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公开(公告)号：US11209463B2
公开(公告)日：2021-12-28
申请号：US16664669
申请日：2019-10-25
Applicant: Technoprobe S.p.A.
Inventor： Riccardo Liberini
IPC: G01R1/073
Abstract: A probe card for a testing apparatus of electronic devices comprises a probe head housing a plurality of contact probes, each contact probe having at least one contact tip adapted to abut onto contact pads of a device under test, as well as a main support and an intermediate support connected to the main support and adapted to realize a spatial transformation of distances between contact pads on its opposite faces as a space transformer, the probe card suitably also comprising at least one connecting element adapted to link the space transformer and the main support, this connecting element having a substantially rod-like body and being equipped with a first end portion comprising at least one terminal section adapted to be engaged in a corresponding housing realized in the space transformer and with a second terminal portion adapted to abut onto an abutment element linked to the main support.
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公开(公告)号：US20210247422A1
公开(公告)日：2021-08-12
申请号：US17244498
申请日：2021-04-29
Applicant: TECHNOPROBE S.P.A.
Inventor： Roberto CRIPPA , Raffaele VALLAURI
Abstract: A contact probe comprises a probe body being extended in a longitudinal direction between respective end portions adapted to realize a contact with respective contact pads, at least one end portion having transverse dimensions greater than the probe body. Suitably, the end portion comprises at least one indentation adapted to house a material scrap being on the contact probe after a separation from a substrate wherein the contact probe has been realized.
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公开(公告)号：US11035885B2
公开(公告)日：2021-06-15
申请号：US16442385
申请日：2019-06-14
Applicant: TECHNOPROBE S.P.A.
Inventor： Flavio Maggioni
Abstract: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer comprises a plurality of contact elements, each comprising a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements, the guide comprising a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.
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公开(公告)号：US10401387B2
公开(公告)日：2019-09-03
申请号：US15640159
申请日：2017-06-30
Applicant: Technoprobe S.p.A.
Inventor： Raffaele Ubaldo Vallauri
Abstract: A manufacturing method of contact probes for a testing head comprises the steps of: providing a substrate made of a conductive material; and defining at least one contact probe by laser cutting the substrate. The method further includes at least one post-processing fine definition step of at least one end portion of the contact probe, that follows the step of defining the contact probe by laser cutting, the end portion being a portion including a contact tip or a contact head of the contact probe. The fine definition step does not involve a laser processing and includes geometrically defining the end portion of the contact probe with at least a substantially micrometric precision.
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公开(公告)号：US10151775B2
公开(公告)日：2018-12-11
申请号：US15257424
申请日：2016-09-06
Applicant: Technoprobe S.p.A.
Inventor： Riccardo Liberini , Filippo Dell'Orto , Roberto Crippa
IPC: G01R1/073
Abstract: A probe card for a testing apparatus of electronic devices comprises at least one testing head which houses a plurality of contact probes, each contact probe having at least one contact tip suitable to abut onto contact pads of a device under test, and a support plate of the testing head associated with a stiffener and an intermediate support, connected to the support plate and suitable to provide a spatial transformation of the distances between contact pads made on the opposite sides thereof. Conveniently, the probe card comprises a support element which is joined to the intermediate support, this support element being made by means of a material having a greater stiffness than the intermediate support, thereby being able to provide local micro rectifications of the intermediate support.
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Patent Agency Ranking
公开(公告)号：US20170307656A1
公开(公告)日：2017-10-26
申请号：US15640159
申请日：2017-06-30
Applicant: Technoprobe S.p.A.
Inventor： Raffaele Ubaldo Vallauri
CPC classification number: G01R1/06744 , B23K26/38 , B23K2101/38 , B44C1/22 , G01R1/0408 , G01R1/0433 , G01R1/07307 , G01R1/07314 , G01R1/07342 , G01R1/07364 , G01R1/07371 , G01R3/00
Abstract: A manufacturing method of contact probes for a testing head comprises the steps of:—providing a substrate made of a conductive material; and—defining at least one contact probe by laser cutting the substrate. The method further includes at least one post-processing fine definition step of at least one end portion of the contact probe, that follows the step of defining the contact probe by laser cutting, the end portion being a portion including a contact tip or a contact head of the contact probe. The fine definition step does not involve a laser processing and includes geometrically defining the end portion of the contact probe with at least a substantially micrometric precision.
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公开(公告)号：US20170122983A1
公开(公告)日：2017-05-04
申请号：US15405062
申请日：2017-01-12
Applicant: Technoprobe S.p.A.
Inventor： Daniele Acconcia , Raffaele Ubaldo Vallauri
CPC classification number: G01R1/07357 , G01R1/06716
Abstract: A testing head comprising vertical probes includes at least one guide provided with guide holes for housing a plurality of contact probes, each of the contact probes having at least one contact tip able to ensure the mechanical and electrical contact with a corresponding contact pad of a device under test, the guide being housed in a containment element of the testing head. Suitably, each of the contact probes comprises a deformed portion, placed in a bending zone between the guide and the device under test, that deformed portion being adapted to further deform during the normal working of the testing head and being prolonged, at least towards the device under test, by an end portion having a diameter suitable to realize the contact tip, the end portion having a longitudinal extension or height exceeding 500 μm.
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公开(公告)号：US20150192614A1
公开(公告)日：2015-07-09
申请号：US14638533
申请日：2015-03-04
Applicant: Technoprobe S.p.A.
Inventor： Riccardo Vettori , Emanuele Bertarelli , Marco Diegidio
CPC classification number: G01R1/06727 , G01R1/04 , G01R1/06733 , G01R1/07342
Abstract: A cantilever contact probe comprises at least a probe body and a hook-shaped end portion, being joined to the probe body and ending with a slanted section being configured as a hook. The end portion is bent at a bending point having a suitable inclination of the hooked slanted section with respect to a longitudinal extension axis of the probe and ends with a contact tip being able to assure a mechanical and electrical contact with a contact pad of a device under test. Suitably, the probe comprises at least a reduced portion having a first area with at least a first size being smaller than a corresponding first size of a second area of the probe in a section which does not comprise the reduced portion, along a side by side placing direction of the probes within a testing head. The reduced portion is substantially reduced along its sides thus forming an area having a reduced cross size being placed edgeways.
Abstract translation: 悬臂接触探针至少包括探针体和钩形端部，其连接到探针主体并且以配置为钩的倾斜部分结束。 端部在弯曲点处弯曲，该弯曲点具有相对于探针的纵向延伸轴线的钩形倾斜部分的适当倾斜度，并且端部具有能够确保与装置的接触垫机械和电接触的接触尖端 被测试。 适当地，探针至少包括具有第一区域的缩小部分，第一区域具有至少第一尺寸小于在不包括减少部分的部分中沿着并排的第一尺寸的探针的第二区域 将探头的方向放置在测试头内。 减小的部分沿其侧面大大减小，从而形成具有减小的交叉大小的区域被设置为边缘。
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公开(公告)号：US12259407B2
公开(公告)日：2025-03-25
申请号：US18040336
申请日：2021-08-03
Applicant: TECHNOPROBE S.P.A.
Inventor： Riccardo Vettori
Abstract: A contact probe having a first end portion adapted to abut onto a contact pad of a device under test and a second end portion adapted to abut onto a contact pad of a PCB board of a testing apparatus, as well as a rod-shaped probe body extended between the end portions along a longitudinal development direction is provided with an opening extending along the longitudinal development direction and defines at least one pair of arms in the probe body. Suitably, each arm of the at least one pair of arms has a not constant transversal section, which is perpendicular to the longitudinal development direction, having different areas in correspondence of different points along the probe body and ensures a distribution of the stress along the probe body during bending thereof during testing operation of the device under test performed by means of the contact probe.
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公开(公告)号：US12000879B2
公开(公告)日：2024-06-04
申请号：US16997726
申请日：2020-08-19
Applicant: Technoprobe S.p.A.
Inventor： Roberto Subranni , David Heriban , Jean-Christophe Villain , Jocelyn Perreau , Florent Perrocheau , Anne Delettre
CPC classification number: G01R3/00 , G01R1/07307
Abstract: An apparatus for the automated assembly of a probe head for testing electronic devices integrated on a semiconductor wafer, includes a support adapted to support at least two parallel guides, which are provided with a plurality of respective guides holes, and at least one holding means adapted to hold a contact probe to be housed in the guides holes, of the guides. Suitably, the support is a movable support adapted to be moved according to a preset trajectory between a first position, wherein the contact probe is held by the holding means at a predetermined position outside the guides holes, and a second position wherein the contact probe, which is held at the predetermined position, is housed in a set of guides holes that are substantially concentric to each other.
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