公开(公告)号：US07009148B2

公开(公告)日：2006-03-07

申请号：US10682419

申请日：2003-10-10

申请人： Kenji Kawano ,  Shinichi Ito ,  Eishi Shiobara

发明人： Kenji Kawano ,  Shinichi Ito ,  Eishi Shiobara

IPC分类号： F27B5/14

CPC分类号： H01L21/67115 ,  G03F7/0042 ,  G03F7/0392 ,  G03F7/38 ,  H01L21/0273 ,  H01L21/67109

摘要： A method of processing a substrate, comprising forming a chemically amplified resist film on a substrate, irradiating energy beams to the chemically amplified resist film to form a latent image therein, carrying out heat treatment with respect to the chemically amplified resist film, heating treatment being carried out in a manner of relatively moving a heating section for heating the chemically amplified resist film and the substrate forming a gas stream flowing reverse to the relatively moving direction of the heating section between the lower surface of the heating section and the chemically amplified resist film.

摘要翻译： 一种处理衬底的方法，包括在衬底上形成化学放大的抗蚀剂膜，将能量束照射到化学放大的抗蚀剂膜上以在其中形成潜像，对化学放大的抗蚀剂膜进行热处理，加热处理为 以相对移动加热部分的方式进行加热，该加热部分用于加热化学放大的抗蚀剂膜和形成在加热部分的下表面和化学放大型抗蚀剂膜之间形成与加热部分的相对移动方向相反的方向流动的气流 。

公开(公告)号：US20050250056A1

公开(公告)日：2005-11-10

申请号：US11114043

申请日：2005-04-26

申请人： Kenji Kawano ,  Shinichi Ito

发明人： Kenji Kawano ,  Shinichi Ito

IPC分类号： G03F7/38 ,  H01L21/027 ,  H01L21/312

CPC分类号： G03F7/38 ,  H01L21/312

摘要： According to an aspect of the present invention, there is provided a substrate treatment method comprising forming a chemically amplified resist film on a substrate to be treated, and supplying heat to the chemically amplified resist film to perform a heat treatment, wherein the heat treatment includes creating a first temperature state satisfying TT TB in which TT is a temperature at a surface portion of the chemically amplified resist film, and TB is a temperature at an interface portion of the chemically amplified resist film with the substrate to be treated.

摘要翻译： 根据本发明的一个方面，提供了一种基板处理方法，包括在待处理的基板上形成化学放大的抗蚀剂膜，并向化学放大的抗蚀剂膜供热以进行热处理，其中热处理包括 产生一个满足T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T B SUB>其中T T T是化学放大抗蚀剂膜的表面部分处的温度，T B B是化学放大抗蚀剂膜的界面部分处的温度 与待处理的基底。

公开(公告)号：US20050109238A1

公开(公告)日：2005-05-26

申请号：US10492532

申请日：2002-10-23

申请人： Takeyuki Yamaki ,  Hiroshi Yokogawa ,  Koichi Takahama ,  Masaru Yokoyama ,  Akira Tsujimoto ,  Norihiro Itou ,  Kenji Kawano ,  Yasuhisa Kishigami ,  Nobuhiro Ide

发明人： Takeyuki Yamaki ,  Hiroshi Yokogawa ,  Koichi Takahama ,  Masaru Yokoyama ,  Akira Tsujimoto ,  Norihiro Itou ,  Kenji Kawano ,  Yasuhisa Kishigami ,  Nobuhiro Ide

IPC分类号： B32B7/02 ,  B32B27/20 ,  C08K7/24 ,  C09D183/02 ,  C09D183/04 ,  G02B1/10 ,  G02B5/02 ,  G02B5/20 ,  H01J5/16 ,  C07G1/00

CPC分类号： B32B27/20 ,  B32B7/02 ,  B32B27/06 ,  B32B2305/72 ,  B32B2327/18 ,  C09D183/02 ,  C09D183/04 ,  G02B1/113 ,  H01J5/16 ,  H01J2211/44 ,  Y10T428/249953 ,  Y10T428/249974 ,  Y10T428/249981 ,  Y10T428/249987

摘要： The present invention provide a coating material composition comprising at least fine hollow particles and a matrix-forming material, wherein when the coating material composition is applied and dried to form a coating film having a low refractive index, the matrix-forming material forms a porous matrix.

摘要翻译： 本发明提供一种包含至少细小的中空颗粒和基体形成材料的涂料组合物，其中当涂覆和干燥涂料组合物以形成具有低折射率的涂膜时，基质形成材料形成多孔 矩阵。

公开(公告)号：US06891982B2

公开(公告)日：2005-05-10

申请号：US10333546

申请日：2002-05-23

申请人： Kenji Kawano ,  Toru Nakahira ,  Seiji Uchida ,  Masaya Nanami ,  Yuji Sato

发明人： Kenji Kawano ,  Toru Nakahira ,  Seiji Uchida ,  Masaya Nanami ,  Yuji Sato

IPC分类号： G02F1/225 ,  G02F1/01 ,  G02F1/035 ,  G02F1/295 ,  G02F1/355

CPC分类号： G02F1/2255 ,  G02F1/225 ,  G02F2201/126 ,  G02F2203/21

摘要： An optical waveguide for guided an incident light is formed on a substrate having an electro-optic effect. A first buffer layer is formed to cover an upper surface of the substrate. A conductive film is formed above the first buffer layer. A center electrode and a ground electrode are formed for applying a voltage in order to induce an electric field in the optical waveguide. A second buffer layer is formed between the conductive film and at least one of the center electrode and the ground electrode. The conductive film is formed to be present on at least a part below the ground electrode. A light guided through the optical waveguide is modulated by changing a phase by a voltage applied to the optical waveguide. Thereby, a thermal drift can be effectively restricted so that an optical modulation device having excellent electric characteristics can be realized.

摘要翻译： 在具有电光效应的基板上形成用于引导入射光的光波导。 形成第一缓冲层以覆盖基板的上表面。 导电膜形成在第一缓冲层上方。 形成中心电极和接地电极以施加电压以便在光波导中引起电场。 在导电膜和至少一个中心电极和接地电极之间形成第二缓冲层。 导电膜形成为存在于接地电极下方的至少一部分上。 通过光波导引导的光被施加到光波导的电压改变相位来调制。 因此，可以有效地限制热漂移，从而可以实现具有优异电特性的光调制装置。

公开(公告)号：US20050069815A1

公开(公告)日：2005-03-31

申请号：US10916414

申请日：2004-08-12

申请人： Tomoyuki Takeishi ,  Kenji Kawano ,  Hiroshi Ikegami ,  Shinichi Ito ,  Masami Watase

发明人： Tomoyuki Takeishi ,  Kenji Kawano ,  Hiroshi Ikegami ,  Shinichi Ito ,  Masami Watase

IPC分类号： B23K26/18 ,  B23K26/00 ,  B23K26/02 ,  B23K101/40 ,  G03F7/00 ,  H01L21/00 ,  H01L21/027 ,  H01L21/302 ,  H01L21/311 ,  H01L21/3205 ,  H01L21/3213 ,  H01L23/544

CPC分类号： H01L23/544 ,  H01L21/0275 ,  H01L21/0276 ,  H01L21/31144 ,  H01L21/32139 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

摘要： A processing method comprises forming a water-soluble protective film on a first film having a processing area above a substrate irradiating processing light on the processing area selectively with to selectively remove the first film in the processing area and the protective film on the processing area, and removing the protective film with water after the selective irradiating.

摘要翻译： 一种处理方法包括在选择性地在处理区域上在基板上照射处理光的处理区域上的第一膜上形成水溶性保护膜，以选择性地去除处理区域中的第一膜和处理区域上的保护膜， 并在选择性照射后用水除去保护膜。

公开(公告)号：US06756609B2

公开(公告)日：2004-06-29

申请号：US10312470

申请日：2002-12-23

申请人： Kenji Kawano ,  Hiroaki Yoshidaya ,  Jun Hiraoka ,  Yuichi Sasaki

发明人： Kenji Kawano ,  Hiroaki Yoshidaya ,  Jun Hiraoka ,  Yuichi Sasaki

IPC分类号： H01L3300

CPC分类号： H01L31/101

摘要： A semiconductor light receiving element has an n electrode, an n-type semiconductor doped layer or a non-doped layer provided above the n electrode, a semiconductor light absorbing layer provided above the n-type semiconductor doped layer or the non-doped layer, a p-type semiconductor doped layer provided above the semiconductor light absorbing layer, and a p electrode provided above the p-type semiconductor doped layer. The semiconductor light absorbing layer has at least two layer portions doped to p-type, and a spacer layer for acceleration which is formed from a semiconductor material sandwiched by the two layer portions and which makes electrons and positive holes generated by incident light being absorbed at the semiconductor light absorbing layer accelerate and run.

摘要翻译： 半导体光接收元件具有设置在n电极上方的n电极，n型半导体掺杂层或非掺杂层，设置在n型半导体掺杂层或非掺杂层上方的半导体光吸收层， 设置在半导体光吸收层上方的p型半导体掺杂层，以及设置在p型半导体掺杂层上方的p型电极。 半导体光吸收层具有掺杂到p型的至少两个层部分和由夹在两层部分之间的半导体材料形成的用于加速的间隔层，并且使由入射光产生的电子和正空穴被吸收在 半导体光吸收层加速运行。

公开(公告)号：US06650483B2

公开(公告)日：2003-11-18

申请号：US09995463

申请日：2001-11-27

申请人： Tsukasa Uehara ,  Makoto Sekita ,  Kenji Kawano ,  Seiji Iida

发明人： Tsukasa Uehara ,  Makoto Sekita ,  Kenji Kawano ,  Seiji Iida

IPC分类号： G02B2714

CPC分类号： G02B17/086 ,  G02B17/0848 ,  G02B17/0896

摘要： In an optical element (B1) prepared by integrally forming, on surfaces of a transparent member, a refracting surface (R2) for receiving a light beam, a plurality of reflecting surfaces (R3, R4, R5) with curvatures, and a refracting surface (R6) for outputting the light beam reflected by the plurality of reflecting surfaces, a reference portion (7) for defining the position of the optical element in a predetermined direction with respect to a Y′-Z′ plane including an incident reference axis (5) and an exit reference axis (5) of at least one reflecting surface of the optical element (B1) is formed on the optical element.

公开(公告)号：US06362921B1

公开(公告)日：2002-03-26

申请号：US09414139

申请日：1999-10-07

申请人： Seiji Iida ,  Tsukasa Uehara ,  Kenji Kawano

发明人： Seiji Iida ,  Tsukasa Uehara ,  Kenji Kawano

IPC分类号： G02B2710

CPC分类号： G02B17/086 ,  G02B7/02 ,  G02B17/0848 ,  H04N5/2251 ,  H04N5/2253 ,  H04N5/2254

摘要： In an optical element composed of an entrance refractive surface, an exit refractive surface and a plurality of internal reflective surfaces provided between the entrance refractive surface and the exit refractive surface, a structure is provided for enabling the optical element to turn around a reference axis of the entrance refractive surface. Further, in such an optical element, an diaphragm member is disposed adjacent to the entrance refractive surface and is arranged to vary an aperture diameter thereof according to a movement thereof.

摘要翻译： 在由入射折射表面，出射折射表面和设置在入射折射表面和出射折射表面之间的多个内部反射表面组成的光学元件中，提供了一种结构，用于使光学元件能够绕着 入口折射面。 此外，在这种光学元件中，隔膜构件设置成与入射折射面相邻，并且被布置成根据其移动来改变其孔径直径。

公开(公告)号：US06337773B1

公开(公告)日：2002-01-08

申请号：US09099146

申请日：1998-06-18

申请人： Kenji Kawano ,  Tsukasa Uehara ,  Seiji Iida

发明人： Kenji Kawano ,  Tsukasa Uehara ,  Seiji Iida

IPC分类号： G02B300

CPC分类号： G02B17/086 ,  G02B17/0848

摘要： An optical element is provided that allows accurate measurement of the shapes of the element and its surfaces which light is bound to strike, a jig is provided for holding the optical element, and an apparatus such as an image pickup apparatus or display apparatus is provided which includes the optical element. This optical element is characterized in that it includes surfaces which light is bound to strike and reference portions indicating the reference positions of the shapes of the surfaces, and the reference portions have curved surfaces defining points corresponding to the reference positions.

摘要翻译： 提供一种光学元件，其允许精确测量光束被撞击的元件及其表面的形状，提供用于保持光学元件的夹具，并且提供诸如图像拾取装置或显示装置的装置，其中 包括光学元件。 该光学元件的特征在于，其包括光被束缚的表面和指示表面的形状的参考位置的参考部分，并且参考部分具有限定对应于参考位置的点的弯曲表面。

公开(公告)号：US6126432A

公开(公告)日：2000-10-03

申请号：US165418

申请日：1998-10-02

申请人： Junji Okada ,  Masaki Hirota ,  Masahiro Taguchi ,  Kenji Kawano ,  Masao Funada ,  Takashi Ozawa

发明人： Junji Okada ,  Masaki Hirota ,  Masahiro Taguchi ,  Kenji Kawano ,  Masao Funada ,  Takashi Ozawa

IPC分类号： G02B6/30 ,  B29D11/00 ,  G02B6/122 ,  G02B6/13 ,  G02B6/255 ,  G02B6/36 ,  G02B6/42

CPC分类号： G02B6/4202 ,  G02B6/2552 ,  G02B6/4239

摘要： An optical transmission line is formed and thereafter solidified using an optical transmission line forming material in the fluid condition. The optical transmission line formed between optical transmission terminals assures higher reliability and never generates disconnection or internal stress therein.

摘要翻译： 形成光传输线，然后使用在流体状态下的光传输线形成材料固化。 形成在光传输端子之间的光传输线确保更高的可靠性，并且不会在其中产生断开或内部应力。