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    GATE LENGTH INDEPENDENT SILICON-ON-NOTHING (SON) SCHEME FOR BULK FINFETS
    61.
    发明申请
    GATE LENGTH INDEPENDENT SILICON-ON-NOTHING (SON) SCHEME FOR BULK FINFETS 有权
    盖子长度独立的无硅（SON）方案用于大块熔体

    公开(公告)号：US20150056781A1

    公开(公告)日：2015-02-26

    申请号：US13971937

    申请日：2013-08-21

    Applicant: GLOBALFOUNDRIES, Inc.

    Inventor： Murat Kerem Akarvardar ,  Ajey Poovannummoottil Jacob

    IPC: H01L21/762 ,  H01L21/02

    CPC classification number: H01L21/76264 ,  H01L21/02488 ,  H01L21/76224 ,  H01L29/66795

    Abstract: Methods for fabricating integrated circuits and FinFET transistors on bulk substrates with active channel regions isolated from the substrate with an insulator are provided. In accordance with an exemplary embodiment, a method for fabricating an integrated circuit includes forming fin structures overlying a semiconductor substrate, wherein each fin structure includes a channel material and extends in a longitudinal direction from a first end to a second end. The method deposits an anchoring material over the fin structures. The method includes recessing the anchoring material to form trenches adjacent the fin structures, wherein the anchoring material remains in contact with the first end and the second end of each fin structure. Further, the method forms a void between the semiconductor substrate and the channel material of each fin structure with a gate length independent etching process, wherein the channel material of each fin structure is suspended over the semiconductor substrate.

    Abstract translation: 提供了在具有与绝缘体与衬底隔离的有源沟道区的本体衬底上制造集成电路和FinFET晶体管的方法。 根据示例性实施例，一种用于制造集成电路的方法包括形成覆盖半导体衬底的鳍状结构，其中每个鳍结构包括沟道材料并且在纵向方向上从第一端延伸到第二端。 该方法将锚固材料沉积在翅片结构上。 该方法包括使锚固材料凹入以形成邻近翅片结构的沟槽，其中锚定材料保持与每个翅片结构的第一端和第二端接触。 此外，该方法在半导体衬底和每个鳍结构的沟道材料之间形成空隙，栅极长度独立蚀刻工艺，其中每个鳍结构的沟道材料悬置在半导体衬底上。

    Heterogeneous directional couplers for photonics chips
    65.
    发明授权
    Heterogeneous directional couplers for photonics chips 有权

    公开(公告)号：US10795083B1

    公开(公告)日：2020-10-06

    申请号：US16426551

    申请日：2019-05-30

    Applicant: GLOBALFOUNDRIES Inc.

    Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Steven M. Shank

    IPC: G02B6/125 ,  G02B6/122 ,  G02B6/13 ,  G02B6/12

    Abstract: Structures for a directional coupler and methods of fabricating a structure for a directional coupler. A first section of a first waveguide core is laterally spaced from a second section of a second waveguide core. A coupling element is arranged either over or under the first section of the first waveguide core and the second section of the second waveguide core. The first and second waveguide cores are comprised of a material having a first refractive index, and the first coupling element is comprised of a material having a second refractive index that is different from the first refractive index. The first coupling element is surrounded by a side surface that overlaps with the first section of the first waveguide core and the second section of the second waveguide core.

    Stacked waveguide arrangements providing field confinement
    66.
    发明授权
    Stacked waveguide arrangements providing field confinement 有权

    公开(公告)号：US10746921B2

    公开(公告)日：2020-08-18

    申请号：US16040896

    申请日：2018-07-20

    Applicant: GLOBALFOUNDRIES Inc.

    Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

    IPC: G02B6/12 ,  G02B6/122 ,  G02B6/10

    Abstract: Structures including a waveguide arrangement and methods of fabricating a structure that includes a waveguide arrangement. A second waveguide spaced in a lateral direction from a first waveguide, a third waveguide spaced in a vertical direction from the first waveguide, and a fourth waveguide spaced in the vertical direction from the second waveguide. The third waveguide is arranged in the lateral direction to provide a first overlapping relationship with the first waveguide. The fourth waveguide is arranged in the lateral direction to provide a second overlapping relationship with the second waveguide.

    Waveguide crossings with a non-contacting arrangement
    67.
    发明授权
    Waveguide crossings with a non-contacting arrangement 有权

    公开(公告)号：US10718903B1

    公开(公告)日：2020-07-21

    申请号：US16441755

    申请日：2019-06-14

    Applicant: GLOBALFOUNDRIES Inc.

    Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

    IPC: G02B6/125 ,  G02B6/136 ,  G02B6/12

    Abstract: Structures for a waveguide bend and methods of fabricating a structure for a waveguide bend. A first waveguide core has a first section, a second section, and a first waveguide bend connecting the first section with the second section. The first waveguide core has a first side surface extending about an outer radius of the first waveguide bend. A second waveguide core also has a first section, a second section, and a second waveguide bend connecting the first section with the second section. The second waveguide core has a second side surface extending about an outer radius of the second waveguide bend. The first waveguide bend is spaced from the second waveguide bend in a first non-contacting relationship with a gap between the first side surface and the second side surface. The gap has a perpendicular distance selected to permit optical signal transfer between the first and second waveguide bends.

    WAVEGUIDE INTERSECTIONS INCORPORATING A WAVEGUIDE CROSSING
    69.
    发明申请
    WAVEGUIDE INTERSECTIONS INCORPORATING A WAVEGUIDE CROSSING 审中-公开

    公开(公告)号：US20200088942A1

    公开(公告)日：2020-03-19

    申请号：US16134295

    申请日：2018-09-18

    Applicant: GLOBALFOUNDRIES Inc.

    Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

    IPC: G02B6/122 ,  G02B6/125

    Abstract: Structures with waveguides in multiple levels and methods of fabricating a structure that includes waveguides in multiple levels. A waveguide crossing has a first waveguide and a second waveguide arranged to intersect the first waveguide. A third waveguide is displaced vertically from the waveguide crossing, The third waveguide includes a portion having an overlapping arrangement with a portion of the first waveguide. The overlapping portions of the first and third waveguides are configured to transfer optical signals between the first waveguide and the third waveguide.

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