公开(公告)号：US20160241167A1

公开(公告)日：2016-08-18

申请号：US15016339

申请日：2016-02-05

申请人： CANON KABUSHIKI KAISHA

发明人： Shunsuke Miyajima

IPC分类号： H02N2/06 ,  G02B7/04

摘要： A vibration motor controller configured to cause a vibrating member in which a vibration is excited based on two frequency signals having a phase difference to move relatively to a contact member, the vibration motor controller including: a memory configured to store a speed characteristic of the vibrating member with respect to a frequency of the two frequency signals; a controller configured to control a speed of the vibrating member by changing the frequency and/or a phase difference of the two frequency signals; a detector configured to detect the speed; and a changing unit configured to acquire change amount and change direction of the speed characteristic based on comparison between the speed detected by the detector and the speed characteristic stored in the memory, and change an activation frequency being a start point of control conducted by the controller based on the change amount and the change direction.

摘要翻译： 一种振动电动机控制器，其被配置为基于具有相位差的两个频率信号使振动被激发的振动部件相对于接触部件移动，所述振动电动机控制器包括：存储器，其被配置为存储所述振动的速度特性 成员关于两个频率信号的频率; 控制器，被配置为通过改变所述两个频率信号的频率和/或相位差来控制所述振动部件的速度; 检测器，被配置为检测速度; 以及改变单元，被配置为基于由检测器检测到的速度与存储在存储器中的速度特性之间的比较来获取速度特性的改变量和改变方向，并且改变作为由控制器执行的控制的起始点的激活频率 基于变化量和变化方向。

公开(公告)号：US09257936B2

公开(公告)日：2016-02-09

申请号：US14236437

申请日：2012-08-06

申请人： Michael Karpelson ,  Robert J Wood ,  Gu-Yeon Wei

发明人： Michael Karpelson ,  Robert J Wood ,  Gu-Yeon Wei

IPC分类号： H02P23/00 ,  H02P31/00 ,  H02M3/335 ,  H02M3/337 ,  H02N2/06 ,  F02D41/20 ,  H02M1/00

CPC分类号： H02P31/00 ,  F02D41/2096 ,  F02D2041/2013 ,  F02D2041/2051 ,  H02M3/33576 ,  H02M3/3372 ,  H02M2001/009 ,  H02N2/06 ,  H02N2/067

摘要： A circuit for driving a plurality of capacitive actuators, the circuit having a low-voltage side, a high voltage side and a flyback transformer between the two. The low-voltage side comprises first and second pairs of low-side switches connected in series across an input voltage. The flyback transformer has a primary winding connected to the two pairs of switches. The high-voltage side has a pair of switches connected between the secondary winding of the flyback transformer and a ground and a plurality of capacitive loads and bidirectional switches to connect the loads to the secondary winding of the flyback transformer and a ground.

摘要翻译： 用于驱动多个电容性致动器的电路，该电路在两者之间具有低压侧，高压侧和回扫变压器。 低电压侧包括跨输入电压串联连接的第一和第二对低侧开关。 回扫变压器具有连接到两对开关的初级绕组。 高压侧具有连接在回扫变压器的次级绕组与接地之间的一对开关和多个容性负载和双向开关，以将负载连接到回扫变压器的次级绕组和地。

公开(公告)号：US09197142B2

公开(公告)日：2015-11-24

申请号：US13926469

申请日：2013-06-25

申请人： Panasonic Corporation

发明人： Yusuke Adachi ,  Hideaki Mukae ,  Masaru Higashionji ,  Eiichi Nagaoka

IPC分类号： H01L41/04 ,  H02K39/00 ,  H01L41/00 ,  H02N2/00 ,  H02N2/02 ,  H02N2/06 ,  H02N2/10 ,  H02N2/14 ,  H01L41/09

CPC分类号： H02N2/008 ,  H01L41/0906 ,  H02N2/004 ,  H02N2/026 ,  H02N2/062 ,  H02N2/103 ,  H02N2/142

摘要： A drive unit includes an ultrasonic actuator having an actuator body formed using a piezoelectric element, and a driving element provided on the actuator body and configured to output a driving force by moving according to the vibration of the actuator body, and a control section configured to induce the vibration in the actuator body by applying a first and a second AC voltages having a same frequency and different phases to the piezoelectric element. The control section adjusts the first AC voltage and the second AC voltage so that the first AC voltage and the second AC voltage have different voltage values from each other.

摘要翻译： 驱动单元包括具有使用压电元件形成的致动器主体的超声波致动器，以及驱动元件，其设置在所述致动器本体上，并且构造成通过根据所述致动器本体的振动而移动而输出驱动力;以及控制部， 通过向压电元件施加具有相同频率和不同相位的第一和第二AC电压来引起致动器主体中的振动。 控制部分调节第一AC电压和第二AC电压，使得第一AC电压和第二AC电压彼此具有不同的电压值。

公开(公告)号：US09082959B2

公开(公告)日：2015-07-14

申请号：US13505676

申请日：2010-10-27

申请人： Wladimir Wischnewskiy ,  Alexej Wischnewskij

发明人： Wladimir Wischnewskiy ,  Alexej Wischnewskij

IPC分类号： H01L41/09 ,  H02N2/00 ,  H02N2/02 ,  H02N2/06

CPC分类号： H01L41/0986 ,  H02N2/002 ,  H02N2/008 ,  H02N2/026 ,  H02N2/06

摘要： An exemplary actuator in the form of a plate is disclosed, which includes, at least two generators for exciting an acoustic standing wave in the actuator. The actuator can have at least two main surfaces and a plane of symmetry S running perpendicularly to the main surfaces, with respect to which the generators are arranged symmetrically. A first lateral surface area can have a length L that substantially corresponds to the wavelength of the acoustic standing wave excited in the actuator. A second lateral surface area of the actuator can have a length (B) that is greater than the wavelength of the acoustic standing wave excited in the actuator, and that is not equal to a multiple of half the wavelength of the excited acoustic standing wave.

摘要翻译： 公开了一种板形式的示例性致动器，其包括用于激励致动器中的声驻波的至少两个发生器。 致动器可以具有至少两个主表面和垂直于主表面延伸的对称平面S，相对于发生器对称地布置。 第一横向表面区域可以具有基本对应于在致动器中激发的声驻波的波长的长度L. 致动器的第二横向表面区域可以具有大于在致动器中激发的声驻波的波长的长度（B），并且不等于被激励的声驻波的波长的一半的倍数。

公开(公告)号：US20150146080A1

公开(公告)日：2015-05-28

申请号：US14552195

申请日：2014-11-24

申请人： CANON KABUSHIKI KAISHA

发明人： Hiromitsu Morita

IPC分类号： G02B7/04 ,  H04N5/232 ,  H02N2/06

CPC分类号： G02B7/04 ,  G02B7/08 ,  G03B3/10 ,  G03B2205/0084 ,  H02N2/0015 ,  H02N2/026 ,  H02N2/062 ,  H04N5/23212

摘要： When a vibration-type actuator is in a non-driving period, at least one of a voltage amplitude and a phase difference of an alternate signal applied to an electrode of a piezoelectric element is set to be equal to a minimum value or a maximum value of a dead zone in terms of the voltage amplitude or the phase difference.

摘要翻译： 当振动型致动器处于非驱动时段时，施加到压电元件的电极的交替信号的电压幅度和相位差中的至少一个被设置为等于最小值或最大值 在电压幅度或相位差方面为死区。

公开(公告)号：US08963400B2

公开(公告)日：2015-02-24

申请号：US13609577

申请日：2012-09-11

申请人： Patrick Muggler ,  Anthony S. Doy

发明人： Patrick Muggler ,  Anthony S. Doy

IPC分类号： H02N2/06

CPC分类号： H01L41/042 ,  H02J7/32 ,  H02J7/34

摘要： A piezo driver is described that is configured to furnish electric charge to a piezo component and configured to transfer electric charge from the piezo component to a passive energy storage component during various operational states of the piezo driver. In one or more implementations, the piezo driver includes a first passive energy storage component and a second passive energy storage component configured to store electric charge. The piezo driver also includes a voltage converter configured to electrically connect between a piezo component and the first passive energy storage component and the second passive energy storage component. The voltage converter is configured to furnish electric charge from the first passive energy storage component to the piezo component, and vice versa. The voltage converter is also configured to furnish electric charge from the second passive energy storage component to the piezo component, and vice versa.

摘要翻译： 描述了一种压电驱动器，其被配置为向压电元件提供电荷并且被配置为在压电驱动器的各种操作状态期间将电荷从压电元件传递到无源储能部件。 在一个或多个实施方案中，压电驱动器包括被配置为存储电荷的第一无源能量存储部件和第二被动能量存储部件。 压电驱动器还包括电压转换器，其被配置为电压连接压电部件与第一被动能量存储部件和第二被动能量存储部件之间。 电压转换器被配置成从第一被动能量存储部件到压电元件提供电荷，反之亦然。 电压转换器还被配置为从第二被动能量存储部件向压电部件提供电荷，反之亦然。

公开(公告)号：US08952597B2

公开(公告)日：2015-02-10

申请号：US13138397

申请日：2010-01-05

申请人： Stefan Fuchs ,  Marco Graf

发明人： Stefan Fuchs ,  Marco Graf

IPC分类号： H01L41/09 ,  H02N2/06 ,  F02D41/20

CPC分类号： H02N2/067 ,  F02D41/2096

摘要： A method for operating an output stage for a piezoactuator includes checking, during an operating phase, in response to the undershooting of a current for the piezoactuator below a setpoint current, whether a point in time for the undershooting lies outside or within a time window. A subsequent current pulse is controlled via the setpoint current if the point in time is located outside the time window, and the subsequent current pulse is controlled via a turn-on time if the point in time is located within the time window.

摘要翻译： 用于操作压电致动器的输出级的方法包括在操作阶段期间响应于压电致动器的电流的低于低于设定值电流的检测，无论下冲的时间点是在外部还是在时间窗内。 如果时间点位于时间窗外，则经由设定值电流控制后续电流脉冲，并且如果时间点位于时间窗内，则通过导通时间控制后续电流脉冲。

公开(公告)号：US08879046B2

公开(公告)日：2014-11-04

申请号：US14085572

申请日：2013-11-20

申请人： Carl Zeiss SMT GmbH

发明人： Karl-Eugen Aubele ,  Sven Ulmer ,  Klaus Rief ,  Marco Jassmann

IPC分类号： G03B27/72 ,  G03B27/54 ,  G03F7/20 ,  G02B7/00 ,  H02N2/02 ,  H02N2/06

CPC分类号： G03F7/70191 ,  G02B7/005 ,  G03F7/70258 ,  G03F7/70825 ,  H02N2/021 ,  H02N2/06

摘要： A projection exposure apparatus for microlithography includes an optical element actuatable by a first and a second actuator. The actuators are controlled via control intervals in such a way that a minimum deflectability predefined in accordance with a preselectable parameter is guaranteed at every point in time of the control.

摘要翻译： 用于微光刻的投影曝光装置包括可由第一和第二致动器致动的光学元件。 执行器通过控制间隔进行控制，使得根据预选参数预定义的最小偏转能力在每个控制点保证。

公开(公告)号：US20140131476A1

公开(公告)日：2014-05-15

申请号：US14126364

申请日：2012-06-07

申请人： Toshio Kanetaka ,  Makoto Udagawa ,  Toshiiku Sashida

发明人： Toshio Kanetaka ,  Makoto Udagawa ,  Toshiiku Sashida

IPC分类号： B05B17/06 ,  H02N2/06

CPC分类号： H02N2/14 ,  A61M5/007 ,  A61M5/1452 ,  A61M5/14546 ,  A61M2205/058 ,  B05B17/06 ,  H02N2/062 ,  H02N2/126 ,  H02N2/163 ,  H02N2/166

摘要： Provided is an injector in which adhesion between a stator and a rotor of an ultrasonic motor can be released efficiently. An injector (1) which injects a chemical liquid includes: an ultrasonic motor unit (3) including an ultrasonic motor (31); a drive mechanism (4) to be driven by the ultrasonic motor unit (3) so as to feed the chemical liquid when the ultrasonic motor (31) rotates forwardly; and a control device (5) which controls the ultrasonic motor (31) of the ultrasonic motor unit (3). The ultrasonic motor (31) includes a stator (32) and a rotor (33), and the control device (5) controls the ultrasonic motor (31) to alternately repeat forward rotation and reverse rotation so that adhesion between the stator (32) and the rotor (33) is released.

摘要翻译： 提供一种可以有效地释放定子与超声波马达的转子之间的粘合的喷射器。 喷射化学液体的喷射器（1）包括：包括超声波马达（31）的超声波马达单元（3）; 驱动机构（4），由超声波马达单元（3）驱动，以便当超声波马达（31）向前旋转时供给药液; 以及控制超声波马达单元（3）的超声波马达（31）的控制装置（5）。 超声波马达31包括定子32和转子33，控制装置5控制超声波马达31交替地重复正转和反向旋转，使得定子32之间的粘合， 并且转子（33）被释放。

公开(公告)号：US20130307440A1

公开(公告)日：2013-11-21

申请号：US13877235

申请日：2011-09-28

申请人： Wladimir Wischnewskiy ,  Alexej Wishnewskiy

发明人： Wladimir Wischnewskiy ,  Alexej Wishnewskiy

IPC分类号： H02N2/06

CPC分类号： H02N2/06 ,  H02N2/008

摘要： The invention relates to a method for electrically exciting a piezoelectric actuator of an ultrasonic motor having a mechanical resonance frequency Fm, wherein the ultrasonic motor has at least one acoustic standing wave generator, which comprises an exciter electrode and a general electrode, wherein a capacitance Co is developed between the exciter electrode and the general electrode. According to the invention, the method comprises the following steps: applying a rectangular exciter voltage Ug to the exciter electrode and the general electrode of the at least one acoustic standing wave generator, wherein the frequency of the rectangular exciter voltage Ug differs from the mechanical resonance frequency Fm of the actuator; providing a voltage ug with the aid of a feedback element, wherein the voltage ug is proportional to a current Ig flowing through the standing wave generator, wherein said current is the sum of a piezoelectric current Ip and a charging and discharging current Ic of the capacitance Co; separating a voltage up from a voltage uc with the aid of a pulse filter, wherein the voltage up is proportional to the piezoelectric current Ip and the voltage uc is proportional to the charging and discharging current Ic of the capacitance Co; and changing the frequency of the rectangular exciter voltage in such a way that the phase shift between the piezoelectric current Ip and the rectangular exciter voltage Ug is substantially zero. The invention further relates to a device for electrically exciting a piezoelectric actuator of an ultrasonic motor.

摘要翻译： 本发明涉及一种用于电激励具有机械共振频率Fm的超声波马达的压电致动器的方法，其中超声波马达具有至少一个声驻波发生器，其包括激励器电极和一般电极，其中电容Co 在励磁电极和一般电极之间形成。 根据本发明，该方法包括以下步骤：将矩形激励器电压Ug施加到至少一个声驻波发生器的激励器电极和一般电极，其中矩形激励器电压Ug的频率与机械谐振 执行器的频率Fm; 通过反馈元件提供电压ug，其中电压ug与流过驻波产生器的电流Ig成比例，其中所述电流是压电电流Ip与电容的充放电电流Ic之和 公司 借助于脉冲滤波器将电压从电压uc分离，其中电压上升与压电电流Ip成比例，并且电压uc与电容Co的充电和放电电流Ic成比例; 并且以使得压电电流Ip和矩形激励器电压Ug之间的相移基本上为零的方式改变矩形激励器电压的频率。 本发明还涉及一种用于电激励超声波马达的压电致动器的装置。