公开(公告)号：US20200173021A1

公开(公告)日：2020-06-04

申请号：US16674195

申请日：2019-11-05

Applicant: Moxtek, Inc.

Inventor： Matthew R. Linford ,  Brian Johnson ,  Anubhav Diwan

IPC: C23C16/455 ,  C23C16/40 ,  C23C16/48 ,  C23C16/56 ,  G02B5/30

Abstract: Thick, inorganic coatings can be deposited on a polarizer by chemical vapor deposition. In one embodiment, the method can comprise activating a surface of the polarizer with an oxygen plasma in an oven; injecting a solution including tetrakis(dimethylamino)silane dissolved in cyclohexane and water into the oven; and vapor depositing silicon dioxide onto the polarizer. These three steps can be repeated multiple times until desired thickness is attained.

公开(公告)号：USD877338S1

公开(公告)日：2020-03-03

申请号：US29673532

申请日：2018-12-14

Applicant: Moxtek, Inc.

Designer： Vincent Floyd Jones ,  Daniel N. Paas

公开(公告)号：US10534120B2

公开(公告)日：2020-01-14

申请号：US15631256

申请日：2017-06-23

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free ,  Bradley R. Williams ,  Matthew R. Linford ,  Anubhav Diwan ,  Fred Lane ,  Shaun Ogden

IPC: G02B5/30 ,  G02B1/14 ,  C09D5/08 ,  C23C16/44 ,  C23C16/56 ,  C23C16/02 ,  C23C14/24 ,  C23C14/02 ,  C23C14/58 ,  B05D1/00 ,  C23C14/12 ,  C23C16/30 ,  C23C16/34 ,  C23C16/40 ,  C23C16/455 ,  G02B1/04 ,  H04N9/31 ,  G02B1/18 ,  B05D3/06 ,  B05D3/10 ,  B05D3/14 ,  G03B21/20

Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.

公开(公告)号：US10524341B2

公开(公告)日：2019-12-31

申请号：US15407751

申请日：2017-01-17

Applicant: Moxtek, Inc.

Inventor： Eric Miller ,  Steven West Wilson

IPC: H05F3/00 ,  H05F3/06 ,  H05F3/04 ,  H01J9/24

Abstract: An electrostatic dissipation device 10 can comprise an elongated enclosure 11 with a longitudinal axis 12. An x-ray source 13 can be oriented to emit x-rays 16 inside of and along the longitudinal axis 12. A fluid-flow device 14 can be oriented to cause fluid to flow across the x-ray source 13 then inside of and along the longitudinal axis 12, the fluid being ionized by the x-rays 16, forming ionized fluid, then out of the elongated enclosure through outlet opening(s) 15. The arrangement of the x-ray source 13 and the fluid-flow device 14 can allow (1) fluid from the fluid-flow device 14 to cool the x-ray source 13, and (2) ion generation along the length of the elongated enclosure 11.

公开(公告)号：US20190250421A1

公开(公告)日：2019-08-15

申请号：US16395695

申请日：2019-04-26

Applicant: Moxtek, Inc.

Inventor： Shaun Ogden ,  Kerry Olivier ,  Hua Li ,  David S. Crawford ,  David Vern Nelson

IPC: G02B27/28 ,  G02B5/30 ,  G02B5/04 ,  H04N9/31

CPC classification number: G02B27/283 ,  G02B5/04 ,  G02B5/3025 ,  G02B5/3058 ,  H04N9/3167

Abstract: A cube polarizing beam splitter (PBS) can have one or more of the following characteristics: high contrast (Tp/Ts), acceptance of a large range of incident angles, broadband, and symmetry. The cube PBS can include a pair of wire-grid polarizers sandwiched between a first prism and a second prism. There can be a boundary layer between the wire-grid polarizers. An optical path length of a transmitted beam can be equal or very close to an optical path length of a reflected beam.

公开(公告)号：US10353127B2

公开(公告)日：2019-07-16

申请号：US15948770

申请日：2018-04-09

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B6/136 ,  G02B5/18 ,  G02B5/00 ,  G02B17/00 ,  G02B26/00

Abstract: The wire grid polarizer (WGP) comprises an array of parallel, elongated nanostructures located over a surface of a transparent substrate and a plurality of spaces, including a space between adjacent nanostructures. Each of the nanostructures can include (1) a plurality of parallel, elongated wires located on the substrate, including an inner-pair located between an outer-pair; (2) lateral-gaps between each wire of the outer-pair and an adjacent wire of the inner-pair; (3) and a center-gap between the two wires of the inner-pair.

公开(公告)号：US20190132936A1

公开(公告)日：2019-05-02

申请号：US16144113

申请日：2018-09-27

Applicant: Moxtek, Inc.

Inventor： Ricky B. Steck ,  Brad Harris

IPC: H05G1/02 ,  H01J35/08 ,  H01J35/06 ,  H01J35/18 ,  H05G1/10

Abstract: In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A1 between an anode axis 02 and an electron-beam axis 01 can be ≥10° and ≤80° and an angle A2 between the anode axis 02 and an x-ray axis 03 can be ≥10° and ≤80°. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.

公开(公告)号：US10264659B1

公开(公告)日：2019-04-16

申请号：US16209639

申请日：2018-12-04

Applicant: Moxtek, Inc.

Inventor： Eric Miller ,  Thomas E. Blair

IPC: H05F1/02 ,  H05G1/02 ,  H01J35/08 ,  H01J35/06

Abstract: Improved heat transfer from an x-ray tube can be accomplished with a heatsink surrounding at least part of an x-ray tube. The heatsink can be electrically connected to an anode of the x-ray tube and can be an electrical current path. The heatsink can include a plurality of protrusions extending radially outward from the x-ray tube and can be a single, integral substance extending from an inner-surface of the heatsink to a distal-end of the protrusions.

公开(公告)号：US10139538B2

公开(公告)日：2018-11-27

申请号：US15715435

申请日：2017-09-26

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Shaun Ogden ,  R. Stewart Nielson ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) 10 can include a reflective layer 15 sandwiched on each side by a pair of transparent layers (11-12 and 13-14). An index of refraction of each outer transparent layer 11 or 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 or 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same, material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP.

公开(公告)号：US20180143365A1

公开(公告)日：2018-05-24

申请号：US15715407

申请日：2017-09-26

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Matt Free ,  Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  G02B1/14 ,  G02B27/283

Abstract: A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.