摘要:
There is provided a method of manufacturing a mask for exposure, which is capable of measuring the phase difference between a shifter portion and a non-shifter portion with good accuracy.A mask for exposure having: two first light-shielding device patterns, which are formed on a quartz substrate (transparent substrate) in a device region at a first gap and extend over a first concave portion; a second device light-shielding pattern at a second gap from the first device light-shielding pattern; two first light-shielding monitor patterns, which are formed on the quartz substrate in a monitor region at a third gap wider than the first gap and extend over a second concave portion; and second light-shielding monitor pattern, which has a fourth gap wider than the second gap from the first light-shielding monitor pattern, in which the size of the first light-shielding monitor pattern is equal to or less than the size of the first light-shielding device pattern.
摘要:
A non-volatile semiconductor memory device includes a memory cell array having a plurality of multi-level memory cells connected in series. The plurality of multi-level memory cells forms a plurality of threshold distributions each of which corresponds to a status of a lower bit and a status of an upper bit, wherein a lower bit and an upper bit constitute a lower page and an upper page respectively. The status of the lower bit dichotomizes the threshold distributions into two groups and the status of the upper bit further dichotomizes each of two groups. When programming a memory cell of the upper page, higher potentials are applied to a non-selected word line adjacent to the selected word line than those applied to the non-selected word line when programming the memory cell of the lower page.
摘要:
A semiconductor memory device comprises a plurality of memory cells connected to a bit line; and a sense amplifier operative to sense the magnitude of cell current flowing via the bit line in a selected memory cell connected to the bit line to determine the value of data stored in the memory cell. The sense amplifier includes a first transistor for precharge operative to supply current in the bit line via a first and a second sense node, a second transistor for charge transfer interposed between the first and second sense nodes, and a third transistor for continuous current supply operative to supply current in the bit line not via the first and second sense nodes.
摘要:
The device has a data write mode to boost a first boost channel region that contains a non-write selected memory cell and non-selected memory cells located closer to the first selection gate transistor, and a second boost channel region that contains non-selected memory cells located closer to the second selection gate transistor than the selected memory cell, both electrically separated from each other. In this mode, a write non-selection voltage applied to a non-selected memory cell next to the second selection gate transistor is switched, at least in two stages, between a lower voltage V1 than a write non-selection voltage Vm applied to other non-selected memory cells in the NAND cell unit and a higher voltage V2 than the lower voltage (V1
摘要:
A photomask made by using a negative photoresist includes a transparent substrate defined with a device chip area, an opaque device pattern formed on the transparent substrate in the device chip area, and a dummy opaque pattern provided on the transparent substrate outside of the device chip area.
摘要:
According to one embodiment, a nonvolatile memory device includes: a memory cell array including memory cells each having a variable resistance element for nonvolatilely storing data identified by an electrically rewritable resistance value; a first data latch storing write and erase data to be written on a given group of memory cells of the memory cell array for a write and erase operation; and a second data latch storing reference data for performing a compensation operation of the given group to compensate write and erase disturbance accompanied by the write or erase operation.
摘要:
A method of programming a non-volatile memory device with memory cells formed of variable resistance elements and disposed between word lines and bit lines, includes: previously charging a selected word line and a selected bit line together with a non-selected word line and a non-selected bit line up to a certain voltage; and further charging the selected word line and the non-selected bit line up to a program voltage higher than the certain voltage and a program-block voltage, respectively, and simultaneously discharging the selected bit line.
摘要:
A non-volatile semiconductor device has a memory cell array having electrically erasable programmable non-volatile memory cells, reprogramming and retrieval circuits that temporarily store data to be programmed in the memory cell array and sense data retrieved from the memory cell array. Each reprogramming and retrieval circuit has first and second latches that are selectively connected to the memory cell array and transfer data. A controller controls the reprogramming and retrieval circuits on a data-reprogramming operation to and a data-retrieval operation from the memory cell array. Each reprogramming and retrieval circuit has a multilevel logical operation mode and a caching operation mode. In the multilevel logical operation mode, re-programming and retrieval of upper and lower bits of two-bit four-level data is performed using the first and the second latches to store the two-bit four-level data in one of the memory cells in a predetermined threshold level range. In the caching operation mode, data transfer between one of the memory cells selected in accordance with a first address and the first latch is performed while data transfer is performed between the second latch and input/output terminals in accordance with a second address with respect to one-bit two-level data to be stored in one of the memory cells.
摘要:
A non-volatile semiconductor memory device includes: a cell array having electrically rewritable and non-volatile memory cells arranged therein, the cell array being divided into a plurality of blocks, each the block being divided into a plurality of sub-blocks each having one or plural and continuous pages; and a controller for controlling data erasure of the cell array in a way that each the sub-block serves as a unit of data erasure, wherein each the sub-block in the cell array stores the number of data erasure which is renewed by each data erasure, and the number of data erasure is limited for each the sub-block to a permissible maximum value stored in a certain block in the cell array.
摘要:
A nonvolatile semiconductor memory device having a first memory cell array including a plurality of electrical reprogramming and erasable nonvolatile semiconductor memory cells formed in a first area of a semiconductor substrate, a second memory cell array including a plurality of electrical reprogramming and erasable nonvolatile semiconductor memory cells formed in a second area different from said first area of said semiconductor substrate, said first and second memory cell arrays being arranged in a first direction, and a first pad section for inputting data to and outputting data from said first memory cell array and said second memory cell array, said first pad section having a plurality of pads arranged between said first memory cell array and said second memory cell array along a second direction perpendicular to said first direction.