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    CMOS-Compatible Microstructures and Methods of Fabrication
    61.
    发明申请
    CMOS-Compatible Microstructures and Methods of Fabrication 失效
    CMOS兼容微结构和制作方法

    公开(公告)号：US20100044807A1

    公开(公告)日：2010-02-25

    申请号：US12422280

    申请日：2009-04-12

    Applicant: Long-Sheng Fan

    Inventor： Long-Sheng Fan

    IPC: H01L29/66 ,  H01L21/28

    CPC classification number: B81C1/00246 ,  B81B2201/0292 ,  B81B2201/038 ,  B81B2203/056 ,  B81C2203/0714 ,  B81C2203/0742 ,  H01L27/0617

    Abstract: The present invention addresses the aims and issues of making multi layer microstructures including “metal-shell-oxide-core” structures and “oxide-shell-metal-core” structures, and mechanically constrained structures and the constraining structures using CMOS (complimentary metal-oxide-semiconductor transistors) materials and layers processed during the standard CMOS process and later released into constrained and constraining structures by etching away those CMOS materials used as sacrificial materials. The combinations of possible constrained structures and methods of fabrication are described.

    Abstract translation: 本发明解决了制造多层微观结构的目的和问题，包括“金属 - 壳 - 氧化物 - 氧化物 - 核心”结构和“氧化物 - 壳 - 金属 - 芯”结构，机械约束结构和使用CMOS（互补金属 - 氧化物半导体晶体管）在标准CMOS工艺期间处理的材料和层，然后通过蚀刻掉用作牺牲材料的那些CMOS材料而释放到约束和约束结构中。 描述了可能的约束结构和制造方法的组合。

    STRUCTURE FOR PROTECTING FEATURES DURING THE REMOVAL OF SACRIFICIAL MATERIALS
    66.
    发明申请
    STRUCTURE FOR PROTECTING FEATURES DURING THE REMOVAL OF SACRIFICIAL MATERIALS 有权
    在移除材料时保护特性的结构

    公开(公告)号：US20080316563A1

    公开(公告)日：2008-12-25

    申请号：US12199236

    申请日：2008-08-27

    Applicant: Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

    Inventor： Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

    IPC: G02B26/08

    CPC classification number: B81C1/00476 ,  B81B2201/038 ,  B81C1/00801

    Abstract: The present invention provides an apparatus. The apparatus, may include an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.

    Abstract translation: 本发明提供一种装置。 该装置可以包括位于基板上的致动器，位于致动器上方并联接到致动器的可移动特征，以及位于致动器和可移动特征上方的材料层，并且不构成与可移动特征相关联的梁/弹簧的一部分， 所述材料层被构造为具有能够保持液体的内部的储存器，所述可移动特征暴露于内部。

    Nanocrystal powered nanomotor
    67.
    发明申请
    Nanocrystal powered nanomotor 有权
    纳米晶纳米电机

    公开(公告)号：US20080197339A1

    公开(公告)日：2008-08-21

    申请号：US11229935

    申请日：2005-09-19

    Applicant: Brian Christopher Regan ,  Alexander K. Zettl ,  Shaul Aloni

    Inventor： Brian Christopher Regan ,  Alexander K. Zettl ,  Shaul Aloni

    IPC: F04D27/02 ,  H01L29/06 ,  C30B23/00 ,  C30B15/26

    CPC classification number: B81B3/0021 ,  B81B2201/038 ,  B82Y15/00 ,  B82Y30/00 ,  Y10S977/725 ,  Y10S977/733 ,  Y10S977/752 ,  Y10T117/1004

    Abstract: A nanoscale nanocrystal which may be used as a reciprocating motor is provided, comprising a substrate having an energy differential across it, e.g. an electrical connection to a voltage source at a proximal end; an atom reservoir on the substrate distal to the electrical connection; a nanoparticle ram on the substrate distal to the atom reservoir; a nanolever contacting the nanoparticle ram and having an electrical connection to a voltage source, whereby a voltage applied between the electrical connections on the substrate and the nanolever causes movement of atoms between the reservoir and the ram. Movement of the ram causes movement of the nanolever relative to the substrate. The substrate and nanolever preferably comprise multiwalled carbon nanotubes (MWNTs) and the atom reservoir and nanoparticle ram are preferably metal (e.g. indium) deposited as small particles on the MWNTs. The substrate may comprise a silicon chip that has been fabricated to provide the necessary electrodes and other electromechanical structures, and further supports an atomic track, which may comprise an MWNT.

    Abstract translation: 提供了可用作往复式电动机的纳米级纳米晶体，其包括具有跨过其的能量差异的衬底。 在近端处与电压源的电连接; 基板远离电连接的原子储存器; 位于原子储存器远端的衬底上的纳米颗粒柱塞; 纳米级接触纳米颗粒柱塞并且具有与电压源的电连接，由此施加在衬底上的电连接和纳米器之间的电压引起原子在储存器和柱塞之间的移动。 柱塞的移动导致纳米级器件相对于衬底的移动。 衬底和纳米棒优选地包括多壁碳纳米管（MWNT），并且原子储存器和纳米颗粒柱塞优选是作为小颗粒沉积在MWNT上的金属（例如铟）。 衬底可以包括硅芯片，其被制造成提供必要的电极和其它机电结构，并且还支持可以包括MWNT的原子轨道。

    Motion Conversion System
    68.
    发明申请
    Motion Conversion System 有权
    运动转换系统

    公开(公告)号：US20080148884A1

    公开(公告)日：2008-06-26

    申请号：US11963072

    申请日：2007-12-21

    Applicant: Richard Lee Knipe

    Inventor： Richard Lee Knipe

    IPC: F16H21/00

    CPC classification number: B81B5/00 ,  B81B3/0032 ,  B81B2201/038 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/16 ,  F16H21/44 ,  F16H21/50 ,  Y10T74/18056 ,  Y10T74/18568 ,  Y10T74/1892

    Abstract: A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.

    Abstract translation: 描述运动转换系统。 运动转换系统包括可操作用于沿第一方向旋转的第一扭转构件。 第二扭转构件偏离与第一扭转构件的距离，其中第二扭转构件可操作用于沿与第一方向相反的方向旋转。 并且，横向构件具有连接到第一和第二扭转构件的下表面。 其中，横向构件的平移运动是由第一和第二扭转构件的旋转运动引起的。

    6-Axis electromagnetically-actuated meso-scale nanopositioner
    70.
    发明申请
    6-Axis electromagnetically-actuated meso-scale nanopositioner 有权
    6轴电磁致动中尺度纳米定位器

    公开(公告)号：US20070220882A1

    公开(公告)日：2007-09-27

    申请号：US11709596

    申请日：2007-02-22

    Applicant: Martin Culpepper ,  Dariusz Golda

    Inventor： Martin Culpepper ,  Dariusz Golda

    IPC: B81B7/02

    CPC classification number: B81B3/0062 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058 ,  Y10T74/20348

    Abstract: A MEMS actuator includes a coil stack in the form of microfabricated, electrically conductive first and second superposed layers. A magnet array is superposed in magnetic communication with the coil stack, with first and second coils being selectively, electrically actuatable to generate relative movement between the coil stack and the magnet array both in-plane and out-of-plane. In various embodiments, a plurality of the actuators are integrally coupled to a microfabricated compliant mechanism to provide a high bandwidth, six degree of freedom nanopositioner.

    Abstract translation: MEMS致动器包括呈微加工，导电的第一和第二叠置层的形式的线圈堆叠。 磁体阵列叠加成与线圈堆叠磁连通，其中第一和第二线圈被选择性地电致动以在线圈堆叠和磁体阵列之间在平面内和平面外产生相对运动。 在各种实施例中，多个致动器整体地耦合到微制造的柔性机构以提供高带宽六自由度的纳米定位器。

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