摘要:
The present invention relates to a method for filling small via holes provided to insulating film on a wafer to expose parts of the underlayer of the wafer by metal by means of CVD, and an apparatus therefor. The gist of the present invention lies in that, before CVD is conducted, a surface cleaning treatment of small via hole bottom underlayer surface and a stabilization treatment of insulating film surface activated thereby are carried out successively or simultaneously and optionally an anti-corrosive treatment is applied to underlayer surface, and then the CVD treatment is conducted without exposing the underlayer metal subjected to above treatments to the air. The present invention provides an effect of enabling via filling by metal which shows good selectivity and gives a low interfacial resistance between underlayer metal and filled metal.
摘要:
In the production of a wire harness for an appliance whose circuit differs depending on a combination of selectable electrical systems, the wire harness is divided beforehand into the common circuit which is always provided independently of the presence or absence of the selectable electrical systems and the dedicated circuits one for each of the selectable electrical systems, the wire harness for the appliance is separated into a common circuit and dedicated circuits one for each of the associated electrical systems when an order of an appliance is made, a number of common circuits and a number of each of the dedicated circuits for the electrical systems are added up, the added up number of an common circuits and the dedicated circuits are manufactured and the common circuit and the dedicated circuits of the associated electric systems are combined to produce wire harnesses of the ordered appliances, whereby simple production control and high production efficiency are assured and changes is production or design can be readily coped with.
摘要:
Various types of air cleaning devices for cleaning air fed to a passenger compartment of a motor vehicle are described. These air cleaning devices are arranged to incorporate with a cowl top structure of the vehicle. In one type, an air filter is disposed in an external air introduction passage led to the passenger compartment, and when the air filter is blocked with arrested dusts, a bypass passage is established to keep the feeding of atmospheric air to the passenger compartment. In a modified type, the bypass passage is instantly blocked and an internal air circulation mode is established. In one type, an electrostatic air collecting unit is used for arresting very fine particles in the atmospheric air fed to the passenger compartment. In order to achieve a smoothed air flow in the electrostatic air collecting unit, smoothly curved air guide passages are defined between positive and negative electrode plates. In one type, two hood ridge reinforcing hollowed structures are used for feeding the air box and thus the passenger compartment with a satisfied amount of atmospheric air. In order to facilitate the maintenance of the air filter in the air box, an inspection aperture is provided in the cowl top. Usually, the inspection aperture is covered by a lid.
摘要:
A method of coating a first resin solution containing a polymerization inducer on a moving web-like support with a coating device, comprising conveying the support to pass near the coating device without coming in contact with the coating device, disposing the first resin solution in a form of a first resin solution layer from the coating device onto the support; the first resin solution layer having a lower surface which faces the support and an upper surface opposite to the lower surface; and the coating device having a first release point at which the upper surface leaves the coating device and a second release point at which the lower surface leaves the coating device; overlaying the first release point with a solvent, thereby superimposing a solvent layer on the upper surface of the first resin solution layer; overlaying the second release point with a second resin solution which does not contain a polymerization inducer, thereby superimposing a second resin solution layer on the lower surface of the first resin solution layer; and applying the superimposed layers onto the support so that the solvent layer forms an uppermost layer on the support.
摘要:
A process for producing a low-loss embedded waveguide is disclosed, which comprises: a first ion exchange step in which a glass substrate containing a monovalent ion and capable of undergoing ion exchange is subjected to thermal ion exchange through an ion exchange-control film provided on the substrate and having a predetermined waveguide pattern formed therein, by immersing the substrate in a first molten salt containing a first monovalent ion capable of changing the refractive index of the substrate; an etching step in which the ion exchange-control film is removed form the substrate by etching; an electric field-applying annealing step in which an electric field is applied to the substrate at substantially right angles to the substrate at a temperature near the temperature at which the first ion exchange step was conducted, provided that the side of the substrate which had the ion exchange-control film is used as a positive potential side; and a second ion exchange step in which the resulting glass substrate is subjected to thermal ion exchange by immersing the substrate in a second molten salt containing a second monovalent ion capable of changing the refractive index of the substrate in a manner contrary to the first monovalent ion.
摘要:
A cold rolled steel sheet or plated steel sheet having an improved press formability as well as excellent phosphatability, resistance to galling and spot weldability is produced by controlling a surface roughness pattern of the steel sheet so as to satisfy a center-line average surface roughness of 0.3-2.0 .mu.m and a regularity parameter in at least one direction of not more than 0.25 defining the regularity of surface roughness.
摘要:
In a contact mechanism having electrical contact pieces in a switching device integrated with a spring plate fixed at one end, a wiping movable contact piece is fixed to the other end of the spring plate and has a semispherical shape at the contact portion, and a fixed contact piece also has a semispherical shape at its contact with a movable contact piece. The level of the apex of the contact area of the movable contact piece is shifted toward the support point side of the movable contact piece from the level of the apex of the contact area of the fixed contact piece. Conversely, the level of the apex of the contact area of the fixed contact piece is shifted toward the lower base stand side from the level of the apex of the apex if the contact area of the movable contact piece. As a result, the movable contact piece can surely and easily contact and separate from the fixed contact piece, and the movement of the movable contact piece in sliding is improved.
摘要:
An electromagnet is formed of a combination of an iron support, an iron piece, and a solenoid, and an interrupter is provided to intermittently excite said electromagnet. A cylindrical diaphragm, equipped with an armature so disposed as to come against said iron piece, covers said iron support so that said iron piece, said solenoid, and said interrupter may be enclose therein.
摘要:
A process for preparing modified polyolefin particles which comprises dispersing cross-linked polyolefin particles and a polymerizable vinyl monomer capable of dissolving or swelling the cross-linked polyolefin particles in an aqueous medium, impregnating the cross-linked polyolefin particles with the vinyl monomer and polymerizing the vinyl monomer. The obtained modified polyolefin particles can provide a foamed article including uniform and fine cells and having excellent toughness, accuracy of demension, cushioning property, heat resistance and smooth and soft surface.
摘要:
A glass article such as a sham bottom tumbler with decorative air bubble encapsulated in its base is produced on existing automatic glass-forming machines by injecting a bubble of air into a charge of molten glass in the gob-forming section of a glass furnace as the charge is being formed into a gob. This is accomplished by providing an air supply tube in the gob-forming plunger. Preferably, the lower tip of the tube extends below the lower tip of the plunger. Puffs of compressed air are supplied in synchronism with the plunger cycle so an air bubble is formed in the lower end of the gob, and the gob is then formed by normal procedures into a finished article.