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公开(公告)号:US07545077B2
公开(公告)日:2009-06-09
申请号:US11806129
申请日:2007-05-30
申请人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda , Hisanori Ehara
发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda , Hisanori Ehara
CPC分类号: H03H9/605 , H03H3/02 , H03H9/02118 , H03H9/02141 , H03H9/132 , H03H9/173 , H03H9/174 , H03H2003/021
摘要: A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.
摘要翻译: 滤波器包括多个压电薄膜谐振器,每个压电薄膜谐振器均具有基板,形成在基板上的下电极,形成在下电极上的压电薄膜和设置在压电薄膜上的上电极,使得上电极和下电极面 彼此横跨压电薄膜。 多个压电薄膜谐振器包括:第一谐振器,其中第一谐振器的压电膜的外弯曲部分的至少一部分位于比上电极和下电极的区域的外弯曲部分更远的位置 电极彼此面对压电薄膜。 多个压电薄膜谐振器包括第二谐振器,其中第二谐振器的压电膜的外部弯曲部分的至少一部分基本上与上电极和下电极面的区域的外弯曲部分重合 彼此隔着压电膜,或者比该区域的外部弯曲部分进一步。
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公开(公告)号:US07345402B2
公开(公告)日:2008-03-18
申请号:US11326418
申请日:2006-01-06
申请人: Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
CPC分类号: H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H2003/021
摘要: A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.
摘要翻译: 压电薄膜谐振器包括形成在器件基板上的薄膜层叠体,该薄膜层叠体包括下电极,设置在器件基板上的压电薄膜和下电极,以及设置在压电薄膜上的上电极。 上电极和下电极中的至少一个具有电极引导部分,其从上部电极通过压电膜与下部电极重叠的膜延伸并且具有比膜的宽度窄的宽度。
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公开(公告)号:US20070096597A1
公开(公告)日:2007-05-03
申请号:US11586731
申请日:2006-10-26
申请人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号: H01L41/08
CPC分类号: H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H9/568 , H03H2003/021
摘要: A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.
摘要翻译: 压电薄膜谐振器包括形成在基板上的下电极,以在下电极和基板之间限定圆顶形空腔,设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域是下电极的重叠区域,并且插入压电膜的上电极,并且空腔的投影面积包括膜区域。
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公开(公告)号:US20060152110A1
公开(公告)日:2006-07-13
申请号:US11326418
申请日:2006-01-06
申请人: Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
CPC分类号: H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H2003/021
摘要: A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.
摘要翻译: 压电薄膜谐振器包括形成在器件基板上的薄膜层叠体,该薄膜层叠体包括下电极,设置在器件基板上的压电薄膜和下电极,以及设置在压电薄膜上的上电极。 上电极和下电极中的至少一个具有电极引导部分,其从上部电极通过压电膜与下部电极重叠的膜延伸并且具有比膜的宽度窄的宽度。
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公开(公告)号:US20060066419A1
公开(公告)日:2006-03-30
申请号:US11236861
申请日:2005-09-28
申请人: Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
发明人: Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
IPC分类号: H03H9/70
CPC分类号: H03H9/564 , H03H7/18 , H03H7/46 , H03H9/0571 , H03H9/706
摘要: A duplexer includes: first and second filters including film bulk acoustic resonators (FBARs) arranged in a ladder form; first and second integrated-passive devices (IPDs) provided between a common terminal and the first and second filters; and a substrate on which the first and second filters and the first and second IPDs are mounted. The substrate includes conductive patterns that realize inductances connected between the first and second filters and ground. The first and second IPDs includes inductors connected to the first and second filters.
摘要翻译: 双工器包括:第一和第二滤波器,包括以梯形布置的薄膜体声共振器(FBAR); 提供在公共端子与第一和第二滤波器之间的第一和第二集成无源器件(IPD); 以及其上安装有第一和第二滤光器以及第一和第二IPD的基板。 衬底包括实现连接在第一和第二滤波器和地之间的电感的导电图案。 第一和第二IPD包括连接到第一和第二滤波器的电感器。
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公开(公告)号:US20090212659A1
公开(公告)日:2009-08-27
申请号:US12431427
申请日:2009-04-28
申请人: Satoru MATSUDA , Michio Miura , Takashi Matsuda , Masanori Ueda
发明人: Satoru MATSUDA , Michio Miura , Takashi Matsuda , Masanori Ueda
IPC分类号: H01L41/04
CPC分类号: H03H9/0222 , H03H9/02818
摘要: An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.
摘要翻译: 弹性边界波装置包括具有压电性的第一介质,激发弹性波并设置在第一介质上的电极,由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质,以及 设在第二介质上的吸音部。
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公开(公告)号:US20070210676A1
公开(公告)日:2007-09-13
申请号:US11714157
申请日:2007-03-06
申请人: Satoru Matsuda , Michio Miura , Takashi Matsuda , Masanori Ueda
发明人: Satoru Matsuda , Michio Miura , Takashi Matsuda , Masanori Ueda
IPC分类号: H01L41/00
CPC分类号: H03H9/0222 , H03H9/02818
摘要: An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.
摘要翻译: 弹性边界波装置包括具有压电性的第一介质,激发弹性波并设置在第一介质上的电极,由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质,以及 设在第二介质上的吸音部。
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公开(公告)号:US20060220494A1
公开(公告)日:2006-10-05
申请号:US11390132
申请日:2006-03-28
申请人: Michio Miura , Takashi Matsuda , Masanori Ueda , Seiichi Mitobe
发明人: Michio Miura , Takashi Matsuda , Masanori Ueda , Seiichi Mitobe
IPC分类号: H03H9/25
CPC分类号: H03H9/0222
摘要: An elastic boundary wave device includes a first medium that is piezoelectric, electrodes provided on the first medium to excite elastic waves, a dielectric film provided on the electrodes and the first medium, and a second medium provided on the dielectric film. The dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.
摘要翻译: 弹性边界波装置包括压电的第一介质,设置在第一介质上以激发弹性波的电极,设置在电极和第一介质上的电介质膜,以及设置在电介质膜上的第二介质。 电介质膜主要包括氧化硅,其密度为至少2.05g / cm 3。
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公开(公告)号:US09236848B2
公开(公告)日:2016-01-12
申请号:US13590897
申请日:2012-08-21
CPC分类号: H03H9/0095 , H03H3/02 , H03H9/585 , H03H9/587 , H03H9/706 , H03H2003/021
摘要: The filter includes: a primary transducer connected to a primary terminal; a secondary transducer connected to a plurality of secondary terminals; and a coupling transducer for mechanically coupling the primary transducer and the secondary transducer.
摘要翻译: 滤波器包括:连接到主终端的主换能器; 连接到多个次级端子的次级换能器; 以及用于机械耦合主换能器和次换能器的耦合换能器。
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公开(公告)号:US07471171B2
公开(公告)日:2008-12-30
申请号:US11711893
申请日:2007-02-28
申请人: Michio Miura , Satoru Matsuda , Takashi Matsuda , Masanori Ueda , Seiichi Mitobe
发明人: Michio Miura , Satoru Matsuda , Takashi Matsuda , Masanori Ueda , Seiichi Mitobe
CPC分类号: H03H9/0222 , H03H9/02559 , H03H9/14541 , H03H9/6483
摘要: An elastic boundary wave device includes a LiNbO3 substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where “θ” is a rotation Y cut angle of the substrate, “a” is a ratio of copper density with respect to a density of a material used as the electrode, “λ” is a wavelength of the elastic wave excited by the electrode, “h” is a film thickness of the electrode, “H” is a thickness of the silicon oxide film.
摘要翻译: 弹性边界波装置包括LiNbO 3基板,激发弹性波并设置在基板上的电极和设置在基板上以覆盖电极的氧化硅膜,弹性边界波装置的参数具有范围, 其中“θ”是基板的旋转Y切割角,“a”是铜密度相对于用作电极的材料的密度的比率,“λ”是由电极激发的弹性波的波长 ,“h”是电极的膜厚,“H”是氧化硅膜的厚度。
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