ROLL-TO-ROLL DEPOSITION APPARATUS AND ROLL-TO-ROLL DEPOSITION METHOD

    公开(公告)号:US20210002758A1

    公开(公告)日:2021-01-07

    申请号:US16761433

    申请日:2019-05-16

    申请人: ULVAC, INC.

    摘要: A roll-to-roll deposition apparatus includes a vacuum chamber, a film travel mechanism, a lithium source, and a first roller. The vacuum chamber is capable of maintaining a reduced-pressure state. The film travel mechanism is capable of causing a film to travel inside the vacuum chamber. The lithium source is capable of evaporating lithium inside the vacuum chamber. The first roller is disposed between a deposition surface of the film and the lithium source. The first roller has a transfer pattern that receives the lithium evaporated from the lithium source. The first roller transfers a pattern of a lithium layer corresponding to the transfer pattern to the deposition surface while rotating.

    PHYSCIAL VAPOR DEPOSITION APPARATUS
    58.
    发明申请

    公开(公告)号:US20200258723A1

    公开(公告)日:2020-08-13

    申请号:US16271473

    申请日:2019-02-08

    摘要: Methods and apparatus for physical vapor deposition are provided. The apparatus, for example, includes A PVD apparatus that includes a chamber including a chamber wall; a magnetron including a plurality of magnets configured to produce a magnetic field within the chamber; a pedestal configured to support a substrate; and a target assembly comprising a target made of gold and supported on the chamber wall via a backing plate coupled to a back surface of the target so that a front surface of the target faces the substrate, wherein a distance between a back surface formed in a recess of the backing plate and a bottom surface of the plurality of magnets is about 3.95 mm to about 4.45 mm, and wherein a distance between the front surface of the target and a front surface of the substrate is about 60.25 mm to about 60.75 mm.