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    Microfabricated filter and shell constructed with a permeable membrane
    62.
    发明授权
    Microfabricated filter and shell constructed with a permeable membrane 失效
    微型过滤器和壳体用可渗透膜构成

    公开(公告)号：US5919364A

    公开(公告)日：1999-07-06

    申请号：US669149

    申请日：1996-06-24

    Applicant: Kyle S. Lebouitz ,  Roger T. Howe ,  Albert P. Pisano

    Inventor： Kyle S. Lebouitz ,  Roger T. Howe ,  Albert P. Pisano

    IPC: B01D71/02 ,  B01L3/00 ,  B81B1/00 ,  B81B7/00 ,  B81C1/00 ,  G01N33/49 ,  G03F7/00 ,  B01D63/00

    CPC classification number: B81C1/00333 ,  B01D67/0072 ,  B01D67/0093 ,  B01D71/02 ,  B01L3/502707 ,  B01L3/502753 ,  B81C1/00158 ,  G01N33/491 ,  G03F7/00 ,  B01D2323/225 ,  B01D2325/04 ,  B01L2200/12 ,  B01L2300/0681

    Abstract: Microfabricated filters constructed with permeable polysilicon membranes and methods for fabricating such filters. The filters include a frame structure having a plurality of openings therethrough and a permeable polysilicon membrane disposed over the openings in the frame structure. The frame structure provides support for the permeable polysilicon membrane. The pores of the filter may be smaller than the resolution limit of photolithography. The width of the pores may be as small as about 0.01 .mu.m, while the length of the pores may be as small as about 0.05 .mu.m. The filters feature a relatively high throughput due to the extremely short pore length. The filters may be fabricated utilizing standard microfabrication processes. Also, microfabricated shells constructed with permeable membranes for encapsulating microfabricated devices such as microelectromechanical structures (MEMS) and methods for fabricating such shells. The shells include a frame structure having a plurality of openings therethrough, a permeable membrane disposed on the openings through the frame structure, an optional sealing structure disposed on the permeable membrane, and a cavity bounded by the frame structure. The frame structure provides support for the permeable membrane. The permeable membrane may be a thin film layer of polysilicon having a thickness of less than about 0.3 .mu.m. The shells and methods for fabricating the shells minimize the damage incurred by the encapsulated microfabricated device during the fabrication of the shell without restricting the width of the shell. The shells may be fabricated utilizing standard microfabrication processes.

    Abstract translation: 用可渗透多晶硅膜构造的微型过滤器和制造这种过滤器的方法。 过滤器包括具有穿过其中的多个开口的框架结构和设置在框架结构中的开口上方的可渗透多晶硅膜。 框架结构为可渗透多晶硅膜提供支撑。 滤光器的孔可以小于光刻的分辨率极限。 孔的宽度可以小至约0.01μm，而孔的长度可以小至约0.05μm。 由于孔长度非常短，过滤器的生产量相对较高。 可以使用标准微加工工艺来制造过滤器。 而且，用可封装微结构器件（例如微机电结构（MEMS））和用于制造这种壳的方法的可渗透膜构成的微制造壳体。 壳体包括具有穿过其中的多个开口的框架结构，通过框架结构设置在开口上的可渗透膜，设置在可渗透膜上的可选密封结构以及由框架结构限定的空腔。 框架结构为渗透膜提供了支撑。 渗透膜可以是厚度小于约0.3μm的多晶硅薄膜层。 用于制造壳体的壳体和方法最小化在壳体制造期间由包封的微制造装置引起的损坏而不限制壳体的宽度。 壳可以使用标准的微细加工工艺制造。

    Mixing, modulation and demodulation via electromechanical resonators
    63.
    发明授权
    Mixing, modulation and demodulation via electromechanical resonators 失效
    通过机电谐振器进行混频，调制和解调

    公开(公告)号：US5839062A

    公开(公告)日：1998-11-17

    申请号：US210199

    申请日：1994-03-18

    Applicant: Clark Tu-Cuong Nguyen ,  Vadim Gutnik ,  Roger T. Howe

    Inventor： Clark Tu-Cuong Nguyen ,  Vadim Gutnik ,  Roger T. Howe

    IPC: H03H9/02 ,  H03H9/24 ,  H03H9/46 ,  H04B1/26

    CPC classification number: H03H9/2426 ,  H03H9/02377 ,  H03H9/465 ,  H04B1/26 ,  H03H2009/02496

    Abstract: Mixing, modulation and demodulation using the nonlinear properties of microelectromechanical resonators and filters are described. Mixing followed by filtering is implemented using microelectromechanical filters with nonlinear input transducers. AM modulation is implemented by passing a carrier signal through the output transducer of a microelectromechanical filter. FM and FSK demodulation is accomplished using parallel banks of microelectromechanical filters. The invention can be implemented using integrated circuit technology.

    Abstract translation: 描述使用微机电谐振器和滤波器的非线性特性的混频，调制和解调。 使用具有非线性输入传感器的微机电滤波器实现混频，随后进行滤波。 通过使载波信号通过微机电滤波器的输出换能器来实现AM调制。 FM和FSK解调是使用微机电滤波器的并行库实现的。 本发明可以使用集成电路技术实现。

    Resonant accelerometer
    65.
    发明授权
    Resonant accelerometer 失效

    公开(公告)号：US4851080A

    公开(公告)日：1989-07-25

    申请号：US285347

    申请日：1988-12-14

    Applicant: Roger T. Howe ,  Shih-Chia Chang

    Inventor： Roger T. Howe ,  Shih-Chia Chang

    IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18

    CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10S438/977

    Abstract: An accelerometer is provided by a sample mass suspended in a central area of a support by pairs of resonating arms. One pair of arms lies on one axis through the sample mass. Another pair of arms lies on a second axis through the sample mass perpendicular to the one axis. Acceleration of the mass and support is detected by a measured change in resonant frequency of the arms of a pair. The measured change in resonant frequency is the magnitude of the acceleration and the axis along which the pair of arms lies provides the direction of the acceleration. Orthogonal components of acceleration are simultaneously measured by the pairs of arms lying on perpendicular axes. Electrostatic force-rebalance techniques and other known techniques for measuring acceleration in a direction perpendicular to the axes of the pairs of arms are readily incorporated to provide a third direction measurement of acceleration. The accelerometer is fabricated in a monolithic process which employs micromachining techniques.

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