Method for manufacturing exposure mask, exposure apparatus and semiconductor device
    61.
    发明授权
    Method for manufacturing exposure mask, exposure apparatus and semiconductor device 失效
    曝光掩模,曝光装置和半导体装置的制造方法

    公开(公告)号:US06558853B1

    公开(公告)日:2003-05-06

    申请号:US09661553

    申请日:2000-09-14

    申请人: Daisuke Kawamura

    发明人: Daisuke Kawamura

    IPC分类号: G03F900

    CPC分类号: G03F1/36 G03F7/70433

    摘要: An exposure mask is used for transcribing a desired pattern on a resist on a wafer in a photolithography step. This exposure mask is formed by the arrangement of transcribed pattern film formed in a desired pattern on the transparent substrate. In order to decrease background light, a dummy pattern film formed in a dummy pattern is arranged on the transparent substrate together with the transcribed pattern film. The dummy pattern is designed in such a manner that the dummy pattern is not transcribed on the resist under the exposure condition required for transcribing the desired pattern on the resist in a desired size. Besides, the dummy pattern film is arranged from the transcribed pattern film in a predetermined distance so that the intensity distribution of light which passes through the transcribed pattern film.

    摘要翻译: 曝光掩模用于在光刻步骤中在晶片上的抗蚀剂上转录所需图案。 该曝光掩模由在透明基板上以期望图案形成的转录图案膜的排列形成。 为了减少背景光,以虚拟图案形成的虚拟图案膜与转印图案膜一起布置在透明基板上。 虚拟图案被设计成使得在用于以希望的尺寸转印抗蚀剂上的期望图案所需的曝光条件下,在抗蚀剂上不转印哑图案。 此外,虚设图案膜从转录图案膜以预定距离布置,使得通过转录图案膜的光的强度分布。

    Pattern forming method
    62.
    发明授权
    Pattern forming method 失效
    图案形成方法

    公开(公告)号:US08673771B2

    公开(公告)日:2014-03-18

    申请号:US13597014

    申请日:2012-08-28

    申请人: Daisuke Kawamura

    发明人: Daisuke Kawamura

    IPC分类号: H01L21/00

    摘要: According to one embodiment, a pattern forming method comprises forming, on a metal layer and an insulating layer, an underlying layer the surface state of which is changeable by irradiation with a light ray, radiating the light ray to the underlying layer, thereby changing the surface state of a portion of the underlying layer above the metal layer, forming a block polymer layer on the underlying layer, forming, on the underlying layer, a directed self-assembly phase which contains a first polymer portion and a second polymer portion, the first polymer portion being positioned above the underlying layer portion the surface state of which has been changed by the radiation of the light ray, removing the first polymer portion, and the underlying layer portion underneath the first polymer portion to make a hole, and burying a conductive film into the hole.

    摘要翻译: 根据一个实施例,图案形成方法包括在金属层和绝缘层上形成其表面状态可通过用光线照射而变化的下层,将光线照射到下层,从而改变 在金属层上方的下层的一部分的表面状态,在下层上形成嵌段聚合物层,在下层上形成包含第一聚合物部分和第二聚合物部分的定向自组装相, 第一聚合物部分位于下面的层部分之上,其表面状态已经被光线的辐射改变,去除第一聚合物部分,并且在第一聚合物部分下方形成下面的层部分以形成孔,并且将 导电膜进入孔。

    Composition for treating arthritic disorder
    64.
    发明授权
    Composition for treating arthritic disorder 有权
    用于治疗关节炎疾病的组合物

    公开(公告)号:US08367637B2

    公开(公告)日:2013-02-05

    申请号:US12461660

    申请日:2009-08-19

    CPC分类号: A61K31/715

    摘要: The present invention provides compositions and methods for treating a joint disease containing as an active ingredient thereof a monovalent metal salt of alginic acid for which the endotoxin level thereof has been lowered to an extent that does not substantially induce inflammation or fever. As a result, it is possible to provide a composition for treating a joint disease which has the effects of protecting cartilage from mechanical irritation, inhibiting degenerative changes in cartilage caused by wear and inflammation, repairing cartilage injuries, suppressing inflammation and pain of joint tissue, inhibiting degeneration of synovial tissue, and inhibiting osteochondral destruction.

    摘要翻译: 本发明提供用于治疗关节疾病的组合物和方法,其含有作为其活性成分的海藻酸的一价金属盐,其内毒素水平已被降低至基本上不诱导炎症或发热的程度。 结果,可以提供一种治疗关节疾病的组合物,其具有保护软骨免受机械刺激的作用,抑制由磨损和炎症引起的软骨的退行性变化,修复软骨损伤,抑制炎症和关节组织的疼痛, 抑制滑膜组织变性,抑制骨软骨破坏。

    DISPLAY DEVICE, DISPLAY PROGRAM, AND DISPLAY METHOD
    65.
    发明申请
    DISPLAY DEVICE, DISPLAY PROGRAM, AND DISPLAY METHOD 有权
    显示设备,显示程序和显示方法

    公开(公告)号:US20120113033A1

    公开(公告)日:2012-05-10

    申请号:US13286345

    申请日:2011-11-01

    IPC分类号: G06F3/041

    CPC分类号: G06F3/04886

    摘要: A display device includes a display section displaying instruction information to be instructed to users in an instruction information display region provided corresponding to the instruction information, a touch panel capturing an instruction represented by the instruction information displayed in the instruction information display region, in response to a users' touch operation to a touch detection region provided corresponding to the instruction information display region, and a control section performing a predetermined operation control based on the instruction information inputted through the touch panel. The instruction information display region is provided in an upward zone within the touch detection region.

    摘要翻译: 显示装置包括显示部分,显示指示信息到用户指示信息显示区域中提供的指令信息,触摸板捕获由指令信息显示区域中显示的指令信息表示的指令,响应于 用户对与指示信息显示区域相对应的触摸检测区域的触摸操作,以及基于通过触摸面板输入的指示信息执行预定操作控制的控制部分。 指示信息显示区域设置在触摸检测区域内的向上区域中。

    Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices
    66.
    发明授权
    Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices 有权
    成膜装置,制造管理系统以及制造半导体装置的方法

    公开(公告)号:US08122848B2

    公开(公告)日:2012-02-28

    申请号:US12591160

    申请日:2009-11-10

    申请人: Daisuke Kawamura

    发明人: Daisuke Kawamura

    IPC分类号: B05C5/02

    CPC分类号: H01L21/316 H01L21/02282

    摘要: A film forming apparatus which forms a film on a substrate by utilizing a chemical solution, including: a correlation data creating unit which creates a correlation data that is related to the quality of a chemical solution, from data that is related to the properties of the chemical solution including at least one of data on storage temperature for the chemical solution to be loaded and data on pressure applied to the chemical solution to be loaded; and a determining unit which determines whether or not the chemical solution holds expected quality thereof on the bases of the correlation data.

    摘要翻译: 一种通过利用化学溶液在基板上形成膜的成膜装置,包括:相关数据生成单元,其从与化学溶液的质量相关的数据生成与化学溶液的质量相关的相关数据 化学溶液,包括要加载的化学溶液的储存温度数据和要加载的化学溶液的压力数据中的至少一个; 以及确定单元,其基于所述相关数据来确定所述化学溶液是否保持其预期质量。

    SERVER APPARATUS, ELECTRONIC APPARATUS, ELECTRONIC BOOK PROVIDING SYSTEM, ELECTRONIC BOOK PROVIDING METHOD, ELECTRONIC BOOK DISPLAYING METHOD, AND PROGRAM
    67.
    发明申请
    SERVER APPARATUS, ELECTRONIC APPARATUS, ELECTRONIC BOOK PROVIDING SYSTEM, ELECTRONIC BOOK PROVIDING METHOD, ELECTRONIC BOOK DISPLAYING METHOD, AND PROGRAM 有权
    服务器装置,电子设备,电子书籍提供系统,电子书提供方法,电子书显示方法和程序

    公开(公告)号:US20120036431A1

    公开(公告)日:2012-02-09

    申请号:US13264394

    申请日:2010-04-20

    IPC分类号: G06F15/16 G06F17/00

    摘要: [Object] To lead a user to various types of information easily with an electronic book as a starting point. [Solving Means] A server apparatus includes a storage, a communication section, and a controller. The storage stores an electronic book obtained by digitizing a book having at least one page in which at least one information item is represented, and associated information that is associated with the information item. The communication section communicates with an external electronic apparatus. The controller generates, when the electronic book is displayed by the external electronic apparatus and the information item of the electronic book is designated, an electronic book unit by adding first metadata to the information item so that display processing of the associated information is executed on the external electronic apparatus, and controls the communication section to transmit the generated electronic book unit to the external electronic apparatus.

    摘要翻译: [对象]以电子书为起点,轻松引导用户进入各种类型的信息。 [解决方案]服务器设备包括存储器,通信部件和控制器。 存储器存储通过数字化具有表示至少一个信息项的至少一个页面的书以及与该信息项相关联的关联信息而获得的电子书。 通信部与外部电子设备通信。 当由外部电子设备显示电子书并指定电子书的信息项时,控制器产生电子书单元,该电子书单元通过将第一元数据添加到信息项中,使得相关信息的显示处理在 外部电子设备,并且控制通信部分将生成的电子书本单元发送到外部电子设备。

    Composition for treating arthritic disorder
    69.
    发明申请
    Composition for treating arthritic disorder 有权
    用于治疗关节炎疾病的组合物

    公开(公告)号:US20100048506A1

    公开(公告)日:2010-02-25

    申请号:US12461660

    申请日:2009-08-19

    IPC分类号: A61K31/715 A61P19/02

    CPC分类号: A61K31/715

    摘要: The present invention provides compositions and methods for treating a joint disease containing as an active ingredient thereof a monovalent metal salt of alginic acid for which the endotoxin level thereof has been lowered to an extent that does not substantially induce inflammation or fever. As a result, it is possible to provide a composition for treating a joint disease which has the effects of protecting cartilage from mechanical irritation, inhibiting degenerative changes in cartilage caused by wear and inflammation, repairing cartilage injuries, suppressing inflammation and pain of joint tissue, inhibiting degeneration of synovial tissue, and inhibiting osteochondral destruction.

    摘要翻译: 本发明提供用于治疗关节疾病的组合物和方法,其含有作为其活性成分的海藻酸的一价金属盐,其内毒素水平已被降低至基本上不引起炎症或发热的程度。 结果,可以提供一种治疗关节疾病的组合物,其具有保护软骨免受机械刺激的作用,抑制由磨损和炎症引起的软骨的退行性变化,修复软骨损伤,抑制炎症和关节组织的疼痛, 抑制滑膜组织变性,抑制骨软骨破坏。