IMAGE-TO-DESIGN ALIGNMENT FOR IMAGES WITH COLOR OR OTHER VARIATIONS SUITABLE FOR REAL TIME APPLICATIONS

    公开(公告)号:US20240193798A1

    公开(公告)日:2024-06-13

    申请号:US18078980

    申请日:2022-12-11

    申请人: KLA Corporation

    IPC分类号: G06T7/33 G06T7/00 G06T11/00

    摘要: Methods and systems for determining information for a specimen are provided. One system includes a model configured for generating a rendered image for an alignment target on a specimen from information for a design of the alignment target. The rendered image is a simulation of images of the alignment target on the specimen generated by an imaging subsystem. The system also includes a computer subsystem configured for modifying parameter(s) of the model based on variation in parameter(s) of the imaging subsystem and/or variation in process condition(s) used to fabricate the specimen. Subsequent to the modifying, the computer subsystem is configured for 10 generating an additional rendered image for the alignment target by inputting the information for the design of the alignment target into the model and aligning the additional rendered image to an image of the alignment target generated by the imaging subsystem.

    OBJECT-BASED PREDICTION OF SCENE TRANSITIONS USING NEURAL NETWORKS

    公开(公告)号:US20240161318A1

    公开(公告)日:2024-05-16

    申请号:US18263627

    申请日:2022-02-03

    IPC分类号: G06T7/38 G06T7/33

    摘要: Methods, computer systems, and apparatus, including computer programs encoded on computer storage media, for predicting scene transitions. A computer system receives an input sequence of images of a scene with each image corresponding to a different time point in an observation time sequence. For each time point, the system processes the corresponding image using a decomposition neural network to generate one or more feature representations. The system processes the feature representations for the time points using an alignment neural network to generate a set of aligned sequences of feature representations. The system further processes the set of aligned sequences of feature representations using a transition neural network to predict, for each of the aligned sequences of feature representations, one or more feature representations that represent predicted features of the object represented by the aligned sequence at one or more successive time points.