Abstract:
A non-polarization beam splitter is used for splitting optical paths of an illumination system and an image formation system. MTF characteristics independent of an orientation of a pattern on a sample is obtained by illumination with a circularly-polarized light by combining a polarizer and a λ/4 plate. A partial polarizer is put in the image formation system immediately after the non-polarization beam splitter, and high-order diffraction lights are taken in with the maximum efficiency and the transmission efficiency of the zero-order light is controlled to improve high frequency part of MTF.
Abstract:
The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.
Abstract:
For recording data on and reproducing data from an optical disk of a single spiral land/groove configuration, a header detector detects header regions on the optical disk, a PID error detector judges whether the address information read from the header regions is erroneous, using error detection codes, and detects the number of errors per sector. An error count comparator compares the number of errors per sector with a predetermined value, and a state judging circuit identifies the state of the optical disk device by causing transition to a higher or lower state according to the output of the error count comparator. The recording and reproduction are controlled according to the state thus identified.
Abstract:
A defect inspection apparatus for detecting defects existing on a surface of a semiconductor sample and/or inside the sample based on light information from the sample obtained by irradiating a light beam onto the sample is provided, which comprises a detecting means for detecting positions in the depth direction where the defects exist and distribution of the defects based on the light information; a setting means for setting a position in the depth direction where defects exist; and a means for displaying the distribution of the defects obtained by the detecting means, the displaying means displaying the distribution of the defects corresponding to the position in the depth direction set by the setting means.
Abstract:
A data recorder for recording data onto a record medium on which a sync signal is inserted at a given interval, has a sequence controller, wherein, after receiving the command from the system controller which triggers an initiation of a recording operation, the sequence controller activates the first encoder in response to a leading end signal of the encoded block from the sync signal set-up section, activates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and activates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block, and wherein, during the absence of the command from the system controller which triggers an initiation of a recording operation, the sequence controller deactivates the first encoder in response to a leading end signal of an encoded block from the sync signal set-up section, deactivates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and deactivates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block.
Abstract:
If a determination is made that a signal is not normally detected by the pre-pit-region detection circuit 53, an error signal is obtained from a pulse generator 58 to control the rotations of the disk 50. If a determination is made that a signal is normally detected by the pre-pit-region detection circuit 53 and if the synchronizing signals are not normally detected at predetermined intervals, an error signal is obtained from the wobble signal so that the rotations of the disk 50 are controlled. If a determination is made that synchronizing signals are detected by the pre-pit-region detection circuit 53 at predetermined intervals, an error signal is obtained from clocks synchronized with the reproduced signal generated by the PLL circuit 54 so that rotations of the disk 50 are controlled.
Abstract:
In order to measure an inner defect of a sample with a certain high accuracy even if the sample surface of the moved up and down by flatness irregularity of the sample and problem on accuracy of the sample movement stage, incident light beams having two wavelength and respective different penetration depths for the sample are slantingly irradiated on the surface of the moving sample 15 from irradiation optical systems 4, 8, and the inner defect of the sample is measured by detecting the scattering light occurred from the interior of the sample with a detection optical system 9 arranged over the sample surface. A distance measurement means 14 is located in an upstream of a movement direction of said sample than said irradiation optical system 4, 8 and said detection optical system 9, thereby a surface height of said sample is measured. When a measured point on sample measured by the distance measurement means 14 is arrived at a lower part of the detection optical system 9, height positions of the irradiation optical system and the detection optical system are controlled by piezo electric elements 11,12,13 so that the irradiation optical system and the detection optical system are located at predetermined positions relating to the measured point.
Abstract:
Irregular mechanical imperfections caused by constituent parts of a monochromator in connection with wavelength setting are compensated by calibrating the monochromator according to the present invention. A whole measurable spectral range in the monochromator is divided into a plurality of spectral regions by a plurality of calibration wavelengths. Errors between apparent wavelengths set theoretically and their true wavelengths are obtained with respect to the respective calibration wavelengths. Error functions in connection with the respective spectral regions are calculated on the basis of the array of the obtained errors. An element to be detected in a sample is measured under a wavelength the error of which has been compensated for by use of an error function in a spectral region associated with a wavelength to be detected.
Abstract:
A clasp for a pair of wristbands on a digital watch having a pager with a radio frequency receiver such that the wristbands comprise an antenna that has its circuit completed and closed into a loop antenna when a user snaps the wristbands together with the clasp. The clasp has a catch shaft welded or soldered to a clasp body such that electrical contact between the antenna in the wristbands is thereby improved.
Abstract:
A polarization interferometer includes a light source to be measured, a Wollaston prism, a pair of polarizers arranged in such a manner that the Wollaston prism is interposed between the polarizers and the plane of polarization of each polarizer is inclined at 45.degree. to each of two crystallographic axes of the Wollaston prism, a photodetector for detecting an interference fringe which is spatially formed by two light beams separated by the Wollaston prism, changeover means for causing one of the polarizers to changeover from one of polarizing and non-polarizing states to the other state, memory means for storing a first output signal which is delivered from the photodetector in a state that one polarizer is kept at the non-polarizing state, and means for dividing a second output signal which is delivered from the photodetector in a state that one polarizer is kept at the polarizing state, by the first output signal stored in the memory means.