公开(公告)号：US20220247248A1

公开(公告)日：2022-08-04

申请号：US17617656

申请日：2020-06-16

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Hiroki Wakabayashi ,  Takakuni Iitsuka ,  Yutaka Wakita ,  Tetsuhiro Tomita

IPC: H02K3/24 ,  H02K1/20 ,  H02K1/16 ,  H02K9/19

Abstract: There is provided motor, including: a stator including a plurality of laminated plates; and a rotor arranged inside the stator with a gap between the rotor and the stator, wherein the stator further includes an annular yoke located outside of the stator and a plurality of teeth protruding from an inner peripheral surface of the yoke toward the rotor, wherein slots in which coils wound around the teeth are arranged are formed between the teeth that are adjacently arranged, wherein gaps to which a cooling medium is supplied are formed between bottom portions of the slots and the coils, and wherein the stator further includes end plate members arranged so as to face the laminated plates.

公开(公告)号：US11377631B2

公开(公告)日：2022-07-05

申请号：US16341493

申请日：2017-10-11

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Toshifumi Kitahara ,  Kunitada Hatabayashi ,  Kiyoshi Mori ,  Hirotsugu Shiraiwa

IPC: C12M1/12 ,  C12M1/00 ,  A61L2/04 ,  C12M3/00 ,  C12M1/02 ,  B08B9/00

Abstract: A culture container linkage device according to the present disclosure includes a first actuator configured to advance or retract needles 32, an actuator holder rotatably provided on a frame and configured to hold the first actuator, a second actuator, and a washer configured to wash the needles. The second actuator rotates the needles via the actuator holder. The needles are configured to be positioned, by the second actuator, at a container-facing position at which the needles face a culture container and a washing-facing position at which the needles face the washer.

公开(公告)号：US11366432B2

公开(公告)日：2022-06-21

申请号：US16804678

申请日：2020-02-28

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Yoji Masui

IPC: G05B13/02 ,  G05B23/02

Abstract: A dead time estimation device capable of accurately estimating a dead time in a control system is provided. A dead time estimation device 6 includes a dead time calculation section 64 configured to obtain a dead time L{circumflex over ( )}′1 with which an evaluation function J in Equation (1) is at minimum [Equation 7] J=∫|Ĝ/e−{circumflex over (L)}′1s−Ĝ′|df  (1) where G{circumflex over ( )}/e−L∧′1s is a frequency characteristic of an element from which a dead time element is removed from a transfer function of a control target P and G{circumflex over ( )}′ is a transfer function not including the dead time element in the control target P.

公开(公告)号：US20210172500A1

公开(公告)日：2021-06-10

申请号：US16952265

申请日：2020-11-19

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Hiroki Tanioka

IPC: F16H1/32 ,  B64C13/34

Abstract: There is provided a mechanical paradox planetary gear mechanism, including: a sun gear configured to be rotatable together with rotation of an input shaft; a plurality of first planetary gears arranged around the sun gear at equal intervals, and configured to rotate about their own axes while revolving around the sun gear in a state in which the first planetary gears mesh with the sun gear; a first internal gear arranged around the plurality of first planetary gears, and configured to mesh with the plurality of first planetary gears; a second internal gear arranged in the same axis as the first internal gear; and a plurality of second planetary gears respectively arranged on the same axes as the plurality of first planetary gears, and configured to mesh with the second internal gear.

公开(公告)号：US11009141B2

公开(公告)日：2021-05-18

申请号：US16349407

申请日：2017-07-14

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Susumu Irie

IPC: F16K31/00 ,  B06B1/06 ,  H02N2/06 ,  H02N2/14 ,  F16K31/02 ,  F01L9/20 ,  F01L9/24

Abstract: In an invention including: a piezoelectric element (13) which generates, as a displacement, a driving force necessary for an operation of a valve body (12) which is an operating body; a displacement enlarging mechanism (14) including at least a spring element so as to enlarge a displacement of the piezoelectric element (13) which acts on the valve body (12); and a driving device (15) which operates the valve body (12) by applying a voltage to the piezoelectric element (13) to extend the piezoelectric element (13), the driving device (15) includes a first filter processing unit (15x) having an inverse function characteristic of a mechanical resonance frequency when operating the displacement enlarging mechanism (14), and is configured to apply, a voltage which reduces the mechanical resonance, to the piezoelectric element (13) through this resonance suppression processing unit (15x).

公开(公告)号：US10978325B2

公开(公告)日：2021-04-13

申请号：US16421733

申请日：2019-05-24

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Izumi Ito ,  Tomoya Mizutani

IPC: H01L21/67 ,  H01L21/677 ,  G06K7/10 ,  B65G1/137

Abstract: A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.

公开(公告)号：US20210013078A1

公开(公告)日：2021-01-14

申请号：US16980764

申请日：2019-03-13

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Toshihiro Kawai ,  Gengoro Ogura

IPC: H01L21/673 ,  H01L21/677 ,  H01L21/67

Abstract: In the present disclosure, when a supply flow rate of an inert gas is changed, a pressure fluctuation in a circulation path is suppressed. An EFEM includes a supply valve configured to be capable of changing a supply flow rate of the inert gas supplied to the circulation path, a discharge valve configured to be capable of changing a discharge flow rate of a gas discharged from the circulation path, a concentration detection part configured to detect a change in an atmosphere inside the circulation path, a pressure detection part configured to detect a pressure in the circulation path, and a control part configured to control the supply valve and the discharge valve. The control part is configured to determine an opening degree of the discharge valve to a predetermined value based on a detection result obtained by the concentration detection part.

公开(公告)号：US10586723B2

公开(公告)日：2020-03-10

申请号：US15750379

申请日：2016-07-12

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro Kawai ,  Yasushi Taniyama ,  Munekazu Komiya ,  Takashi Shigeta

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

Abstract: A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.

公开(公告)号：US20180323086A1

公开(公告)日：2018-11-08

申请号：US15774882

申请日：2016-10-28

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Takashi SHIGETA ,  Toshihiro KAWAI ,  Haruki TAKEUCHI ,  Yoshimasa SUDA ,  Hisashi GOMI ,  Shigenori OZAKI

IPC: H01L21/67 ,  B65G49/07 ,  B25J5/00 ,  B25J15/00 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67017 ,  B25J5/005 ,  B25J15/00 ,  B65G49/07 ,  B65G2201/0297 ,  H01L21/677 ,  H01L21/68707

Abstract: Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.

公开(公告)号：US20180254209A1

公开(公告)日：2018-09-06

申请号：US15757560

申请日：2016-08-19

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro KAWAI ,  Yasushi TANIYAMA ,  Munekazu KOMIYA ,  Takashi SHIGETA

IPC: H01L21/673

CPC classification number: H01L21/67389 ,  F16K15/028 ,  F16K15/147 ,  F16K31/1221 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67775

Abstract: There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.