Spectroscopy method and spectroscope
    61.
    发明申请
    Spectroscopy method and spectroscope 有权
    光谱法和光谱仪

    公开(公告)号:US20110063609A1

    公开(公告)日:2011-03-17

    申请号:US12926027

    申请日:2010-10-21

    IPC分类号: G01J3/42 G01N21/25

    摘要: A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.

    摘要翻译: 光谱学方法包括将脉冲激光引导到与待测样品相互反应的光吸收特性的光纤,输出通过样品的光吸收获得的环形脉冲光,测量样品的吸收特性 根据环形脉冲光的衰减特性,将脉冲激光设定为宽光谱激光,将光纤设为强分散光纤,增加环形脉冲光的脉冲宽度,测定波长 基于相对于对应于波长的时间序列的脉冲序列的衰减衰减常数的吸收特性。

    Wavelength-variable short pulse generating device and method
    62.
    发明授权
    Wavelength-variable short pulse generating device and method 失效
    波长可变短脉冲发生装置及方法

    公开(公告)号:US07346247B2

    公开(公告)日:2008-03-18

    申请号:US10523080

    申请日:2003-07-22

    IPC分类号: G02B6/00

    摘要: An apparatus and method for generating a wavelength-tunable short pulse that can generate wavelength-tunable short pulsed light in the visible-light wavelength band are provided. When ultrashort pulsed light is introduced into an optical fiber (3), a wavelength-tunable ultrashort soliton pulse is generated by a nonlinear optical effect through the soliton effect and Raman scattering. When the soliton pulse has a short duration and high peak intensity, a third harmonic having one-third of the wavelength of the soliton pulsed light is generated by a third nonlinear optical effect. This third harmonic has a short wavelength in the visible light band.

    摘要翻译: 提供一种用于产生可在可见光波长带中产生波长可调短脉冲光的波长可调短脉冲的装置和方法。 当超短脉冲光被引入到光纤(3)中时,通过孤子效应和拉曼散射,通过非线性光学效应产生波长可调的超短孤子脉冲。 当孤子脉冲具有短持续时间和高峰值强度时,具有三分之一波长的孤子脉冲光的三次谐波由第三非线性光学效应产生。 该三次谐波在可见光带中具有短波长。

    Plasma Generator
    63.
    发明申请
    Plasma Generator 审中-公开
    等离子发生器

    公开(公告)号:US20080029030A1

    公开(公告)日:2008-02-07

    申请号:US10589568

    申请日:2005-01-26

    摘要: [Object] To stably generate plasma at atmospheric pressure.[Solving Means] There are provided a tubular casing 10 into which a gas and a microwave are introduced, a hole 30 provided in a bottom surface of this casing, and a columnar conductor 40 which is provided in an axis direction of the casing, a bottom surface of the conductor 40 having a contour placed inside the contour of the hole. A minute gap A formed between the contour of a bottom surface 41 of the conductor 40 and the contour of the hole, a coaxial waveguide formed of the conductor and the casing, and an insulating film 22 formed at least on a contour portion forming the hole at the minute gap are provided. In the structure described above, the microwave is guided to the minute gap by the coaxial waveguide, and the gas is made to pass through the minute gap, so that the gas is placed in a plasma state at the minute gap. The microwave is a pulse wave and is duty-controlled, and the contour portion forming the hole 30 is cooled with a cooling medium from the inside of an electrode 20. Accordingly, the increase in plasma temperature can be prevented, and as a result, stable plasma can be generated.

    摘要翻译: [对象]在大气压下稳定地产生等离子体。 [解决方案]设置有引入气体和微波的管状壳体10,设置在该壳体的底面的孔30和沿壳体的轴线方向设置的柱状导体40, 导体40的底表面具有放置在孔的轮廓内的轮廓。 形成在导体40的底面41的轮廓和孔的轮廓之间的微小间隙A,由导体形成的同轴波导和壳体,以及至少形成在形成孔的轮廓部分上的绝缘膜22 提供了微小间隙。 在上述结构中,通过同轴波导将微波引导到微小间隙,使气体通过微小间隙,使得气体在微小间隙处被置于等离子体状态。 微波是脉冲波并且是负责控制的,并且形成孔30的轮廓部分从电极20的内部用冷却介质冷却。因此,可以防止等离子体温度的升高,结果, 可以产生稳定的等离子体。

    Radical generating method, etching method and apparatus for use in these methods
    64.
    发明申请
    Radical generating method, etching method and apparatus for use in these methods 失效
    自由基产生方法,蚀刻方法和用于这些方法的装置

    公开(公告)号:US20070131651A1

    公开(公告)日:2007-06-14

    申请号:US10578835

    申请日:2004-11-09

    IPC分类号: B44C1/22

    摘要: The method for generating radicals comprises: feeding F2 gas or a mixed gas of F2 gas and an inert gas into a chamber of which the inside is provided with a carbon material, supplying a carbon atom from the carbon material by applying a target bias voltage to the carbon material, and thereby generating high density radicals, wherein the ratio of CF3 radical, CF2 radical and CF radical is arbitrarily regulated by controlling the target bias voltage applied to the carbon material while measuring the infrared absorption spectrum of radicals generated inside the chamber.

    摘要翻译: 产生自由基的方法包括:将F 2 N 2气体或F 2气体的混合气体和惰性气体进料到其内部设置有碳材料的室中 通过向碳材料施加目标偏置电压从碳材料提供碳原子,从而产生高密度自由基,其中CF 3 3基团CF 2的比例

    Surface treating method and surface-treating apparatus
    65.
    发明申请
    Surface treating method and surface-treating apparatus 审中-公开
    表面处理方法和表面处理装置

    公开(公告)号:US20070034601A1

    公开(公告)日:2007-02-15

    申请号:US10550020

    申请日:2003-09-22

    IPC分类号: C03C15/00 H01L21/302 B44C1/22

    摘要: The surface of a material for an electronic device is flattened by irradiating the surface of the material with at least part of plasma components, while supplying a liquid to the surface of the material for an electronic device. There are provided a method of treating the surfaces for favorably flattening the surface of the material for an electronic device or of the substrate for an electronic device, while suppressing damage to the material or to the substrate, and an apparatus for treating the surfaces.

    摘要翻译: 用于电子设备的材料的表面通过用至少部分等离子体部件照射材料的表面而平坦化,同时将液体供应到用于电子设备的材料的表面。 提供了一种处理表面以有利地平坦化用于电子设备的材料的表面或用于电子设备的基板的方法,同时抑制对材料或基板的损坏,以及用于处理表面的设备。

    Distance measurement device and distance measurement method
    66.
    发明申请
    Distance measurement device and distance measurement method 失效
    距离测量装置和距离测量方法

    公开(公告)号:US20070024842A1

    公开(公告)日:2007-02-01

    申请号:US11384296

    申请日:2006-03-21

    IPC分类号: G01C3/08

    摘要: In a distance measurement device of the invention, a light divider separates pulsed light emitted from an ultrashort pulse fiber laser into reference light A and signal light. A scanning mirror unit irradiates an object with the signal light as a division of the pulsed light and receives scattered light B, which is reflected from the object irradiated with the signal light. An optical path length adjustment unit adjusts an optical path length of the reference light A as a division of the pulsed light. A differential detector included in an interference signal generator detects the degree of interference of the reference light A having the adjusted optical path length with the scattered light B and outputs the detected degree of interference as an interference signal. A computer specifies an adjustment value set in the optical path length adjustment unit to attain a specific optical path length maximizing the interference signal and uses the specified adjustment value to compute a distance from a reference position of the scanning mirror unit to the object. The distance measurement device of the invention thus enables high-speed and highly-accurate measurement of the object.

    摘要翻译: 在本发明的距离测量装置中,分光器将从超短脉冲光纤激光器发射的脉冲光分离成参考光A和信号光。 扫描反射镜单元用信号光照射物体作为脉冲光的分割,并且接收从被信号光照射的物体反射的散射光B. 光路长度调节单元调整参考光A的光路长度作为脉冲光的除法。 包括在干扰信号发生器中的差分检测器检测具有调整光程长度的参考光A与散射光B的干涉程度,并将检测到的干扰信号作为干扰信号输出。 计算机指定设置在光程长度调整单元中的调整值,以获得使干扰信号最大化的特定光程长度,并使用指定的调整值来计算从扫描反射镜单元的参考位置到物体的距离。 因此,本发明的距离测量装置能够高速且高精度地测量物体。

    Wavelenght-variable short pulse generating device and method
    67.
    发明申请
    Wavelenght-variable short pulse generating device and method 失效
    波长可变短脉冲发生装置及方法

    公开(公告)号:US20060051037A1

    公开(公告)日:2006-03-09

    申请号:US10523080

    申请日:2003-07-22

    IPC分类号: G02B6/26

    摘要: An apparatus and method for generating a wavelength-tunable short pulse that can generate wavelength-tunable short pulsed light in the visible-light wavelength band are provided. When ultrashort pulsed light is introduced into an optical fiber (3), a wavelength-tunable ultrashort soliton pulse is generated by a nonlinear optical effect through the soliton effect and Raman scattering. When the soliton pulse has a short duration and high peak intensity, a third harmonic having one-third of the wavelength of the soliton pulsed light is generated by a third nonlinear optical effect. This third harmonic has a short wavelength in the visible light band.

    摘要翻译: 提供一种用于产生可在可见光波长带中产生波长可调短脉冲光的波长可调短脉冲的装置和方法。 当超短脉冲光被引入到光纤(3)中时,通过孤子效应和拉曼散射,通过非线性光学效应产生波长可调的超短孤子脉冲。 当孤子脉冲具有短持续时间和高峰值强度时,具有三分之一波长的孤子脉冲光的三次谐波由第三非线性光学效应产生。 该三次谐波在可见光带中具有短波长。

    Broadband optical spectrum generating apparatus and pulsed light generating apparatus

    公开(公告)号:US06813423B2

    公开(公告)日:2004-11-02

    申请号:US10647293

    申请日:2003-08-26

    IPC分类号: G02B600

    CPC分类号: G02F1/365 G02F2001/3528

    摘要: A broadband optical spectrum generating apparatus 20 includes an ultra-short pulse fiber laser 22 that generates pulsed light having a pulse width in a unit of picosecond to femtosecond, and a broadband optical spectrum-generating optical fiber 24 that is connected with the ultra-short pulse fiber laser 22 via a lens 26 and has a non-linear coefficient of not less than 10 [W−1m−1] at a wavelength of the pulsed light and a magnitude of chromatic dispersion of not greater than 2 [ps/km/nm]. The pulsed light emitted from the ultra-short pulse fiber laser 22 is converted into a relatively flat super continuum over a broad band of approximately 1200 nm to 2000 nm by chromatic dispersion in the course of transmission through the broadband optical spectrum-generating optical fiber 24.