公开(公告)号：US07538888B2

公开(公告)日：2009-05-26

申请号：US11745749

申请日：2007-05-08

申请人： Shinichi Hara ,  Naoyuki Taketomi ,  Makoto Abbe

发明人： Shinichi Hara ,  Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01B11/02

CPC分类号： G01S17/74 ,  G01S17/42 ,  G01S17/66

摘要： A method for estimating an absolute distance between a tracking laser interferometer and a retroreflector is provided. The tracking laser interferometer includes the retroreflector for reflecting and returning an incident measurement light in an incident direction and a two-axis rotating mechanism for rotationally moving in an exit direction of the measurement light so that optical axes of the measurement light and return light are collimated.

摘要翻译： 提供了用于估计跟踪激光干涉仪和后向反射器之间的绝对距离的方法。 跟踪激光干涉仪包括用于在入射方向上反射和返回入射测量光的后向反射器和用于在测量光的出射方向上旋转移动的两轴旋转机构，使得测量光和返回光的光轴被准直 。

公开(公告)号：US20080020699A1

公开(公告)日：2008-01-24

申请号：US11325580

申请日：2006-01-04

申请人： Shinichi Hara ,  Akihiko Yoshida ,  Takao Koike

发明人： Shinichi Hara ,  Akihiko Yoshida ,  Takao Koike

IPC分类号： B60H1/00 ,  B60H3/00

CPC分类号： B60H3/0092 ,  B60H3/0085

摘要： [Problem] The purpose of the present invention is to satisfy the following: (1) it prevents the adsorption of antibacterial agent to the filter during storage, (2) for this reason, makes the container and the filter separable and furthermore makes it easy to fix the container, and (3) makes it possible to change the filter and the antibacterial agent respectively separately with simple operations. [Resolving Means] The fixing mechanism of the container in which an antibacterial agent has been sealed according to the present invention is a fixing mechanism for a container in which an antibacterial agent is sealed in a vehicle air conditioning device. And, fixing means 53 are provided for removably fixing the container 31 to the lid 51 which opens and closes the inlet/outlet port 50 of the filter unit 30.

摘要翻译： [问题]本发明的目的是满足以下要求：（1）防止在储存期间将抗菌剂吸附到过滤器上，（2）为此，容器和过滤器可分离，并且使其容易 固定容器，（3）可以通过简单的操作分别改变过滤器和抗菌剂。 [解决方案]根据本发明的密封有抗菌剂的容器的固定机构是在车辆空调装置中密封抗菌剂的容器的固定机构。 并且，设置固定装置53，用于将容器31可拆卸地固定到打开和关闭过滤器单元30的入口/出口50的盖51上。

公开(公告)号：US07265812B2

公开(公告)日：2007-09-04

申请号：US11550825

申请日：2006-10-19

申请人： Shinichi Hara ,  Eiji Sakamoto ,  Yoshinori Miwa ,  Yasuo Hasegawa ,  Yoshiki Kino

发明人： Shinichi Hara ,  Eiji Sakamoto ,  Yoshinori Miwa ,  Yasuo Hasegawa ,  Yoshiki Kino

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70891 ,  G03B27/52

摘要： A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

摘要翻译： 布置在真空或减压气氛中的冷却装置用于与照射有光照射凹部的照明区域的光学元件一起使用，该温度变化机构以不接触的方式改变部分冷却装置的温度。

公开(公告)号：US20070091275A1

公开(公告)日：2007-04-26

申请号：US11550825

申请日：2006-10-19

申请人： Shinichi Hara ,  Eiji Sakamoto ,  Yoshinori Miwa ,  Yasuo Hasegawa ,  Yoshiki Kino

发明人： Shinichi Hara ,  Eiji Sakamoto ,  Yoshinori Miwa ,  Yasuo Hasegawa ,  Yoshiki Kino

IPC分类号： G03B21/16 ,  G03B21/18

CPC分类号： G03F7/70891 ,  G03B27/52

摘要： A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

摘要翻译： 布置在真空或减压气氛中的冷却装置用于与照射有光照射凹部的照明区域的光学元件一起使用，该温度变化机构以不接触的方式改变部分冷却装置的温度。

公开(公告)号：US07191599B2

公开(公告)日：2007-03-20

申请号：US10631927

申请日：2003-07-31

申请人： Shinichi Hara

发明人： Shinichi Hara

IPC分类号： F25B21/02

CPC分类号： H01L35/00 ,  F25B21/02 ,  F25B2321/0212 ,  F25D19/00 ,  G03F7/70233 ,  G03F7/70891

摘要： A cooling apparatus for cooling an optical element provided in a vacuum atmosphere includes a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer, and a controller for controlling temperature of the radiation cooling part.

摘要翻译： 用于冷却设置在真空气氛中的光学元件的冷却装置包括：与光学元件隔开的辐射冷却部件，用于通过辐射热传递来冷却光学元件;以及控制器，用于控制辐射冷却部件的温度。

公开(公告)号：US07095480B2

公开(公告)日：2006-08-22

申请号：US10779214

申请日：2004-02-13

申请人： Shinichi Hara ,  Eiji Sakamoto ,  Yoshinori Miwa ,  Yasuo Hasegawa ,  Yoshiki Kino

发明人： Shinichi Hara ,  Eiji Sakamoto ,  Yoshinori Miwa ,  Yasuo Hasegawa ,  Yoshiki Kino

IPC分类号： G03B27/42

CPC分类号： G03F7/70891 ,  G03B27/52

摘要： A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

公开(公告)号：US07081949B2

公开(公告)日：2006-07-25

申请号：US10766258

申请日：2004-01-27

申请人： Shinichi Hara

发明人： Shinichi Hara

IPC分类号： G03B27/72 ,  G03B27/42

CPC分类号： G03F7/70891 ,  G02B17/0663 ,  G03F7/70216 ,  G03F7/7055 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70875

摘要： An exposure apparatus having an exposure mode that transfers a pattern on a reticle onto an object, and a standby mode that waits for exposure includes an optical system for introducing the exposure light to the object in the exposure mode, and a mechanism for allowing the exposure light to enter the reticle and/or the optical system in the standby mode, and for preventing the exposure light from entering the object in the standby mode.

摘要翻译： 具有将掩模版上的图案转印到物体上的曝光模式的曝光装置和等待曝光的待机模式包括用于在曝光模式下将曝光光引入到物体的光学系统，以及允许曝光的机构 在待机模式中光进入光罩和/或光学系统，并且用于在待机模式下防止曝光光进入对象。

公开(公告)号：US06990173B1

公开(公告)日：2006-01-24

申请号：US09577608

申请日：2000-05-25

申请人： Eigo Kawakami ,  Shinichi Hara

发明人： Eigo Kawakami ,  Shinichi Hara

IPC分类号： G21K5/00

CPC分类号： G03F7/70816 ,  G03F7/70933

摘要： A positioning apparatus of an exposure apparatus includes a chamber, a substituting unit for substituting a gas in the chamber from a first gas to a second gas, a static pressure gas bearing provided in the chamber, a gas supply unit for supplying the second gas to the static pressure gas bearing, a control unit for controlling the gas supply unit to supply the second gas to the static pressure gas bearing when the substituting unit substitutes the gas in the chamber from the first gas to the second gas, and a bearing exhaust unit for exhausting the gas of the static pressure gas bearing.

摘要翻译： 曝光装置的定位装置包括：室，用于将室中的气体从第一气体替换到第二气体的替代单元，设置在室中的静压气体轴承，用于将第二气体供应到 静压气体轴承，控制单元，用于控制气体供应单元，以在替代单元将室中的气体从第一气体替换为第二气体时将第二气体供应到静压气体轴承;以及轴承排气单元 用于排出静压气体轴承的气体。

公开(公告)号：US20050110967A1

公开(公告)日：2005-05-26

申请号：US10953205

申请日：2004-09-29

申请人： Shinichi Hara ,  Hideo Yokota

发明人： Shinichi Hara ,  Hideo Yokota

IPC分类号： G02B5/08 ,  G03F7/20 ,  G05D23/19 ,  H01L21/027 ,  G03B27/52

CPC分类号： G03F7/70891 ,  G05D23/1919

摘要： Disclosed is cooling technology in one aspect of which is a cooling system for cooling an optical member including a material having a linear expansion coefficient that becomes equal to zero at a predetermined temperature, the cooling system including a temperature detecting unit for detecting a temperature of a detection-subject portion of the optical member, a cooling unit for cooling a cooling-subject portion of the optical member, and a control unit for controlling the cooling unit on the basis of the detection by the temperature detecting unit.

摘要翻译： 公开了一种冷却技术，其一个方面是用于冷却包括在预定温度下变为等于零的线性膨胀系数的材料的光学构件的冷却系统，该冷却系统包括用于检测温度的温度的温度检测单元 光学构件的检测对象部分，用于冷却光学构件的冷却对象部分的冷却单元，以及用于基于温度检测单元的检测来控制冷却单元的控制单元。

公开(公告)号：US06422827B1

公开(公告)日：2002-07-23

申请号：US09626077

申请日：2000-07-26

申请人： Shinichi Hara

发明人： Shinichi Hara

IPC分类号： F04F500

CPC分类号： B01F5/045 ,  B01F3/04007 ,  B01F5/0413 ,  B01F5/0426 ,  B01F13/1025 ,  B01F2003/061 ,  B01F2003/125

摘要： A flow path for the pressure gas which is to be connected to a pressure gas feeder is formed almost rectilinearly, a liquid reservoir chamber to be connected to a pressure liquid feeder is provided in the flow path for the pressure gas. The sectional area of the flow path for the pressure fluid is gradually reduced to form an accelerating portion, an injection port for a liquid injection nozzle communicating with the liquid reservoir chamber is provided in the acceleration portion and a gas injection port is formed on the outside to enclose the injection port of the liquid injection nozzle. A powder and granular material may be mixed into the pressure gas or the pressure liquid, or a detergent may be added into the pressure liquid.

摘要翻译： 要连接到压力气体进料器的压力气体的流路几乎是直线形成的，在压力气体的流路中设置有连接到压力液体进料器的储液室。 用于压力流体的流路的截面积逐渐减小以形成加速部分，在加速部分设置有与储液室连通的液体喷射喷嘴用喷射口，在外部形成有气体喷射口 以封闭液体喷射喷嘴的注入口。 可以将粉末和颗粒材料混合到压力气体或压力液体中，或者可以将洗涤剂加入到压力液体中。