INCREASED SENSOR DIE ADHESION
    62.
    发明申请
    INCREASED SENSOR DIE ADHESION 失效
    增加传感器胶粘剂

    公开(公告)号:US20120144921A1

    公开(公告)日:2012-06-14

    申请号:US12965469

    申请日:2010-12-10

    IPC分类号: G01L9/06 G01R3/00

    摘要: Methods and devices for adhesively bonding a sensor die to a substrate are described. In some cases, a sensor assembly may include a pressure sensor die mounted to a substrate with an adhesive. The pressure sensor die may be fabricated to include a back-side having one or more adhesion features (e.g. recesses or indentations), which increase the surface area of the pressure sensor die that is in contact with the adhesive, to thereby increase the adhesion force therebetween. In some cases, the one or more adhesion features may define a non-planar interface between the pressure sensor die and the adhesive which, in some instances, may reduce the formation and/or propagation of cracks in the adhesive, which also may help increase the adhesion force therebetween.

    摘要翻译: 描述了用于将传感器管芯粘合到基底上的方法和装置。 在一些情况下,传感器组件可以包括用粘合剂安装到基底的压力传感器模具。 压力传感器芯片可以被制造成包括具有一个或多个粘合特征(例如凹部或凹陷)的背面,其增加与粘合剂接触的压力传感器模具的表面积,从而增加粘合力 之间。 在一些情况下,一个或多个粘合特征可以限定压力传感器管芯和粘合剂之间的非平面界面,在一些情况下,这可以减少粘合剂中裂纹的形成和/或传播,这也可能有助于增加 其间的粘合力。

    Gage pressure transducer and method for making the same
    63.
    发明授权
    Gage pressure transducer and method for making the same 有权
    量规压力传感器及其制作方法

    公开(公告)号:US08191425B1

    公开(公告)日:2012-06-05

    申请号:US12971615

    申请日:2010-12-17

    发明人: Anthony D. Kurtz

    IPC分类号: G01L9/06

    摘要: A gage pressure transducer comprising a first pressure sensing assembly exposed to a main pressure and a second pressure sensing assembly exposed to a reference pressure. The pressure sensing assemblies comprise half-bridge sensors and means for using an alignment glass plate with each sensor which reduces the amount of oil required for operation, which consequently reduces the back pressures caused by large volumes of oil. The pressure sensor assemblies are hermetically sealed using glass frits, therefore enabling the gage pressure transducer to robustly and accurately measure pressure in harsh environments.

    摘要翻译: 一种量规压力传感器,包括暴露于主压力的第一压力感测组件和暴露于参考压力的第二压力感测组件。 压力传感组件包括半桥传感器和用于使用具有每个传感器的对准玻璃板的装置,其减少了操作所需的油量,这因此降低了由大体积的油引起的背压。 压力传感器组件使用玻璃料密封,因此能够使测量压力传感器在恶劣环境下稳健而准确地测量压力。

    Method for producing gas sensor
    67.
    发明授权
    Method for producing gas sensor 有权
    生产气体传感器的方法

    公开(公告)号:US08176618B2

    公开(公告)日:2012-05-15

    申请号:US12036393

    申请日:2008-02-25

    IPC分类号: G01R3/00

    摘要: A solid electrolyte body is placed on and fixed to an upper plate of a press jig such that a major surface (an upper surface) of the solid electrolyte body faces one major surface of a guide plate having an open space. The upper plate is rotated by a transfer mechanism to incline the solid electrolyte body in one direction, and the inclined solid electrolyte body is moved toward the other major surface of the guide plate such that a first edge of the solid electrolyte body protrudes from the open space. Then, a cutter is slid along the other major surface, so that the first edge is chamfered to form a first chamfered portion.

    摘要翻译: 将固体电解质体置于并固定到压制夹具的上板上,使得固体电解质体的主表面(上表面)面向具有开放空间的导向板的主表面。 上板通过传送机构旋转,以使固体电解质体在一个方向上倾斜,并且倾斜的固体电解质体朝向引导板的另一个主表面移动,使得固体电解质体的第一边缘从开口突出 空间。 然后,切割器沿着另一个主表面滑动,使得第一边缘被倒角以形成第一倒角部分。

    Method for making a transducer, transducer made therefrom, and applications thereof
    68.
    发明授权
    Method for making a transducer, transducer made therefrom, and applications thereof 有权
    用于制造换能器,由其制成的换能器的方法及其应用

    公开(公告)号:US08174352B2

    公开(公告)日:2012-05-08

    申请号:US13000644

    申请日:2009-06-26

    IPC分类号: G01L1/22

    摘要: A method for manufacturing or preparing thin-film stacks that exhibit moderate, finite, stress-dependent resistance and which can be incorporated into a transduction mechanism that enables simple, effective signal to be read out from a micro- or nano-mechanical structure. As the structure is driven, the resistance of the intermediate layers is modulated in tandem with the motion, and with suitable dc-bias, the motion is directly converted into detectable voltage. In general, detecting signal from MEMS or NEMS devices is difficult, especially using a method that is able to be integrated with standard electronics. The thin-film manufacturing or preparation technique described herein is therefore a technical advance in the field of MEMS/NEMS that could enable new applications as well as the ability to easily develop CMOS-MEMS integrated fabrication techniques. Also disclosed are: (i) transducers where current flows across a piezo layer from one major surface to the opposite major surface; and (ii) methods of making a transducer the resistivity of a piezoresistive layer is decreased and/or the gauge factor of a piezoresistive layer is increased.

    摘要翻译: 制造或制备薄膜叠层的方法,其显示中等的,有限的,受应力依赖的电阻,并且可以结合到转导机构中,使得能够从微机械结构或纳米机械结构读出简单有效的信号。 当结构被驱动时,中间层的电阻与运动一起被调制,并且通过合适的直流偏置,运动被直接转换成可检测的电压。 通常,来自MEMS或NEMS器件的检测信号是困难的,特别是使用能够与标准电子器件集成的方法。 因此,本文所述的薄膜制造或制备技术是MEMS / NEMS领域的技术进步,其可以实现新应用以及容易地开发CMOS-MEMS集成制造技术的能力。 还公开了:(i)电流从压电层从一个主表面流向相对的主表面的换能器; 和(ii)制造换能器的方法是减小压阻层的电阻率和/或压阻层的规格因子增加。

    MIRROR ASSEMBLY WITH RECESSED MIRROR
    69.
    发明申请
    MIRROR ASSEMBLY WITH RECESSED MIRROR 有权
    镜子组装与被镜的镜子

    公开(公告)号:US20120102730A1

    公开(公告)日:2012-05-03

    申请号:US13347264

    申请日:2012-01-10

    申请人: John W. Orcutt

    发明人: John W. Orcutt

    IPC分类号: H05K3/00

    摘要: A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

    摘要翻译: 本发明提供一种反射镜装置及其制造方法。 镜装置包括由第一基板和由第二基板形成的铰链/支撑结构形成的反射镜。 铰链/支撑结构包括凹陷区域和扭转铰链区域。 镜子在凹陷区域处联接到铰链/支撑结构。 此外,采用驱动器系统使镜子围绕扭转铰链区域枢转。