Filter having multiple piezoelectric thin-film resonators
    71.
    发明授权
    Filter having multiple piezoelectric thin-film resonators 有权
    具有多个压电薄膜谐振器的滤波器

    公开(公告)号:US07545077B2

    公开(公告)日:2009-06-09

    申请号:US11806129

    申请日:2007-05-30

    IPC分类号: H03H9/00 H01L41/08

    摘要: A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.

    摘要翻译: 滤波器包括多个压电薄膜谐振器,每个压电薄膜谐振器均具有基板,形成在基板上的下电极,形成在下电极上的压电薄膜和设置在压电薄膜上的上电极,使得上电极和下电极面 彼此横跨压电薄膜。 多个压电薄膜谐振器包括:第一谐振器,其中第一谐振器的压电膜的外弯曲部分的至少一部分位于比上电极和下电极的区域的外弯曲部分更远的位置 电极彼此面对压电薄膜。 多个压电薄膜谐振器包括第二谐振器,其中第二谐振器的压电膜的外部弯曲部分的至少一部分基本上与上电极和下电极面的区域的外弯曲部分重合 彼此隔着压电膜,或者比该区域的外部弯曲部分进一步。

    ELASTIC BOUNDARY WAVE DEVICE
    76.
    发明申请
    ELASTIC BOUNDARY WAVE DEVICE 失效
    弹性边界波装置

    公开(公告)号:US20090212659A1

    公开(公告)日:2009-08-27

    申请号:US12431427

    申请日:2009-04-28

    IPC分类号: H01L41/04

    CPC分类号: H03H9/0222 H03H9/02818

    摘要: An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

    摘要翻译: 弹性边界波装置包括具有压电性的第一介质,激发弹性波并设置在第一介质上的电极,由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质,以及 设在第二介质上的吸音部。

    Elastic boundary wave device
    77.
    发明申请
    Elastic boundary wave device 审中-公开
    弹性边界波装置

    公开(公告)号:US20070210676A1

    公开(公告)日:2007-09-13

    申请号:US11714157

    申请日:2007-03-06

    IPC分类号: H01L41/00

    CPC分类号: H03H9/0222 H03H9/02818

    摘要: An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

    摘要翻译: 弹性边界波装置包括具有压电性的第一介质,激发弹性波并设置在第一介质上的电极,由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质,以及 设在第二介质上的吸音部。

    Elastic boundary wave device, resonator, and ladder-type filter
    78.
    发明申请
    Elastic boundary wave device, resonator, and ladder-type filter 审中-公开
    弹性边界波器件,谐振器和梯形滤波器

    公开(公告)号:US20060220494A1

    公开(公告)日:2006-10-05

    申请号:US11390132

    申请日:2006-03-28

    IPC分类号: H03H9/25

    CPC分类号: H03H9/0222

    摘要: An elastic boundary wave device includes a first medium that is piezoelectric, electrodes provided on the first medium to excite elastic waves, a dielectric film provided on the electrodes and the first medium, and a second medium provided on the dielectric film. The dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.

    摘要翻译: 弹性边界波装置包括压电的第一介质,设置在第一介质上以激发弹性波的电极,设置在电极和第一介质上的电介质膜,以及设置在电介质膜上的第二介质。 电介质膜主要包括氧化硅,其密度为至少2.05g / cm 3。

    Elastic boundary wave device, resonator, and filter
    80.
    发明授权
    Elastic boundary wave device, resonator, and filter 有权
    弹性边界波器件,谐振器和滤波器

    公开(公告)号:US07471171B2

    公开(公告)日:2008-12-30

    申请号:US11711893

    申请日:2007-02-28

    IPC分类号: H03H9/25 H03H9/64

    摘要: An elastic boundary wave device includes a LiNbO3 substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where “θ” is a rotation Y cut angle of the substrate, “a” is a ratio of copper density with respect to a density of a material used as the electrode, “λ” is a wavelength of the elastic wave excited by the electrode, “h” is a film thickness of the electrode, “H” is a thickness of the silicon oxide film.

    摘要翻译: 弹性边界波装置包括LiNbO 3基板,激发弹性波并设置在基板上的电极和设置在基板上以覆盖电极的氧化硅膜,弹性边界波装置的参数具有范围, 其中“θ”是基板的旋转Y切割角,“a”是铜密度相对于用作电极的材料的密度的比率,“λ”是由电极激发的弹性波的波长 ,“h”是电极的膜厚,“H”是氧化硅膜的厚度。