公开(公告)号：US5757760A

公开(公告)日：1998-05-26

申请号：US783366

申请日：1997-01-16

申请人： Shunichi Shido ,  Ryo Kuroda

发明人： Shunichi Shido ,  Ryo Kuroda

IPC分类号： G01Q90/00 ,  G11B9/00 ,  G11B21/08 ,  G11B21/10 ,  G02B21/00

CPC分类号： B82Y10/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1454 ,  G11B21/081 ,  G11B21/10 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/875 ,  Y10S977/947

摘要： In an information recording and/or reproduction apparatus, a recorded bit row on a record medium is relatively scanned with a probe and the recorded bit is detected. The information recording and/or reproduction apparatus includes a scanning unit for effecting a plurality of relative scans of the recorded bit row with the probe, a detecting unit for detecting a tilt of the recorded bit row relative to a direction of the relative scan on the basis of a reproduction signal obtained by the scans performed by the scanning unit, and a correction unit for correcting the direction of the relative scan on the basis of a detected result by the detecting unit.

摘要翻译： 在信息记录和/或再现装置中，用探针相对地扫描记录介质上的记录位行，并检测记录位。 信息记录和/或再现装置包括一个扫描单元，用于利用该探针对记录的位行进行多次相对扫描;检测单元，用于检测记录位行相对于相对扫描方向的倾斜 基于由扫描单元执行的扫描获得的再现信号的基础;以及校正单元，用于根据检测单元的检测结果来校正相对扫描的方向。

公开(公告)号：US5751686A

公开(公告)日：1998-05-12

申请号：US665457

申请日：1996-06-18

申请人： Ryo Kuroda ,  Shunichi Shido

发明人： Ryo Kuroda ,  Shunichi Shido

IPC分类号： G02B21/00 ,  G01Q30/18 ,  G01Q60/14 ,  G01Q60/38 ,  G01Q60/42 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/04 ,  G11B9/14 ,  G11B19/04

CPC分类号： G11B9/14 ,  G11B9/1409 ,  B82Y10/00 ,  G01Q60/16 ,  G01Q70/06 ,  G01Q80/00 ,  G11B19/04 ,  Y10S977/875

摘要： A probe for use in an information recording apparatus for recording information on a recording medium by applying a voltage between the recording medium and a tip of the probe includes a conductive tip, wiring provided on the probe for applying a voltage to the tip from a voltage application device, and an electrical resistance provided in the tip or in the wiring on the probe. The resistance may be composed of an oxide film on the surface of the tip. Instead of providing the electrical resistance, the tip or the wiring may be covered with an electromagnetic shield. As another alteractive, an electrical resistance layer may be provided between a substrate of the recording layer and the tip of the probe.

摘要翻译： 一种用于信息记录装置的探针，用于通过在记录介质和探针的尖端之间施加电压将信息记录在记录介质上，包括导电末端，设置在探针上的布线，用于从电压施加电压至尖端 应用装置，以及设置在探针的尖端或布线中的电阻。 电阻可以由尖端表面上的氧化膜构成。 代替提供电阻，尖端或布线可以用电磁屏蔽覆盖。 作为另一种替代物，可以在记录层的基底和探针的尖端之间设置电阻层。

公开(公告)号：US5325176A

公开(公告)日：1994-06-28

申请号：US875601

申请日：1992-04-28

申请人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

发明人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

IPC分类号： G03F9/00 ,  G01B11/02

CPC分类号： G03F9/7076

摘要： A device usable with a first object and a second object at least one of which is provided with a diffraction grating, for detecting the position of the second object relative to the first object, is disclosed. The device includes a light source for projecting a position detecting beam upon the first object; a beam detecting portion for receiving the position detecting beam after it is directed from the first object and being incident on the second object, the beam detecting portion receiving the position detecting beam to detect the position of the second object relative to the first object; wherein at least one diffraction grating is disposed in the path of the position detecting beam to be received by the beam detecting portion, which diffraction grating is effective to diffract the position detecting beam at least twice and wherein the beam detecting portion is disposed at a site effective not to receive unwanted diffraction light produced from the or at least one diffraction grating.

摘要翻译： 公开了一种可用于第一物体和第二物体的装置，其中至少一个具有用于检测第二物体相对于第一物体的位置的衍射光栅。 该装置包括用于将位置检测光束投射到第一物体上的光源; 光束检测部分，用于在从第一物体引导之后接收位置检测光束并入射到第二物体上，光束检测部分接收位置检测光束以检测第二物体相对于第一物体的位置; 其中至少一个衍射光栅设置在所述位置检测光束的路径中，以由所述光束检测部分接收，所述衍射光栅有效地将所述位置检测光束衍射至少两次，并且其中所述光束检测部分设置在位置 有效地不接收由该至少一个衍射光栅产生的不想要的衍射光。

公开(公告)号：US5122660A

公开(公告)日：1992-06-16

申请号：US671657

申请日：1991-03-19

申请人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Ryo Kuroda

发明人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Ryo Kuroda

IPC分类号： G01D5/38 ,  G02B7/32 ,  G11B7/085

CPC分类号： G11B7/085 ,  G01D5/38 ,  G02B7/32

摘要： A device for measuring a relatively moving distance of two relatively moving objects is disclosed. The device includes a plurality of inclined surfaces formed on one of the objects and arrayed with a predetermined pitch along the relatively moving direction, with each of the inclined surfaces being inclined with respect to the relatively moving direction. A measuring portion is provided on the other object for measuring the distance to at least one of the inclined surfaces in a direction having an angle with respect to the relatively moving direction, and a detecting portion detects the relatively moving distance of the two objects on the basis of the measurement by the measuring portion.

摘要翻译： 公开了一种用于测量两个相对移动的物体的相对移动距离的装置。 该装置包括形成在一个物体上的多个倾斜表面，并且沿相对移动的方向以预定间距排列，每个倾斜表面相对于相对移动的方向倾斜。 测量部分设置在另一物体上，用于测量在相对于相对运动方向具有角度的方向上至少一个倾斜表面的距离，并且检测部分检测两个物体在相对移动方向上的相对移动的距离 由测量部分测量的基础。

公开(公告)号：US07898667B2

公开(公告)日：2011-03-01

申请号：US11961216

申请日：2007-12-20

申请人： Tomohiro Yamada ,  Ryo Kuroda

发明人： Tomohiro Yamada ,  Ryo Kuroda

IPC分类号： G01N21/00

CPC分类号： G01N21/554 ,  G01N33/54373

摘要： In the fields of biosensing and the like, achievement of high sensitivity and high performance has been demanded in the concentration detection of target substances. In order to meet such demand, disclosed is an optical element utilizing the localized surface plasmon resonance, including: a dielectric substrate; a first group of metal microstructures in which a plurality of metal microstructures is supported on a dielectric substrate in an in-plane direction of the substrate; and a second group of metal microstructures in which a plurality of metal microstructures is disposed in the in-plane direction, and each of the metal microstructures is partially exposed to the outside; wherein the first group of metal microstructures and the second group of metal microstructures are laminated so as to be separated from each other by 100 nm or more.

摘要翻译： 在生物传感等领域中，目标物质的浓度检测中要求达到高灵敏度，高性能。 为了满足这样的要求，公开了利用局部表面等离子体共振的光学元件，包括：电介质基板; 第一组金属微结构，其中多个金属微结构在基板的面内方向上被支撑在电介质基板上; 以及第二组金属微结构，其中多个金属微结构在面内方向上设置，并且每个金属微结构部分暴露于外部; 其中所述第一组金属微结构和所述第二组金属微结构被层压以便彼此分离100nm以上。

公开(公告)号：US07733491B2

公开(公告)日：2010-06-08

申请号：US12131433

申请日：2008-06-02

申请人： Ryo Kuroda ,  Natsuhiko Mizutani ,  Takako Yamaguchi ,  Yasuhisa Inao ,  Tomohiro Yamada

发明人： Ryo Kuroda ,  Natsuhiko Mizutani ,  Takako Yamaguchi ,  Yasuhisa Inao ,  Tomohiro Yamada

IPC分类号： G12Q1/68 ,  G01N1/02 ,  G01N21/55

CPC分类号： G01N21/648 ,  G01N21/554 ,  Y10T436/11

摘要： A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.

摘要翻译： 传感器装置由具有多个开口的金属膜形成，位于每个开口内的传感器材料，发射具有第一波长的光的光源和检测从光源发出的光并发射的光检测器 从开口穿过或反射。 多个开口在金属膜中沿第一方向周期性地布置，并且多个开口中的每一个的尺寸和第一方向上的间隔都等于或小于光的波长。

公开(公告)号：US07592108B2

公开(公告)日：2009-09-22

申请号：US10529908

申请日：2004-05-12

申请人： Takako Yamaguchi ,  Ryo Kuroda

发明人： Takako Yamaguchi ,  Ryo Kuroda

IPC分类号： G03F9/00

CPC分类号： G03F7/7035 ,  G03F1/22 ,  G03F1/42 ,  G03F7/2039 ,  G03F9/7038

摘要： A near-field exposure method including preparing a photomask for near-field exposure, having a light blocking film provided on a base material constituting a membrane portion and a support member supporting the base material, wherein a first alignment mark for rough alignment is provided on the support member and a second alignment mark for fine alignment is provided on the membrane portion, setting the photomask and an object to be exposed in a near-field exposure apparatus, aligning the photomask and the object using the first alignment mark, flexing the membrane portion to contact with the object and detecting a positional relation between the membrane portion and the object using the second alignment mark, aligning the photomask and the object based on the detected positional relation and flexing the membrane portion to contact with the object, and exposing the object to light from a light source by way of the photomask.

摘要翻译： 一种近场曝光方法，包括制备用于近场曝光的光掩模，具有设置在构成膜部分的基材上的遮光膜和支撑所述基材的支撑构件，其中用于粗略对准的第一对准标记设置在 在膜部分上设置支撑部件和用于精细对准的第二对准标记，将光掩模和要曝光的物体设置在近场曝光装置中，使用第一对准标记对准光掩模和物体，使膜 与物体接触的部分，并使用第二对准标记检测膜部分和物体之间的位置关系，基于检测到的位置关系对准光掩模和物体，并使膜部分弯曲以与物体接触，并将 通过光掩模来对待来自光源的光。

公开(公告)号：US20090021742A1

公开(公告)日：2009-01-22

申请号：US12174776

申请日：2008-07-17

申请人： Kentaro Furusawa ,  Natsuhiko Mizutani ,  Ryo Kuroda

发明人： Kentaro Furusawa ,  Natsuhiko Mizutani ,  Ryo Kuroda

IPC分类号： G01N21/55

CPC分类号： G01N21/553

摘要： A plasmon sensor apparatus using a metallic fine periodic structure designed to reduce the dependences of the resonance wavelength and sensitivity on the incident angle. The plasmon sensor apparatus has a sensing element including a metallic member having periodic slit openings and metallic portions, and a substrate on which the metallic member is held, a light source which emits light so that the light is incident on the sensing element, and a photodetector which detects light obtained from the light source. If the period of the slit openings is Λ; the width of the metallic portions is d; and the thickness of the metallic member is h, the aspect ratio h/(Λ−d) of the slit openings is 3 or higher and the opening width (Λ−d) is equal to or smaller than the wavelength of light applied from the light source to the sensing element.

摘要翻译： 一种使用金属微细周期结构的等离子体激元传感器装置，其设计用于降低谐振波长和灵敏度对入射角的依赖性。 等离子体激元传感器装置具有感测元件，其包括具有周期性狭缝开口的金属部件和金属部分，以及保持金属部件的基板，发射光以使得光入射到感测元件上的光源，以及 检测从光源获得的光的光电检测器。 如果狭缝开口的周期是λ; 金属部分的宽度为d; 并且金属构件的厚度为h，狭缝开口的长宽比h /（λ-d）为3以上，开口宽度（λ-d）为从 光源传感元件。

公开(公告)号：US07262851B2

公开(公告)日：2007-08-28

申请号：US11166106

申请日：2005-06-27

申请人： Ryo Kuroda ,  Yasuhisa Inao

发明人： Ryo Kuroda ,  Yasuhisa Inao

IPC分类号： G01B11/00

CPC分类号： G03F9/7076 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/7038 ,  G03F9/7042

摘要： Disclosed is a method and apparatus for detecting a relative positional deviation between first and second objects. In one preferred form of the invention, the detecting method includes the steps of (i) providing the first and second objects with diffraction gratings, respectively, each having a grating pitch larger than a wavelength of a light source used, (ii) placing the first and second objects so that a dielectric material layer having a thickness smaller than the wavelength of the light source used is interposed between the first and second objects, and so that the diffraction gratings of the first and second objects are opposed to each other, (iii) projecting light from the light source onto the diffraction gratings of the first and second objects, and (iv) detecting the relative positional deviation between the first and second objects on the basis of diffraction light projected from the diffraction gratings to a space.

摘要翻译： 公开了一种用于检测第一和第二物体之间的相对位置偏差的方法和装置。 在本发明的一个优选形式中，检测方法包括以下步骤：（i）分别为第一和第二物体提供衍射光栅，每个衍射光栅具有大于所使用的光源的波长的光栅间距，（ii） 第一和第二物体，使得具有小于所使用的光源的波长的厚度的介电材料层插入在第一和第二物体之间，并且使得第一和第二物体的衍射光栅彼此相对（（ iii）将来自光源的光投射到第一和第二物体的衍射光栅上，以及（iv）基于从衍射光栅投影到衍射光栅的衍射光来检测第一和第二物体之间的相对位置偏差。

公开(公告)号：US20070141483A1

公开(公告)日：2007-06-21

申请号：US11703108

申请日：2007-02-07

申请人： Takako Yamaguchi ,  Ryo Kuroda

发明人： Takako Yamaguchi ,  Ryo Kuroda

IPC分类号： G03F1/00

CPC分类号： G03F7/0226 ,  G03F7/0236 ,  G03F7/0752 ,  G03F7/168 ,  G03F7/2014

摘要： A near-field photoresist for formation of a fine pattern with by near-field exposure includes an alkali-soluble novalac resin, a diazyde-type photosensitizer which is photoreactive by near-field exposure, a photoacid generator which generates acid by the near-field exposure, and a solvent.

摘要翻译： 用于通过近场曝光形成精细图案的近场光致抗蚀剂包括碱溶性诺瓦克树脂，通过近场曝光光反应的二叠氮型光敏剂，通过近场产生酸的光酸产生剂 暴露和溶剂。