THERMOELECTRIC COOLING FOR PACKAGE LEVEL THERMAL MANAGEMENT

    公开(公告)号:US20240363484A1

    公开(公告)日:2024-10-31

    申请号:US18308411

    申请日:2023-04-27

    IPC分类号: H01L23/38 H10N10/01 H10N10/17

    CPC分类号: H01L23/38 H10N10/01 H10N10/17

    摘要: An electronic device includes a semiconductor die with first and second sides, a semiconductor layer extending to the first side, an array of unit cells arranged in rows columns, and a conductive reference terminal in the semiconductor layer that laterally surrounds the array, the first and second sides being spaced apart from one another by a thickness distance of 50 μm or less, and the respective unit cells including: a circuit component in the semiconductor layer; a holey semiconductor portion in the semiconductor layer that laterally surrounds the respective circuit component and includes holes that extend from the metallization structure toward the first side; and a conductive control terminal in the semiconductor layer that laterally surrounds the respective holey semiconductor portion, and an adhesive layer extends between the first side of the semiconductor die and a die attach pad.

    THERMAL SENSOR DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240298543A1

    公开(公告)日:2024-09-05

    申请号:US18587644

    申请日:2024-02-26

    IPC分类号: H10N10/17 H10N10/01 H10N10/13

    CPC分类号: H10N10/17 H10N10/01 H10N10/13

    摘要: A method of manufacturing a thermal sensor (106) comprises providing a first part (102) of a body of the sensor (106), the first part (102) of the body being configured to define a first part (114) of a chamber (310). A second part (104) of the body of the sensor (106) is also provided, the second part (104) of the body being configured to define a second part (118) of the chamber (310). A getter material (112) is disposed in the first part (114) of the body of the sensor (106), and the first part (102) and the second part (104) of the body of the sensor (106) are brought together so that the first and second parts (102, 104) of the chamber (310) define the chamber (310). The chamber (310) is backfilled with a gas to a pressure greater than 10 mbar, and the first part (102) of the body is bonded to the second part (104) of the body so as to seal hermetically the chamber (310).