日：2001-07-17

申请号：US09618262

申请日：2000-07-18

申请人： Yakub Aliyu ,  Simon Chooi ,  Mei Sheng Zhou ,  John Leonard Sudijono ,  Subhash Gupta ,  Sudipto Ranendra Roy ,  Paul Kwok Keung Ho ,  Yi Xu

发明人： Yakub Aliyu ,  Simon Chooi ,  Mei Sheng Zhou ,  John Leonard Sudijono ,  Subhash Gupta ,  Sudipto Ranendra Roy ,  Paul Kwok Keung Ho ,  Yi Xu

IPC分类号： H01L2144

CPC分类号： H01L21/02046 ,  C23F1/12 ,  H01L21/02079 ,  Y10S438/906

摘要： An effective copper decontamination method in the fabrication of integrated circuits is achieved. An organic-based HFACAC decontamination compound in vapor phase is sprayed over elemental copper found on equipment or tools or as a spill wherein the compound reacts with all of the elemental copper and forms a volatile compound that can be flushed away thereby completing copper decontamination.

摘要翻译： 实现了集成电路制造中有效的铜去污方法。 蒸气相中的基于有机的HFACAC去污化合物喷洒在设备或工具上发现的元素铜上，或作为溢出物喷洒，其中化合物与所有元素铜反应并形成可被冲洗掉的挥发性化合物，从而完成铜去污。

公开(公告)号：US6124194A

公开(公告)日：2000-09-26

申请号：US439365

申请日：1999-11-15

申请人： Kai Shao ,  Yi Xu ,  Cerdin Lee ,  Shao-Fu Sanford Chu

发明人： Kai Shao ,  Yi Xu ,  Cerdin Lee ,  Shao-Fu Sanford Chu

IPC分类号： H01L21/768 ,  H01L23/525 ,  H07L29/00

CPC分类号： H01L21/7681 ,  H01L23/5252 ,  H01L2924/0002

摘要： A method of fabricating an anti-fuse module and dual damascene interconnect structure comprises the following steps. A semiconductor structure having at least two exposed metal lines covered by a first dielectric layer is provided. A first metal line is within an anti-fuse area and a second metal line is within an interconnect area. A first metal via is formed within the first dielectric layer within the anti-fuse area with the first metal via contacting the first metal line. A SiN layer is deposited over the first dielectric layer and the first metal via. The SiN layer is patterned to form at least two openings. A first opening exposes the first metal via, and a second opening exposes a portion of the first dielectric layer above the second metal line. A fusing element layer is deposited and patterned over the patterned SiN layered structure to form a fusing element over the first metal via. Simultaneously, an anti-fuse metal line is formed over the fusing element to form an anti-fuse module within the anti-fuse area, and a dual damascene interconnect is formed over, and contacting with, the second metal line and within the interconnect area.

摘要翻译： 一种制造抗熔丝模块和双镶嵌互连结构的方法包括以下步骤。 提供具有被第一介电层覆盖的至少两个暴露的金属线的半导体结构。 第一金属线在反熔丝区内，第二金属线在互连区内。 第一金属通孔形成在反熔丝区域内的第一电介质层内，第一金属通孔接触第一金属线。 在第一介电层和第一金属通孔上沉积SiN层。 图案化SiN层以形成至少两个开口。 第一开口暴露第一金属通孔，第二开口暴露第二电介质层的第二金属线上方的一部分。 在图案化的SiN层状结构上沉积并图案化定影元件层，以在第一金属通孔之上形成定影元件。 同时，在熔断元件上方形成抗熔丝金属线，以在反熔丝区域内形成反熔丝模块，并且在第二金属线之间和互连区内形成双面镶嵌互连 。

公开(公告)号：US20220255833A1

公开(公告)日：2022-08-11

申请号：US17731719

申请日：2022-04-28

申请人： Zahra Ferdowsi ,  Michael Cieslak ,  Michael David Marr ,  Aysegul Cansizoglu ,  Xiaolin Shi ,  Hussein Mehanna ,  Caleb Ogden ,  Yi Xu

发明人： Zahra Ferdowsi ,  Michael Cieslak ,  Michael David Marr ,  Aysegul Cansizoglu ,  Xiaolin Shi ,  Hussein Mehanna ,  Caleb Ogden ,  Yi Xu

IPC分类号： H04L43/55 ,  H04L67/125 ,  H04L67/1087 ,  H04L41/50

摘要： Clustering a plurality of client devices running an application as a function of a data structure such that the plurality of client devices are each assigned a cluster. Client devices having similar performance metrics are assigned the same cluster. An operation of the application is modified as a function of the performance metrics of the client device. The modification of application operation is performed by turning certain features of the application on and off using a rule based on device cluster.

公开(公告)号：US11194237B2

公开(公告)日：2021-12-07

申请号：US16198749

申请日：2018-11-21

申请人： Yi Xu

发明人： Yi Xu

IPC分类号： G03B21/16 ,  G02B27/30 ,  G03B21/00 ,  G03B21/20 ,  G02B27/28

摘要： The invention discloses a novel projector, comprising a sealed shell of electronic projector, an illumination system and a LED light source system, wherein the sealed shell is provided with an optical and internal circulation cooling assembly inside by area; the optical assembly comprises the projector working assembly. The invention is inside a sealed shell; the cold air far below normal temperature generated by semiconductor refrigeration piece takes away the heat on optical device, improving the heat dissipation efficiency. Simultaneously, because the cold air is inside a sealed shell, the optical device can be placed in a dust-free environment. The polarized light conversion prism converts the useless P light in conventional projector imagining into the useful S light, improving the light utilization, and increasing the brightness of projection at the same power. The LED light source is collimated by the collimating lens to meet PCS conversion requirement for polarized light converter.

公开(公告)号：US08659971B2

公开(公告)日：2014-02-25

申请号：US13541600

申请日：2012-07-03

申请人： Lei Wang ,  Yi Xu ,  Xiaojin Guan

发明人： Lei Wang ,  Yi Xu ,  Xiaojin Guan

IPC分类号： G11C7/00

CPC分类号： G11C16/12 ,  G11C5/145 ,  G11C8/08

摘要： A word-line voltage regulating circuit and a single power supply memory are disclosed. The word-line voltage regulating circuit includes: a charge pump for raising an input voltage to a desired value and outputting the raised input voltage as an output voltage; a controller for inputting a refresh signal to the charge pump according to the output voltage of the charge pump; and a comparator for inputting a feedback signal to the charge pump according to a comparison result between the output voltage of the charge pump and a reference voltage. The charge pump works under control of the refresh signal when the memory is in an active mode, and works under control of the feedback signal when the memory is in a standby mode. The word-line voltage regulating circuit can effectively reduce the power consumption and can meet the requirement for proportional scale-down of integrated circuits.

摘要翻译： 公开了一种字线电压调节电路和单电源存储器。 字线电压调节电路包括：用于将输入电压提高到期望值并输出升高的输入电压作为输出电压的电荷泵; 控制器，用于根据电荷泵的输出电压向电荷泵输入刷新信号; 以及比较器，用于根据电荷泵的输出电压和参考电压之间的比较结果将反馈信号输入到电荷泵。 当存储器处于活动模式时，电荷泵在刷新信号的控制下工作，并且当存储器处于待机模式时在反馈信号的控制下工作。 字线电压调节电路可以有效降低功耗，满足集成电路比例缩小的要求。

公开(公告)号：USD633443S1

公开(公告)日：2011-03-01

申请号：US29278786

申请日：2007-04-10

申请人： Junxing Wang ,  Chengcun Wang ,  Yi Xu ,  Qi Chen ,  Dehua Zhou ,  Jisheng Xia ,  Hongchun Ding ,  Chaojian Zhang

设计人： Junxing Wang ,  Chengcun Wang ,  Yi Xu ,  Qi Chen ,  Dehua Zhou ,  Jisheng Xia ,  Hongchun Ding ,  Chaojian Zhang

公开(公告)号：US07850974B2

公开(公告)日：2010-12-14

申请号：US12575909

申请日：2009-10-08

申请人： Magnus Hook ,  Yi Xu ,  Jouko V. Sillanpaa ,  Narayana Sthanam ,  Karthe Ponnuraj ,  Joseph M. Patti ,  Jeff T. Hutchins ,  Andrea Hall ,  Maria G. Bowden

发明人： Magnus Hook ,  Yi Xu ,  Jouko V. Sillanpaa ,  Narayana Sthanam ,  Karthe Ponnuraj ,  Joseph M. Patti ,  Jeff T. Hutchins ,  Andrea Hall ,  Maria G. Bowden

IPC分类号： A61K39/02

CPC分类号： G01N33/56916 ,  A61K38/00 ,  C07K14/315 ,  C07K16/1267 ,  G01N33/56911 ,  G06F19/16 ,  G06F19/22 ,  Y02A90/26 ,  Y10S435/975

摘要： A bioinformatic method for identifying and isolating proteins and peptides with MSCRAMM®-like characteristics from Gram positive bacteria, such as Enterococcus, Staphylococcus, Streptococcus and Bacillus bacteria, and proteins and peptides obtained thereby are provided which can be utilized in methods to prevent and treat infections caused by Gram-positive bacteria. The method involves identifying from sequence information those proteins with a putative C-terminal LPXTG (SEQ ID NO:1) cell wall sorting signal and other structural similarities to MSCRAMM® proteins having the LPXTG-anchored cell wall proteins. The MSCRAMM® proteins and immunogenic regions therein that are identified and isolated using the present invention may be useful in the diagnosis, treatment or prevention of Gram positive bacterial infections.

摘要翻译： 提供了用于从革兰氏阳性细菌如肠球菌属，葡萄球菌属，链球菌属和芽孢杆菌属细菌鉴定和分离具有MSCRAMM®样特征的蛋白质和肽的生物信息学方法，以及由此得到的蛋白质和肽，其可用于预防和治疗 革兰氏阳性菌引起的感染。 该方法包括从序列信息中鉴定具有推定的C末端LPXTG（SEQ ID NO：1）细胞壁分选信号的蛋白质和具有LPXTG锚定的细胞壁蛋白质的MSCRAMM®蛋白质的其他结构相似性的蛋白质。 使用本发明鉴定和分离的MSCRAMM蛋白质及其免疫原性区域可用于革兰氏阳性细菌感染的诊断，治疗或预防。