Abstract:
An apparatus for transferring a wafer in a semiconductor manufacturing process, and for carrying a wafer between a cassette and a wafer chuck without an additional tool such as a tripod. The apparatus includes: a holder capable of holding the side of the wafer; a wafer transfer assembly including an actuator of the holder and a detector that detects a malfunction of the holder; and a process reactor having a vacuum exhaust port installed under a wafer chuck so as to guide gas in an axially-symmetric flow pattern. The holder grasps the rounded side of a wafer. Removal of additional tools makes the structure of an overall system more simple and an exhaust port can be installed under the reactor so as to cause processing gas to be guided in an axially-symmetric flow, resulting in an enhancement of the process uniformity.
Abstract:
A X-ray mask structure which reduces the distortion of the membrane, the X-ray mask structure including, a mask substrate having an opening in the central part thereof, a membrane formed on the mask substrate, the membrane having the chip site on which absorbers are arranged according to a desired pattern of a semiconductor device, and a support ring for supporting the mask substrate, which is defined by a plurality of fragments.
Abstract:
In a refrigerator having a fluorescent lamp for illuminating a fresh food compartment in which the fluorescent lamp is installed in the fresh food compartment, and is turned on and off according to the opening and closing of a door for opening and closing the fresh food compartment, the refrigerator includes a heater which is installed adjacent to the fluorescent lamp to heat the peripheral portion of the fluorescent lamp. The refrigerator maintains a peripheral temperature of a fluorescent lamp at an appropriate temperature for lighting up the fluorescent lamp, to thereby prevent failure in the light-up of the fluorescent lamp and the reduction of illumination after lighting up the fluorescent lamp.
Abstract:
An arc discharge apparatus includes a body unit including a housing and a transmissive member fixed to the housing, the housing having a coolant inlet and a coolant outlet, and an electrode unit on the housing, the electrode unit including an anode and a cathode facing each other, wherein the anode includes a main body portion connected to the housing, an anode tip coupled to the main body portion, and a cooling line in the anode and in contact with an inner wall of the anode tip, the cooling line being connected to the coolant inlet and to the coolant outlet.
Abstract:
Disclosed is a technique for localizing a sound source. In the technique, a sound pressure signal measured by microphones is acquired using a spherical microphone array sensor where the microphones are fixedly arranged on a surface of a spherical body. A sound pressure distribution on the surface of the spherical body is obtained by a controller from a sound pressure calculation formula for calculating a sound pressure at a certain location of a spherical surface using the sound pressure signal measured by the microphones as an input value. A location of the sound source is estimated from the obtained sound pressure distribution.
Abstract:
The present invention relates to a probe and a device for detecting abnormality of an intervertebral disc. More particularly, the present invention relates to a probe and a device for detecting abnormality of an intervertebral disc that gives vibration stimulation to the inner part of the intervertebral disc and obtains an ultrasonic image in order to sense the abnormality of the intervertebral disc causing discogenic pains and inspects whether the intervertebral disc is abnormal by measuring impedance in the intervertebral disc. The present invention provides a probe for detecting abnormality of an intervertebral disc including: a shaft connector; a vibration generator connected to the shaft connector; and an inspector connected to the vibration generator, wherein the vibration generator vibrates the inspector by using a piezoelectric element and a device for detecting abnormality of an intervertebral disc.
Abstract:
There is provided a semiconductor light emitting device including: first and second conductivity type semiconductor layers; and an active layer disposed between the first and second conductivity type semiconductor layers and having a structure in which a plurality of quantum barrier layers and a plurality of quantum well layers are alternately disposed, wherein at least one of the plurality of quantum well layers includes a first region in which band gap energy is reduced through a first slope and a second region in which band gap energy is reduced through a second slope different from the first slope. The influence of polarization is minimized by adjusting the shape of the band gap of the quantum well layer, crystallinity and internal quantum efficiency can be enhanced.
Abstract:
There is provided a method of fabricating a semiconductor light emitting device, including: forming a sacrificial layer having a plurality of nanostructures on a growth substrate; forming a protective layer to cover the sacrificial layer; forming a light emitting structure by allowing a first conductive semiconductor layer, an active layer and a second conductive semiconductor layer to be sequentially grown on the protective layer; etching the protective layer to expose the nanostructures; and separating the light emitting structure from the growth substrate by etching the exposed nanostructures, whereby damage and degradation of a light emitting structure at the time of the separation thereof may be prevented.
Abstract:
The present invention provides a method for removing residual water in a fuel cell, which controls the humidity of purge gases to effectively remove residual water in the fuel cell and to maintain the humidity in a membrane at a constant level, thus ensuring the durability of the membrane.For this purpose, the present invention provides a method for removing residual water in a fuel cell, characterized in that the relative humidities of purge gases supplied to an anode and a cathode are controlled to selectively reduce water content in the fuel cell and water content in a membrane.
Abstract:
A fuel cell system is disclosed. More specifically, the fuel cell system may include a stack that includes an electrical generation assembly of a fuel cell, an air supply unit that supplies air to a cathode of the fuel cell, a humidifier that humidifies exhaust air that is exhausted from the cathode and supply air that is supplied from the air supply unit, a hydrogen supply unit that supplies the anode of the fuel cell with hydrogen, and a water trap that traps condensate that is generated by the anode and exhausts it. In particular, the supply air is supplied to an upstream side of the humidifier and the condensate that is trapped in the water trap is supplied to an upstream side of the humidifier.