Device for displacement of small liquid volumes along a micro-catenary line by electrostatic forces
    51.
    发明授权
    Device for displacement of small liquid volumes along a micro-catenary line by electrostatic forces 有权
    用于通过静电力沿着微型悬链线移动小液体体积的装置

    公开(公告)号:US07052244B2

    公开(公告)日:2006-05-30

    申请号:US10457375

    申请日:2003-06-10

    Abstract: The invention relates to a device for displacement of at least a small volume of liquid (5) under the effect of an electrical control, including a substrate (1) provided with first electrically conducting means (2), the device also comprising second electrically conducting means (3) arranged facing the first electrically conducting means (2), the first electrically conducting means and the second electrically conducting means possibly being connected to electrical power supply means to enable the application of electrostatic forces to the small liquid volume (5). The second electrically conducting means include at least one conducting wire (3) arranged parallel to the substrate and at a fixed distance from the substrate to enable displacement of the small volume of liquid (5) along said conducting wire (3) under the effect of the applied electrostatic forces.

    Abstract translation: 本发明涉及一种用于在电控制的作用下移动至少少量液体(5)的装置,包括设置有第一导电装置(2)的基板(1),该装置还包括第二导电 相对于第一导电装置(2)布置的装置(3),第一导电装置和第二导电装置可能连接到电源装置,以便能够将静电力施加到小液体容积(5)。 第二导电装置包括至少一个导线(3),其平行于衬底布置并且距离衬底固定距离,以使得能够沿着所述导线(3)沿着所述导线(3)移动小体积的液体(5) 所施加的静电力。

    Scanning micro-elements for optical systems
    55.
    发明授权
    Scanning micro-elements for optical systems 失效
    扫描光学系统的微元件

    公开(公告)号:US5818623A

    公开(公告)日:1998-10-06

    申请号:US679754

    申请日:1996-07-10

    CPC classification number: G02B26/0858

    Abstract: This invention relates to a scanning micro-element for an optical system, characterized in that it comprises: a substrate (12), a membrane (14, 16) made of a dielectric material deposited on a substrate surface, the membrane defining two planes making a non-zero angle .alpha. between them, part (14) of the membrane including a reflecting area (20) capable of being deflected along at least a first direction above a cavity formed in the substrate, means (22, 24, 26, 28) to deflect this part of the membrane along at least one direction.

    Abstract translation: 本发明涉及一种用于光学系统的扫描微元件,其特征在于其包括:基底(12),由沉积在基底表面上的电介质材料制成的膜(14,16),所述膜限定两个平面 在它们之间的非零角度α,膜的部分(14)包括能够沿着形成在衬底中的空腔上方的至少第一方向偏转的反射区域(20),装置(22,24,26,28 )以沿着至少一个方向偏转膜的该部分。

    Process for the micromechanical fabrication of nozzles for liquid jets
    56.
    发明授权
    Process for the micromechanical fabrication of nozzles for liquid jets 失效
    用于液体喷嘴的喷嘴的微机械制造工艺

    公开(公告)号:US5781994A

    公开(公告)日:1998-07-21

    申请号:US564600

    申请日:1995-11-29

    CPC classification number: B41J2/1606 Y10T29/49401

    Abstract: A process for the micromechanical fabrication of nozzles for ink jets includes forming a groove on a surface of a first substrate, securing the first substrate to a second substrate to form an assembly in which the second substrate covers the groove to form a channel having walls, and then forming an internal protective coating within the channel by thermal oxidation of the walls of the channel. The first and second substrates are then cut along a plane extending perpendicular to the channel thereby to form a nozzle for dispensing a liquid jet. Scales, formed as a result of the cutting operations, are formed on the internal protective coating rather than directly on the walls of the channel. These scales then are removed from the nozzle by eliminating the internal protective coating.

    Abstract translation: 用于喷墨喷嘴的微机械制造的方法包括在第一基板的表面上形成凹槽,将第一基板固定到第二基板以形成组件,其中第二基板覆盖凹槽以形成具有壁的通道, 然后通过通道的壁的热氧化在通道内形成内部保护涂层。 然后沿着垂直于通道延伸的平面切割第一和第二基底,从而形成用于分配液体射流的喷嘴。 作为切割操作的结果形成的鳞片形成在内部保护涂层上,而不是直接在通道的壁上。 然后通过消除内部保护涂层从喷嘴中除去这些鳞片。

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