Semiconductor polysilicon component and method of manufacture thereof
    61.
    发明授权
    Semiconductor polysilicon component and method of manufacture thereof 失效
    半导体多晶硅组件及其制造方法

    公开(公告)号:US06838308B2

    公开(公告)日:2005-01-04

    申请号:US10344840

    申请日:2001-05-14

    申请人: Koichi Haga

    发明人: Koichi Haga

    摘要: On a transparent substrate, by use of, for instance, vapor deposition, an Al film is formed. Subsequently, with a DC-bias applied on a surface of the Al film, a first zinc oxide thin film is formed by use of a sputtering method. On a surface of the first zinc oxide thin film, according to an atmospheric MO-CVD method, a second zinc oxide thin film is formed. When the second zinc oxide thin film deposited by use of an MO-CVD method is formed on the first zinc oxide thin film having a-axis orientation, the second zinc oxide thin film becomes to have the a-axis orientation. Since the Al thin film, owing to heat during the deposition by use of the MO-CVD method, is absorbed in the first zinc oxide thin film, the transparency is improved. As a result, a sample having a ZnO/ZnO/Al/glass structure becomes high in the transparency as a whole.

    摘要翻译: 在透明基板上,通过使用例如气相沉积,形成Al膜。 随后,通过施加在Al膜的表面上的DC偏压,通过使用溅射法形成第一氧化锌薄膜。 在第一氧化锌薄膜的表面上,根据大气MO-CVD法,形成第二氧化锌薄膜。 当在具有a轴取向的第一氧化锌薄膜上形成通过使用MO-CVD法沉积的第二氧化锌薄膜时,第二氧化锌薄膜变为具有a轴取向。 由于Al薄膜由于通过使用MO-CVD方法的沉积期间的热被吸收在第一氧化锌薄膜中,所以透明度得到改善。 结果,具有ZnO / ZnO / Al /玻璃结构的样品整体上的透明度变高。

    Zinc oxide semiconductor member formed on silicon substrate
    62.
    发明授权
    Zinc oxide semiconductor member formed on silicon substrate 失效
    形成在硅衬底上的氧化锌半导体部件

    公开(公告)号:US06589362B2

    公开(公告)日:2003-07-08

    申请号:US09973149

    申请日:2001-10-09

    申请人: Koichi Haga

    发明人: Koichi Haga

    IPC分类号: H01L2912

    摘要: The surface of a silicon substrate is covered with a natural oxide film having a thickness of several tens of angstroms. In an initial process, the natural oxide film is removed with hydrogen fluoride (HF) diluted with pure water to 10% (process(1)). The surface of the silicon substrate from which the oxide film has been removed is covered with hydrogen atoms. A large amount of plasma energy is applied to the silicon substrate in a process (2) for depositing a ZnO thin film thereon by sputtering. Hydrogen is dissociated by this energy at low temperature as well as a thin film buffer layer, in which an amorphous material and fine crystals are mixed, is formed by easing the difference of lattice intervals between silicon and zinc oxide. Next, in a process (3), a ZnO thin film of high quality is formed on the buffer layer by MO-CVD using it as a seed crystal. With this arrangement, a zinc oxide semiconductor member suitable for a light receiving element can be formed on a silicon substrate.

    摘要翻译: 硅衬底的表面覆盖有几十埃厚度的天然氧化物膜。 在初始过程中,用纯水稀释至10%的氟化氢(HF)除去天然氧化物膜(工艺(1))。 已除去氧化膜的硅衬底的表面被氢原子覆盖。 在用于通过溅射在其上沉积ZnO薄膜的工艺(2)中,大量的等离子体能量被施加到硅衬底。 通过缓解硅和氧化锌之间的晶格间隔的差异,形成了通过低温下的能量解离氢以及混合无定形材料和微细晶体的薄膜缓冲层。 接下来,在工序(3)中,通过使用它作为晶种的MO-CVD在缓冲层上形成高品质的ZnO薄膜。 利用这种布置,可以在硅衬底上形成适合于光接收元件的氧化锌半导体元件。

    Optical waveguide device and manufacturing method thereof
    63.
    发明授权
    Optical waveguide device and manufacturing method thereof 失效
    光波导器件及其制造方法

    公开(公告)号:US06307996B1

    公开(公告)日:2001-10-23

    申请号:US09184041

    申请日:1998-11-02

    IPC分类号: G02B6124

    摘要: In an optical waveguide device, a laser beam is collected to an end face of a channel waveguide, and introduced into a PLZT thin film optical waveguide. The incident laser beam, when emitted from the channel waveguide, diverges in the PLZT waveguide, permeates a thin film lens and is collimated into 0.4 Mm size. When a high frequency voltage is not applied to a comb Al electrode, the laser beam is collected after penetrating through the second thin film and emitted from the end face through the channel waveguide to form an emission beam. When the high frequency voltage is applied to the comb Al electrode, a diffraction grating is formed by an acousto-optic effect, and the laser beam is deflected. The deflected laser beam, when penetrating through the second thin film lens, is collected and emitted from the end face through the channel waveguide in adjacent with the above-described channel waveguide to form a deflected emission beam.

    摘要翻译: 在光波导装置中,激光束被收集到通道波导的端面,并被引入到PLZT薄膜光波导中。 当从通道波导发射时,入射激光束在PLZT波导中发散,渗透薄膜透镜并准直成0.4μm的尺寸。 当没有对梳状Al电极施加高频电压时,在穿透第二薄膜并且从端面通过沟道波导发射之后,收集激光束以形成发射光束。 当高频电压施加到梳状Al电极时,通过声光效应形成衍射光栅,激光束被偏转。 当穿透第二薄膜透镜时,偏转的激光束通过与上述通道波导相邻的通道波导从端面被收集和发射,以形成偏转的发射光束。

    Method and apparatus for redirecting propagating acoustic waves from a
substrate to a slant face to cause ink-jetting of ink material
    64.
    发明授权
    Method and apparatus for redirecting propagating acoustic waves from a substrate to a slant face to cause ink-jetting of ink material 失效
    用于将传播声波从基板重定向到倾斜面以使墨水材料喷墨的方法和装置

    公开(公告)号:US5953027A

    公开(公告)日:1999-09-14

    申请号:US731780

    申请日:1996-10-18

    CPC分类号: B41J2/14008

    摘要: An ink-jet recording apparatus jetts an ink droplet from a free surface of an ink material by propagating a surface acoustic wave. The apparatus includes a substrate, a slant face formed on the substrate, The slant face contacts the ink material with a grade in use. A vibration generator for generating plural surface acoustic waves, is formed on the substrate away from the ink material in use, and the plural surface acoustic waves are propagated along with the substrate and changed into plural longitudinal waves having propagating directions in the ink material. The propagating directions will be concentrated at a certain portion within the ink material.

    摘要翻译: 喷墨记录装置通过传播表面声波从墨水材料的自由表面喷射墨滴。 该装置包括基板,形成在基板上的倾斜面。倾斜面在使用中与使用的等级接触墨水材料。 用于产生多个表面声波的振动发生器在离开使用的墨水材料的基板上形成,并且多个声表面波与基板一起传播并变成在油墨材料中具有传播方向的多个纵波。 传播方向将集中在油墨材料中的某一部分。

    Ink jet recording apparatus and method for jetting an ink droplet from a
free surface of an ink material using vibrational energy
    65.
    发明授权
    Ink jet recording apparatus and method for jetting an ink droplet from a free surface of an ink material using vibrational energy 失效
    喷墨记录装置和使用振动能从墨水材料的自由表面喷射墨滴的方法

    公开(公告)号:US5917521A

    公开(公告)日:1999-06-29

    申请号:US803859

    申请日:1997-02-21

    IPC分类号: B41J2/04 B41J2/135

    CPC分类号: B41J2/04 B41J2202/15

    摘要: An ink jet recording device for jetting an ink droplet from a free surface of an ink material includes: an ink container for containing the ink material and providing the free surface of the ink material therein; a vibrating member for providing a vibrating energy to the free surface of the ink material by contacting thereto at an interface portion between the free surface of the ink material and the ink container, wherein the vibrating means surrounds the free surface so that the vibrating energy is concentrated at one specific portion on the free surface of the ink material in order to jet the ink droplet therefrom; and an actuating system for actuating the vibrating member. An ink jet recording method using the same is also disclosed.

    摘要翻译: 用于从墨水材料的自由表面喷射墨滴的喷墨记录装置包括:用于容纳墨水材料并在其中提供墨水材料的自由表面的墨水容器; 振动构件,用于通过在油墨材料的自由表面和油墨容器之间的界面部分处与油墨材料的自由表面接触来提供振动能,其中振动装置包围自由表面,使得振动能量为 浓缩在油墨材料的自由表面上的一个特定部分上,以便从其喷射墨滴; 以及用于致动振动构件的致动系统。 还公开了使用该喷墨记录方法的喷墨记录方法。

    Photosensitive material for electrophotography
    67.
    发明授权
    Photosensitive material for electrophotography 失效
    电子照相用感光材料

    公开(公告)号:US4734346A

    公开(公告)日:1988-03-29

    申请号:US860714

    申请日:1986-05-07

    IPC分类号: G03G5/08 G03G5/082

    CPC分类号: G03G5/08235 G03G5/082

    摘要: The present invention is concerned with a photosensitive material for electrophotography that comprises forming a photosensitive layer on a substrate, wherein said photosensitive layer is constructed by laminating a charge transfer layer, a first charge carrier generating layer and a second charge carrier generating layer in order from said substrate side to free surface, and said charge transfer layer and second charge carrier generating layer each has a band gap wider than that of said first charge carrier generating layer.

    摘要翻译: 本发明涉及用于电子照相的感光材料,其包括在基底上形成感光层,其中所述感光层通过层叠电荷转移层,第一电荷载体产生层和第二电荷载流子产生层而构成, 所述衬底侧为自由表面,并且所述电荷转移层和第二电荷载流子产生层各自具有比所述第一电荷载流子生成层宽的带隙。