公开(公告)号：US5774222A

公开(公告)日：1998-06-30

申请号：US539886

申请日：1995-10-06

Applicant: Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

Inventor： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

IPC: G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95615 ,  G01N2201/0618 ,  G01N2201/0634

Abstract: A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.

Abstract translation: 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上，检查被检查物体上的微细图案，晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制，并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较，并且检测出显示不一致的图案的一部分作为缺陷，从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外，通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。

公开(公告)号：US5288646A

公开(公告)日：1994-02-22

申请号：US720531

申请日：1991-06-21

Applicant: Finn C. Lundsgaard ,  Niels-Henrik Jensen ,  Willy Andersen

Inventor： Finn C. Lundsgaard ,  Niels-Henrik Jensen ,  Willy Andersen

IPC: G01N33/49 ,  G01N21/03 ,  G01N21/11 ,  G01N21/25 ,  G01N21/27 ,  G01N21/31 ,  G01N21/64 ,  G01N21/76 ,  G01N21/77 ,  G01N21/80 ,  G01N21/84 ,  G01N33/48 ,  G01N33/497 ,  G01N33/84 ,  G01N35/00 ,  G01N35/10

CPC classification number: G01N21/03 ,  G01N21/251 ,  G01N21/255 ,  G01N21/276 ,  G01N21/6408 ,  G01N21/6428 ,  G01N21/78 ,  G01N33/4925 ,  G01N33/497 ,  G01N2021/0346 ,  G01N2021/036 ,  G01N2021/0364 ,  G01N2021/3148 ,  G01N2021/3166 ,  G01N2021/6417 ,  G01N2021/6432 ,  G01N2021/6439 ,  G01N2021/7786 ,  G01N2021/8405 ,  G01N2035/00306 ,  G01N2035/00316 ,  G01N2035/1062 ,  G01N21/05 ,  G01N21/80 ,  G01N2201/0407 ,  G01N2201/0476 ,  G01N2201/0618 ,  G01N2201/1288

Abstract: A sampling device for photometric determination of the content of an analyte in a sample of whole blood has at least one measuring chamber having locally transparent wall parts, at least one wall part being sufficiently deformable to facilitate displacement of the whole blood sample from the measuring chamber, with a transparent body having a radiation transmission characteristic dependent upon the concentration of a predetermined analyte in the whole blood sample disposed between the wall parts. The sampling device is employed in an analyzer for photometric determination of the content of analyte in a sample of whole blood and in a method of photometric in vitro determination of the content of an analyte in a sample of whole blood. In the method, a sample of whole blood is transferred directly from an in vivo locality to the sampling device, the measuring chamber therein is deformed in a controlled manner to substantially drain the whole blood from the measuring chamber, radiation is transmitted through the substantially drained measuring chamber, detected, and the analyte content determined. A measuring chamber for photometric determination of an analyte in a sample of whole blood has locally transparent wall parts, at least one being sufficiently deformable to facilitate displacement of the whole blood sample from the measuring chamber, and a transparent body disposed between the wall parts. The measuring chamber is employed in an analyzer and in a method for the photometric determination of an analyte in a sample of whole blood.

Abstract translation: PCT No.PCT / DK89 / 00301 Sec。 371日期1991年6月21日 102（e）1991年6月21日PCT 1989年12月21日PCT PCT。 公开号WO90 / 07109 日本1990年6月28日。用于光度测定全血样品中分析物含量的采样装置具有至少一个具有局部透明壁部分的测量室，至少一个壁部分可充分变形， 来自测量室的全血样本，具有取决于设置在壁部之间的全血样品中的预定分析物的浓度的透射特性的透明体。 采样装置用于测量全血样品中分析物含量的光度测定仪和全血样品中分析物含量的光度测定方法。 在该方法中，将全血样品直接从体内局部转移到采样装置，其中的测量室以受控的方式变形，从而从测量室基本上排出全部血液，辐射通过基本排出的 测量室，检测，并确定分析物含​​量。 用于光度测定全血样品中的分析物的测量室具有局部透明的壁部分，至少一个可充分变形以促进全血样品从测量室排出，以及设置在壁部之间的透明体。 测量室用于分析仪和全血样品中的分析物的光度测定方法。

公开(公告)号：US5223715A

公开(公告)日：1993-06-29

申请号：US763927

申请日：1991-09-20

Applicant: James L. Taylor

Inventor： James L. Taylor

IPC: G01J3/42 ,  G01N21/25 ,  G01N21/27 ,  G01N21/35

CPC classification number: G01N21/276 ,  G01N21/255 ,  G01J3/42 ,  G01N21/359 ,  G01N2201/0618 ,  G01N2201/067 ,  G01N2201/129

Abstract: A process is provided for obtaining spectral information and quantifying the physical properties of a sample. The process comprises launching polychromatic light having a wavelength ranging from about 100 nanometers to about 2500 nanometers alternately through at least one sample channel and at least one reference channel, through at least one high-efficiency fiber optic switch. The sample and the polychromatic light along the sample channel are directed to a sample cell wherein the polychromatic light is passed through the sample, producing sample spectral information. The polychromatic light directed along the reference channel produces reference spectral information. The sample and reference spectral information is reproducibly and uniformly imaged by passing or conveying said sample and reference spectral information through a mode scrambler and the uniformly imaged sample and reference spectral information is then processed in a wavelength discrimination device wherein the uniformly imaged spectral information is separated into component wavelengths and the light intensity at each wavelength determined and recorded. A chemometric model and the separated and recorded uniformly imaged sample and reference spectral information are then utilized to predict the physical properties of the sample. The process of the present invention provides improved prediction accuracy, increased reliability, lower operating costs, and is easier to use and calibrate.

Abstract translation: 提供了一种用于获得光谱信息和量化样品的物理性质的过程。 该方法包括通过至少一个高效光纤开关通过至少一个采样通道和至少一个参考通道交替地发射具有约100纳米至约2500纳米波长范围的多色光。 将样品和沿着样品通道的多色光引导到样品池，其中多色光通过样品，产生样品光谱信息。 沿着参考通道引导的多色光产生参考光谱信息。 通过传递或传送所述样本和参考光谱信息通过模式加扰器对样本和参考光谱信息进行再现性和均匀地成像，然后在均匀成像的光谱信息被分离的波长鉴别装置中处理均匀成像的样本和参考光谱信息 确定并记录每个波长的分量波长和光强度。 然后利用化学计量学模型和分离和记录的均匀成像的样本和参考光谱信息来预测样品的物理性质。 本发明的方法提供了改进的预测精度，增加了可靠性，降低了操作成本，并且更易于使用和校准。

公开(公告)号：US4587427A

公开(公告)日：1986-05-06

申请号：US517920

申请日：1983-07-28

Applicant: Douglas C. Talbot ,  James L. Witler

Inventor： Douglas C. Talbot ,  James L. Witler

IPC: G01N21/35 ,  G01N21/31

CPC classification number: G01N21/314 ,  G01N2021/3148 ,  G01N21/3504 ,  G01N2201/0618

Abstract: A method and apparatus for determining the concentration of a predetermined energy absorbing compound in a breath sample even in the presence of other unknown energy absorbing compounds. Infrared energy of three wavelengths are passed through the collected sample. The first wavelength of infrared energy, 3.95 microns for example, is selected to be insensitive to absorption by both the predetermined energy absorbing compound such as ethanol and the unknown energy absorbing compounds such as acetone and water vapor. The second wavelength of infrared energy, 3.48 microns for example, is selected to be significantly absorbed by ethanol. The third wavelength of infrared energy, 3.39 microns for example, is selected to be significantly absorbed by acetone and water vapor. Operational amplifiers responsive to the first, second and third predetermined wavelengths of energy are utilized to subtract the effect of the absorption by acetone and water vapor so as to generate an electrical output signal which is proportional only to the ethanol concentration.

Abstract translation: 即使在存在其它未知的能量吸收化合物的情况下，也可以测定呼吸样本中预定能量吸收化合物的浓度的方法和装置。 三个波长的红外能量通过收集的样品。 选择例如3.95微米的红外能量的第一波长对预定的能量吸收化合物如乙醇和未知的能量吸收化合物如丙酮和水蒸气的吸收不敏感。 选择例如3.48微米的红外能量的第二波长被乙醇显着吸收。 选择例如3.39微米的红外能量的第三波长被丙酮和水蒸气显着吸收。 利用响应于第一，第二和第三预定波长能量的运算放大器来减去由丙酮和水蒸汽吸收的影响，以产生仅与乙醇浓度成比例的电输出信号。