公开(公告)号：US20060072106A1

公开(公告)日：2006-04-06

申请号：US11243188

申请日：2005-10-05

Applicant: Shigeru Matsui ,  Kei Shimura

Inventor： Shigeru Matsui ,  Kei Shimura

IPC: G01N21/88

CPC classification number: G01N21/956 ,  G01N21/21

Abstract: A non-polarization beam splitter is used for splitting optical paths of an illumination system and an image formation system. MTF characteristics independent of an orientation of a pattern on a sample is obtained by illumination with a circularly-polarized light by combining a polarizer and a λ/4 plate. A partial polarizer is put in the image formation system immediately after the non-polarization beam splitter, and high-order diffraction lights are taken in with the maximum efficiency and the transmission efficiency of the zero-order light is controlled to improve high frequency part of MTF.

Abstract translation: 非偏振分束器用于分离照明系统和图像形成系统的光路。 通过组合偏振器和λ/ 4板，通过用圆偏振光进行照明来获得与样品上的图案的取向无关的MTF特性。 在非偏振光束分离器之后立即将部分偏振片放入图像形成系统中，并且以最大效率吸收高阶衍射光，并且控制零级光的透射效率以改善高频部分的高频部分 MTF。

公开(公告)号：US20050117796A1

公开(公告)日：2005-06-02

申请号：US10995512

申请日：2004-11-24

Applicant: Shigeru Matsui ,  Katsuya Suzuki

Inventor： Shigeru Matsui ,  Katsuya Suzuki

IPC: G01N21/956 ,  G06K9/00 ,  G06T1/00 ,  G06T5/50 ,  G06T7/00 ,  H01L21/66

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G03F7/7065 ,  G06T2207/30148

Abstract: The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.

Abstract translation: 图案缺陷检查装置可以通过将通过图像传感器进行扫描而得到的检测图像进行比较来检测缺陷，所述检测图像具有相同形状且连续设置在被检测物体上的行和列方向上等间隔的那些图案， 具有通过扫描行和列方向上的相邻相同形状图案而获得的参考图像。 该装置具有用于通过统计计算处理从邻近检测图像的相同形状图案的图像生成平均参考图像的单元，该检测图像包括上下左右侧至少八个最近的码片，以及在 对角位置，检测图像位于中间位置。 该装置还包括通过将检测图像与由此生成的平均参考图像进行比较来检测缺陷的单元。

公开(公告)号：US06421308B1

公开(公告)日：2002-07-16

申请号：US09241411

申请日：1999-02-02

Applicant: Naoki Kizu ,  Kazuhiro Sugiyama ,  Shigeru Matsui ,  Noboru Yashima ,  Yukari Hiratsuka

Inventor： Naoki Kizu ,  Kazuhiro Sugiyama ,  Shigeru Matsui ,  Noboru Yashima ,  Yukari Hiratsuka

IPC: G11B2010

CPC classification number: G11B27/36 ,  G11B7/00718 ,  G11B7/00745 ,  G11B20/1833 ,  G11B27/24 ,  G11B27/3027 ,  G11B2220/216 ,  G11B2220/2575

Abstract: For recording data on and reproducing data from an optical disk of a single spiral land/groove configuration, a header detector detects header regions on the optical disk, a PID error detector judges whether the address information read from the header regions is erroneous, using error detection codes, and detects the number of errors per sector. An error count comparator compares the number of errors per sector with a predetermined value, and a state judging circuit identifies the state of the optical disk device by causing transition to a higher or lower state according to the output of the error count comparator. The recording and reproduction are controlled according to the state thus identified.

Abstract translation: 为了在单个螺旋纹/纹槽配置的光盘上记录数据和再现数据，标题检测器检测光盘上的标题区，PID错误检测器判断从标题区读出的地址信息是否错误，使用错误 检测代码，并检测每个扇区的错误数。 误差计数比较器将每个扇区的误差数与预定值进行比较，状态判断电路根据误差计数比较器的输出，通过转变到更高或更低的状态来识别光盘装置的状态。 根据所识别的状态来控制记录和再现。

公开(公告)号：US06384909B2

公开(公告)日：2002-05-07

申请号：US09842929

申请日：2001-04-27

Applicant: Koji Tomita ,  Muneo Maeshima ,  Shigeru Matsui ,  Yoshitaka Kodama ,  Hitoshi Komuro ,  Kazuo Takeda

Inventor： Koji Tomita ,  Muneo Maeshima ,  Shigeru Matsui ,  Yoshitaka Kodama ,  Hitoshi Komuro ,  Kazuo Takeda

IPC: G01N2188

CPC classification number: G01N21/9505 ,  G01N21/9501

Abstract: A defect inspection apparatus for detecting defects existing on a surface of a semiconductor sample and/or inside the sample based on light information from the sample obtained by irradiating a light beam onto the sample is provided, which comprises a detecting means for detecting positions in the depth direction where the defects exist and distribution of the defects based on the light information; a setting means for setting a position in the depth direction where defects exist; and a means for displaying the distribution of the defects obtained by the detecting means, the displaying means displaying the distribution of the defects corresponding to the position in the depth direction set by the setting means.

公开(公告)号：US06275878B1

公开(公告)日：2001-08-14

申请号：US09239994

申请日：1999-01-29

Applicant: Noboru Yashima ,  Kazuhiro Sugiyama ,  Shigeru Matsui ,  Yukari Hiratsuka ,  Naoki Kizu

Inventor： Noboru Yashima ,  Kazuhiro Sugiyama ,  Shigeru Matsui ,  Yukari Hiratsuka ,  Naoki Kizu

IPC: G06F306

CPC classification number: G11B20/1883 ,  G11B20/10 ,  G11B20/1833 ,  G11B27/3027 ,  G11B2220/20 ,  G11B2220/216 ,  G11B2220/2575

Abstract: A data recorder for recording data onto a record medium on which a sync signal is inserted at a given interval, has a sequence controller, wherein, after receiving the command from the system controller which triggers an initiation of a recording operation, the sequence controller activates the first encoder in response to a leading end signal of the encoded block from the sync signal set-up section, activates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and activates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block, and wherein, during the absence of the command from the system controller which triggers an initiation of a recording operation, the sequence controller deactivates the first encoder in response to a leading end signal of an encoded block from the sync signal set-up section, deactivates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and deactivates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block.

Abstract translation: 用于将数据记录到以给定间隔插入同步信号的记录介质上的数据记录器具有序列控制器，其中在从系统控制器接收到触发记录操作开始的命令之后，序列控制器激活 第一编码器响应于来自同步信号建立部分的编码块的前端信号，响应于下一编码块的前端信号激活第一编码器和第二编码器，并激活第一编码器， 所述第二编码器和所述数据读取器响应于所述下一个后续编码块的前端信号，并且其中，在不存在触发记录操作开始的系统控制器的命令的情况下，所述序列控制器使所述第一编码器 响应于来自同步信号设置部分的编码块的前端信号，在第一编码器和第二编码器的响应中停用 nse到下一个编码块的前导信号，并且响应于下一个后续编码块的前导信号去激活第一编码器，第二编码器和数据读取器。

公开(公告)号：US6118742A

公开(公告)日：2000-09-12

申请号：US058844

申请日：1998-04-13

Applicant: Shigeru Matsui ,  Noboru Yashima ,  Naoki Kizu ,  Kazuhiro Sugiyama ,  Yukari Hiratsuka

Inventor： Shigeru Matsui ,  Noboru Yashima ,  Naoki Kizu ,  Kazuhiro Sugiyama ,  Yukari Hiratsuka

IPC: G11B19/28 ,  G11B19/247 ,  G11B27/22

CPC classification number: G11B19/247

Abstract: If a determination is made that a signal is not normally detected by the pre-pit-region detection circuit 53, an error signal is obtained from a pulse generator 58 to control the rotations of the disk 50. If a determination is made that a signal is normally detected by the pre-pit-region detection circuit 53 and if the synchronizing signals are not normally detected at predetermined intervals, an error signal is obtained from the wobble signal so that the rotations of the disk 50 are controlled. If a determination is made that synchronizing signals are detected by the pre-pit-region detection circuit 53 at predetermined intervals, an error signal is obtained from clocks synchronized with the reproduced signal generated by the PLL circuit 54 so that rotations of the disk 50 are controlled.

Abstract translation: 如果确定信号未被预凹坑区域检测电路53正常检测到，则从脉冲发生器58获得误差信号以控制盘50的旋转。如果确定信号 通常由预凹坑区域检测电路53检测到，并且如果以预定间隔不正常地检测到同步信号，则从摆动信号获得误差信号，从而控制盘50的旋转。 如果确定了预定间隔检测电路53以预定间隔检测到同步信号，则从与PLL电路54产生的再现信号同步的时钟获得误差信号，使得盘50的旋转为 受控。

公开(公告)号：US6108079A

公开(公告)日：2000-08-22

申请号：US245195

申请日：1999-02-05

Applicant: Muneo Maeshima ,  Kazuo Takeda ,  Isao Nemoto ,  Shigeru Matsui ,  Yoshitaka Kodama

Inventor： Muneo Maeshima ,  Kazuo Takeda ,  Isao Nemoto ,  Shigeru Matsui ,  Yoshitaka Kodama

IPC: G01N21/88 ,  G01N21/25 ,  G01N21/47 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G01N21/00 ,  G01N21/86

CPC classification number: G01N21/9501 ,  H01L22/12 ,  H01L2924/0002

Abstract: In order to measure an inner defect of a sample with a certain high accuracy even if the sample surface of the moved up and down by flatness irregularity of the sample and problem on accuracy of the sample movement stage, incident light beams having two wavelength and respective different penetration depths for the sample are slantingly irradiated on the surface of the moving sample 15 from irradiation optical systems 4, 8, and the inner defect of the sample is measured by detecting the scattering light occurred from the interior of the sample with a detection optical system 9 arranged over the sample surface. A distance measurement means 14 is located in an upstream of a movement direction of said sample than said irradiation optical system 4, 8 and said detection optical system 9, thereby a surface height of said sample is measured. When a measured point on sample measured by the distance measurement means 14 is arrived at a lower part of the detection optical system 9, height positions of the irradiation optical system and the detection optical system are controlled by piezo electric elements 11,12,13 so that the irradiation optical system and the detection optical system are located at predetermined positions relating to the measured point.

Abstract translation: 为了以一定的高精度测量样品的内部缺陷，即使样品的平坦度不均匀性上下移动的样品表面和样品移动台的精度问题，具有两个波长的入射光束和相应的 样品的不同穿透深度从照射光学系统4,8倾斜地照射在移动样品15的表面上，并且通过用检测光学检测从样品内部发生的散射光来测量样品的内部缺陷 系统9布置在样品表面上。 距离测量装置14位于所述样品的移动方向的上游，比所述照射光学系统4,8和所述检测光学系统9，从而测量所述样品的表面高度。 当通过距离测量装置14测量的样品上的测量点到达检测光学系统9的下部时，照射光学系统和检测光学系统的高度位置由压电元件11,12,13所控制 照射光学系统和检测光学系统位于与测量点相关的预定位置处。

公开(公告)号：US5557404A

公开(公告)日：1996-09-17

申请号：US405652

申请日：1995-03-17

Applicant: Shigeru Matsui ,  Akira Owada

Inventor： Shigeru Matsui ,  Akira Owada

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28 ,  G01J9/00 ,  G01N21/73

CPC classification number: G01J3/18 ,  G01J2003/2866

Abstract: Irregular mechanical imperfections caused by constituent parts of a monochromator in connection with wavelength setting are compensated by calibrating the monochromator according to the present invention. A whole measurable spectral range in the monochromator is divided into a plurality of spectral regions by a plurality of calibration wavelengths. Errors between apparent wavelengths set theoretically and their true wavelengths are obtained with respect to the respective calibration wavelengths. Error functions in connection with the respective spectral regions are calculated on the basis of the array of the obtained errors. An element to be detected in a sample is measured under a wavelength the error of which has been compensated for by use of an error function in a spectral region associated with a wavelength to be detected.

Abstract translation: 通过校准本发明的单色仪来补偿由与单色仪的波长设定有关的组成部分引起的不规则的机械缺陷。 单色仪中的整个可测量光谱范围被多个校准波长分成多个光谱区域。 理论上设定的表观波长与其相应校准波长之间的真实波长的误差。 基于获得的误差的阵列来计算与相应的光谱区域相关的误差函数。 通过在与要检测的波长相关联的光谱区域中使用误差函数对其误差进行了补偿的波长进行测量。

公开(公告)号：US5152693A

公开(公告)日：1992-10-06

申请号：US842730

申请日：1992-02-26

Applicant: Shigeru Matsui ,  Taeko Imai

Inventor： Shigeru Matsui ,  Taeko Imai

IPC: A44C5/00 ,  G04G21/04 ,  G08B5/22 ,  H01Q1/27 ,  H01Q1/44 ,  H01Q7/02 ,  H01R4/48 ,  H01R13/03 ,  H01R13/62

CPC classification number: G04G21/04 ,  G04R60/04 ,  G08B5/228 ,  H01Q1/273 ,  H01R4/48 ,  H01R13/03 ,  H01R13/62 ,  Y10T24/2166

Abstract: A clasp for a pair of wristbands on a digital watch having a pager with a radio frequency receiver such that the wristbands comprise an antenna that has its circuit completed and closed into a loop antenna when a user snaps the wristbands together with the clasp. The clasp has a catch shaft welded or soldered to a clasp body such that electrical contact between the antenna in the wristbands is thereby improved.

Abstract translation: 一种用于具有无线电频率接收器的寻呼机的数字手表上的一对腕带的扣环，使得当使用者将腕带与扣环一起扣住时，腕带包括其电路完成并闭合成环形天线的天线。 卡扣具有焊接或焊接到扣环体上的捕获轴，从而改善了腕带之间的天线之间的电接触。

公开(公告)号：US4732481A

公开(公告)日：1988-03-22

申请号：US42244

申请日：1987-04-24

Applicant: Shigeru Matsui ,  Masaru Inoue

Inventor： Shigeru Matsui ,  Masaru Inoue

IPC: G01B11/06 ,  G01B9/02 ,  G01J3/45 ,  G01J3/453

CPC classification number: G01B9/02024 ,  G01B9/02057 ,  G01J3/4537 ,  G01B2290/70

Abstract: A polarization interferometer includes a light source to be measured, a Wollaston prism, a pair of polarizers arranged in such a manner that the Wollaston prism is interposed between the polarizers and the plane of polarization of each polarizer is inclined at 45.degree. to each of two crystallographic axes of the Wollaston prism, a photodetector for detecting an interference fringe which is spatially formed by two light beams separated by the Wollaston prism, changeover means for causing one of the polarizers to changeover from one of polarizing and non-polarizing states to the other state, memory means for storing a first output signal which is delivered from the photodetector in a state that one polarizer is kept at the non-polarizing state, and means for dividing a second output signal which is delivered from the photodetector in a state that one polarizer is kept at the polarizing state, by the first output signal stored in the memory means.

Abstract translation: 偏振干涉仪包括待测量的光源，Wollaston棱镜，以这样的方式布置的一对偏振器，使得Wollaston棱镜插入在偏振器之间并且每个偏振器的偏振面之间倾斜45° Wollaston棱镜的晶轴，用于检测由由Wollaston棱镜分离的两个光束空间形成的干涉条纹的光电检测器，用于使偏振器之一从偏振和非偏振状态之一转换到另一个的转换装置 状态，用于存储在一个偏振器保持在非偏振状态的状态下从光电检测器传送的第一输出信号的存储装置，以及用于将从光电检测器传送的第二输出信号划分为一个 通过存储在存储装置中的第一输出信号将偏振器保持在偏光状态。