公开(公告)号：US20140341679A1

公开(公告)日：2014-11-20

申请号：US14223553

申请日：2014-03-24

申请人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

公开(公告)号：US08822209B2

公开(公告)日：2014-09-02

申请号：US12171984

申请日：2008-07-11

申请人： Kevin R. Oldenburg ,  Andrew B. Holt ,  Robert L. Weeks

发明人： Kevin R. Oldenburg ,  Andrew B. Holt ,  Robert L. Weeks

IPC分类号： C12M3/00 ,  C12M1/12 ,  C12M1/00 ,  C12M1/24 ,  C12M1/06

CPC分类号： C12M23/28 ,  B01F7/0025 ,  B01F7/16 ,  C12M23/08 ,  C12M27/02 ,  Y10T29/49826

摘要： A disposable spinner flask includes an asymmetric container, a lid, and a spinning mechanism. The container can be sealingly coupled to the lid, which includes an access port and a cap configured to be coupled to the access port for preventing bacteria, viruses, and fungi from passing therethrough while allowing air to flow between the container and a surrounding environment. The lid may include a structure for retaining the cap when the cap is removed. The spinning mechanism can include a shaft, at least one blade, and a magnetic device. Further, the spinning mechanism can include a receptacle that fixedly receives the magnetic device toward an end of the blade assembly, the magnetic device configured to rotate when subjected to an external magnetic force.

摘要翻译： 一次性旋转烧瓶包括不对称容器，盖子和旋转机构。 该容器可以密封地连接到所述盖子，其包括一个访问端口，并且被配置为耦合到所述接入口的盖，用于防止细菌，病毒和真菌从中通过，同时允许空气在容器和周围环境之间流动。 盖子可以包括当盖子被移除时用于保持盖子的结构。 旋转机构可以包括轴，至少一个叶片和磁性装置。 此外，纺丝机构可以包括固定地接收所述的磁性装置朝向所述叶片组件的端部的插座，该磁性装置被配置成当经受外部磁力旋转。

公开(公告)号：US08801069B2

公开(公告)日：2014-08-12

申请号：US13036876

申请日：2011-02-28

申请人： Martin Hosek ,  Jayaraman Krishnasamy ,  Leonard T. Lilliston, III

发明人： Martin Hosek ,  Jayaraman Krishnasamy ,  Leonard T. Lilliston, III

IPC分类号： H01L21/683 ,  B65G49/07

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67781

摘要： An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.

摘要翻译： 一种用于在其周缘上抓住基底的装置，包括具有近端和远端的基底支撑件，设置在远端的至少一个远端固定垫，所述至少一个远端休息垫包括后挡块部分， 至少一个邻近的安置垫，设置在所述近端处，所述至少一个邻近的衬垫被配置为支撑所述衬底的周边边缘，以及设置在所述近端的有源接触构件组件，所述活动 接触构件组件，包括推动构件，接触构件和可旋转的联接构件，所述推动构件，接触构件和可旋转的联接构件能够朝向远端可往复移动，用于将基板推靠在后止挡部分上，接触构件可旋转地固定到推动器构件并且可围绕 可旋转联接构件的轴线。

公开(公告)号：US08764934B2

公开(公告)日：2014-07-01

申请号：US13284437

申请日：2011-10-28

申请人： Robert K. Neeper ,  Rhett L. Affleck ,  Roger Howard

发明人： Robert K. Neeper ,  Rhett L. Affleck ,  Roger Howard

IPC分类号： B32B38/00

CPC分类号： B01L9/00 ,  B01L99/00 ,  B29C63/0013 ,  B32B38/10 ,  B32B43/006 ,  B67B7/00 ,  Y10T156/1168 ,  Y10T156/1174 ,  Y10T156/19 ,  Y10T156/195 ,  Y10T156/1956 ,  Y10T156/1978 ,  Y10T156/1989

摘要： A container or array of containers that is are sealed with a peelable seal is transported via a conveyor along a processing path toward a desealing station at which an adhesive surface having a width substantially the same as or greater than the width of the seal is pressed against the upper surface of the peelable seal. A collection rod applies a downward pressure on the adhesive surface, pressing it against the seal and keeping the container or container array in position on the conveyor as the plate moves with the conveyor. As the leading edge of the seal passes the collection rod, the adhesive surface is rolled upward, away from the plane of the seal, pulling up on the leading edge of the seal to separate it from the container or container array while the container or container array is held down by the roller. The removed seal is then discarded.

摘要翻译： 用可剥离密封件密封的容器或容器阵列通过输送机沿着处理路径被输送到一个吸引站，在该站处，具有基本上等于或大于密封件的宽度的宽度的粘合剂表面被压紧 可剥离密封件的上表面。 收集杆在粘合剂表面上施加向下的压力，当压板随着输送机移动时，将其压靠在密封件上并将容器或容器阵列保持在输送机上的适当位置。 当密封的前缘通过收集杆时，粘合剂表面向上滚动，远离密封件的平面，在密封件的前缘上拉起，以将其与容器或容器阵列分开，同时容器或容器 阵列被滚筒压住。 然后将去除的密封件丢弃。

公开(公告)号：US20140152320A1

公开(公告)日：2014-06-05

申请号：US14174386

申请日：2014-02-06

申请人： Brooks Automation, Inc.

发明人： Gerardo A. Brucker

IPC分类号： G01L21/30

CPC分类号： G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

摘要： An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

摘要翻译： 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：US20140119856A1

公开(公告)日：2014-05-01

申请号：US14148785

申请日：2014-01-07

申请人： Brooks Automation, Inc.

发明人： Michael Duhamel ,  Richard J. Pickreign

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  H01L21/67276 ,  H01L21/67727 ,  H01L21/68707 ,  Y10S414/135

摘要： In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.

摘要翻译： 根据示例性实施例的一个方面，提供了一种基板输送装置，其包括驱动机构，连接到驱动机构的可动臂组件，连接到臂组件的端部执行器。 用于保持基板的卡盘安装在端部执行器上并且具有带有接触表面的可动边缘夹持器，并且可以通过致动可动边缘夹持器来夹持基板的边缘以将基板与接触表面接合。 该装置还包括运动传感器，用于提供信号以致动可动边缘夹持器，以闭合和打开用于捕获和释放衬底的可移动边缘夹持器。

公开(公告)号：US08686733B2

公开(公告)日：2014-04-01

申请号：US12808983

申请日：2008-12-17

申请人： Gerardo A. Brucker

发明人： Gerardo A. Brucker

IPC分类号： G01L21/30

CPC分类号： G01L21/34 ,  G01N27/64 ,  H01J41/06

摘要： An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.

摘要翻译： 电离计包括电子发生器阵列，其包括微通道板，该微通道板包括微通道板的电子产生部分，该微通道板包括用于产生种子电子的源和微通道板的电子倍增器部分，其响应于由电子产生产生的种子电子 部分，乘以电子。 电离计包括其中电子撞击气态物质的离子化体积，以及用于收集由电子和气体物质之间的冲击形成的离子的集电极。 集电极可以被阳极包围，或者电离计可以形成多个集电极。 电子源可以提供电子的自发发射，其中电子被级联地相乘。

公开(公告)号：US20140081581A1

公开(公告)日：2014-03-20

申请号：US14082894

申请日：2013-11-18

申请人： BROOKS AUTOMATION INC.

发明人： Michael Borenstein

IPC分类号： G01L11/00 ,  G01N9/00 ,  G01D21/00

CPC分类号： G01L11/00 ,  G01D3/024 ,  G01D21/00 ,  G01L15/00 ,  G01N9/00

摘要： A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change.

摘要翻译： 一种具有处理器，第一传感器和第二传感器的测量仪器。 处理器适于输出体现物理量的测量的测量信号。 第一传感器和第二传感器连接到处理器并且可操作以分别产生物理量的第一和第二测量值。 处理器定义第一测量范围，其中测量信号取决于第一测量，而不是第二测量。 处理器定义第二测量范围，其中测量信号取决于第二测量而不是第一测量。 第一和第二范围在预定的转变处相遇。 第一和第二测量在转变时是不同的，并且测量信号中包含的测量与没有突然变化的过渡相交。

公开(公告)号：US08662812B2

公开(公告)日：2014-03-04

申请号：US13625704

申请日：2012-09-24

申请人： Brooks Automation, Inc.

发明人： Christopher Hofmeister ,  Martin R. Elliot ,  Alexander Krupyshev ,  Joseph Hallisey ,  Joseph A. Kraus ,  William Fosnight ,  Craig J. Carbone ,  Jeffrey C. Blahnik ,  Ho Yin Owen Fong

IPC分类号： H01L21/67 ,  F16K25/00

CPC分类号： H01L21/67098 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67201

摘要： A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

摘要翻译： 公开了一种半导体加工工具，所述工具具有框架，所述框架形成具有开口的至少一个室，并且具有围绕所述开口的周边的密封表面;门构造成与所述密封表面相互作用以密封所述开口，所述门具有侧面 垂直于所述门密封表面并垂直于衬底的传输平面的至少一个驱动器，以及位于所述框架上的至少一个侧面的至少一个驱动器，所述驱动器基本上垂直于所述门密封表面并且基本上垂直于所述传送 所述驱动器具有至少部分地位于所述密封表面前面的致动器，并且所述致动器联接到所述门的一侧以将所述门从密封位置移动。 至少一个驱动器位于衬底转移区的外部。

公开(公告)号：US08636459B2

公开(公告)日：2014-01-28

申请号：US13151178

申请日：2011-06-01

申请人： Robert K. Neeper

发明人： Robert K. Neeper

IPC分类号： B65G1/06 ,  B66F9/075

CPC分类号： G01N35/0099

摘要： Within a storage compartment, closely spaced rows of adjacent stacks are supported on a plurality of parallel sliding rails. A pair of coordinated robots is positioned with one robot on one side of the stacks to push the stacks within a selected row toward the other robot. The pushing robot on one side of the row starts off with a starting stack supported in its support arms. The pushing robot pushes the starting stack into one end of the selected row, causing the row to shift toward the waiting receiving robot, which receives the stack at the opposite end of the row from the starting stack. A series of pushes between the two robots moves a stack containing a desired sample into alignment with an access port in the storage compartment.

摘要翻译： 在储藏室内，紧密排列的相邻堆叠的行被支撑在多个平行的滑轨上。 一对协调的机器人被定位成一个机器人位于堆叠的一侧，以将堆栈在选定的行内推向另一个机器人。 在行的一侧的推动机器人从其支撑臂中支撑起始堆栈开始。 推动机器人将启动堆栈推动到所选行的一端，导致该行朝向等待的接收机器人移动，该接收机器人在起始堆栈的相对端处接收堆栈。 两个机器人之间的一系列推动将包含所需样品的堆叠移动到与储存室中的进入口对准。